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Studies on the ecological variations of rice plant under the different seasonal cultures -I. Variations of the various agronomic characteristics of rice plant under the different seasonal cultures- (재배시기 이동에 의한 수도의 생태변이에 관한 연구 -I. 재배시기 이동에 의한 수도의 실용제형질의 변이-)

  • Hyun-Ok Choi
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.3
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    • pp.1-40
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    • 1965
  • To measure variations in some of the important agronomic characteristics of rice varieties under shifting of seedling dates, this study has been carried out at the Paddy Crop Division of Crop Experiment Station(then Agricultural Experiment Station) in Suwon for the period of three years 1958 to 1960. The varieties used in this study were Kwansan, Suwon #82, Mojo, Paltal and Chokwang, which have the different agronomic characteristics such as earliness and plant type. Seeds of each variety were sown at 14 different dates in 10-day interval starting on March 2. The seedlings were grown on seed bed for 30, 40, 50, 60, 70 and 80 days, respectively. The results of this study are as follows: A. Heading dates. 1. As the seeding date was delayed, the heading dates was almost proportionally delayed. The degree of delay was higher in early varieties and lower in late varieties and the longer the seedling stage, the more delayed the heading date. 2. Number of days to heading was proportionally lessened as seeding was delayed in all the varieties but the magnitude varied depending upon variety. In other words, the required period for heading in case of late planting was much shortened in late variety compared with early one. Within a variety, the number of days to heading was less shortened as the seedling stage was prolonged. Early variety reached earlier than late variety to the marginal date for the maximum shortening of days to heading and the longer the seeding stage, the limitted date came earlier. There was a certain limit in seeding date for shortening of days to heading as seeding was delayed, and days to heading were rather prolonged due to cold weather when seeded later than that date. 3. In linear regression equation, Y=a+bx obtained from the seeding dates and the number of days to heading, the coefficient b(shortening rate of days to heading) was closely correlated with the average number of days to heading. That is, the period from seeding to heading was more shortened in late variety than early one as seeding was delayed. 4. To the extent that the seedling stage is not so long and there is a linear relationship between delay of seeding and shortening of days to heading, it might be possible to predict heading date of a rice variety to be sown any date by using the linear regression obtained from variation of heading dates under the various seeding dates of the same variety. 5. It was found out that there was a close correlation between the numbers of days to heading in ordinary culture and the other ones. When a rice variety was planted during the period from the late part of March to the middle of June and the seedling ages were within 30 to 50 days, it could be possible to estimate heading date of the variety under late or early culture with the related data of ordinary culture. B. Maturing date. 6. Within (he marginal date for maturation of rice variety, maturing date was proportionally delayed as heading was delayed. Of course, the degree of delay depended upon varieties and seedling ages. The average air temperature (Y) during the ripening period of rice variety was getting lower as the heading date. (X) was delayed. Though there was a difference among varieties, in general, a linear regression equation(y=25.53-0.182X) could be obtained as far as heading date were within August 1 to September 13. 7. Depending upon earliness of a rice variety, the average air temperature during the ripening period were greatly different. Early variety underwent under 28$^{\circ}C$ in maximum while late variety matured under as low as 22$^{\circ}C$. 