• The Korean Journal of Ceramics
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• v.3 no.4
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• pp.257-262
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• 1997

Aluminum nitride(AIN) thin films were deposited on SiO$_2$/Si substrates by reactive sputtering for the application of SAW devices. The major deposition parameters such as pressure, nitrogen fraction, rf power, substrate distance were changed to find out the optimal condition for c-axis oriented thin films on an amorphous substrate. The effects of deposition parameters on the crystal structure, residual stress, and growth morphology of thin films were characterized by XRD, SEM, and TEM. The FWHM of (002) rocking curve of the films deposited at the proper condition was lower than 2.2$^{\circ}$(C=0.93$^{\circ}$). Cross-sectional TEM showed that self-aligned structure was developed just after slightly random growth at the initial stage. The frequency characteristics of test device fabricated from AIN thin films confirmed their piezoelectric property and applicability for SAW devices.

• KIEE International Transactions on Electrophysics and Applications
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• v.3C no.6
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• pp.241-245
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• 2003

ZnO thin films on (l00) p-type Si and sapphire substrates have been deposited by a pulsed laser deposition technique using an Nd:YAG laser with a wavelength of 266 nm. The influence of the deposition parameters such as oxygen pressure, substrate temperature and laser energy density on the properties of the grown films was studied. The experiments were performed for substrate temperatures in the range of 200∼50$0^{\circ}C$ and oxygen pressure in the range of 100∼700 sccm. All of the films grown in this experiment show strong c-axis orientation with (002) textured ZnO peak. With increasing substrate temperature, the FWHM (full width at half maximum) and surface roughness were decreased. In the case of using sapphire substrate, the intensity of PL spectra increased with increasing ambient oxygen flow rate. We investigated the structural and morphological properties of ZnO thin films using X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.8
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• pp.716-722
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• 2003

ZnO thin films were deposited on Al and Pt electrodes by an RF reactive sputtering system for the fabrication of FBAR (film bulk acoustic wave resonator), and the effect of thermal treatment temperature on their c-axis preferred orientation was investigated. SEM experiments show that columnar structure of ZnO thin films were grown with c-axis normal to electrode material, and XRD experiments show that both ZnO films were grown with (002) plane preferred orientation, but larger diffraction peak was observed with Pt electrode. The peak intensity increased with higher thermal treatment temperature, but c-axis preferred orientation was diminished. The surface roughness of Al thin film was higher than that of Pt, and these affect the surface roughness of ZnO film deposited on the electrode. Though the preferred orientation with respect to Pt(111) plane was improved with higher thermal treatment temperature, this could not improve the c-axis orientation of ZnO film.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.04b
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• pp.13-16
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• 2009

In this study, AlN thin films were deposited on a polycrystalline (poly) 3C-SiC buffer layer for surface acoustic wave (SAW) applications using a pulsed reactive magnetron sputtering system. AFM, XRD and FT-IR were used to analyze structural properties and preferred orientation of the AlN/3C-SiC thin film. Suitability of the film in SAW applications was investigated by comparing the SAW characteristics of an interdigital transducer (IDT)/AlN/3C-SiC structure with the IDT/AIN/Si structure at 160 MHz in the temperature range $30-150^{\circ}C$. These experimental results showed that AlN films on the poly 3C-SiC layer were highly (002) oriented. Furthermore, the film showed improved temperature stability for the SAW device, $TCF\;=\;-18\;ppm//^{\circ}C$. The change in resonance frequency according to temperature was nearly linear. The insertion loss decrease was about $0.033dB/^{\circ}C$. However, some defects existed in the film, which caused a slight reduction in SAW velocity.

• The Journal of Korean Society for Radiation Therapy
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• v.22 no.1
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• pp.25-32
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• 2010

Purpose: In radiotherapy that takes into account respiration using a RPM (Real time Position Management, Varian, USA) system, which can treat in consideration of the movement of tumor, infrared reflective markers supplied by manufacturers cannot obtain respiratory signal if the couch rotates at a certain angle or larger. In order to solve this problem, the author developed the 3D infrared reflective marker named 'Kw-marker' that can obtain respiratory signal at any angle, and evaluate its usefulness. Materials and Methods: In order to measure the stability of respiratory signal, we put the infrared reflective marker on the 3D moving phantom that can reproduce respiratory movement and acquired respiratory signal for 3 minutes under each of 3 conditions (A: $couch\;0^{\circ}$, a manufacturer's infrared reflective marker B: $couch\;0^{\circ}$, Kw-marker C: $couch\;90^{\circ}$, Kw-marker). By analyzing the respiratory signal using a breath analysis program (Labview Ver. 7.0), we obtained the peak value, valley value, standard deviation, variation value, and amplitude value. In order to examine the rotation error and moving range of the target, we placed a B.B phantom on the 3D moving phantom, and obtained images at a couch angle of $0^{\circ}$ and $90^{\circ}$ using OBI, and then acquired the X, Y and Z values (mm) of the ball bearing at the center of the B.B phantom. Results: According to the results of analyzing the respiratory signal, the standard deviation at the peak value was A: 0.002, B: 0.002 and C: 0.003, and the stability of respiration for amplitude was A: 0.15%, B: 0.14% and C:0.13%, showing that we could get respiratory signal stably by using the Kw-marker. When the couch rotated $couch\;90^{\circ}$, the mean rotation error of the ball bearing, namely, the target was X: -1.25 mm, Y: -0.45 mm and Z: +0.1 mm, which were within 1.3 mm on the average in all directions, and the difference in the moving range of the target was within 0.3 mm. Conclusion: When we obtained respiratory signal using the Kw-marker in non-coplanar treatment where the couch rotated, we could acquire respiratory signal stably and the Kw-marker was effective enough to substitute for the manufacturer's infrared reflective marker. When the rotation error and moving range of the target were measured, there was little difference, indicating that the displacement of the reflector movement in couch rotation is the cause of change in the scale and amplitude of respiratory signal. If the converted value of amplitude height according to couch angle is studied further and applied, it may be possible to perform non-coplanar phase-based gating treatment.

