• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.483-484
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• 2008

• 한국전자현미경학회:학술대회논문집
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• 한국현미경학회 2007년도 제38차 춘계학술대회 초록집
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• pp.21-23
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• 2007

• 한국산학기술학회논문지
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• 제15권4호
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• pp.1807-1812
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• 2014

플라스틱은 형상의 구애를 거의 받지 않아 자유 곡면형상을 표현할 수 있고, 다양한 색상과 저렴한 가격으로 대량으로 생산할 수 있는 장점을 가지고 있으며, 차량의 경량화 부품소재로 많이 사용되고 있는 가운데 자동차 도어필러 성형은 엔지니어링 플라스틱을 사용하는 대표적인 예로서, 사출성형으로 생산되고 있다. 이러한 방법으로 생산된 부품은 대부분 외관 부품으로 사용되어 표면에 대한 불량 제거가 무엇보다 중요하며, 이를 위해 마지막 공정으로 폴리싱 작업을 수행하고 있다. 작업자에 의해 이루어지는 폴리싱 작업은 많은 힘을 요구하며, 이로 인해 작업자들의 피로도가 높은 공정으로 분류되어 기피공정이 되고 있다. 본 연구에서는 영상처리를 이용하여 폴리싱 공정의 작업을 작업자와 연계하여 불량위치를 검출하고 폴리싱 공정을 자동으로 수행할 수 있도록 폴리싱 자동화 장비의 개발하였다. 이를 통해 생산시간 단축(30초)및 작업인원 1명 감소로 생산단가의 경쟁력을 높이는 개선효과를 기대하게 되었다.

• 발명특허
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• 제29권5호통권335호
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• pp.32-37
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• 2004

• 디지털콘텐츠학회 논문지
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• 제3권1호
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• pp.113-122
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• 2002

반도체와 관련한 실리콘웨이퍼의 평탄도는 양질의 웨이퍼를 보증하는 가장 중요한 요소이다. 따라서 평탄도(flatness)를 측정하고 제어하는 Polishing이라는 공정은 웨이퍼 생산의 여러 라인중 특별히 중요시 되는 과정이며 현재 이 공정에서는 담당 엔지니어가 웨이퍼의 모형을 모니터에서 육안으로 관찰하여 판단하고 평탄도를 높이기 위한 제어를 하고 있다. 그러나 사람에 의한 것이므로 많은 경험이 필요하고 일일이 체크해야하는 번거로움이 있다. 본 연구는 이러한 비효율적인 작업의 효율화를 위해 이루어 졌으며 Polishing 공정에 있어 평탄도를 사람이 아닌 시스템에 의해 자동으로 측정하여 제어하는 알고리즘을 제안한다. 여기서 제안한 시스템은 보간 다항식을 이용하여 웨이퍼 전역의 두께를 추정하고 Polishing공정에서 평탄도를 높이기 위해 제어 가능한 모형별로 분류할 수 있도록 하였다.

• 한국정밀공학회지
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• 제18권11호
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• pp.168-173
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• 2001

The chemical mechanical polishing (CMP) is generally consisted of pad, slurry including abrasives and so on. However, there are some problems in a general CMP: defects, a high Cost of Consumable (CoC), an environmental problem. The slurry including abrasives especially gives rise to not only increase a CoC, but also prohibition from achieving an eco-process. This paper introduces an abrasive capsulation pad to achieve an eco-process decreasing abrasives used is CMP. The binder wth a water a water swelling and a water soluble characteristic is used for an auto-conditioning, and the $CeO_2$abrasive is selected for an abrasive capsulation pad. Comparing with a conventional CMP, an abrasive capsulation pad appears good characteristics in ILD CMP and is able to achieve an eco-process decreasing wasted slurry.

• 대한치과보철학회지
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• 제35권4호
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• pp.719-741
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• 1997

This study was undertaken to compare by Atomic Force Microscope the effects of various finishing and polishing instruments on surface roughness of filling and veneering composite resins. Seven composite resins were studied : Silux Plus (3M Dental Products, U.S.A.), Charisma (Heraeus Kulzer, Germany), Prisma THP (L.D.Caulk, Dentsply, U.S.A.), Photoclearfil (Kuraray, Japan), Cesead (Kuraray, Japan), Thermoresin LC (GC, Japan), Artglass (Heraeus Kulzer, Germany). Samples were placed and polymerized in holes (2mm thick and 8.5mm in diameter) machined in Teflon mold under glass plate, ensuring excess of material and moulded to shape with polyester matrix strip. Except control group (Polyester matrix strip), all experimental groups were finished and polishied under manufacturer's instructions. The finishing and polishing procedure were : carbide bur (E.T carbide set 4159, Komet, Germany), diamond bur (composite resin polishing bur set, GC, Japan), aluminum-oxide disc (Sof-Lex Pop-On, 3M Dental Products, U.S.A.), diamond-particle disc (Dia-Finish, Renfert Germany), white stone bur & rubber point( composite finishing kit, EDENTA, Swiss), respectively. Each specimens were evaluated for the surface roughness with Atomic Force Microscope (AutoProbe CP, Park Scientific Instruments, U.S.A.) under contact mode and constant height mode. The results as follows : 1. Except Thermoresin LC, all experimental composite resin groups showed more rougher than control group after finishing and polishing(p<0.1). 2. A surface as smooth as control group was obtained by $Al_{2}O_{3}$ disc all filling composite resin groups except Charisma and all veneering composite resin groups except Thermoresin LC(p<0.05). 3. In case of Thermoresin LC, there were no statistically significant differences before and after finishing and polishing(p>0.1). 4. Carbide bur, diamond bur showed rough surfaces in all composite resin groups, so these were inappropriate for the final polishing instruments.

