• ETRI Journal
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• v.16 no.1
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• pp.45-57
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• 1994

The effects of reactive ion etching (RIE) of $SiO_2$ layer in $CHF_3/C_2F_6$ on the underlying Si surface have been studied by X-ray photoelectron spectroscopy (XPS), secondary ion mass spectrometer, Rutherford backscattering spectroscopy, and high resolution transmission electron microscopy. We found that two distinguishable modified layers are formed by RIE : (i) a uniform residue surface layer of 4 nm thickness composed entirely of carbon, fluorine, oxygen, and hydrogen with 9 different kinds of chemical bonds and (ii) a contaminated silicon layer of about 50 nm thickness with carbon and fluorine atoms without any observable crystalline defects. To search the removal condition of the silicon surface residue, we monitored the changes of surface compositions for the etched silicon after various post treatments as rapid thermal anneal, $O_2$, $NF_3$, $SF_6$, and $Cl_2$ plasma treatments. XPS analysis revealed that $NF_3$ treatment is most effective. With 10 seconds exposure to $NF_3$ plasma, the fluorocarbon residue film decomposes. The remained fluorine completely disappears after the following wet cleaning.

• Journal of Sensor Science and Technology
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• v.5 no.5
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• pp.1-10
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• 1996

Solar cells made of the edge-defined film-fed growth Si are characterized using current-voltage, surface photovoltage, electron beam induced current, electron microprobe, scanning electron microscopy, and electron backscattering. The weak temperature dependence of the I-V curves in the EFG solar cells is due to a voltage variable shunt resistance giving higher diode ideality factors than the ideal one. The voltage variable shunt resistance is modeled by a modified recombination mechanism which includes carrier tunneling to distributed impurity energy states in the band gap within the space-charge region. The junction integrity and the substrate quality are characterized simultaneously by combining I-V and surface photovoltage (SPV) measurements. The diode ideality factors and the surface photovoltages characterize the junction integrity while the SPV diffusion lengths characterizes the substrate quality. Most of the measured samples show the voltage variable shunt resistance although how serious it is depends on the solar cell efficiency. The voltage variable shunt resistance is understood as one of the most important factors of the degradation of EFG solar cells.

• Analytical Science and Technology
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• v.7 no.4
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• pp.471-476
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• 1994

The capability of PIXE (Proton Induced X-ray Emission) method for the precision measurement of coating thickness has been tested by measuring several gold coated copper plates. Two different experimental methods are applied and compared. The results are compared with those by the weight measurement and proton RBS (Rutherford Backscattering Spectrometry). The advantage of the method is that it can be also used for the nondestructive thickness measurement of this layers on large-scaled samples or archeological samples which cannot be placed in a vacuum chamber.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.162-162
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• 2000

We have studied magnetic properties of Co/Pt multilayered films which have attracted great interest as high-density magneto-optical (MO) recording media due to their good MO properties. For this study, [Pt(45 )/Co(35 )]$\times$8 films were deposited with a Pt buffer layer of 60 on Si(100) substrate by alternating electron-beam evaporation in a high vacuum and were ion beam mixed by using 80keV Ar+ at 25$0^{\circ}C$. Especially, an external magnetic field was added to help changing magnetic property during ion beam mixing (IBM). The intermixing of Co and Pt layers after IBM was confirmed with Rutherford Backscattering Spectroscopy (RBS) and Transmission Electron Microscopy (TEM). The MO property of the film was measured with magneto-optical Kerr spectrometer and the change of magnetic easy axis in the film plane was observed from Ker loop data. This anomalous result might be correlated with the change of atomic structure due to the intermixing effect.

• Korean Journal of Materials Research
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• v.25 no.3
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• pp.149-154
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• 2015

We evaluated the developed microstructures and mechanical properties of a severely plastically deformed Ni-30Cr alloy. Normal rolling and differential speed rolling were used as deformation processes, and the thicknesses of the specimens were reduced to 68 % of the original thickness after holding at $700^{\circ}C$ for 10 min and annealing at $700^{\circ}C$ for 40 min to obtain a fully recrystallized microstructure. Electron backscattering diffraction was used to analyze the characteristic distribution of the grain boundaries on the deformed and annealed specimens. Differential speed rolling was more effective for refining grains in comparison with normal rolling. The grain size was refined from 33 mm in the initial material to 8.1 mm with normal rolling and 5.5 mm with differential speed rolling. The more refined grain in the differential-speed-rolled material directly resulted in increases in the yield and tensile strengths by 68 % and 9.0%, respectively, compared to normal rolling. We systematically explain the relationship between the grain refinement and mechanical properties through a plastically deformed Ni-30Cr alloy based on the development of a deformation texture. The results of our study show that the DSR process is very effective when used to enhance the mechanical properties of a material through grain refinement.

• Food Engineering Progress
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• v.14 no.1
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• pp.41-48
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• 2010

An optical method was introduced to investigate the dispersion stability of Saengshik beverages (SB) containing 3.7-11.7% Saengshik powder (SP). Time course changes in backscattering light flux (BSLF) from SB were monitored by a Turbiscan. BSLF in the bottom and top layers of SB increased by forming sediment and foam, respectively, while that in the middle layer decreased by clarifying. With SP levels, sedimentation in SB was retarded, but the height of total sedimentation layer was increased. A logarithmic model was developed to fit to the changes in BSLF with time, showing determination coefficients of 0.979-0.988. The levels of SP in SB influenced the migration speed of the clarification front as well as the numbers of separated layers; 2 layers in SB containing 3.7% SP, 3 in 5.7-9.7%, and 4 in 11.7%. Formation of clear layers started after 17-29 min and continued for 22-53 min. The clarification was retarded most in SB containing 7.7% SP, indicating the most stable SP level for the SB preparation.