8. There was a highly significant correlation between the average air temperature (X) during the ripening period, and number of day (Y) for the maturation. And the relationship could be expressed as y=82.30-1.55X. When the average air temperature during the period was within the range of 18$^{\circ}C$ to 28$^{\circ}C$, the ripening period was shortened by 1.55 days with increase of 1$^{\circ}C$. Considering varieties, Kwansan was the highest in shortening the maturing period by 2.24 days and Suwon #82 was the lowest showing 0.78 days. It is certain that ripening of rice variety is accelerated at Suwon as the average air temperature increases within the range of 18$^{\circ}C$ to 28$^{\circ}C$. 9. Between number of days to heading (X) related to seeding dates and the accumulated average air temperature (Y) during the ripening period, a positive correlation was obtained. However, there was a little difference in the accumulated average air temperature during the ripening period even seeding dates were shifted to a certain extent. C. Culm- and ear-lengths. 10. In general all the varieties didn't show much variation in their culm-lengths in case of relatively early seeding but they trended to decrease the lengths as seeding was delayed. The magnitude of decreasing varied from young seedlings to old ones. Young seedlings which were seeded during May 21 to June 10 didn't decrease their culm-lengths, while seedlings old as 80 days decreased the length though under ordinary culture. 11. Variation in ear-length of rice varieties show the same trend as the culm-length subjected to the different seeding dates. When rice seedlings aged from 30 to 40 days, the ear-length remained constant but rice plants older than 40 days obviously decreased their ear-lengths. D. Number of panicles per hill. 12. The number of panicles per hill decreased up to a certain dates as seeding was delayed and then again increased the panicles due to the development of numerous tillers at the upper internodes. The seeding date to reach to the least number of panicles of rice variety depended upon the seedling ages. Thirty- to 40-day seedlings which were seeded during May 31 to June 10 developed the lowest number of panicles and 70- to 80-day seedlings sown for the period from April 11 to April 21 reached already to the minimum number of panicles. E. Number of rachillae. 13. To a certain seeding date, the number of rachillae didn't show any variation due to delay of seeding but it decreased remarkably when seeded later than the marginal date. 14. Variation in number of rachillae depended upon seedling ages. For example, 30- to 40-day old seedlings which, were originally seeded after May 31 started to decrease the rachillae. On the other hand, 80-day old seedlings which, were seeded on May 1 showed a tendency to decrease rachillae and the rice plant sown on May 31 could develop narrowly 3 or 4 panicles. F. Defective grain and 1.000-grain weights. 15. Under delay of the seeding dates, weight of the defective grains gradually increased till a certain date and then suddenly increased. These relationships could be expressed with two different linear regressions. 16. If it was assumed that the marginal date for ripening was the cross point of these two lines, the date seemed. closely related with seedling ages. The date was June 10- in 30- to 40-day old seedlings but that of 70- to 80-day old seedlings was May 1. Accordingly, the marginal date for ripening was getting earlier as the seedling stage was prolonged. 17. The 1.000-grain weight in ordinary culture was the heaviest and it decreased in both early and late cultures. G. Straw and rough rice weights. 18. Regardless of earliness of variety, rice plants under early culture which were seeded before March 22 or April 1 did not show much variation in straw weight due to seedling ages but in ordinary culture it gradually decreased and the degree was became greater in late culture. 19. Relationship between seeding dates (X) and grain weight related to varieties and seedling ages, could be expressed as a parabola analogous to a line (Y=77.28-7.44X$_1$-1.00lX$_2$). That is, grain yield didn't vary in early culture but it started to decrease when seeded later than a certain date, as seeding was delayed. The variation was much greater in cases of late planting and prolongation of seedling age. 20. Generally speaking, the relationship between grain yield (Y) and number of days to heading (X) was described with linear regression. However, the early varieties were the highest yielders within the range of 60 to 110, days to heading but the late variety greatly decreased its yield since it grows normally only under late culture. The grain yield, on the whole, didn't increase as number of days to heading exceeded more than 140 days.

