• KIEE International Transactions on Electrophysics and Applications
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• v.5C no.4
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• pp.176-179
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• 2005

The increasing demand for high density packaging technologies and the evolution to mixed digital and analogue devices has been the con-set of increasing research in thin film multi-layer technologies such as the passive components integration technology. In this paper, Cu and TaO thin film with RF sputtering was deposited for spiral inductor and MOM capacitor on the $SiO_2$/Si(100) substrate. MOM capacitor and spiral inductor were fabricated for L-C band pass filter by sputtering and lift-off. We are analyzed and designed thin films L-C passive components for band pass filter at 900 MHz and 1.8 GHz, important devices for mobile communication system. Based on the high-Q values of passive components, MOM capacitor and spiral inductors for L-C band pass filter, a low insertion loss of L-C passive components can be realized with a minimized chip area. The insertion loss was 3 dB for a 1.8 GHz filter, and 5 dB for a 900 MHz filter. This paper also discusses a analysis and practical design to thin-film L-C band pass filter.

• Journal of the Korean Ceramic Society
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• v.38 no.2
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• pp.158-165
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• 2001

고체산화물 연료전지용 밀봉재로서 전지 구성원과 열팽창계수가 유사하고 비젖음성 특성을 가지며 전지 작동온도에서 화학적 안정성을 갖는 밀봉유리를 개발하고자, BaO-Al$_2$O$_3$-La$_2$O$_3$-Ba$_2$O$_3$-SiO$_2$계 유리를 제조하여 조성 변화에 따른 열적 특성 변화와 접합후의 젖음성 및 반응성 등을 조사하였다. 유리망목 형성산화물인 B$_2$O$_3$와 SiO$_2$의 함량비 및 BaO의 망목 형성산화물(B$_2$O$_3$+SiO$_2$)에 대한 함량비 변화에 따른 유리의 열적 특성을 조사한 결과, 0.33~0.71의 B$_2$O$_3$/SiO$_2$함량비하에서 BaO/(B$_2$O$_3$+SiO$_2$)가 0.70일 때 유리의 열팽창계수는 106~111$\times$$10^{-7}$/K 이었으며 이때 연료전지 구성원인 YSZ(yttria stabilized zirconia)와의 열팽창 불일치(thermal expansion mismatch)가 가장 작았다. 또한 이러한 조성의 유리로부터 분말성형체를 제조하여 YSZ에 접합을 시도한 결과, 우수한 접합성 및 비젖음성을 확인할 수 있었으며, 800~8$50^{\circ}C$의 전지 작동온도에서 100시간까지 유지시에도 YSZ와의 계면반응이 일어나지 않음을 관찰할 수 있었다.

• Applied Microscopy
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• v.21 no.2
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• pp.57-66
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• 1991

The main purpose of this paper was to investigate the change of rapidly solidified microstructures and dispersoid behavior according to heat-treatment in the Al-Fe-V-Si-(Mn) alloys. It was found that (111) preferred orientation identified by X-ray diffraction and fine subgrain/large grain were observed in the rapidly solidified Al-Fe-V-Si-(Mn) alloys. Cell boundary of the zone A was composed of the microcrystalline, whereas that of the zone B was amorphous. Decomposition of the Al-Fe-V-Si-(Mn) alloys occurred at about $300^{\circ}C$. These alloys exhibited excellent thermal stability at the elevated temperature. Microstructure of the zone B was more stable than that of the zone A. The spherical dispersoid and 5-fold symmetry phase was also more thermally stable than the amorphous structure of cell boundary.

• Journal of the Korean Chemical Society
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• v.39 no.9
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• pp.692-697
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• 1995

The chemical compositions and possible structure for the complex of B15C5 with Nd(Ⅲ) have been determined by NMR spectrophotometry in acetone-d6. On the stepwise additions of Nd(Ⅲ) to B15C5 solution of constant concentration, all the resonances shifted to downfield and the mole ratio of B15C5 to Nd(Ⅲ) was found to be 1 : 1. From the line broadening of proton peaks of NMR spectra, it was found that oxygen atoms in B15C5 interact with Nd(Ⅲ) ion. And in IR spectra of Nd(Ⅲ)-B15C5 complex, the band of asymmetric C-C-O stretching vibration shifted to a lower frequency region upon complexation. We have proposed the possible structure of the Nd(Ⅲ)-B15C5 coordinated with the five ether oxygen atoms and with the three bidentate nitrato groups.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1405-1407
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• 2001

It was studied to prepare high temperature heating elements using molybdenum disilicide($MoSi_2$). Molybdenum disilicide is widely used as material for manufacturing high temperature heating elements. $MoSi_2$ heating elements could be used at 1700-1900$^{\circ}C$. However, it is relatively expensive, and its demand depends on import. $MoSi_2$ powders was mixed with 4-5wt% of montmorillonites type bentonite as plasticizer and a small amount of $Si_3N_4$, $ThO_2$, and B as additives to prepare specimen of heating elements. Then, it was extruded, dried, sintered and machined followed by heating test. Effects of sintering conditions and amount of additives were investigated, It was sintered effectively at 1,350$^{\circ}C$ for five hours. Electrical resistivity was decreased with increasing of sintering temperature and time, and related with apparent density of the specimens. It was linealy decreased with increasing of sintered density. The heating elements thus prepared was stable at 1700$^{\circ}C$ and the physical properties such as specific electrical resistivity, hardness, apparent density, thermal expansion coefficient, and bending strength were almost identical with those of commercial heating elements.