• Korean Journal of Remote Sensing
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• v.21 no.3
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• pp.173-188
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• 2005

The present study aims to derive and compare narrow and broad bandwidths of ocean color sensor’s algorithms for the study of monitoring highly dynamic coastal oceanic environmental parameters using high-resolution imagery acquired from Multi-spectral Camera (MSC) on KOMPSAT-2. These algorithms are derived based on a large data set of remote sensing reflectances ($R_{rs}$) generated by using numerical model that relates $b_b/(a + b_b)$ to $R_{rs}$ as functions of inherent optical properties, such as absorption and backscattering coefficients of six water components including water, phytoplankton (chl), dissolved organic matter (DOM), suspended sediment (SS) concentration, heterotropic organism (he) and an unknown component, possibly represented by bubbles or other particulates unrelated to the first five components. The modeled $R_{rs}$ spectra appear to be consistent with in-situ spectra collected from Korean waters. As Kompsat-2 MSC has similar spectral characteristics with Landsat-5 Thematic Mapper (TM), the model generated $R_{rs}$ values at 2 ㎚ interval are converted to the equivalent remote sensing reflectances at MSC and TM bands. The empirical relationships between the spectral ratios of modeled $R_{rs}$ and chlorophyll concentrations are established in order to derive algorithms for both TM and MSC. Similarly, algorithms are obtained by relating a single band reflectance (band 2) to the suspended sediment concentrations. These algorithms derived by taking into account the narrow and broad spectral bandwidths are compared and assessed. Findings suggest that there was less difference between the broad and narrow band relationships, and the determination coefficient $(r^2)$ for log-transformed data [ N = 500] was interestingly found to be $(r^2)$ = 0.90 for both TM and MSC. Similarly, the determination coefficient for log-transformed data [ N = 500] was 0.93 and 0.92 for TM and MSC respectively. The algorithms presented here are expected to make significant contribution to the enhanced understanding of coastal oceanic environmental parameters using Multi-spectral Camera.

• Korean Journal of Remote Sensing
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• v.25 no.4
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• pp.375-381
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• 2009

In this paper, synthetic aperture radar (SAR) clutter images are simulated based on the extensive analyses for radar backscatter characteristics of various earth surfaces, and the simulated images are compared with measured SAR images. At first, the surface parameters including soil moisture content and surface roughness parameters and other parameters for vegetation canopies are measured for various surfaces. The backscattering coefficients for the surfaces are computed using theoretical and empirical models for surface scattering and the radiative transfer for vegetation-canopy scattering. Then, the digital elevation map (DEM) and land cover map (LCM) are used for the SAR image generation. The SAR impulse response (correlation function) is also employed to simulated reliable SAR images. Finally, the appropriate speckle and texture parameters for various earth surfaces are used for generating the SAR clutter images.

• The Journal of Engineering Geology
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• v.32 no.3
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• pp.363-376
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• 2022

An area under construction for a living facility collapsed around 12:48 KST on 13 January 2021 in Sa-dong, Ansan-si, Gyeonggi-do. There were no casualties due to the rapid evacuation measure, but part of the temporary retaining facility collapsed, and several cracks occurred in the adjacent road on the south side. This study used the potential of synthetic aperture radar (SAR) satellite for surface property changes that lies in backscattering characteristic to map the collapsed structure. The interferometric SAR technique can make a direct measurement of the decorrelation among different acquisition dates by integrating both amplitude and phase information. The damage proxy map (DPM) technique has been employed using four high-resolution Constellation of Small Satellites for Mediterranean basin Observation (COSMO-SkyMed) data spanning from 2020 to 2021 during ascending observation to analyze the collapse of the construction. DPM relies on the difference of pre- and co-event interferometric coherences to depict anomalous changes that indicate collapsed structure in the study area. The DPMs were displayed in a color scale that indicates an increasingly more significant ground surface change in the area covered by the pixels, depicting the collapsed structure. Therefore, the DPM technique with SAR data can be used for damage assessment with accurate and comprehensive detection after an event. In addition, we classify the amplitude information using support vector machine (SVM) and maximum likelihood classification algorithms. An investigation committee was formed to determine the cause of the collapse of the retaining wall and to suggest technical and institutional measures and alternatives to prevent similar incidents from reoccurring. The report from the committee revealed that the incident was caused by a combination of factors that were not carried out properly.

• Korean Journal of Remote Sensing
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• v.38 no.5_2
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• pp.737-746
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• 2022

Utilizing weather independent SAR images along with machine learning based object detector is effective in robust vessel monitoring. While conventional SAR images often applied amplitude data from Single Look Complex, exploitation of polarimetric parameters acquired from multiple polarimetric SAR images was yet to be implemented to vessel detection utilizing machine learning. Hence, this study used four polarimetric parameters (H, p₁, DoP, DPRVI) retrieved from eigen-decomposition and two backscattering coefficients (γ₀, _VV, γ₀, _VH) from radiometric calibration; six bands in total were respectively exploited from 52 Sentinel-1 SAR images, accompanied by vessel training data extracted from AIS information which corresponds to acquisition time span of the SAR image. Evaluating different cases of combination, the use of polarimetric indexes along with amplitude values derived enhanced vessel detection performances than that of utilizing amplitude values exclusively.