• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.7
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• pp.573-578
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• 2003

Low temperature selective epitaxial growth of Si and SiGe has been obtained using an industrial single wafer chemical vapor deposition module operating at reduced pressure. Epitaxial Si and heteroepitaxial SiGe deposition with Ge content about 20 % has been studied as extrinsic base for self-aligned heterojunction bipolar transistors(HBTs), which helps to reduce the parasitic resistance to obtain higher maximum oscillation frequencies(f$\_$max/). The dependence of Si and SiGe deposition rates on exposed windows and their evolution with the addition of HCl to the gas mixture are investigated. SiH$_2$Cl$_2$ was used as the source of Si SEG(Selective Epitaxial Growth) and GeH$_4$ was added to grow SiGe SEG. The addition of HCl into the gas mixture allows increasing an incubation time even low growth temperature of 675∼725$^{\circ}C$. In addition, the selectivity is enhanced for the SiGe alloy and it was proposed that the incubation time for the polycrystalline deposit on the oxide is increased probably due to GeO formation. On the other hand, when only SiGe SEG(Selective Epitaxial Growth) layer is used for extrinsic base, it shows a higher sheet resistance with Ti-silicide because of Ge segregation to the interface, but in case of Si or Si/SiGe SEG layer, the sheet resistance is decreased up to 70 %.

• Progress in Superconductivity and Cryogenics
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• v.10 no.4
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• pp.23-28
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• 2008

As a part of the plasma control system (PCS) for the first plasma campaign of KSTAR, seven sets of fast feedback control loop for the superconducting poloidal field magnet power supply (PF MPS) have been implemented. A special real-time digital communication interface has been developed for the simultaneous exchanges of the current/voltage data from the 7 sets of 12-thyristor power supplies in a 200 microsecond control cycle. Preliminary power supply tests have been performed before actual cooldown of the device. A $29mH/50m{\Omega}$ solenoid dummy has been fabricated for a series of single power supply tests. Connectivity and response speed of the plasma control system have been verified. By changing hardware cabling, this load was also used to estimate mutual inductance coupling effects of two geometrically adjacent solenoid coils on each power supply. After the cooldown was complete, each pair of the up/down symmetric PF coils has been serially connected and tested as part of the device commissioning process. Bipolar operation and longer pulse attempts have been investigated. The responses of the coils and power supplies corresponding to the plasma magnetic controls in plasma discharges are also analyzed for the future upgrades.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.17-18
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• 2011

Plasma in liquid phase has attracted great attention in the last few years by the wide domain of applications in material processing, decomposition of organic and inorganic chemical compounds and sterilization of water. The plasma in liquid is characterized by three main regions which interact each - other during the plasma operation: the liquid phase, which supply the plasma gas phase with various chemical compounds and ions, the plasma in the gas phase at atmospheric pressure and the interface between these two regions. The most complex region, but extremely interesting from the fundamental, chemical and physical processes which occur here, is the boundary between the liquid phase and the plasma gas phase. In our laboratory, plasma in liquid which behaves as a glow discharge type, is generated by using a bipolar pulsed power supply, with variable pulse width, in the range of 0.5~10 ${\mu}s$ and 10 to 30 kHz repetition rate. Plasma in water and other different solutions was characterized by electrical and optical measurements. Strong emissions of OH and H radicals dominate the optical spectra. Generally water with 500 ${\mu}S/cm$ conductivity has a breakdown voltage around 2 kV, depending on the pulse width and the repetition rate of the power supply. The characteristics of the plasma initiated in ultrapure water between pairs of different materials used for electrodes (W and Ta) were investigated by the time-resolved optical emission and the broad-band absorption spectroscopy. The deexcitation processes of the reactive species formed in the water plasma depend on the electrode material, but have been independent on the polarity of the applied voltage pulses. Recently, Coherent anti-Stokes Raman Spectroscopy method was employed to investigate the chemistry in the liquid phase and at the interface between the gas and the liquid phases of the solution plasma system. The use of the solution plasma allows rapid fabrication of the metal nanoparticles without being necessary the addition of different reducing agents, because plasma in the liquid phase provides a reaction field with a highly excited energy radicals. We successfully synthesized gold nanoparticles using a glow discharge in aqueous solution. Nanoparticles with an average size of less than 10 nm were obtained using chlorauric acid solutions as the metal source. Carbon/Pt hybrid nanostructures have been obtained by treating carbon balls, synthesized in a CVD chamber, with hexachloro- platinum acid in a solution plasma system. The solution plasma was successfully used to remove the template remained after the mesoporous silica synthesis. Surface functionalization of the carbon structures and the silica surface with different chemical groups and nanoparticles, was also performed by processing these materials in the liquid plasma.

• Journal of KIISE:Software and Applications
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• v.34 no.10
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• pp.900-909
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• 2007

This paper describes an experiment on the evaluation of human sensibility by monitoring responses to changes In the frequency and amplitude of a tactile display system. Preliminary tasks were performed to obtain effective adjectives concerning texture perception. The number of collected adjectives was originally 33. This number of adjectives was reduced to 14 by a suitability survey that asked whether an adjective is suitable for expressing a texture feeling. Finally after performing a semantic similarity evaluation, the number of adjectives was further reduced to ten and these ten were used in the main experiment. In the main experiment, selected sandpaper types and 15 selected combinations of frequencies and amplitudes of a tactile display were utilized to quantitatively evaluate the ten adjectives using a bipolar seven-point scale. The data show that a relationship exists between the independent variables(frequency, amplitude, and grit site) and the dependent variable(perceived texture). That is, the change of frequency and amplitude is directly related to perceived roughness or essential elements of human tactile sensitivity found in the preliminary experiment.