• 제어로봇시스템학회:학술대회논문집
• /
• 1991.10b
• /
• pp.1961-1965
• /
• 1991

This paper deals with an automatic and precision alignment technique for proximity printing in x-ray lithography, using two pairs of moire gratings, with moire signals from each pair being 180.deg. out of phase with each other. We constructed an automatic and precision alignment experimental system which could measure both transmitted moire signals and reflected moire signals at the same time. The automatic alignment was achieved using transmitted moire signals and also reflected moire signals as a control signal for a stage driver. The alignment position of the system was monitored not only by a control signal but also by a non-control signal. The effect of transmitted and reflected moire signals upon alignment accuracy was discussed. We concluded that the technique using diffracted moire signals is a viable automatic and precision alignment technique.

• Journal of the Korean Society for Precision Engineering
• /
• v.23 no.5 s.182
• /
• pp.103-110
• /
• 2006

Automatic optical alignment modules are a key technology in optical communication system. However, the optic component assembly depends highly on manual or semi-automated alignment process. In this paper, a novel alignment mechanism with minimum degree-of-freedom has been designed and theoretical models are derived from geometric optical characteristics on collimators, optical filters and optical ray alignment. The automatic alignment control algorithm has been newly developed based on the mechanism and models, and then we make fast, precise and reliable alignment through the algorithm. The reliability of developed modules has been verified with various simulations and performance evaluations.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.17 no.3
• /
• pp.134-140
• /
• 2018

This paper describes the design and fabrication of an automatic alignment and loading system for workpieces. To move a workpiece to a chucking position of a machine tool using a gantry robot, an automatic aligning device is required to load the workpiece before machining and automatically align them. The automatic alignment system was conceptually designed, and the structural analysis was performed for the main parts such as the top plate, center support, front and back support, and support shaft. Based on the structural analysis results, the size of these structures was determined. The automatic alignment system was manufactured, and the vertical movement characteristics of the workpiece up-and-down movement device and the rotation characteristics of the workpiece rotation device were experimentally examined. The result has confirmed that they operate normally.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.1688-1692
• /
• 2003

The automatic Landing system is used for the automatic functions of automatic transfer crane in the automated container terminal. It confirms and adjusts the alignment and pose between spreader and container and accomplishes the automatic loading/unloading job of containers in yard. Specially, it is required in the automated container terminal and is well adapted under the coarse external environments. This system used the laser sensors to recognize the alignment between spreader and container. In this paper the algorithm of recognition of the alignment and pose is presented and the result of its simulation is shown.

• Journal of KSNVE
• /
• v.8 no.5
• /
• pp.922-928
• /
• 1998

This paper presents the automatic alignment measuring system for improving the accuracy and working time of alignment of large vertical hydraulic pump turbine. It is general practice that rotating shaft should run within acceptable vibration limit. In order to obtain better run-out data of multi-stage rotor, careful and accurate alignment approach must be established. Generally, present alignment procedure are required several iterative works and so many manpower. Therefore, the new system has been developed using a vector calculation algorithm, laser sensor and data acquisition devices. As a result of appling to actual machines, it is confirmed that manpower is saved up to an average 90%.

• Journal of the Semiconductor & Display Technology
• /
• v.6 no.1 s.18
• /
• pp.43-48
• /
• 2007

For exposure systems, very accurate alignment between the mask and the substrate is indispensable. In this paper, an automatic alignment system using machine vision for exposure systems is described. Machine vision algorithms are described in detail including extraction of an alignment mark's center position and camera calibration. Methods for extracting parameters for alignment are also presented with some compensation techniques to reduce alignment time. Our alignment system was implemented with a vision system and motion control stages. The performance of the alignment system has been extensively tested with satisfactory results. The performance evaluation shows alignment accuracy of lum within total alignment time of about $2{\sim}3$ seconds including stage moving time.

• Journal of the Korean Society for Precision Engineering
• /
• v.20 no.12
• /
• pp.105-114
• /
• 2003

In this study, a dicing machine with vision system was built and an algorithm for automatic alignment was developed for dual camera system. The system had a macro and a micro inspection tool. The algorithm was formulated from geometric relations. When a wafer was put on the cutting stage within certain range, it was inspected by vision system and compared with a standard pattern. The difference between the patterns was analyzed and evaluated. Then, the stage was moved by x, y, $\theta$ axes to compensate these differences. The amount of compensation was calculated from the result of the vision inspection through the automatic alignment algorithm. The stage was moved to the compensated position and was inspected by vision for checking its result again. Accuracy and validity of the algorithm was discussed from these data.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.05a
• /
• pp.483-486
• /
• 2002

Toggle bolt is mechanical device constructed with toggle spring wing toggle and machine screw, and defined as an expansive bolt consisting of a nut with flanged wings which are pressed to the bolt and, after insertion in a thin or hollow wall, spread open through spring pressure, thus anchoring it to the wall. And spring wing toggle is aligned with two wings, spring and nut manually in domestic manufacturing line. Then it is regarded as major problem for exports increasement to make cost down in the view of total manufacturing process. Accordingly in this study, high speed type automatic alignment mechanism is guided for spring wing bolt, and exclusive alignment dies and some special additional units are designed and manufactured.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.10a
• /
• pp.451-454
• /
• 2002

The fiber optic communication technology is considered as a key solution for the future communication. However the assembly of the fiber optic components highly depends on manual or semi-automated alignment process. And the light search algorithm is recognized an important factor to reduce the manufacturing process time. Therefore this paper investigates optimal search algorithm for the automatic alignment of fiber optic components. The experiments show the effectiveness of Hill Climbing Search, Adaptive Hill Climbing Search and Steepest Search algorithms, in a view of process time.

• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.4
• /
• pp.194-201
• /
• 2004

Optical fibers are indispensable fer optical communication systems that transmit large volumes of data at high speed. But the aligning technology under the sub-micron accuracy is required for the precise axis adjustment and connection. For the purpose of precise alignment of the optical arrays, in this research, we have developed the 12-axis(with 8 automated axis and 4 manual axis) automatic optical fiber alignment system including the image processing-based searching system, the automatic loading system using the robot and the suction toot and the automatic UV bonding system. In order to obtain the sub-micron alignment accuracy, two 4-axis PC-based motion controllers and the two 50nm resolution 6-aixs micro-stage actuated by micro stepping motors are adopted. The fiber aligning procedure consists of two steps. Firstly, the optical wave guide and an input optical array are aligned by the 6-axis input micro-stage with the IR camera. The image processing technique is introduced to reduce primary manual aligning time and result in achieving the 50% decrease of aligning time. Secondly, the IR camera is replaced by the output micro-stage and a wave guide and two optical arrays are aligned simultaneously before the laser power intensity delivered to the optical powermeter reached the threshold value. When the aligning procedure is finished, the wave guide and arrays are W bonded. The automatic loading/unloading system is also introduced and the entire wave guide handing time is reduced significantly compared to the former commercial aligning system.