• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.130-130
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• 2009

This paper describes the temperature characteristics of polycrystalline 3C-SiC micro resonators. The 1.2 ${\mu}m$ and 0.4 ${\mu}m$ thick polycrystalline 3C-SiC cantilever and doubly clamped beam resonators with 60 ~ 100 ${\mu}m$ lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at temperature range of $25{\sim}200^{\circ}C$. The TCF(Temperature Coefficient of Frequency) of 60, 80 and 100 ${\mu}m$ long cantilever resonators were -9.79, -7.72 and -8.0 $ppm/^{\circ}C$. On the other hand, TCF of 60, 80 and 100 ${\mu}m$ long doubly clamped beam resonators were -15.74, -12.55 and -8.35 $ppm/^{\circ}C$. Therefore, polycrystalline 3C-SiC resonators are suitable with RF MEMS devices and bio/chemical sensor applications in harsh environments.

• 한국전기전자재료학회논문지
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• 제22권4호
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• pp.303-306
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• 2009

This paper describes the characteristics of polycrystalline 3C-SiC doubly clamped beam micro resonators. The polycrystalline 3C-SiC doubly clamped beam resonators with $60{\sim}100{\mu}m$ lengths, $10{\mu}m$ width, and $0.4{\mu}m$ thickness were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonant frequency was measured by a laser vibrometer in vacuum at room temperature. For the $60{\sim}100{\mu}m$ long cantilevers, the fundamental frequency appeared at $373.4{\sim}908.1\;kHz$. The resonant frequencies of doubly clamped beam with lengths were higher than simulated results because of tensile stress. Therefore, polycrystalline 3C-SiC doubly clamped beam micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.250-250
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the 100 ~ $40{\mu}m$ long cantilevers, the fundamental frequency appeared at 147.2 kHz - 856.3 kHz. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5 kHz and 1.14 MHz. Therefore, polycrystalline 3C-SiC micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.252-252
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• 2008

The microhotplates consisting of a Pt-ased heating element on AlN/poly 3C-SiC layers were fabricated. The microhotplate has a $600{\mu}m{\times}600{\mu}m$ square shaped membrane which made of $1{\mu}m$ thick ploycrystalline 3C-SiC suspended by four legs. 3C-SiC is known for excellent chemical durability, mechanical strength and sustaining of high temperature. The membrane is fabricated by surface micromachining using oxidized Si sacrificial layer. The Pt thin film is used for heating material and resist temperature sensor. The fabrication methodology allows intergration of an array of heating material and resist temperature detector. For reasons of a short response time and a high sensitivity a uniform temperature profile is desired. The dissipation of microhotplate was examined by a IR thermoviewer and the power consumption was measured. Measured and simulated results are compared and analyzed. Thermal characterization of the microhotplates shows that significant reduction in power consumption was achieved using suspended structure.

• 유변학
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• 제5권2호
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• pp.161-169
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• 1993

Glucomannan(G.M.)은 Amorphophallus Konjac C. Koch의 tuber로부터 분리되었고. 이 G.M.은 다시 침전제로 메탄올을 사용하여 4단계로 분별되었다.(F.1, F.2, F.3, F.4,). 각분 별물에 비하여 직선으로부터 벗어남을 보였다. Low shear viscometer로 G.M. 용액의 viscosity를 측정하였고 농도와 zero shear specific viscosity의 logarithm을 도시한 결과 inflection point를 나타내었다. 이것은 G.M. 분자들의 coil overlap의 시작에서 기인한 것이 고 묽은 용액에서 진한 용액으로의 전이행동은 임계농도. C＊=4/[η]에서 일어났고 이때의 zero shear specific viscosity는 10을 나타내었다. 또한 specific viscosity는 묽은 용액에대해 서는 C14로써 변화하였고 진한 요액에서는 C3.0으로변화하였다. G.M.의 고체상태에 대한 유 전성($\varepsilon$＇,$\varepsilon$＂)과 점탄성(C＇,C＂)계수들을 액체질소 온도에서부터 15$0^{\circ}C$ 온도범위에 걸쳐 4단계로 film을 건조시키면서 10Hz에서 측정하였다. G.M. film의 유전성과 점탄성의 허수부 분은 ($\varepsilon$＂, C＂), -10$0^{\circ}C$에서 peak를 나타내었고 이 peak는 hydroxy methyl 기들의 회전 운동에서 생겨난 것이다. 건조시키지 않은 상태의 G.M. film의 유전성과 점탄성의 허수부분 의 값들은 -5$0^{\circ}C$에서 물 분자의 운동에 의하여 생긴 peak를 보였다.

