• Journal of the Korean Society for Nondestructive Testing
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• v.33 no.2
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• pp.129-137
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• 2013

A force calibration of a nanoindenter and a 3D morphology observation of indenters were carried out in this study. A microbalance calibrated with standard weights was used for measuring the loads generated by a nanoindenter. The indentation load could be calibrated from the ratio of measured and generated loads and the first contact load also could be detected from the microbalance data. By analyzing atomic force microscopy images of two indenters, curvature radii of apexes were determined by $19.71{\pm}3.03$ and $1043.94{\pm}50.91$ nm, respectively, for the nearly new indenter A and the severly worn indenter B. Corresponding bluntness depths were estimated by 1.22 and 64.56 nm for the both indenters by overlapping their profiles on the perfect pyramidal shape. In addition, nanoindentation curves obtained from a fused silica reference material with the both indenters showed a depth difference corresponding to the bluntness depth difference along the indentation depth axis. By shifting amounts of the bluntness depths along the horizontal axis, whole nanoindentation curves overlapped on themselves and resulted in nanohardness values consistent within 1.11 % without considering the complex indenter area function of each indenter.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.63-68
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• 2005

The nanoindentation technique is widely used to investigate the mechanical properties of nano-microscale materials. The nanoindentation method for assessing mechanical properties at low loads and shallow depths is already well established fur the characterization of thin films as well as bulk materials. In this study, we evaluated residual stress in DLC and Au thin films usign nanoindentation technique with a new stress-relaxation model. Moreover, We suggest a composite hardness equation and quantify the magnitude of hardness increase by using an equation based on the interface hardness and the interface thickness, derived by comparing results derived from this equation and those determined in nanoindentation tests. Finally, We present an indentation size effect (ISE) model that extends the available contact depth for ISE application down to several tens of nanometers by considering the tip bluntness effect.