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LTCC기판상에 성장시킨 PZT박막의 열처리 특성연구

  • 이경천;황현석;우형관;이태용;허원영;심등;송준태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 추계학술대회 논문집
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    • pp.117-117
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    • 2009
  • Recently, low temperature co-fired ceramic (LTCC) technology has gained a remarkable application potential in sensors, actuators and microsystems fields. In this study, we investigated the effects of annealing treatment on the electrical properties of $Pb(ZrTi)O_3$ (PZT) thin films deposited on LTCC substrate. The LTCC substrates with thickness of 400 ${\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The PZT thin films were deposited on Au/LTCC substrates by RF magnetron sputtering method. Then, the change of the crystallization of the films was investigated under various annealing temperatures. The results showed that the crystallization of the films were enhanced as increasing annealing temperatures. The film, annealed at $700^{\circ}C$, 3min, was well crystallized in the ferovskite structure. The structural variation of the films were analyzed by using X-Ray diffraction (XRD) and field emmision scanning electron microscopy (FESEM).

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3차원 LTCC 기판을 이용한 압전 압력 센서의 제작 및 연구 특성

  • 허원영;황현석;우형관;이태용;이경천;심등;송준태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 추계학술대회 논문집
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    • pp.118-118
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    • 2009
  • Low temperature co-fired ceramic (LTCC) is one of promising materials for MEMS structures because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of 400 um were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of $Pb(ZrTi)O_3$ (PZT) thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The results showed that the fabrication method is very suitable for pressure sensor applications. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

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炭素아-크 (arc)에 依한 Sol의 生成 (Preparation of Sols by Carbon-arc)

  • 장세헌;김태린
    • 대한화학회지
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    • 제4권1호
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    • pp.7-9
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    • 1957
  • On sparking carbon-arc in water we found that a inflammable gas was generated. The object of this experiment is to prepare sols of metals by applying the gas mentioned to a solution of metallic salts. As the result of this experiment we found that : 1) By this method we can prepare easily some kinds of Ag-sol from $AgNO_3$ solution in about 30 sec. by adjusting the temperature, the quantity of stabilizer and the concentration of metallic salt. 2) The appropriate concentration of $AgNO_3$ is about 0.01% by volume, that of the stabilizer, 0.9104 N-NaOH is 0.03-2 cc/100 cc of 0.01% $AgNO_3$ solution. And the lower the temperature, the more concentrated the Ag-sol. But to check the possibility of applying this method to metals other than Au and Ag, measurement of the particle size and properties of a sol prepared by this method, should be studied. Especially, we must study what kinds of gases are generated by sparking the carbon-arc in water.

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LTCC 기판을 이용한 PZT 압력 센서의 제작 및 특성 연구

  • 허원영;황현석;이태용;이경천;송준태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 춘계학술대회 논문집
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    • pp.13-13
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    • 2010
  • Piezoelectric sensors are extensively used to measure force because of their high sensitivity and low cost. however, the development of device with reduced size but with improved sensitivity is highly important. Low-temperature co-fired ceramic (LTCC) is one of promising materials for this application than a silicon substrate because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of PZT thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

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3차원 LTCC 기판을 이용한 PZT 압력센서의 주파수 응답 특성 (Frequency response characteristics of PZT pressure sensor using three dimensional LTCC substrates)

  • 허원영;이경천;황현석;이태용;송준태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.204-204
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    • 2010
  • A development of device with reduced size and improved sensitivity is highly impotant Pb(Zr,Ti)$O_3$ thin films are widely used both to make actuator and sensor due to their high sensitivity and low cost. In this study, the feasibility of a piezoelectric presssure sensors based on hybrid low-temperaute co-fired ceramic (LTCC) technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. PZT thin films were successfully prepared on between top and bottom Au electrode with LTCC substrates using RF magnetron sputtering. In addition, The frequency response characteristics of the sensor under varing pressure has been analysed. by Network Analyser (HP-8722D). A frequency shift range has been obseved from 1.7GHz to 1.8GHz with a good linearity for applied pressure from 0 psi up to 25 psi.