• 대한치과보철학회지
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• 제41권1호
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• pp.1-19
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• 2003

The surface of metals should be as smooth as possible for optimum comfort, oral hygiene, low plaque retention, and resistance to corrosion. In this study five specimens of each precious metal(type III gold alloy, ceramic gold alloy, and Ag-Pd alloy) were divided into five groups according to finishing and polishing procedures : group 1(sandblaster), group 2(group 1+stone), group 3(group 2+brown rubber), group 4(group 3+green rubber), and group 5(group 4+rouge). Six specimens of each non-precious metal(Co-Cr alloy, Ni-Cr alloy, and Co-Cr-Ti alloy) were divided into six groups: group 1(sandblaster), group 2(group 1+hard stone), group 3(group 2+electrolytic polisher), group 4(group 3+brown hard rubber point), group 5(group 4+green hard rubber point), and group 6(group 5+rouge). Considering factors affecting the rate of abrasion, the same dentist applied each finishing and polishing procedure. In addition, the surface roughness of enamel, resin, and porcelain was evaluated. The effect of finishing and polishing procedures on surface roughness of precious and non-precious metals, enamel, resin, and porcelain was evaluated by means of Atomic Force Microscope(AutoProbe CP. Park Scientific Instruments, U.S.A.) that can image the three dimensional surface profile and measure average surface roughness values of each sample at the same time. The obtained results were as follows : 1. According to finishing and polishing procedures, the surface roughness of type III gold alloy, ceramic gold alloy, and Ag-Pd alloy was decreased in the order of group 1, 2, 3, 4, and 5 (P<0.01). 2. According to finishing and polishing procedures. the surface roughness of Co-Cr alloy, Ni-Cr alloy, and Co-Cr-Ti alloy was decreased in the order of group 1, 2, 3, 4, 5, and 6 (p<0.01). 3. There was not statistically significant difference in the surface roughness among three metals of precious metals in group 1 but was significant difference in group 2, 3, 4, and 5 (P<0.05). 4. There was not statistically significant difference in the surface roughness among three metals of non-precious metals in all groups. 5. When the surface roughness of the smoothest surface of each metal, enamel. porcelain, and resin was compared, porcelain was the smoothest and the surface roughness was decreased in the order of Ni-Cr alloy. Co-Cr alloy. Co-Cr-Ti alloy, resin. Ag-Pd alloy, ceramic gold alloy type III gold alloy, and enamel (P<0.01). The results of this study indicate that the finishing and polishing procedures should be carried out in a logical, systematic sequence of steps and the harder non-precious metals may be less resistance to abrasion than are the softer precious metals.

• 동력기계공학회지
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• 제14권1호
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• pp.22-26
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• 2010

Generally, it is a method to remove the fouling cleaning the plate heat exchanger with chemicals or polishing with a brush or cloth after stopping the equipment and disassembling heat exchanger. However, the equipment must be stopped and taken apart when using this method, which causes an unnecessary work to assemble again after cleaning it. In this study, it has developed and tested the equipment which can automatically clean the fouling on plate heat exchanger at regular intervals with air bubbles. It indicated that the overall heat transfer coefficient had decreased without significant differences similar to that calculated without air bubbles until after 72 hours when making air bubbles to remove fouling ingredient on the surface of heat transfer area every 10 minutes per 2 hours. However, it showed that there was a 10% higher of heat transfer effect compared to the case without air bubbles of after 192 hours.

• 한국산업융합학회 논문집
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• 제7권3호
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• pp.259-263
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• 2004

In the manufacture progress of LCD or semiconductor, there are used many kinds of gas like erosion gas, dilution gas, toxic gas as a progress which used these gas there are required high puritize to increase accumulation rate of semiconductor or LCD materials work progress of semiconductor or LCD it demand many things like the material which could minimize metallic dust that could be occured by reaction between gas and transfer pipe laying material, illumination of the surface, emition of the gas, metal liquation, welding etc also demand quality geting stricted. Material-Low-sulfur-contend (0.007-0010), vacuum-arc-remelt(VAR), seamless, high-purity tubing material is recommend for enhance welding lower surface defect density All wetted stainless steel surface must be 316LSS elecrto polishinged with ${\leq}0.254{\mu}m$($10.0{\mu}in$) Ra average surface finish, $Cr/Fe{\geq}1.1$ and $Cr_2O_3$ thickness ${\geq}25{\AA}$ From the AES analytical the oxide layer thickness (23.5~36 angstroms silicon dioxide equivalent) and chromum to iron ratios is similar to those generally found on electropolished stainless steel., molybdenum and silicon contaminants ; elements characteristic of stainless steel (iron, nickel and chromium); and oxygen were found on the surface Phosphorus and nitrogen are common contaminants from the electropolish and passivation steps.