• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.523-523
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• 2012

As the wafer geometric requirements continuously complicated and minutes in tens of nanometers, the expectation of real-time add-on sensors for in-situ plasma process monitoring is rapidly increasing. Various industry applications, utilizing plasma impedance monitor (PIM) and optical emission spectroscopy (OES), on etch end point detection, etch chemistry investigation, health monitoring, fault detection and classification, and advanced process control are good examples. However, process monitoring in semiconductor manufacturing industry requires non-invasiveness. The hypothesis behind the optical monitoring of plasma induced ion current is for the monitoring of plasma induced charging damage in non-invasive optical way. In plasma dielectric via etching, the bombardment of reactive ions on exposed conductor patterns may induce electrical current. Induced electrical charge can further flow down to device level, and accumulated charges in the consecutive plasma processes during back-end metallization can create plasma induced charging damage to shift the threshold voltage of device. As a preliminary research for the hypothesis, we performed two phases experiment to measure the plasma induced current in etch environmental condition. We fabricated electrical test circuits to convert induced current to flickering frequency of LED output, and the flickering frequency was measured by high speed optical plasma monitoring system (OPMS) in 10 kHz. Current-frequency calibration was done in offline by applying stepwise current increase while LED flickering was measured. Once the performance of the test circuits was evaluated, a metal pad for collecting ion bombardment during plasma etch condition was placed inside etch chamber, and the LED output frequency was measured in real-time. It was successful to acquire high speed optical emission data acquisition in 10 kHz. Offline measurement with the test circuitry was satisfactory, and we are continuously investigating the potential of real-time in-situ plasma induce current measurement via OPMS.

• 한국자동차공학회논문집
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• 제13권2호
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• pp.52-57
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• 2005

The increasing automobiles continue to cause air-pollution problem s worse than ever. In fact, many automobile research are involved in how to reduce exhaust emissions effectively specially in $NO_X$ and PM to comply with stringent emission standards, Euro V. This research emphasized on the development of continuous regeneration DPF technology which was one of promising removing technology of particulate matters because of its comparability and high applicability. In addition, this research discussed on some design points of view through correlation study by com paring the experimental data with computational results by the introduction of commercial codes such as CFD-ACE+ and KIVA-3V. The numerical simulation on the performance of continuous regeneration DPF apparatus and corresponding emission characteristics has been predicted well enough and verified with experimental results. The pressure and average temperatures are decreased to about 2.6% and 1.4% respectively under a full engine load condition mainly due to back pressures raised by diesel particulate filter. Pressure, temperature and heat releasing rates tend to decrease specially at higher engine load, but they are not affected at lower engine load regions.

• 센서학회지
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• 제13권3호
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• pp.218-223
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• 2004

Thin film gas sensor based on tin oxide was fabricated and its characteristics were examined. Target gas is acetonitrile ($CH_{3}CN$) that is simulant gas of blood agent gas. Sensing materials are $SnO_{2}$, $SnO_{2}$/Pt, and (Sn/Pt)oxidation with thickness from $1000{\AA}$ to $3000{\AA}$. Sensor was consisted of sensing electrode with interdigit (IDT) type in front side and a heater in back side. Its dimension was $7{\times}10{\times}0.6mm^{3}$. Fabricated sensor was measured as flow type and monitored real time using PC. The optimal sensing material for $CH_{3}CN$ was {Sn($3000{\AA}$)/Pt($30{\AA}$)}oxidation and its sensitivity and operating temperature were 30%, $300^{\circ}C$ in $CH_{3}CN$ 3 ppm.

• 한국환경복원기술학회지
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• 제10권6호
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• pp.70-80
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• 2007

This study was surveyed from January to september, 2007 in order to evaluate the function of coastal wetland as a ecological axis in korea peninsula. Assessment was done by RAM (Rapid Assessment Method). RAM is consisted of total 8 contents and divided into high, moderate, low. The preservation grade of RAM is divided into 4 grades; absolute preservation, preservation, improvement and improvement or restoration. Throughout survey on total 14 wetlands of marine, estuary wetland and back marsh which are distributed in west coast in chung-nam province, their function was assessed. As result, total all the 14 wetlands were judged as preservation grade by assessment of 8 functional contents. The function of wetlands assessed as preservation grade showed high in water quality protection and improvement. Also, showed high in vegetation diversity, wildlife habitat and aesthetic recreation. Meanwhile, showed low in ground water recharge, Shoreline/Stream Bank Protection, Flood/Stormwater storage and Flood flow alteration. Of wetlands evaluated as preservation grade, Dae-ho, Sinduri, Bu-Nam lake, Sowhang dune and keum river estuary were assessed as absolute preservative area owing to habitation of international protection species and endangered species. These wetlands are essential to be managed continuously as a area having high ecological value. Farther, this wetlands will be done as a axis of ecological network related to land ecosystem.