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Effect of Dietary Streptococcus faecium on the Performances and the Changes of Intestinal Microflora of Broiler Chicks (Streptococcus faecium의 급여가 육계의 성장과 장내 세균총 변화에 미치는 영향)

  • Kim, K.S.;Chee, K.M.;Lee, S.J.;Cho, S.K.;Kim, S.S.;Lee, W.
    • Korean Journal of Poultry Science
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    • v.18 no.2
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    • pp.97-119
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    • 1991
  • Effect of Streptococcus faecium(SF) and an antibiotic, Colistin(Col), supplemented to diets singly or in combination, on the performances and changes of intestinal population of microflora of broiler chicks studied. A total of 252, day-old chicks(Arbor Acre) of mixed sex(M:F=1:1) were alloted into six groups. A diet with no Col and SF was referred as a control diet. The basal diets were added with two levels of SF, 0.04 and 0.08%, singly or in combination with Col 10ppm Another diet was prepared by adding only Col 10 ppm. Numbers of the microorganism in diets added with SF 0.04% and 0.08% were 7$\times$10$^{4}$ and 1.4$\times$10$^{5}$ /g diet respectively The diets consisting of corn and soybean meal as major ingredients were fed for a period of seven weeks . During the feeding trial, fresh excreta were sampled at the end of every week in a sterilized condition to count microbial changes from each dietary group. Microbial changes of large intestine were also measured from nine birds sacrificed at the end of the 4th and 7th weeks each time per dietary group. Excreta from all the groups were also collected quantitatively at the end of 3rd and 6th weeks to measure digestibility of the diets, At the end of 7th week, nine birds from each group were also sacrificed to measure weight changes of gastrointestinal tracts . Average body weight gains of broilers fed the diets added with SF 0.08% (2.37kg) or SF 0. 08%+col 10ppm(2.34kg) were significantly larger than that of the control(2.18kg). The weight gains of the other groups were not statistically different from that of the control Feed/gain ratios of the supplemental groups were better than that of control (P<0.05) except that of birds fed the diet added only with SF 0.04%. Digestibilities of nutrients such as dry matter, crude protein, crude fat and total carbohydrates were not altered by the consumption of the diets added with SF and/or Col throughout the whole feeding period. As expected, the numbers of Streptococci in the excreta from birds fed diets added with SF increased significantly with a statistical difference between groups with SF 0.04% and SF 0.08% most of the time. However. addition of Colistin to the diets supplemented with SF did not give any effects on the number of the microorganism. Numbers of coliforms in the excreta were apparently reduced by feeding the diets added with SF and/or Col(P<0.05). There were, however, no additive effects observed between the two feed additives in this regard when supplementing Col to the SF diets. Distributions of intestinal microflora exhibited exactly the same pattern as those of the excreta. Length of small intestine of the birds fed diets added with SF 0.08% with or without Col 10 ppm became significantly longer with a range of about 10% than those of the birds fed diets without SF. However, the empty weight of the small inestine of the former group was lighter than that of control These changes resulted in a significant reduction in weight/unit length of the intestine of the birds fed diets supplemented with Col and SF singly or in combination. In overall conclusion, diet added with SF 0.08% appeared most effective in improving broiler performances. Colistin added at a level of 10ppm was not beneficial at all in itself or in combination with SF in terms of broiler performances or changes of intestinal microflora population. The efficacy of SF and Col could be attributed to the changes of wall thickness of the small intestine.

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A Late-Maturing and Whole Crop Silage Rice Cultivar 'Mogwoo' (만생종 총체사료용 벼 신품종 '목우')

  • Lee, Sang-Bok;Yang, Chang-Ihn;Lee, Jeom-Ho;Kim, Myeong-Ki;Shin, Young-Seop;Lee, Kyu-Seong;Choi, Yong-Hwan;Jeong, O-Young;Jeon, Yong-Hee;Hong, Ha-Cheol;Kim, Yeon-Gyu;Jung, Kuk Hyun;Jeung, Ji-Ung;Kim, Junhwan;Shon, Ji-Young
    • Journal of The Korean Society of Grassland and Forage Science
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    • v.33 no.2
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    • pp.81-86
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    • 2013
  • 'Mogwoo', a new high yield and whole crop silage rice (Oryza sativa L.) cultivar, was developed by the rice breeding team of the National Institute of Crop Science, RDA, Suwon, Korea, from 1999 to 2009, and was released in 2010. It was derived in 1999 from a cross between Dasanbyeo, having a high yield, and Suweon431/IR71190-45-2-1. A promising line, SR25848-C99-1-2-1, selected by the pedigree breeding method, was designated the name of 'Suweon 519' in 2007. This cultivar has about 155 days of growth period from seeding to heading, and is tolerance to lodging, with erect pubescent leaves as well as a long and thick culm. This cultivar has the same number of tillers per hill and higher spikelet numbers per panicle compared to Nokyang. 'Mogwoo' has longer leaves compared with other Tongil-type varieties. This new variety is resistant to grain shattering, leaf blast, bacterial leaf blight, and small brown planthopper. The biomass yield of 'Mogwoo' was 1,956 kg/10a in a regional test over three years. The result shows that 'Mogwoo' is adaptable to central and south-east plain areas of Korea.

