• Journal of the Korean Vacuum Society
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• v.18 no.4
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• pp.296-301
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• 2009

An inductively coupled plasma assisted atomic layer deposition(ICP-ALD) system has been constructed for the deposition of ZnO thin films, and various experiments of ZnO thin films on p-type Si(100) substrates have been carried out to find the self-limiting reaction conditions for the ICP-ALD system under non-plasma circumstances. Diethyl zinc[$Zn(C_2H_5)_2$, DEZn] was used as the zinc precursor, $H_2O$ as the oxidant, and Ar as the carrier and purge gas. At the substrate temperature of $150^{\circ}C$, atomic layer deposition conditions based on self-limiting surface reaction were successfully obtained by series of experiments through the variation of exposure times for DEZn, $H_2O$, and Ar. ZnO deposition was repeated at different substrate temperatures of $90{\sim}210^{\circ}C$. As a result, the thermal process window(ALD window) for ZnO thin films was observed to be $110{\sim}190^{\circ}C$ and the average growth rate was measured to be constant of 0.29 nm/cycle. Properties of the film's microstructure and composition(Zn, O, etc.) were also studied. As the substrate temperature increases, the crystallinity was improved and ZnO(002) peak became dominant. The films deposited at all temperatures were high purity, and the films deposited at high temperatures had the composition ratio between Zn and O closer to one of a stable hexagonal wurtzite structure.

• Carbon letters
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• v.1 no.3_4
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• pp.138-142
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• 2001

The effect of electrochemical surface treatments in KOH chemical solution on microstructures of carbon blacks was investigated in terms of surface functional values and XRD measurements. And their mechanical interfacial properties of the carbon blacks/rubber composites were studied by the composite tearing energy ($G_{IIIC}$). It was found that the development of basic-surface functional groups lead to the significant physical changes of carbon blacks, such as, decrease of the interlayer spacing ($d_{002}$), increase of the crystalline size along c-axis ($L_c$), and increase of degree of crystalline (${\chi}_c$). This treatment is possibly suitable for carbon blacks to be incorporated in a hydrocarbon rubber matrix, resulting in improving the hardness and tearing energy of the resulting composites.

• Journal of the Korean Ceramic Society
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• v.37 no.12
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• pp.1198-1203
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• 2000

AlN와 Si을 이용하여 체적 탄성파 over-moded 공진기를 형성하였다. 높은 c-축 배향성을 갖는 AlN 압전박막은 sputtering에 의해 저온에서 증착하였다. AlN 박막의 c-축 배향성은 기판과 타겥의 거리가 가까울수록, 증착 압력이 낮을수록 (002) 면으로의 성장이 촉진되었다. Si 기판을 이용한 over-moded 공진기로부터 TFR의 임피던스를 산출한 결과 공진영역의 면적에 가장 의존하였다. Al/AlN/Al로 이루어진 TFR의 입력 임피던스는 공진 영역이 크기가 200㎛×200㎛인 경우 가장 50Ω에 근접하였다. Over-moded 공진 특성은 Si 기판의 낮은 Q로 인해 mode 수 294인 2.60976 GHz에서 0.109%의 유효 전기기계결합계수(K/sub eff/²)와 0.3의 K/sub eff/²·Q값을 보였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.95-98
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• 1999

ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition technique using a Nd:YAG laser with the wavelength of 355 nm. In order to investigate the effect of the deposition conditions on the properties of ZnO thin films at an oxygen pressure of 350 mTorr, the experiment has been Performed at various substrate temperatures in the range of 20$0^{\circ}C$ to $700^{\circ}C$. According to XRD, (002) textured ZnO films of high crystalline quality have been obtained and the intensity of UV emission was the highest at 40$0^{\circ}C$ substrate temperature.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.11a
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• pp.242-244
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• 1996

The effects of $Co_{67}$C $r_{33}$ underlayer on the crystallographec and magnetic characteristics of the Co-Cr-Ta layer deposited on the underlayer was investigated. The diffraction intensity $I_{p(002)}$ of Co-Cr-Ta layers on the $Co_{67}$C $r_{33}$ layer was stronger than that of single layer and Co-Cr-Ta/Ti double layer. Therefore, the crystallinity of Co-Cr-Ta layer was improved by the $Co_{67}$C $r_{33}$ underlayers rather than Ti ones. However, the coercivity $H_{c}$ of Co-Cr-Ta layers deposited on $Co_{67}$C $r_{33}$ underlayer was as low as 250 Oe even at substrate temperature of 22$0^{\circ}C$. This $H_{c}$ decrease seems to be attributed to the effect of the $Co_{67}$C $r_{33}$ underlayer as well as interval time between deposition of the underlayer and the Co-Cr-Ta layer.yer.layer.yer.