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LTCC 기판위에 성장시킨 PZT 박막의 열처리시 $O_2$가 미치는 영향 (Effects of annealing under oxygen atmosphere of PZT thin films on LTCC substrates)

  • 이경천;허원영;황현석;이태용;이종덕;송준태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.205-205
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    • 2010
  • Recently, low temperature co-fired ceramic (LTCC) technology is widely used in sensors, actuators and microsystem fields because of its very good electrical and mechanical properties, high stability as well as possibility of making 3D micro structures. In this study, we investigated the effects of on $O_2$ annealing treatment on the electrical properties of Pb(ZrTi)$O_3$ (PZT) thin films deposited on LTCC substrate. The LTCC substrates with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. The PZT thin films were deposited on Au / LTCC substrates by RF magnetron sputtering method. The change of the crystallization of the films were investigated under various atmosphere. The structural variation of the films were analyzed by using X-Ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) and secondary ion mass spectrometry (SIMS).

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고대 안료의 성분분석 연구-쌍계사 탱화 안료를 중심으로 (A study on the analysis of ancient pigments-Focus on the Buddha pigments at the Ssanggye temple)

  • 한민수;홍종욱
    • 보존과학연구
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    • 통권24호
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    • pp.131-152
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    • 2003
  • In ancient times, many kinds of different inorganic pigments were used as colorants for making objects. These pigments are still evidentin well known objects such as Danchung, mural painting and Buddhist painting. This study discusses the results obtained from an analysis of the pigments used on the Buddha pigments. The results can be briefly summarized as below; Firstly, the microcrystalline structures revealed on the cross section of analyzed pigments, samples of which were taken from various parts of Buddha pigments show that different sizes and shapes of pigment particle were used for different purposes such as coloring, toning of the pigments. The arrangement of pigments and their usages are varied according to the owner temples and the place where it was created. Secondly, a result of the analysis on the composition and structure of the pigments shows that the main components in their composition are: Red pigments - Red lead($Pb_3O_4$) and Cinnabar(HgS)Green pigments - Malachite[$CuCO_3$.$Cu(OH)_2$] and Prussian Blue[$Fe4(Fe(CN)_6)_2$]Gold pigments - pure gold(Au)Yellow pigments - Orpiment($A_s2S_3)White pigments - Lead Cyanamide[$Pb_3(CO_3)_2(OH)_2]Ultramarine pigments - Azulite[$Cu_3(CO_3)_2(OH)_2]Especially, we knew that pigments used on the Ssanggye temple not repaired to the artificial synthetic pigment

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Anisotropic Conductive Film (ACF) Prepared from Epoxy/Rubber Resins and Its Fabrication and Reliability for LCD

  • Kim, Jin-Yeol;Kim, Eung-Ryul;Ihm, Dae-Woo
    • Journal of Information Display
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    • 제4권1호
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    • pp.17-23
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    • 2003
  • A thermoset type anisotropic conductive adhesive film (ACAF) comprising epoxy resin and natural butyl rubber (NBR) as the binder, micro-encapsulated imidazole as the curing agent, and Ni/Au coated polymer bead as a conductive particle has been studied. These films have been prepared to respond to requirements such as improved contact resistance, current status less of than 60 ${\mu}m$ and reliability. These films can also be used for connection between the ITO glass for LCD panel and the flexible circuit board. The curing conditions for the connection were 40, 20 and 15 seconds at 150, 170 and 190 $^{\circ}C$, respectively. The initial contact resistance and adhesion strength were 0.5 ${\Omega}/square$ and 0.4 kg/cm under the condition of 30 kgf/$^{cm}^2}$, respectively. After completing one thousand thermal shock cycling tests between -15 $^{\circ}C$ and 100 $^{\circ}C$, the contact resistance was maintained below 0.7 ${\Omega}/square$. Durability against high temperature (80$^{\circ}C$) and high humidity (85 % RH) was also tested to confirm long-term stability (1000 hrs) of the conduction.

