• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.2001-2003
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• 1996

In this study, Allied Signal 211 SOG was used as a sacrificial material. After researching its etching properties, we adapted it to bottom-drive micrometers. SOG was superior etch rate and roughness to them of PSG or CVD-oxide and possible to low-temperature processing. Etching properties of SOG depended on the temperature and duration of its bake and cure. SOG used in the fabrication of bottom-drive micrometers showed us usefulness as a sacrificial layer and haying a least influence on machines on it in comparison with conventional sacrificial materials.

• Proceedings of the KIEE Conference
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• 1995.11a
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• pp.609-611
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• 1995

In this study, we experimented the properties of SOG film as sacrificials layers in surface micromachining and made $SiO_2$ films through spin, bake, cure process. When we culled SOG films once, SOG film thickness is 1000 $\sim$ 3000 ${\AA}$. Then we coaled 200-${\AA}$ SOG film on 9000 ${\AA}$-CVD oxide and then we fabricated test structure, cantilever and ring/beam structure. We estimated deformed structure by SEM. As the results, The deformation of the structure layer in the SOG-coated sacrificial layers is small compared with that or the structure layer on CVD oxide or PSG. In the future, we use multi coated SOG films, SOG film become adequate material as sacrificial layer.

• Journal of the Korean Vacuum Society
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• v.1 no.1
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• pp.198-205
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• 1992

Abstract-Planarieation technology, which is essential to VLSI, has been developed using non-etch back Spin- On-Glass (SOG). Process factors for 1.5 micron double metal technology are optimized by the statistical design of experiments. Optimum conditions are found to be a process with twice SOG coating, sufficiently long hot plate baking at 300t, and furnace curing for 40 minutes below 400$^{\circ}$C.

• Journal of the Korean Ceramic Society
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• v.43 no.4 s.287
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• pp.253-258
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• 2006

In the lamination process of multi-layer ceramic modules, the occurrence of delamination comes into repeatedly. To completely improve the lamination process of LTCC sheets, a binder film was introduced between the layers. The binder film did not originate the delamination until the thickness under $40{\mu}m$. After lamination, the thickness of the binder film was determined by the infilteraion of binder by the pressure, and after the bake-out, was dependent on the decomposition of binder resin. Any detectable defect was not observed in the multilayer structure with Ag inner electrodes.

• Proceedings of the SAREK Conference
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• 2008.06a
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• pp.1220-1224
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• 2008

Because of the high airtightness and insulation of the building, indoor environment has been largely polluted resulted from insufficient ventilation and occurrence of new air pollutant. These factors have made worse indoor air quality and caused symptoms of the SHS(Sick House Syndrome), MCS(Multi Chemical Sensitivity). The purpose of this study is to present the fundamental strategies for improving the Indoor Air Quality(IAQ) in newly-constructed apartment buildings. To investigate the concentration of indoor air pollutants such as Formaldehyde and VOCs, the field measurement were conducted.

• Proceedings of the KSR Conference
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• 2009.05a
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• pp.1643-1648
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• 2009

The braking system of train must posses the large baking effort in order to stop the train safety within the limited traveling distance. but, the excessive braking effort has been deteriorated the ride comfort due to high level of deceleration and jerk, and sometimes occurred the skid. because the applied braking force exceeds the allowable adhesive force. this skid causes not only to increase the a stopping distance but also to deteriorate the safety of train and damage the rall surface by wheel flat. In the present paper, braking force for disk brake of Tilting Train eXpress(TTX) was measured though on convention line test and the traction force was estimated by using the analytic model in skid condition. also, we have discussed the relationship between the bake force and traction force in starting condition.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2007.11a
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• pp.41-44
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• 2007

Recently, the strenuous industrial waste is scattered and one of the oyster also make the serious environmental contamination. The purpose of this study is investigating an utilization ability as calcium binder of the oyster with Hwang-To according to a rate(10%, 20%, 30%, 40%, 50%). This study grasp physical properties of the oyster powder, bake production of the paste, and conduct the flow test, stiff time test and strength test. According to baking condition, strength of $1000^{\circ}C$(120minutes, rate 30%) is higher than any other condition. The oyster powder from above $900^{\circ}C$ seem possibility as binder hereafter. It is thought that the continuous research will be necessary.

• Transactions on Electrical and Electronic Materials
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• v.3 no.3
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• pp.1-7
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• 2002

The developed patterns by direct writing of electron beam are measured by AFM, FESEM and optical profiler of WYKO NT3300. From different measurement methods, the measured linewidths of the patterns are shown a little bit wider than designed pattern size due to electrons scattering effect during direct writing of electron beam. The optimized conditions of these experiments are suggested and explained for the forming of structures below 0.1 ㎛ dimension size. Because of electron scattering effects from the different under layers such as Si, Si$_3$N$_4$ and aluminum, the developed pattern size is also influenced by the accelerated energy of electrons, dose, resist and soft and hard bake conditions in PMMA. The distributions of electron beam and calculations of backscattering coefficient are demonstrated by Monte Carlo simulation. From the measured results, the developed linewidth of PMMA/Al /silicon is shown a little bit wider than that of PMMA/Si$_3$N$_4$/silicon structure due to the backscattering effects.

• Transactions of the Korean Society of Automotive Engineers
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• v.14 no.5
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• pp.17-24
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• 2006

Anti-lock brake system(ABS) are designed to prevent wheel lock on all wheels of the vehicle by sensing wheel angular speed, processing the speed sensor signals in suitable digital electronic control circuits and comanding electrohydraulic actuators to control brake pressure. This study considers a control of ABS using wheel circumferential acceleration thresholds which avoids dangerous wheel locking due to excessive brake pressure during the vehicle braking and discusses the 3-channels, 3-sensors ABS system that employs "independent control" technique for the front wheels and "select low" technique for the rear wheels. The validities of the ABS such as vehicle stability, steerability and stopping distance during braking are assured through the vehicle tests on uniform asphalt straight roads.

• International Journal of Railway
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• v.8 no.1
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• pp.30-34
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• 2015

The Maglev(UTM-02) project is leading by Korea Institute of Machinery & Materials and financially supported from the ministry of Commerce, Industry and Energy. The early development stagy of Maglev(UTM-02) was adopted the general urban railway pneumatic brake system due to the Korea domestic industrial environment. Currently there is two commercial operation Light Railway Train(LRT) system in Korea. One is U-Line in Uijungbu, and the other is Everline in Yongin. Both LRT systems are adopting high performance light weight hydraulic brake system. But those design and manufacturing core technology of the brake system is came from a major brake system companies located from aboard. Currently various studies have been continued to increase practical application and to improve competitiveness on performance for each sub-system of Maglev. Also in case of brake system, developing competitive hydraulic brake system is required. In this study, we have introduced the development process and performance evaluation of the new hydraulic brake system of Maglev.