• 한국전기전자재료학회논문지
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• 제16권12S호
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• pp.1217-1223
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• 2003

Nerve gas sensor based on tin oxide was fabricated and its characteristics were examined. Target gas is dimethyl methyl phosphonate(C$_3$ $H_{9}$ $O_3$P, DMMP) that is simulant gas of nerve gas. Sensing materials were Sn $O_2$ added a-Al$_2$ $O_3$ with 0∼20wt.% and were physically mixed each material. They were deposited by screen printing method on alumina substrate. The sensor device was consisted of sensing electrode with interdigit(IDT) type in front and a heater in back side. Total size of device was 7${\times}$10${\times}$0.6㎣. Crystallite size & phase identification and morphology of fabricated Sn $O_2$ powders were analyzed by X-ray diffraction and by a scanning electron microscope, respectively. Fabricated sensor was measured as flow type and resistance change of sensing material was monitored as real time using LabVIEW program. The best sensitivity was 75% at adding 4wt.% $\alpha$-Al$_2$ $O_3$, operating temperature 30$0^{\circ}C$ to DMMP 0.5ppm. Response and recovery time were about 1 and 3min., respectively. Repetition measurement was very good with $\pm$3％ in full scale.TEX>$\pm$3％ in full scale.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 제37회 하계학술대회 논문집 B
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• pp.1203-1204
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• 2006

Recently, utility network is getting more and more complicated and huge. In addition to, demands of power conversion devices which have non-linear switching devices are getting more and more increased. Consequently, according to the non-linear power semiconductor devices, current harmonics are unavoidable. Those current harmonics flow back to utility network and become one of the reasons which make the voltage distortion. On the other hands, voltage sag from sudden increasing loads is also one of the terrible problems inside of utility network. In order to compensate the current harmonics and voltage sag problem, AF(Active Filter) systems could be a good solution method and SMES(Superconducting Magnetic Energy Storage) system is a very good promising source due to the high response time of charge and discharge. Therefore, the combined system of AF and SMES is a wonderful device to compensate both harmonics current and voltage sag. However, unfortunately SMES needs a superconducting magnetic coil. Because of the introduction of superconducting magnetic coil, quench problem caused by unexpected reasons is always existed. In case of discharge operation, quench is a significantly harmful factor according as it decreases the energy capacity of SMES. Therefore, this paper presents a decision method of the specification of the AF-SMES system considering internal fault condition. Especially, authors analyzed the change of the original energy capacity of SMES regarding to the size of resistance caused by quench of superconducting magnetic coil. Finally, based on this simulation, authors manufactured actual Active Filter System using DSP.

• 한국시뮬레이션학회논문지
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• 제17권4호
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• pp.133-142
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• 2008

생산시스템의 유연성과 효율성을 동시에 만족시키기 위한 자재취급 시스템으로써 AGV 시스템을 사용한다. AGV 시스템은 전체 생산시스템의 성능을 결정하는 중요 요인으로써 최적 설계안의 도출이 필수적이다. 일반적으로 상용 시뮬레이션 소프트웨어를 이용하여 AGV 시스템 설계 검증이 이루어지고 있지만, 이러한 검증 과정을 신속히 처리하기 위한 일련의 절차에 대한 개발이 필요하다. 본 연구에서는 근사최적화된 일방향 흐름 경로와 다양한 운영 파라미터를 고려할 수 있는 일방향 AGV 시스템 시뮬레이터의 아키텍처를 제시 및 개발 하였다. 개발된 AGV 시스템 시뮬레이터는 Java를 기반으로 개발되었으며, 타부탐색을 이용한 근사최적 일방향 네트워크 설계를 지원하고, 사용자가 쉽게AGV 시스템의 설계 검증 및 대안분석에 사용할 수 있도록 개발되었다. 사용자의 시스템 설계 운영 정보는 입력창을 통해 입력되며 이 정보는 레이아웃 생성기, AGV 운영계획 생성기, 통합 AGVS 생성기로 구성된 시뮬레이션 엔진에서 자동으로 AGV 시스템을 모델링 및 시뮬레이션을 하여 빠른 시간 안에 시뮬레이터 사용자에게 피드백을 제공한다.

