• 제목/요약/키워드: BioMEMS sensor

검색결과 37건 처리시간 0.025초

31 타입 트리모프 켄틸레버의 마이크로 발전 특성 연구 (Micro-power Properties of 31Type Triple-morph Cantilever for Energy Harvesting Device)

  • 김인성;주현규;정순종;김민수;송재성;전소현
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.220-221
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    • 2008
  • With recent advanced in portable electric devices, wireless sensor, MEMS and bio-Mechanics device, the new typed power supply, not conventional battery but self-powered energy source is needed. Particularly, the system that harvests from their environments are interests for use in self powered devices. For very low powered devices, environmental energy may be enough to use power source. Therefore, in other to made piezoelectric energy harvesting device. The made 31 type triple-morph cantilever was resulted from the conditions of 100k$\Omega$, 0.25g, 154Hz respectively. The thick film was prepared at the condition of $6.57V_{rms}$, and its power was $432.31{\mu}W$ and its thickness was $50{\mu}m$.

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압전 재료를 이용한 에너지 변환 시스템의 출력 파워 예측 및 평가 (Prediction and Evaluation of Power Output for Energy Scavengers using the Piezoelectric Material)

  • 오재응;김성현;심현진;이정윤
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2006년도 춘계학술대회논문집
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    • pp.827-830
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    • 2006
  • With recent advanced in portable electric devices, wireless sensor, MEMS and bio-Mechanics device, the new typed power supply, not conventional battery but self-powered energy source is needed. Particularly, the system that harvests from their environments are interests for use in self powered devices. For very low powered devices, environmental energy may be enough to use power source. In the generality of cases, these energy harvesting systems are used in the piezoelectric materials as mechanisms to convert mechanical vibration energy into electric energy. Through the piezoelectric materials, the ambient vibration energy could be used to prolong the power supply or in the ideal case provide endless energy f9r the devices. Therefore, the piezoelectric power harvesting cantilever beam is developed. Also, the output voltage and power are predicted in this study. We also discuss the developing system of the piezoelectric energy scavenger. An experimental verification of the model is also performed to ensure its accuracy.

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Easy Detection of Amyloid β-Protein Using Photo-Sensitive Field Effect

  • Kim, Kwan-Soo;Ju, Jong-Il;Song, Ki-Bong
    • 센서학회지
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    • 제21권5호
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    • pp.339-344
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    • 2012
  • This article describes a novel method for the detection of amyloid-${\beta}$($A{\beta}$) peptide that utilizes a photo-sensitive field-effect transistor (p-FET). According to a recent study, $A{\beta}$ protein has been known to play a central role in the pathogenesis of Alzheimer's disease (AD). Accordingly, we investigated the variation of photo current generated from p-FET with and without intracellular magnetic beads conjugated with $A{\beta}$ peptides, which are placed on the p-FET sensing areas. The decrease of photo current was observed due to the presence of the magnetic beads on the channel region. Moreover, a similar characteristic was shown when the Raw 264 cells take in magnetic beads treated with $A{\beta}$ peptide. This means that it is possible to simply detect a certain protein using magnetic beads and a p-FET device. Therefore, in this paper, we suggest that our method could detect tiny amounts of $A{\beta}$ for early diagnosis of AD using the p-FET devices.

A Temperature-Controllable Microelectrode and Its Application to Protein Immobilization

  • Lee, Dae-Sik;Choi, Hyoung-Gil;Chung, Kwang-Hyo;Lee, Bun-Yeoul;Pyo, Hyeon-Bong;Yoon, Hyun-C.
    • ETRI Journal
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    • 제29권5호
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    • pp.667-669
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    • 2007
  • This letter presents a smart integrated microfluidic device which can be applied to actively immobilize proteins on demand. The active component in the device is a temperature-controllable microelectrode array with a smart polymer film, poly(N-isopropylacrylamide) (PNIPAAm) which can be thermally switched between hydrophilic and hydrophobic states. It is integrated into a micro hot diaphragm having an integrated micro heater and temperature sensors on a 2-micrometer-thick silicon oxide/silicon nitride/silicon oxide (O/N/O) template. Only 36 mW is required to heat the large template area of 2 mm${\times}$16 mm to $40^{\circ}C$ within 1 second. To relay the stimulus-response activity to the microelectrode surface, the interface is modified with a smart polymer. For a model biomolecular affinity test, an anti-6-(2, 4-dinitrophenyl) aminohexanoic acid (DNP) antibody protein immobilization on the microelectrodes is demonstrated by fluorescence patterns.

