• Title/Summary/Keyword: C-F properties

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Fluorinated amorphous carbon thin films grown by plasma enhanced chemical vapor deposition with $C_4$F$_8$ and $Si_2H_6/He$ for low dielectric constant intermetallic layer dielectrics

  • Kim, Howoon;Shin, Jang-Kyoo;Kwon, Dae-Hyuk;Lee, Gil S.
    • Journal of Korean Vacuum Science & Technology
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    • v.7 no.2
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    • pp.33-38
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    • 2003
  • Fluorinated amorphous carbon thin films (a-C:F) for the use of low dielectric constant intermetallic layer dielectrics are deposited by plasma enhanced chemical vapor deposition with $C_4$F$_{8}$ and Si$_2$H$_{6}$/He gas mixture as precursors. To characterize and improve film properties, we changed various conditions such as deposition temperature, and RF power, and we measured the thickness and refractive indexes and FT-IR spectrum before and after annealing. At low temperatures the film properties were very poor although the growth rate was very high. On the other hand, the growth rate was low at high temperature. The growth rate increased in accordance with the deposition pressure. The dielectric constants of samples were in the range of 1.5∼5.5∼5.

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Microwave Dielectric Properties of Low-temperature Sintered $Mg_4Nb_2O_9$ Ceramics (저온소결 $Mg_4Nb_2O_9$ 세라믹스의 마이크로파 유전특성)

  • Lee, Ji-Hun;Bang, Jae-Cheol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.439-442
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    • 2004
  • The effects of sintering additives on the low-temperature sintering and microwave dielectric properties of $Mg_4Nb_2O_9$ dielectric ceramics were studied. When $3{\sim}20wt%$ of $0.242Bi_2O_3-0.758V_2O_5$ was added, the sintering temperature decreased from $1100{\sim}1300^{\circ}C$ to $950^{\circ}C$ and high density was obtained. When $Mg_4Nb_2O_9$ was sintered at $950^{\circ}C$ with 10wt% of sintering additive, the microwave dielectric properties of $Q{\times}f_0\;=\;80.035GHz,\;\epsilon_r\;=\;13.3\;and\;\tau_f\;=\;-12.9\;ppm/^{\circ}C$ were obtained.

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Determination of the initial cross-sections for the $C_4F_6$ molecule from the electron drift velocity ($C_4F_6$-Ar혼합기체에서의 Plasma Discharge Simulation을 위한 $C_4F_6$ 초기단면적 결정)

  • Lee, Kyung-Yeob;Jeon, Byung-Hoon
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.1544-1545
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    • 2011
  • For quantitative understanding of gas discharge phenomena, we should know electron collision cross section. Processing plasma etching of semiconductor, and research are being used in the etching source $C_4F_6$ gas may be used by itself and mixed with other gases are also used. However, the molecular gas $C_4F_6$ study on the characteristics of the electron transport and the cross-sectional area of the decision is still lacking. Therefore, we understand the electron transport characteristics and analysed the electron transport coefficients. And to understand and interpret physical properties of the ionization coefficient ${\alpha}$/N, and the attachment coefficient ${\eta}$/N in $C_4F_6$ gas.

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The Construction of High Strength Concrete (500kg/$\textrm{cm}^2$) with Fly-Ash for SAMSUNG APT in San Bon Area (산본 삼성고층 APT에 플라이 애쉬를 혼입한 500kg/$\textrm{cm}^2$이상의 고강도 콘크리트의 최적배합, 시공 및 구조적 연구)

  • 신성우;이광수;문정일;안종문;안경한;김현모;박희민;장일영
    • Proceedings of the Korea Concrete Institute Conference
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    • 1991.10a
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    • pp.162-162
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    • 1991
  • To investigate the properties of High Strength Concrete with Fly-Ash for SAMSUNG San Bon high rised apartment, following variables has been strudied and constructed, successfully. Major variables are F/(F+C), W/C, S/A, Pumping Method, etc.. The results show that 15% of F/(F+C) is the best properties for compressive strength of concrete, temperature reduction and workability.

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The Structural and Microwave Dielectric Properties of the BMT Ceramics with Sintering Temperature and BCN Composition Ratio (소결온도와 BCN 초성에 따른 BMT 세라믹스의 구조 및 마이크로파 유전특성)

  • Choe, Ui-Seon;Lee, Mun-Gi;Ryu, Gi-Won;Lee, Seong-Gap;Lee, Yeong-Hui
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.51 no.7
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    • pp.305-310
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    • 2002
  • The microwave dielectric properties of Ba(Mg$_{1}$3/Ta$_{2}$3/O$_3$-Ba(Co$_{1}$3/Nb$_{2}$3/O$_3$[BMT-BCN] ceramics were investigated. The specimens were prepared by the conventional mixed oxide method with the sintering temperature of 15$25^{\circ}C$~1575$^{\circ}C$. It was found that Ba(Mg$_{1}$3/Ta$_{2}$3/O$_3$[BMT] and BCN formed a solid solution with complex perovskite structure. As increasing the mole fraction of BCN, dielectric constant increased while the temperature coefficient of resonant frequency was changed from positive to negative value. The highest value of quality factor, Q$\times$f$_{0}$=138,205GHz, obtained in the 0.9BMT-0.1BCN ceramics sintered at 1575$^{\circ}C$. In the range of x$\geq$0.4, the dielectric constant was about 30. The 0.55BMT-0.45BCN ceramics sintered at 15$25^{\circ}C$ for 5 hours showed the microwave dielectric properties of $\varepsilon$$_{r}$=30.21, Q$\times$f$_{0}$=85,789GHz and $\tau$$_{f}$=2.9015ppm/$^{\circ}C$.EX>.