• 멤브레인
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• 제27권1호
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• pp.77-83
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• 2017

무기실리카 입자로 구성된 고탁도 원수를 처리하는 침지식 정밀여과 운전에서 휴민산과 2가 양이온의 존재유무에 따라 시간에 따른 파울링 저항을 관찰하였다. 공기폭기로 인한 무기실리카 입자의 파울링 감소효과는 휴민산과 칼슘이 혼합으로 존재 시 감소하였다. 파울링층의 전자현미경 관찰결과 칼슘의 존재 시 휴민산의 무기실리카 입자 표면흡착이 관찰되었다. 이는 멤브레인 표면에 조밀한 파울링층을 형성시켜 공기폭기 효과를 감소시킨 것으로 판단된다. 용액의 조성에 따른 고탁도 원수의 탁도 제거율에는 큰 변화가 없었으나 공기폭기량에 따라 칼슘과 무기실리카 입자의 혼합 존재 시 유기물질의 제거율은 80% 이상으로 증가하였다. 이는 공기폭기 하에 무기실리카 입자 표면에 흡착된 일부 휴민산들이 멤브레인 표면으로부터 함께 역수송 되어 유기물질 제거율을 증가시킨 것으로 사료된다.

• 한국농촌건축학회논문집
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• 제22권2호
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• pp.1-8
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• 2020

This study is intended to derive the adaptive reuse techniques through the history and aspects of new construction, extension, repair, and other works, limited to the deep and narrow lots facing Seongan-gil and Nammun-gil in Nammun-ro 2 ga of Cheongju, the historic urban area. The results are as follows. 1) In the case of newly built reinforced concrete buildings, the central part of the top floor of the residence or all floors are opened to the open space(void) to facilitate lighting and ventilation. This is developed as a convection phenomenon due to the temperature difference from the slits between buildings, which affects the entire air flow of the block. 2) The buildings of extension and repair are composed of two-story masonry or steel frame, both the front store facing the road and the house on the back, but it looks like one because it is in contact with each other. If only a small gap between the front and rear buildings is restored to an external space or a space equipped with sun light, a small breath can be provided in lighting and ventilation. 3) The existing two-story wooden stores and houses have lost their external space due to repairs. With minimal intervention to restore the small courtyard, slits, and space under the eaves, it will not only improve lighting and ventilation, but also create a unique appearance as a segment of the elongated store.

• 한국군사과학기술학회지
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• 제6권3호
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• pp.54-61
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• 2003

$SnO_2$ gas sensor for the detection DMMP, simulant of nerve gas was fabricated and its characteristics were examined. Sensing materials were $SnO_2$ added by TEX>$\alpha$-$Al_{2}O_{3}$ with 0∼20wt.% and $In_{2}O_{3}$ with 0∼3wt.% and were physically mixed each material. They were deposited by screen printing method on alumina substrate. The sensor was consisted of sensing electrode with interdigit(IDT) type in front and a heater in back side. Its dimension was 7$\times$10$\times$0.6$\textrm{mm}^2$. Crystallite size 8t phase identification, specific surface area and morphology of fabricated $SnO_2$ powders were analyzed by X-ray diffraction(XRD), surface area analyzer(BET) and by a scanning electron microscope(SEM), respectively. Sensor was measured as flow type and sensor resistance change was monitored as real time using LabVIEW program. The best sensitivities were 75% at adding 4wt.% TEX>$\alpha$-$Al_{2}O_{3}$, operating temperature $300^{\circ}C$ and 87% at adding 2wt.% $In_{2}O_{3}$, operating temperature $350^{\circ}C$ to DMMP 0.5ppm. Response and recovery times were about 1 and 3 min., respectively. Repetition measurement was very good with $\pm$3% in full scale. As a result, operating temperature was lower TEX>$\alpha$-$Al_{2}O_{3}$ than $In_{2}O_{3}$, but sensitivity was higher $In_{2}O_{3}$ than $\alpha$-$Al_{2}O_{3}$.