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센서 응답의 Time-Profile 을 이용한 전자 후각 (E-Nose) 시스템의 Vapor 인식 성능 향상 (Improved Vapor Recognition in Electronic Nose (E-Nose) System by Using the Time-Profile of Sensor Array Response)

  • Yoon Seok, Yang
    • 대한의용생체공학회:의공학회지
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    • 제25권5호
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    • pp.329-334
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    • 2004
  • 전자후각(I-nose)시스템은, 전통적으로 음식물이나 플라스틱 제재의 생산에서 자동화된 품질관리 시스템에 사용되어 왔으나, 최근 호흡가스 등을 통해 당뇨, 호흡 및 소화기 질환과 감염 등을 검사하는 진단영역으로 그 응용분야를 확대하고 있다 이러한 질병과 연관이 없는 휘발성 유기화합물(volatile organic compound, YOC) 에 대하여 I-nose 의 센서어래이는 센서 물질과 휘발성 화합물 사이의 반응으로 인해 고유한 반응을 보이며, 신호의 profile 에 그 흔적을 남긴다. 본 연구에서는 센서어래이의 반응 신호를 profile 형태로 유지 및 분석함으로써 I-nose 의 가스시료 인식 성능을 보다 향상시킬 수 있는 방법을 제안하였다. 신호의 profile 에는 패턴인식을 위한 기존의 개별적인 특성(feature) 보다 많은 정보가 들어 있으며, 이를 가스의 구분에 효과적으로 이용하기 위해 디지털 영상처리에서 사용되는 패턴 매칭을 응용한time-profile방법을 새롭게 제안하였다. 제안된 방법의 검증을 위해, 반도체 공정에 의해 제작된 16채널의 초소형 가스센서 어래이를 사용해 측정된 8종류의 각기 다른 가스시료들에 대하여, 동종 및 이종 가스간의 매칭의 정도를 산출하였다. 기존의 방법과 비교한 결과 동종과 이종 가스간의 뚜렷한 구별이 가능하여 이를 패턴인식에 사용하면 E-nose의 가스 인식 성능을 향상시킬 것으로 전망된다.

PZT 캔틸레버의 길이와 면적에 따른 에너지 하베스팅 장치의 출력 특성 (Micro Power Properties of Harvesting Devices as a Function of PZT cantilever length and gross area)

  • 김인성;주현규;송재성;김민수;정순종;이대수
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2008년도 제39회 하계학술대회
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    • pp.1246-1247
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    • 2008
  • With recent advanced in portable electric devices, wireless sensor, MEMS and bio-Mechanics device, the new typed power supply, not conventional battery but self-powered energy source is needed. Particularly, the system that harvests from their environments are interests for use in self powered devices. For very low powered devices, environmental energy may be enough to use power source. Therefore, in other to made piezoelectric energy harvesting device, PMN-PZT thick film was formed by the screen printing method on the Ag/Pd coated alumina substrate. The layer was 8 layers and slurry where a-terpineol, ethycellulose, ferro B-75001 as Vehicle, PMN-PZT powder used are fabricated by ball mill. The output power quality was be also investigated by changing the load resistance, weight and frequency. The made piezoelectric energy harvesting device was resulted from the conditions of 33$k{\Omega}$, 0.25g, 197Hz respectively. The thick film was prepared at the condition of 2.75Vrms, and its power was 230${\mu} W$ and its thickness was 56${mu}m$. The piezoelectric energy harvesting device output voltage was increased, when the load weight, load resistance was increasing and resonance frequency was diminishing. The other side, resonance frequency was diminished, when the weight was increasing. And output power was continuously it changed by load resistance, output voltage, weight and resonance frequency.

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Fabrication, Estimation and Trypsin Digestion Experiment of the Thermally Isolated Micro Teactor for Bio-chemical Reaction

  • Sim, Tae-Seok;Kim, Dae-Weon;Kim, Eun-Mi;Joo, Hwang-Soo;Lee, Kook-Nyung;Kim, Byung-Gee;Kim, Yong-Hyup;Kim, Yong-Kweon
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제5권3호
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    • pp.149-158
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    • 2005
  • This paper describes design, fabrication, and application of the silicon based temperature controllable micro reactor. In order to achieve fast temperature variation and low energy consumption, reaction chamber of the micro reactor was thermally isolated by etching the highly conductive silicon around the reaction chamber. Compared with the model not having thermally isolated structure, the thermally isolated micro reactor showed enhanced thermal performances such as fast temperature variation and low energy consumption. The performance enhancements of the micro reactor due to etched holes were verified by thermal experiment and numerical analysis. Regarding to 42 percents reduction of the thermal mass achieved by the etched holes, approximately 4 times faster thermal variation and 5 times smaller energy consumption were acquired. The total size of the fabricated micro reactor was $37{\times}30{\times}1mm^{3}$. Microchannel and reaction chamber were formed on the silicon substrate. The openings of channel and chamber were covered by the glass substrate. The Pt electrodes for heater and sensor are fabricated on the backside of silicon substrate below the reaction chamber. The dimension of channel cross section was $200{\times}100{\mu}m^{2}$. The volume of reaction chamber was $4{\mu}l$. The temperature of the micro reactor was controlled and measured simultaneously with NI DAQ PCI-MIO-16E-l board and LabVIEW program. Finally, the fabricated micro reactor and the temperature control system were applied to the thermal denaturation and the trypsin digestion of protein. BSA(bovine serum albumin) was chosen for the test sample. It was successfully shown that BSA was successfully denatured at $75^{\circ}C$ for 1 min and digested by trypsin at $37^{\circ}C$ for 10 min.