• The Korean Journal of Ceramics
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• v.6 no.2
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• pp.129-133
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• 2000

Boron nitride films were synthesized with $N_2$ion flux of low energy, up to 100 eV, at different substrate temperatures of no heating, 200, 400, 500, and $800^{\circ}C$, respectively. Boron was supplied by e-beam evaporation at the rate of $1.5\AA$/sec. For all the conditions, hexagonal BN (h-BN) phase was mainly synthesized and high resolution transmission electron microscopy (HRTEM) showed that (002) planes of h-BN phase were aligned vertical to the Si substrate. The maximum alignment occurred around $400^{\circ}C$. In addition to major h-BN phase, transmission electron diffraction (TED) rings identified the formation of cubic BN (c-BN) phase. But HRTEM showed no distinct and continuous c-BN layer. These results suggest that c-BN phase may form in a scattered form even when h-BN phase is mainly synthesized under small momentum transfer by bombarding ions, which are not reconciled with the macro compressive stress model for the c-BN formation.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.14 no.5
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• pp.187-192
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• 2004

We try to use isopropanol which has low boiling point to prepare ZnO thin films at low temperature. ZnO thin films were prepared by sol-gel spin-coating method using zinc acetate dehydrate-isopropanol-monoethanolamine (MEA) solution. The c-axis preferred orientation and optical properties of ZnO films with preheating temperature have been investigated. ZnO thin films were preheated at 200 to $300^{\circ}C$ with an interval of $25^{\circ}C$ and post-heated at $650^{\circ}C$. The ZnO film preheated at $275^{\circ}C$ and post-heated at $650^{\circ}C$ was highly oriented along c-axis (002) plane, and the surface with homogeneous and dense microstructures was formed having nano-sized grains. The optical transmittance was above 90 % in the visible range and exhibited absorption edges at 368 nm wavelength.

• Journal of the Korean Ceramic Society
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• v.39 no.9
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• pp.846-850
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• 2002

A PMN-PT-BT/Ag composite was prepared by surface modification with MgO sol with hoping to suppress silver's migration during sintering. The mixture of PbO, $N_2O_5,\;TiO_2\;with\;Mg(NO_3)_2$ instead of MgO was ball milled, the solvent was removed and then the dried powders were calcined at 950$^{\circ}C$/1h. The calcined powder were treated with 3.0 mol% $Ag_2O$ and 1.0 wt% MgO sol and calcined at 550$^{\circ}C$/1h. The dielectrics sintered at 1000$^{\circ}C$/4h under a flowing oxygen showed the density of 7.84g/$cm^3$, the room temperature dielectric constant of 18400, the dielectric loss of 2.4%, the specific resistivity of $0.24{\times}10^{12}{\Omega}{\cdot}cm$. It also showed the bending strength of $120.7{\pm}11.26$ MPa and the fracture toughness of $0.87{\pm}0.002\;MPam^{1/2}$ which were comparable to commercial PZT. The microstructure sonsisted of grains of ∼4${\mu}m$. SEM and SIMS analysis showed that Ag grew as ∼1${\mu}m$ and excess MgO as ∼0.5${\mu}m$.