• 대한수학회논문집
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• 제13권4호
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• pp.759-764
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• 1998

We define the rational lens algebra (equation omitted)(n) as the crossed product by an action of Z on C( $S^{2n＋l}$). Assume the fibres are $M_{ k}$/(C). We prove that (equation omitted)(n) $M_{p}$ (C) is not isomorphic to C(Prim((equation omitted)(n))) $M_{kp}$ /(C) if k > 1, and that (equation omitted)(n) $M_{p{\infty}}$ is isomorphic to C(Prim((equation omitted)(n))) $M_{k}$ /(C) $M_{p{\infty}}$ if and only if the set of prime factors of k is a subset of the set of prime factors of p. It is moreover shown that if k > 1 then (equation omitted)(n) is not stably isomorphic to C(Prim(equation omitted)(n))) $M_{k}$ (c).

• 한국해양공학회지
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• 제1권2호
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• pp.83-92
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• 1987

Inorder ot estimate the running life of turbine rotors, fatigue crack propagation low, da/dN = C(${\DELTA}K)^m$, proposed by paris et al. has been widely applied. In this study, fatigue crack propagation rates for 16 samples of 1% Cr-Mo-V rotor steel were measured and statistical characteristics of m and C values in above equation were reviewed. The results are summarized as follows. 1. C and m follow a log-normal distribution and normal distribution, respectively. And the relation of C and shows a strong negative correlation. 2. Fatigue crack propagation equation can be expressed as da/dN=$4.11{\times}10^{-4}({\Delta}K/153.8)^m$, introducing the ralationship C=$C_oK_o^{-m}$. In this case, contribution of $C_o$ distribution to the distribution of log C shows very small compared to degrees of contribution by m.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.69-70
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• 2008

Micro resonators have been actively investigated for bio/chemical sensors and RF M/NEMS devices. Among various materials, SiC is a very promising material for micro/nano resonators since the ratio of its Young's modulus, E, to mass density, $\rho$, is significantly higher than other semiconductor materials, such as, Si and GaAs. Polycrystalline 3C-SiC cantilever with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and its fundamental resonance was measured by a laser vibrometer in air and vacuum at room temperature, respectively. For the cantilever with $100{\mu}m$ length, $10{\mu}m$width and $1.3{\mu}m$ thickness, the fundamental frequency appeared at 147.2 kHz.

• 대한수학회논문집
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• 제33권1호
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• pp.157-164
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• 2018

A $C_0$-semigroup ${\tau}=(T_t)_{t{\geq}0}$ on a Banach space X is called subspace-supercyclic for a subspace M, if $\mathbb{C}Orb({\tau},x){\bigcap}M=\{{\lambda}T_tx\;:\;{\lambda}{\in}\mathbb{C},\;t{\geq}0\}{\bigcap}M$ is dense in M for a vector $x{\in}M$. In this paper we characterize the notion of subspace-supercyclic $C_0$-semigroup. At the same time, we also provide a subspace-supercyclicity criterion $C_0$-semigroup and offer two equivalent conditions of this criterion.

• 대한수학회논문집
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• 제38권1호
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• pp.123-135
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• 2023

It is proved that there is a one to one correspondence between representations of C^*-ternary ring M and C^*-algebra 𝒜(M). We discuss primitive and modular ideals of a C^*-ternary ring and prove that a closed ideal I is primitive or modular if and only if so is the ideal 𝒜(I) of 𝒜(M). We also show that a closed ideal in M is primitive if and only if it is the kernel of some irreducible representation of M. Lastly, we obtain approximate identity characterization of strongly quasi-central C^*-ternary ring and the ideal structure of the TRO V ⊗^tmin B for a C^*-algebra B.