Effect of Calving Season on Postpartum Milk Production and Persistency of TMR Fed Holstein Heifers (분만계절이 TMR 급여 홀스타인 육성우의 분만 후 유생산과 비유지속성에 미치는 영향)

  • Kim, Youn-Jeong;Hwang, Sun-Cook;Nam, In-Sik;Ahn, Jong-Ho
    • Korean Journal of Organic Agriculture
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    • v.27 no.3
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    • pp.365-380
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    • 2019
  • Total of 20 Holstein calves of 10 calves (3.90±0.26 month of age) born in spring (S) and 10 calves (4.10±0.30 month of age) born in fall (F) were reared in this study for 24 months and diets were divided into separate feeding of forage and concentrates (C) and TMR (T). Therefore, 4 treatments in this study were composed of CS, CF, TS and TF with the factors of diets and calving season. After parturition of heifers, all animals were fed the same diet and milk production was recorded monthly. DM intakes in growing period were influenced by calving season, and those of the animals calved in fall were higher than in those calved in spring (P<0.01), but there were no significant differences by feeding method. CP intakes and TDN intakes were significantly influenced by calving season (P<0.05) and feeding method (P<0.001), and the animals calved in fall were about 1.2% higher than those calved in spring, and the animals fed TMR were about 4.7% higher than those fed concentrates and forage separately. Average, 9th and 10th months' milk yields were significantly influenced by feeding method in which those in the treatments fed TMR (TS, TF) were higher than in separate feeding of concentrates and forage (CS, CF; average P<0.05; 9th and 10th months P<0.01). Average milk persistency was also significantly influenced by calving season (P<0.05) and feeding method (P<0.01) and those in the animals calved in fall were higher than in spring and those of the TMR fed animals were also higher than in separate feeding of concentrates and forage. Milk persistency was similar to the results of milk yield, showing statistically significant differences affected by the feeding method at 9th and 10th months of late lactation (P<0.01), and it was about 8% higher in the animals fed TMR, showing higher tendency at 7th (P=0.12) and 8th months of late lactation (P=0.09). Therefore, it is expected that postpartum milk yield and milk persistency would be higher when the hiefers are fed TMR in growing period and calved in fall. Average milk fat content was influenced by feeding method. Milk fat content of the animals fed TMR during growing period were 7.8% higher than those fed concentrates and forage separately (P<0.01). This suggests that feeding TMR during growing period influenced first postpartum eating behavior, which stabilized the rumen and resulted in the increased milk fat. At 3rd month after calving, milk fat content was lower in the animals calved in spring than in those calved in fall, suggesting that it might have been influenced by the seasonal differences. MUN showed significant differences by feeding method in which those in separate feeding of concentrates and forages were higher especially in average, 4th, 5th and 6th months (average and 4th P<0.01; 5th and 6th months P<0.05). SCC was higher in the animals fed TMR than in those fed concentrates and forage separately especially in average, 3rd and 4th months after calving (P<0.01). In conclusion, when feeding TMR during growing period and calving in fall, it was not influenced by the high temperature in summer, and it resulted in the improved milk yield, milk persistency and milk fat content.

Analytical Studies on The Useful Characters Affecting The Lodging Resistance of Wheat and Barley Varieties (맥류의 도복에 관여하는 유용형질의 분석에 관한 연구)

