• Korean Journal of Optics and Photonics
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• v.11 no.5
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• pp.312-316
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• 2000

Vole lllvesnguted the surface roughness charactenstics of the super~polished mirror substrate made by bowl-feed technique. in comparison with the case of fresh-feed technique. Fresh-feed techmque and bowl-feed technique were tried lor substrate surface polishing, and the surface roughne~s was estimated by phase-measunng interferometry. l11e slilface roughness of the substrate after bowl-feed procedure was Improved approxImately three times as fine as that after fresh-feed procedure. and tbe nns roughness of less than $0.5\AA$ and up to $0.3\AA$ at its best was obtained for the bowl-feed procedure. The surface roughness changes by (he bowl-feed technique. compated with tbe fresh-feeclleclmique. were analyzed witb tbe help of both 1 -dimensional roughne,>s profde and rougbness amplItude spect1U1l1 of the polished substrate, whIch ascertained that the final polishing partIcle size of the bowl-feed ptocedure was much smaller than that of the fresh~feed procedure. edure.

• Journal of the Korea Institute of Military Science and Technology
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• v.2 no.2
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• pp.157-165
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• 1999

Production and measurement of a super-polished few-ppm-scattering mirror substrate are investigated. In order to improve the surface roughness directly determining scattering, the super-polishing process using Bowl-Feed technique is tried. The surface quality of the super-polished substrate is estimated by the phase-measuring interferometer. For the reliable roughness measurement using the interferometer, data averaging method is applied so that the optimal data averaging condition, 30 phase-data averaging and 20 intensity-data averaging, minimizing the measurement error is experimently searched. Based on the optimal data averaging condition, surface roughness of home-made mirror substrate is measured to be less than $0.5{\AA}$ rms corresponding to 2-ppm total-integrated-scattering.

• Korean Journal of Optics and Photonics
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• v.18 no.6
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• pp.452-460
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• 2007

Ultra-low loss ZERODUR and fused silica mirrors were manufactured and their light scattering characteristics were investigated. For this purpose, ZERODUR and fused silica substrates were super-polished by the bowl feed method. The surface roughness were 0.292 ${\AA}$ and 0.326 ${\AA}$ in rms for ZERODUR and fused silica, respectively. To obtain the high reflectivity, 22 thin film layers of $SiO_2$ and $Ta_2O_5$ were deposited by Ion Beam Sputtering. The measured light scattering of ZERODUR and fused silica mirror were 30.9 ppm and 4.6 ppm, respectively. This shows that the substrate surface roughness is not the only parameter which determines the light scattering of the mirror. In order to investigate the mechanism for additional light scattering of the ZERODUR mirror, the surface roughness of the mirror was measured by AFM and was found to be 2.3 times higher than that of the fused silica mirror. It is believed that there is some mismatch at the interface between the substrate and the first thin film layer which leads to the increased mirror surface roughness. To clarify this, the contact angle measurements were performed by SEO 300A, based on the Giriflaco-Good-Fowkes-Young method. The fused silica substrates with 0.46 ${\AA}$ in its physical surface roughness shows lower contact angle than that of the ZERODUR substrate with 0.31 ${\AA}$. This indicates that the thin film surface roughness is determined by not only its surface roughness but also the surface energy of the substrate, which depends on the chemical composition or crystalline orientation of the materials. The surface energy of each substrate was calculated from a contact angle measurement, and it shows that the higher the surface energy of the substrate, the better the surface roughness of the thin film.