Study on the Development of Photoelastic Experiment of Orthotropic Material (I) (직교 이방성의 광탄성 실험법 개발에 관한 연구 I)

  • 최선호;황재석
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.12 no.1
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    • pp.8-18
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    • 1988
  • In the composite structures or the concrete structures, to analyze stress concentration factor, stress distributions and fracture mechanics of them under forces by photoelastic experiment, it is natural that to develope photoelastic model material for them is surely necessary. Thus, the orthotropic photoelastic model material for the transparent type photoelastic device was developed in the paper, it is called Copper Fiber Epoxy Composite and abbreviated as E.F.E.C. It was found that C.F.E.C. developed in this paper was satisfied with the properties of photoelastic model material that the photoelastic model material should have and that C.F.E.C. had completely properties of composite material. It is thought that C.F.E.C. can be applied to both medical engineering for modeling biological tissue and to the aerospace industry as orthotropic photoelastic material.

High Temeprature Strength Property of Continuous SiC Fiber Reinforced SiC Matrix Composites (SiC 장섬유 강화 SiC 기지 복합재료의 고온강도 특성)

  • Shin, Yun-Seok;Lee, Sang-Pil;Lee, Jin-Kyung;Lee, Joon-Hyun
    • Proceedings of the Korean Society For Composite Materials Conference
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    • 2005.04a
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    • pp.102-105
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    • 2005
  • The mechanical properties of $SiC_f/SiC$ composites reinforced with continuous SiC fiber have been investigated in conjunction with the detailed analysis of their microstructures. Especially, the effect of test temperature on the characterization of $SiC_f/SiC$ composites was examined. In this composite system, a braiding Hi-Nicalon SiC fibric was selected as a reinforcement. $SiC_f/SiC$ composites have been fabricated by the reaction sintering process, using the complex matrix slurry with a constant composition ratio of SiC and C particles. The characterization of $RS-SiC_f/SiC$ composites was investigated by means of SEM, EDS and three point bending test. Based on the mechanical property-microstructure correlation, the high temperature applicability of $RS-SiC_f/SiC$ composites was discussed.

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Effect of $ZrO_2$Addition on the Microwave Dielectric Properties of BZN-SZN System Ceramics (BZN-SZN계 세라믹스의 마이크로파 유전 특성에 미치는 $ZrO_2$의 영향)

  • 윤석규;박우정;양우석;윤대호
    • Journal of the Korean Ceramic Society
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    • v.38 no.11
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    • pp.1042-1045
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    • 2001
  • Microwave dielectric properties of Ba(Zn$_{1}$3/Nb$_{2}$3/) $O_3$-Sr(Zn$_{1}$3/Nb$_{2}$3/) $O_3$(BZN-SZN) system were investigated as a function of sintering temperature and Zr $O_2$content. Density was increased and the temperature coefficient of resonant frequency (TCF, $\tau$$_{f}$) decreased with increasing sintering temperature. However dielectric constant (K) and Q$\times$f value did not change markedly with the sintering temperature. For the samples sintered at the same temperature, density, dielectric constant, and Q$\times$f value were increased and TCF was decreased with increasing Zr $O_2$concentration. Especially, the dielectric constant of the sample increased with x and exhibited the maximum value ($\varepsilon$$_{r}$=41) when x=0.6 at 1575$^{\circ}C$ sintered. TCF decreased with x and exhibited the minimum value ($\tau$$_{f}$=+0.8ppm/$^{\circ}C$) when x=1.0..0.

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Purification and Properties of Carboxymethylcellulases from Aspergillus nidulans FGSC 159 (Aspergillus nidulans FGSC 159의 carboxymethylcellulases의 분리 순화 및 그 성질에 관한 연구)

  • 맹필재;홍순우;하영칠
    • Korean Journal of Microbiology
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    • v.18 no.3
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    • pp.133-147
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    • 1980
  • Washed mycelia of Aspergillus nidulans FGSC159 were incubated in CMC minimal liquid medium and the culture filtrate which contained induced extracellular cellulase was fractionated by a three-step procedure including chromatography on Bio-Gel P-150, chromatography on DEAE-Sephadex A-50 and chromatography on Sephadex G-100. Three CMCase components ; F-I-Ia, F-I-Ib and F-II-Ia were prepared. No enzyme activity toward avicel could be detected in these components. Similarly, there was no ${\beta}-glucosidase$ activity. pH-optima of the three components were all 5.0 in acetate buffer. Temperature-optima for the activities of F-I-Ia, F-Ib and F-II-Ia were $45^{\circ}C,\;40^{\circ}C\;and\;50^{\circ}C$, respectively. F-II-Ia was shown to be more thermostable than the other two components. F-II-Ia was proved to have quite a different substrate specificity and action property and action property from those of F-I-Ia and F-I-Ib by product analysis on liquid chromatography.

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