• Journal of the Korean Vacuum Society
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• v.18 no.1
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• pp.9-14
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• 2009

We calculated tetragonal-$HfO_2$/Si superstructures using density functional theory. When a and b-axes of cubic-$HfO_2$ were increased to be matched with those of Si for epitaxy contact, c-axis was decreased by 2%. Eight models of interface layers were produced by choosing different terminating layers of tetragonal-$HfO_2$ and Si substrate at the interface. It was found that tetragonal-$HfO_2$ $(004)_{1/4}$/Si $(004)_{3/4}$ superstructure was the most favorable and tetragonal-$HfO_2$ (004)$_{1/4}$/Si (002) superstructure was the most unfavorable. In tetragonal-$HfO_2$ $(004)_{1/4}$/Si (002) superstructure, there were two oxygen vacancies in tetragonal-$HfO_2$ as two oxygen atoms were moved to Si substrate located at the interface.

• The Korean Journal of Mycology
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• v.50 no.1
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• pp.65-73
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• 2022

This study aimed to isolate wild yeasts from seawaters and soils samples of the Haeundae and Mongdol beaches on the southern coast of Korea, and to characterize these unrecorded wild yeast strains. In total, 41 strains, representing 37 different species of wild yeast were isolated from 70 samples collected from the beaches. Among these, 14 strains were isolated from the alkalophilic medium of yeast extract-peptone-dextrose (YPD) medium (pH 9.0), and 27 strains were isolated concurrently on general YPD medium (pH 6.5). Among the 41 isolated wild yeast strains, Candida insectorum HUD 16-3(JSL-KSS-002) and Metschnikowia citriensis HUD 12-5(JSL-KSS-001) had not previously been recorded. We investigated the microbiological characteristics of these two unrecorded yeast strains and three other strains-, Cystobasidium lysinophilum JSC 52-2(JSL-GGU-019), Candida takata NMD 11-1(JSL-GGU-017) and Candida panamensis ASG 58M-2(JSL-GGU-018) from Jangseoncheon in Jellabuk-do and Jangtaesan in Deajeon city. All five previously unrecorded yeasts were oval and did not form spores. All strains grew well in YPD and yeast extract-malt extract media in a vitamin-free medium. Two strains, including C. insectorum HUD 16-3(JSL-KSS-002) grew well in a 15% NaCl-containing YPD medium. Three strains, including Cys. lysinophilum JSC52-2(JSL-GGU-019) assimilated lactose, and all strains assimilated starch.

• Journal of the Korean Ceramic Society
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• v.30 no.10
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• pp.852-858
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• 1993

The effect of coal tar ptch-impregnated carbon materials which were made from petroleum coke was investigated at various pressure time and impregnation-sintering cycle. As a result, density and bending strength of the carbon materials were remarkably increased in the condition of pressure times of 5hrs and of the cycle of 3rd times. And the value of d002 and Lc of the graphitic carbon sintered at 230$0^{\circ}C$ shwoed 3.387$\AA$ and 167$\AA$, respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.2
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• pp.109-113
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• 2013

ZnO thin films were synthesized on Si substrates by MOCVD using diethyl zinc as a precursor. Effects of $O_2$/DEZ gas mixing ratio on the growth rate, surface morphology, preferred orientation, and electrical properties of the ZnO thin films were investigated with SEM, XRD, and Hall measurement. The surface reflectance variations of ZnO thin films were analyzed using laser-photometer apparatus. As the $O_2$/DEZ mixing ratio increased, growth rate and $I_{(002)}/I_{(101)}$ in XRD of ZnO thin films decreased, and the crystal structure was changed from columnar to planar structure. All ZnO films deposited at various CVD conditions exhibited c-axis (002) plane preferred orientation. The electrical properties of ZnO thin films mainly depended on the carrier mobility.

• Korean Journal of Materials Research
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• v.4 no.5
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• pp.581-589
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• 1994

Magnetic properties and microstructures of the $Co_{83}Cr_{17}$ films growing under the applied magnetic field were studied. In comparison, those of the films growing without magnetic field were also studied. Magnetic field does not affect saturation magnetization and in-plane coercivity of the films. On the contrary perpendicular coercivity and effective perpendicular anisotropy field decreased. Grain size and the thickness of the so-called transition layer were not affected and the C-axis alignment of the films was slightly deteriorated due to magnetic field. Also, microstructures of the sputtered films showed larger grain sizes of strong (002) preferred orientation for thicker film specimens independent of applied magnetic field.