• 한국산학기술학회논문지
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• 제19권1호
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• pp.596-602
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• 2018

최근 나노임프린트 리소그래피 공정이 마이크로/나노 스케일의 소자 개발에 있어서 경제적으로 대량 생산할 수 있는 기술로 주목 받고 있다. 자외선경화 방식의 나노임프린트의 경우 상온 및 저압의 장점과 함께 비진공 환경에서 공정을 통하여 설비 비용의 저감과 생산공정의 고속화를 달성할 수 있다. 그러나 이 경우 비진공 환경에서 발생하는 기포결함의 문제를 해결해야만 한다. 본 연구에서는 비진공 환경에서의 자외선경화 방식의 나노임프린트 공정에서 몰드 중공부 단면의 형상과 기포결함 발생 관계를 연구하였다. 일반적으로 많이 사용되는 사각형 단면과 타원형 단면 그리고 삼각형 단면에 대하여 2차원 유동해석 및 VOF 방법을 통하여 기포결함을 시뮬레이션 하였고 단면의 형상과 다양한 접촉각에 따른 유동선단의 특성을 분석하였다. 해석결과 몰드 중공부 형상은 기포결함 발생에 매우 중요한 영향을 미치며, 고려된 형상 모두 몰드와의 접촉각이 작을수록, 기판과의 접촉각이 클수록 기포결함 발생 가능성이 작아짐을 알 수 있었다. 또한 타원형 형상이 기포결함 발생방지 측면에서 가장 효과적임을 확인하였다.

• 반도체디스플레이기술학회지
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• 제14권3호
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• pp.61-66
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• 2015

Recently, the major trends of NIL are high throughput and large area patterning. For UV NIL, if it can be proceeded in the non-vacuum environment, which greatly simplifies tool construction and greatly shorten process times. However, one key issue in non-vacuum environment is air bubble formation problem. In this paper, numerical analysis of bubble defect of UV NIL is performed. Fluent, flow analysis focused program was utilized and VOF (Volume of Fluid) skill was applied. For various resist-substrate and resist-mold angles, effects of velocity inlet and residual layer thickness of resist on bubble defect formation were investigated. The numerical analyses show that the increases of velocity inlet and residual layer thickness can cause the bubble defect formation, however the decreases of velocity inlet and residual layer thickness take no difference in the bubble defect formation.

• 한국생산제조학회지
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• 제21권3호
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• pp.473-478
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• 2012

In this paper, the air bubble formation mechanism in the rectangular and triangular line-and-space pattern during dispensing UV Nanoimprint Lithography (UV-NIL) at an atmospheric condition is studied. To investigate the air bubble formation, an analytic model based on geometric approach and a numerical model based on CFD(computational fluid dynamics) were used in the analysis. It was found in the numerical analysis that every time the flow front passed through a corner of the pattern, it proceeded with a newly formed shape, occurring due to interface reconfiguration, since the flow fronts were formed such that they minimized the surface energy. Moreover, the conditions for the air bubble formation were investigated by applying the analytic analysis based on geometric approach and the numerical analysis. Good overall agreement was found between the analytic and numerical analysis.

• Nuclear Engineering and Technology
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• 제56권4호
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• pp.1490-1500
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• 2024

Helium-induced defect nucleation and accumulation in polycrystalline W and W0.5 wt%ZrC (W0.5ZrC) were studied in-situ using the transmission electron microscopy (TEM) combined with 40 keV He⁺ irradiation at 800 and 1000℃ at the maximum damage level of 1 dpa. Radiation-induced dislocation loops were not observed in the current study. W0.5ZrC was found to be less susceptible to irradiation damage in terms of helium bubble formation and growth, especially at lower temperature (800 ℃) when vacancies were less mobile. The ZrC particles present in the W matrix pin the forming helium bubbles via interaction between C atom and neighbouring W atom at vacancies. This reduces the capability of helium to trap a vacancy which is required to form the bubble core and, as a consequence, delays, the bubble nucleation. At 1000 ℃, significant bubble growth occurred in both materials and all the present bubbles transitioned from spherical to faceted shape, whereas at 800 ℃, the faceted helium bubble population was dominated in W.

• Journal of Welding and Joining
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• 제24권2호
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• pp.71-78
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• 2006

It has been reported that good quality weld beads are not easily obtained during the $CO_2$ CW laser welding of primer coated plate. However, by introducing a small gap clearance in the lap position, the zinc vapor can escape through it and sound weld beads can be acquired. Therefore, this study examines for keyhole behavior by observing the laser-induced plasma and investigates the relation between keyhole behavior and formation of weld defect. Laser-induced plasma has accompanied with the vaporizing pressure of zinc ejecting from keyhole to surface of primer coated plate. This dynamic behavior of plasma was very unstable and this instability was closely related to the unstable motion of keyhole during laser welding. As a result of observing the composition of porosity, much of Zn element was found from inner surface of porosity. But Zn was not found from the dimple structure fractured at the weld metal. By analyzing of vaporizing element in laser welding, a component ratio of Zn was decreased by introducing a small gap clearance. Therefore we can prove that the major cause of porosity is the vaporization of primer in lap position. Mechanism of porosity-formation is that the primer vaporized from the lap position accelerates dynamic behavior of the key hole and the bubble separated from the key hole is trapped in the solidification boundary and romaines as porosity.