복제교환 분자동력학 모의실험을 통한 갇힌 조건에서의 금-팔라듐 나노합금입자 구조에 대한 연구

  • 오태환;문성욱;김태훈
    • EDISON SW 활용 경진대회 논문집
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    • 제5회(2016년)
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    • pp.32-36
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    • 2016
  • 단일금속 나노입자에 비해 나노합금입자는 발광이나 촉매력과 같은 여러 특징들이 더 뛰어나게 나타난다고 잘 알려져 있다. 이에 따라 실험적인 연구뿐 아니라 이론적으로도 나노합금입자의 특성과 구조를 밝히려는 노력이 이루어지고 있다. 그러나 대부분의 연구는 자유공간을 상정하여 진행되고 있어, 갇힌 공간 속의 입자에 대한 연구는 부족한 실정이다. 이러한 배경으로 본 연구에서는 Sutton-Chen (SC) 포텐셜을 주요 이론으로 하여, 복제교환분자동력학(replica exchange molecular dynamics, REMD) 모의실험을 통해 가두는 공간의 크기에 따라 금-팔라듐 나노합금입자(Au17Pd17)의 구조와 특성이 어떻게 달라지는지 EDISON에 등록된 metal_alloy 프로그램(molecular dynamics simulation of metal alloy nano-cluster)을 사용해 살펴보았다. 결과적으로 입자가 상전이 이전의 낮은 온도에서 존재하면, 둘러싼 공간의 크기와 무관하게 안정한 구조의 중심에 항상 팔라듐 원자가 위치한다는 것이 확인되었다. 또, 가두는 공간의 크기마다 상전이가 일어나는 온도 구간의 차이가 나타났으며, 작은 공간에 갇힌 입자일수록 입자의 최대 직경이 작아지면서 상대적으로 높은 에너지를 가지는 구조를 형성하였다. 이는 입자가 존재하는 공간이 좁을수록 에너지의 증가를 통하면서 최대한 공간을 활용할 수 있는 구조를 선택하는 것으로 보인다.

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Medicinal aspects of Murraya koenigii mediated silver nanoparticles

  • Mumtaz, Sumaira;Nadeem, Raziya;Sarfraz, Raja A.;Shahid, Muhammad
    • Advances in nano research
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    • 제11권6호
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    • pp.657-665
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    • 2021
  • The present work aimed to explore green approach via aqueous leaves extract of Murraya koenigii (ALEMk) for the synthesis of silver nanoparticles (AgNPsMk) in single step. The synthesis process was visualized with a color change and monitored by employing UV/Visible spectroscopy and a clear peak attained at 420 nm confirming the synthesis of AgNPsMk. The possible functional groups present in the extract which participated in the synthesis of AgNPsMk were identified with the help of FTIR spectroscopy. Further characterization using TEM images revealed the spherical shape of AgNPsMk with average particle size of 20 nm displaying well dispersion throughout the solution. Pronounced antioxidant activities of AgNPsMk at increased concentrations observed which evidencing strong radical scavenging ability. Moreover, AgNPsMk exhibited strong antibacterial behavior when tested against bacterial strains of Escherichia coli and Bacillus subtilis. Moving ahead, in vitro cytotoxicity work revealed potent cell viability loss appearing in AU565 and HeLa cancer cell lines on exposure to AgNPsMk at increased concentration. Finally, in vivo assessment carried out inside male Wistar rats indicated non toxic effect on examined liver tissues besides biochemical analysis including bilirubin, alkaline phosphtase (ALP) and serum glutamate pyruvate transaminase (SGPT) which found within the normal range when compared with control. The prior research work profoundly apprises the potential of green synthesized AgNPsMk to play a significant role in biomedical applications and formulations.