• 한국정밀공학회지
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• 제27권1호
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• pp.58-63
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• 2010

A new contact force estimation technique is proposed. Keeping the contact force at a certain level between finishing tool and the object is essential since the quality of the finished surface is very sensitive to the contact force during the finishing process. However, the contact force measurement cannot be obtained by simply installing load cells under machine table or in the middle of tool linkage. The reason is that the weight of the machine table and the tool linkage are much heavier than the force to be measured. To that end, a method for estimating disturbance is proposed for a system that is similar to the mechanism of the finishing machine, and the same method is applied to estimate the contact force of the brush-type finishing machine. To verify the effectiveness of the proposed method, a small scale test set-up has been built and the method has been tested.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.515-516
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• 2009

• 한국정밀공학회지
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• 제27권3호
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• pp.41-49
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• 2010

Two promising control candidates have been selected to test the sinusoidal reference tracking performance for a brush-type polishing machine having strong nonlinearities and disturbances. The controlled target system is an oscillating mechanism consisting of a common positioning stage of one degree-of-freedom with a screw and a ball nut driven by a servo motor those can be obtained commercially. Beside the strong nonlinearity such as stick-slip friction, the periodic contact of the polishing brush and the work piece adds an external disturbance. Selected control candidates are a Sliding Mode Control (SMC) and a variant of a feedback linearization control called Smooth Robust Nonlinear Control (SRNC). A SMC and SRNC are selected since they have good theoretical backgrounds, are suitable to be implemented in a digital environment and show good disturbance and modeling uncertainty rejection performance. It should be also noted that SRNC has a nobel approach in that it uses the position information to compensate the stickslip friction. For both controllers analytical and experimental studies have been conducted to show control design approaches and to compare the performance against the strong nonlinearity and the disturbances.

• 한국전기전자재료학회논문지
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• 제22권2호
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• pp.114-118
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• 2009

PVA (polyvinyl alcohol) brush cleaning method is a typical cleaning method for semiconductor cleaning process especially post-CMP cleaning. PVA brush contacts with the wafer surface and abrasive particle, generating the contact rotational torque of the brush, which is the removal mechanism. The brush rotational torque can overcome theoretically the adhesion force generated between the abrasive particle and wafer by zeta potential. However, after CMP (chemical mechanical polishing) process, many particles remained on the wafer because the brush was contaminated in previous post-CMP cleaning step. The abrasive particle on the brush redeposits to the wafer. The level of the brush contamination increased according to the cleaning run time. After cleaning the brush, the level of wafer contamination dramatically decreased. Therefore, the brush cleanliness effect on the cleaning performance and it is important for the brush to be maintained clearly.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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• pp.235-238
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• 2004

본 연구는 반도체소자 제조공정에 적용되는 CMP공정 중 LPP(Landing Plug Poly) Contact간의 소자 분리를 위해 진행되는 LPP CMP의 후 세정 과정에서 유발되는 방사형 Defect 제거에 관한 내용이다. 방사형 Defect은 LPP CMP 후에 노출되는 BPSG, Poly, Nitride Film과 연마재로 사용되는SiO2 입자, 후 세정과정에서 적용되는 SC-1, DHF, $NH_4OH$ Chemical과 Brush와의 상호작용에 의해 발생되며, Cleaning시의 산성 분위기 하에서 각 물질간의 pH와 Zeta Potential의 차이에서 기인한다. 이 Defect을 제거하기 위해 LPP CMP후에 Film 표면에 노출되는 각 물질의 표면 특성과 CMP 후 오염입자의 흡착과 재 흡착에 영향을 미치는 Electrostatic force와 Van der Waals force, PVA Brush에 의한 Mechanical force의 상호작용을 고려하여 최적 후 세정 조건을 제시 하였다.

• 대한기계학회논문집A
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• 제41권7호
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• pp.585-590
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• 2017

주행중인 차량의 거동은 지면과 타이어의 접촉면에 발생하는 힘과 토크에 의해 결정된다. 타이어에 작용하는 힘과 토크를 계산하기 위하여 다양한 타이어 모델들이 사용되고 있으며, 본 연구에서 사용하는 브러쉬 모델(brush model)은 타이어의 물리적 특성을 이용하여 지면과의 접촉면에 발생하는 힘과 토크를 구하는 모델이다. 브러쉬 모델은 힘과 토크를 계산하는데 다른 타이어 모델에 비하여 적은 수의 계수를 필요로 하지만, 힘과 토크를 계산하는데 낮은 자유도를 가지기 때문에 시험 데이터를 정확하게 표현하는데 한계가 있다. 본 논문에서는 이러한 단점을 개선하기 위하여 타이어 마찰계수 및 특성계수에 최소한의 변수를 추가한 개선된 모델을 제안하고, 이의 유효성을 검증하였다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.1077-1081
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• 2003

In this paper, experimental studies of force tracking control for the crack sealing robot are presented. Crack sealing robot is built to detect, track and seal the crack on the pavement. Before sealing, crack must be detected by a laser sensor and a camera sensor, then cleaned for a better sealing job. In order to maintain contact with the ground force control is required to brush all dirt in the crack out for preparing sealing cracks with tars. Impedance control algorithm is presented to regulate a specified desired force. Experimental studies of the proposed force control algorithm are conducted under unknown environment stiffness and location. Performances of force control algorithm are stable and excellent.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.2502-2507
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• 2003

In this paper, a crack sealing robot is developed. The crack sealing robot is built to detect, track, and seal the crack on the pavement. The sealing robot is required to brush all dirt in the crack out for preparing a better sealing job. Camera calibration has been done to get accurate crack position. In order to perform a cleaning job, the explicit force control method is used to regulate a specified desired force in order to maintain constant contact with the ground. Experimental studies of force tracking control are conducted under unknown environment stiffness and location. Crack tracking control is performed. Force tracking results are excellent and the robot finds and tracks the crack very well.

• Tribology and Lubricants
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• 제35권2호
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• pp.99-105
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• 2019

This study presents an experimental investigation of the wear and oxidation of the bristles of a brush seal in a super-heated steam environment. We construct a model reflecting normal force and radial interference to predict the amount of wear. To monitor the volume loss of the bristle induced by the swirl phenomenon of the rotor, we measure the clearance between the rotor and the brush seal by using a non-contact 3-D device. We calculate the area by using the area-wise measurement method. Considering the obvious brush seal wear variables, we use two disks with different roughness($Ra=0.1{\mu}m$ and $100{\mu}m$) to determine the effect of roughness on wear. Considering an actual steam turbine, we utilize a steam generator and super-heater to generate a working fluid (0.95MPa, 523.15K) that has high kinetic energy. We observe the abrasion of the bristles in the hot steam environment through a scanning electron microscope image. This study also conducted energy dispersive X-ray (EDX) analysis for a qualitative evaluation of local chemistry. The results indicate that the wear and elimination of bristles occur on the disk with high roughness, and the weight increases due to oxidation. Furthermore these results, reveal that the bristle oxidation is accelerated more under super-heated steam conditions than under conditions without steam.