  • Chang-Hwan Cho
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.11
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    • pp.105-117
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    • 1972
  • This experiment has been made to study the relationship between several characters affecting the field lodging and to establish some useful standards for selection of lodging resistant varieties and to classify the degree of lodging resistance in wheat and barley varieties of different sources. The experiment was carried at the Crop Experiment Station, Suwon in 1968. The results obtained are summarized as followings. a. The lodging index modified with bending moment of culm at breaking seemed to be the most useful character in checking the lodging resistance. Highly significant positive correlation (Barley; r=0.40-0.67, Wheat; r=0.46-0.68) was obtained between the lodging index and actual field lodging. b. Between two essential components expressing bending stiffness of the culm, the bending moment at breaking and secondary moment of inertia, a highly significant positive correlation (Barley; r=0.59, wheat; r=0.46-0.53) was observed. c. The bending stiffness of culm got stronger as the dry weight per unit culm, which express the quantity of accumulated dry matters in culm, increased. The correlation coefficient between those two factors was 0.35 to 0.40 in barley and 0.33 to 0.76 in wheat respectively. d. In both wheat and barley, highly significant negative correlation between lodging index and the other factors such as dry weight per unit culm (Barley; r=-0. 51 to -0.70, Wheat; r=-0.65 to -0.83) and bending moment of culm at breaking (Barley; r=-0.29 to -0.69, Wheat: r=-0.54 to -0.89) were observed. Particulary, weight of culm at breaking, secondary moment of inertia and section modulus showed significant negative correlation with lodging index in wheat. e. Outside diameter of culm expressed more intimate relationship with physical characteristics of culm than inside diameter and also showed highly significant correlation with weight of culm at breaking (Barley; r=0.42-0.56, Wheat; r=0.39-0.44) and with bending moment of culm at breaking (Barley; r=0.40-0.41, Wheat; r=0.38-0.49) and with secondary moment of inertia (Barley; r=0.56-0.57, Wheat; r=0.28-0.98) and with section modulus (Wheat; r=0.22-0.96). Between the thickness of culm and physical characteristics of culm also showed the positive correlation. f. There was positive correlation between the culm length and actual field lodging in several groups of variety among the varieties tested. But the culm length seemed to undesirable as a selection measure for the selection of the lodging resistant variety considering the stiffness of culm. g. In classification of lodging resistance for the varieties tested, many Korean barley varieties expressed excellent lodging resistant than wheat, but most of the wheat and barley varieties from Japan considered quite resistant to lodging. h. In selection of lodging resistant varieties, lodging index lower than 1.67 in barley and 1. 76 in wheat considered highly resistant to actual field lodging.

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SSR Marker Related to Major Characteristics Affected Kernel Quality in Waxy Corn Inbred Lines (찰옥수수 자식계통의 주요 품질특성과 관련된 SSR마커)

  • Jung, Tae-Wook;Moon, Hyeon-Gui;Son, Beom-Young;Kim, Sun-Lim;Kim, Soon-Kwon
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.51 no.spc1
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    • pp.185-192
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    • 2006
  • This experiment was conducted to assess genetic diversity of waxy corn inbred lines and to identify SSR markers related to major characteristics affected kernel quality for improving waxy corn $F_1$ hybrid with good quality. Diversity of 64 waxy com inbred lines was evaluated using 30 microsatellite markers. The 30 microsatellite markers representing 30 loci in the maize genome detected polymorphisms among the 64 inbred lines and revealed 225 alleles with a mean of 7.5 alleles per primer. The polymorphism Information content (PIC) value ranged from 0.14 to 0.87, with an average of 0.69. Based on Nei's genetic distances, the 64 inbred lines were classified into 9 groups by the cluster analysis. The group I included 26 inbred lines (41%), other groups included 3 to 9 inbred lines. One-way analysis of variance was conducted to identify significant relationship between individual markers and major characteristics that affect kernel quality. The analysis showed that umc1019 was related to amylopectin and crude protein content, me 1020 to amylopectin content and peak viscosity, and bnlg1537 to 100-kernel weight, kernel length, and kernel width.

Study on the Optimum Range of Weight-Age Data for Estimation of Growth Curve Parameters of Hanwoo (한우의 체중 성장곡선 모수 추정을 위한 체중 측정 자료의 최적 범위에 관한 연구)

  • Cho, Y.M.;Yoon, H.B.;Park, B.H.;Ahn, B.S.;Jeon, B.S.;Park, Y.I.
    • Journal of Animal Science and Technology
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    • v.44 no.2
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    • pp.165-170
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    • 2002
  • Mature weight (A) and rate of maturing (k) estimated by nonlinear regression were studied to determine the optimum age range over which the estimate of growth curve parameters can be estimated. The weight-age data from 1,133 Hanwoo bulls at Hanwoo Improvement Center of N.A.C.F. were used to fit the growth curve using Gompertz model. All available weight data from birth to the specific age of months were used for the estimation of parameters: the six specific ages used were 12, 14, 16, 18, 20 22 and 24 months of age. The mean estimates of mature weight (A) were 966.5, 1,255.9, 1,126.2, 916.5, 842.2, 780.9 and 767.0kg for ages 12 through 24 months, respectively. The mean estimates of mature weight (A) to 22 and 24 months of age were not different from each other. However, they were different from the estimates based on the data to other ages. Mean estimates of rate of maturing (k) were 3.362, 3.595, 3.536, 3.421, 3.403, 3.409 and 3.411 for ages 12 through 24 months, respectively. The mean estimates of maturing rate (k) for ages 18 through 24 months of age were not significantly different from each other. However, they were different from the estimates based on the data to other ages. Correlations among estimates of A at various ages showed the highest value of 0.93 between 22 and 24 months. Correlations among estimates of k at various ages were highest ranging from 0.91 to 0.99 among 18 to 24 months. The correlations between A and k were positive and tended to decrease with the increase of the age from 0.84 for the age of 12 months to 0.10 for the age of 24 months. Thus, the estimates of growth curve parameters, A and k, suitable for genetic studies can be derived from accumulated Hanwoo bulls after 22 months of age.