• Journal of Surface Science and Engineering
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• v.38 no.3
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• pp.106-111
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• 2005

Ternary Ti-B-C coatings were synthesized on WC-Co and Si wafers substrates by a PECVD technique using a gaseous mixture of $TiCl_4,\;BCl_3,\;CH_4,\;Ar,\;and\; H_2$. The effects of deposition variables such as substrate temperature, gas ratio, $R_x=[BCl_3/(CH_4+BCl_3)]$ on the microstructure and mechanical properties of Ti-B-C coatings were investigated. From our instrumental analyses, the synthesized Ti-B-C coatings was confirmed to be composites consisting of nanocrystallites TiC, quasi-amorphous TiB2, and amorphous carbon at low boron content, on the contrary, nanocrystallites $TiB_2$, quasi-amorphous TiC, and amorphous carbon at relatively high boron content. The microhardness of the Ti-B-C coatings increased from $\~23 GPa$ of TiC to $\~38 GPa$ of $Ti_{0.33}B_{0.55}C_{0.11}$ coatings with increasing the boron content. The $Ti_{0.33}B_{0.55}C_{0.11}$ coatings showed lower average friction coefficient of 0.45, in addition, it showed relatively better wear behavior compared to other binary coatings of $TiB_2$ and TiC. The microstruture and microhardness value of Ti-B-C coatings were largely depend on the deposition temperature.

• Journal of the Korean Society for Heat Treatment
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• v.11 no.2
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• pp.140-149
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• 1998

The graphitization is affected by the addition of small amount of the elements, such as Si, Al, Ni, B, Cr and Mn etc. Boron is well known as the most effective element for the graphitization of cementite in high carbon steels. But a study on quantitative analysis of B effect on the graphitization is few reported. Therefore the effect of boron addition in Fe-0.65%C-1.0%Si-0.5%Mn steels on the graphitization is investigated quantitatively using hardness tester, optical microscope and scanning electron microscope, neutron induced microscopic radiography. The graphitization in high carbon steels is promoted with 0.003~0.005%B addition. But the graphitization in steels which has no boron takes long holding time at $680{\sim}720^{\circ}C$. The hardness of quenched steel containing 0.003%B is higher than that of 0.005%B added steel due to complete dissolution of fine graphites into the austenite. The 0.003%B added high carbon steel graphitized at $680^{\circ}C$ for 25hr is useful steel for the agricultural implements and automobile parts which needed a good formability and high hardness.

• Applied Microscopy
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• v.47 no.1
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• pp.50-54
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• 2017

The microstructure, the crystallization behavior, and magnetic properties of FeSi-based soft magnetic alloys (FINEMET) were investigated using transmission electron microscopy, X-ray diffraction, and coercive force measurements. The amorphous $Fe_{73.28}Si_{13.43}B_{8.72}Cu_{0.94}Nb_{3.63}$ alloys particles, prepared in $10^{-4}$ torr by gas atomization process, were heat treated at $530^{\circ}C$, $600^{\circ}C$, and $670^{\circ}C$ for 1 hour in a vacuum of $10^{-2}$ torr. Nanocrystalline Fe precipitation was first formed followed by the grain growth. Phase formation and crystallite sizes was compared linked to its magnetic behavior, which showed that excellent soft magnetic property can directly be correlated with its microstructure.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1470-1472
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• 2002

3원계 51wt%Ni-4lwt%Cr-8wt%Si 합금 타겟을 가지고 DC/RF 마그네트론 스퍼터를 이용하여 박막저항을 제조하였고, 낮은 저항온도계수(TCR)를 가지는 박막을 만들기 위해 제조공정의 변화에 따른 박막의 미세구조와 전기적인 특성을 조사하였다. 스퍼터링 제조공정 변수로써 DC/RF Power, 반응압력, 기판온도를 변화시켰고, 제조된 박막은 공기중에서 $400[^{\circ}C]$까지 열처리 하였다. 반응압력을 감소시킴에 따라 TCR값은 감소하였고, 기판온도 및 열처리 온도의 증가에 따라 TCR값도 증가하였다. 또한, 비저항은 DC Power에서 $172[{\mu}{\Omega}cm]$, RF인 경우에는 $209[{\mu}{\Omega}cm]$을 나타내었고, 각각 +52, $-25[ppm/^{\circ}C]$의 TCR값을 나타냈다. 이와 같은 결과로부터 제조공정을 변화시킴에 따라 면저항 및 저항온도계수의 제어가 가능함을 알 수 있었다.

• Journal of the Korean Vacuum Society
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• v.18 no.1
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• pp.9-14
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• 2009

We calculated tetragonal-$HfO_2$/Si superstructures using density functional theory. When a and b-axes of cubic-$HfO_2$ were increased to be matched with those of Si for epitaxy contact, c-axis was decreased by 2%. Eight models of interface layers were produced by choosing different terminating layers of tetragonal-$HfO_2$ and Si substrate at the interface. It was found that tetragonal-$HfO_2$ $(004)_{1/4}$/Si $(004)_{3/4}$ superstructure was the most favorable and tetragonal-$HfO_2$ (004)$_{1/4}$/Si (002) superstructure was the most unfavorable. In tetragonal-$HfO_2$ $(004)_{1/4}$/Si (002) superstructure, there were two oxygen vacancies in tetragonal-$HfO_2$ as two oxygen atoms were moved to Si substrate located at the interface.