• Journal of Neurogastroenterology and Motility
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• v.24 no.4
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• pp.628-642
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• 2018

Background/Aims A Subset of patients with irritable bowel syndrome (IBS) may have mild inflammation due to immune activation. Toll-like receptors (TLRs) and cytokines may cause intestinal inflammation. We studied their expression in relation to gut microbiota. Methods Expression of TLRs and cytokines was assessed in 47 IBS patients (Rome III) and 25 controls using quantitative real-time polymerase chain reaction. Immunohistochemistry was further performed to confirm the expression of TLR-4 and TLR-5. Results Of 47 patients with IBS, 20 had constipation (IBS-C), 20 diarrhea (IBS-D), and 7 unclassified (IBS-U). The mRNA levels of TLR-4 and TLR-5 were up-regulated in IBS patients than controls (P = 0.013 and P < 0.001, respectively). Expression of TLR-4 and TLR-5 at protein level was 4.2-folds and 6.6-folds higher in IBS-D than controls. The mRNA levels of IL-6 (P = 0.003), C-X-C motif chemokine ligand 11 (CXCL-11) (P < 0.001) and C-X-C motif chemokine receptor 3 (CXCR-3) (P < 0.001) were higher among IBS patients than controls. Expression of IL-6 (P = 0.002), CXCL-11 (P < 0.001), and CXCR-3 (P < 0.001) were up-regulated and IL-10 (P = 0.012) was down-regulated in IBS-D patients than controls. Positive correlation was seen between TLR-4 and IL-6 (P = 0.043), CXCR-3, and CXCL-11 (P = 0.047), and IL-6 and CXCR-3 (P = 0.003). Stool frequency per week showed positive correlation with mRNA levels of TLR-4 (P = 0.016) and CXCR-3 (P = 0.005), but inversely correlated with IL-10 (P = 0.002). Copy number of Lactobacillus (P = 0.045) and Bifidobacterium (P = 0.011) showed correlation with IL-10 in IBS-C, while Gram-positive (P = 0.031) and Gram-negative bacteria (P = 0.010) showed correlation with CXCL-11 in IBS-D patients. Conclusions Altered immune activation in response to dysbiotic microbiota may promote intestinal inflammation in a subset of patients with IBS.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.299-299
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• 2012

투명전도산화물 박막은 디스플레이, 태양전지, 압전소자 등 다양한 응용분야에 많이 이용되고 있는 소재이다. 그 중에서 현재 산업에서 활용 빈도가 높은 투명전도막의 재료는 ITO를 기반으로 하는 물질이다. 하지만 인듐의 높은 생산단가와 플라즈마 노출시 열화로 인한 문제점 때문에 기존의 ITO를 대체하기 위한 새로운 재료에 관심이 증대되고 있다. 본 연구에서는 대표적인 ITO 대체 물질 중의 하나인 ZnO 박막에 대해서 증착환경변화에 따른 물성변화를 조사하였다. 먼저 대기중에서 안정화된 ZnO 박막을 얻기 위해서 인(P) 2% 첨가된 ZnO 세라믹을 고상반응법으로 제작하고, 펄스레이저 증착법을 이용하여 Al2O3(0001)기판에 산소분압을 30~150 mTorr로 변화를 주어 P-ZnO 박막을 제작하였다. 이 때 증착온도는 $400^{\circ}C$로 고정하였다. X선 회절 결과로부터 산소분압에 상관없이 ZnO (002)방향으로 증착되었다. 하지만 결정립의 크기는 산소분압이 증가하면서 줄어들고, ZnO (002)피크로부터 얻어진 격자상수(c-축)는 벌크 값에 가까워짐을 알 수 있었다. 하지만 P첨가로 인해서 박막의 격자상수는 순수한 ZnO 벌크 값 보다 큰 것으로 알 수 있다. 산소분압 변화에 따른 P-ZnO 박막의 산화 상태는 X-선 광전자 분광기를 이용하여 측정하였다. 그 결과 산소 core-level의 스펙트럼은 자연산화, 산소 vacancy, Zn-O 결합으로 구성되어짐을 알 수 있었다. 산소분압이 증가하면 Zn-O 결합은 증가하지만 산소 vacancy는 감소함을 알 수 있었다. 전기적 특성 결과 P-ZnO 박막은 30 mTorr에서는 n형 반도체 특성, 100 mtorr에서 p형 반도체의 특성이 나타내었고, 산소분압이 증가하면 다시 n형 반도체 특성을 나타냄을 알 수 있었다. 광학적 특성 결과 P-ZnO 박막은 산소분압에 상관없이 가시광선 영역에서 80%이상의 투과율을 나타내었으며, 산소분압이 증가할수록 에너지 갭이 증가하였다.