The Maize with Multiple Ears and Tillers (MET) III. Developmental Habit and Morphology of the Tillers (다얼성 옥수수 연구 III. 분얼발생의 습성 및 형태)

  • Choe, Bong-Bo;Lee, Hee-Bong;Lee, Won-Koo;Kang, Kwon-Kyoo;Jong, Seung-Keun
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.34 no.1
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    • pp.23-29
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    • 1989
  • In order to investigate developmental habit and morphology of maize tillers, time and location of tiller development. number of tillers per plant, tiller angle, height and diameter of tillers and root systems of tillers were examined under field condition for maize with tillers. Materials used were mostly from Korean local lines and a few lines from other countries were also included for comparison. The time of the first tiller development was about 18 to 20 days after emergence when planted on May in Yusong. The second tiller appeared about 4 to 5 days after the first tiller appeared. The tiller number per plant varied with lines and hybrids and ranged from two to ten. The location of tiller development was usually basal nodes of the main stem. Each tiller appeared to have its own root system. The angle between tillers and main stem was variable depending upon the maizes and the tiller angle could be classified into three categories. The height of tillers was also variable and seemed to be under genetic control. The most productive tillers were found among the Korean local derivatives.

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Comparison of the Quality Characteristics of Radish by Soaking Using Sun-dried Salt and Leuconostoc starter (무 절임 제조 시 천일염과 스타터 첨가에 따른 품질특성 비교)

  • Na, Jong-Min;Jin, Yong-Xie;Kim, Se-Na;Kim, Jung-Bong;Cho, Young-Suk;Kim, Kwang-Yup;Kim, Haeng-Ryan;Kim, So-Young
    • Food Science and Preservation
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    • v.19 no.6
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    • pp.951-956
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    • 2012
  • In this study, the effects of the use of a starter on radish soaked at $4^{\circ}C$ for 28 days using two kinds of domestic sun-dried salt (white and gray salt) were determined. As a result, the moisture contents of the radish soaked with white and gray salt were 7.93 and 4.50%, respectively. The salinity levels were found to be equal (90%). No significant difference was found between the two groups in terms of the mineral contents of the salts therein ($37812.41{\pm}1922.95$ and $39755.13{\pm}1205.70$ mg/100 g, respectively). However, iron and zinc contents of gray salt were higher than those of white salt while the calcium, potassium, and magnesium contents were lower than those of white salt. After the addition of the starter, the sugar content increased, the pH decreased, and the total acidity rapidly decreased compared with the non-starter group during fermentation. The total microorganism count of the two groups increased during the fermentation period of 28 days. From the initial fermentation for 7 days, the lactic acid bacteria in the non-starter group increased while those in the leuconostoc starter group steadily increased within the whole fermentation period. The Leuconostoc spp. in non-starter group increased, but that in the starter group decreased to pH 4.0 on day 14.

GPU Based Feature Profile Simulation for Deep Contact Hole Etching in Fluorocarbon Plasma

  • Im, Yeon-Ho;Chang, Won-Seok;Choi, Kwang-Sung;Yu, Dong-Hun;Cho, Deog-Gyun;Yook, Yeong-Geun;Chun, Poo-Reum;Lee, Se-A;Kim, Jin-Tae;Kwon, Deuk-Chul;Yoon, Jung-Sik;Kim3, Dae-Woong;You, Shin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.80-81
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    • 2012
  • Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

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