Selective Epitaxial Growth of Si and SiGe using Si-Ge-H-Cl System for Self-Aligned HBT Applications
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김상훈
(한국전자통신연구원 무선통신소자연구부 SiGe 소자팀)
박찬우 (한국전자통신연구원 무선통신소자연구부 SiGe 소자팀) 이승윤 (한국전자통신연구원 무선통신소자연구부 SiGe 소자팀) 심규환 (한국전자통신연구원 무선통신소자연구부 SiGe 소자팀) 강진영 (한국전자통신연구원 무선통신소자연구부 SiGe 소자팀) |
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