• Title/Summary/Keyword: Atmospheric pressure growth

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Epitaxy of Self-assembled InAs Quantum Dots on Si Substrates by Atmospheric Pressure Metalorganic Chemical Vapor Deposition (대기압 MOCVD 시스템을 이용하여 Si 기판 위에 자발적으로 형성된 InAs 양자점에 대한 연구)

  • Yoo, Choong-Hyun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.6
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    • pp.527-531
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    • 2005
  • Fully coherent self-assembled InAs quantum dots(QDs) grown on Si (100) substrates by atmospheric pressure metalorganic chemical vapor deposition(APMOCVD) were grown and the effect of growth conditions such as growth rate and growth time on quantum dots' morphology such as densities and sizes was investigated. InAs QDs of 30 - 80 nm in diameters with densities in the range of (0.6 - 1.7) x $10^{10}\;cm^{-2}$ were achieved on Si substrates and InAs layer was changed from 2 dimensional growth to 3 dimensional one at a nominal thickness less than 0.48 ML. This is attributed to the higher ambient pressure of APMOCVD suppressing of In segregation from the 2 dimensional InAs layer. This In segregation looked to disturb the dot formation especially when the growth rate was low so that the dots became less dense and bigger as the growth rate was lower.

Growth and Etching of Epitaxial Layer and Polysilicon for the Selective Epitaxy (선택적 에피택시를 위한 에피택셜층 및 폴리실리콘의 성장과 에칭)

  • 조경익;김창수
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.22 no.1
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    • pp.34-40
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    • 1985
  • An investigation has been made on the growth phenomena of epitaxial layer and polysilicon from SiH2 Cl2 in H2 and the etch phenomena of them from HCI in H2, at the system pressures of 1.0 atm (atmospheric process) and 0.1 attn (reduced pressure process). From the experimental equations for the growth rates and etch rates. the relevant process conditions for the selective epitaxy are predicted for the case of using mixtures of SiH2Cl2 and HCI in H2. As a result, it is found that selective epitaxial growth region exists in the concentration range investigated for the reduced pressure process but it does not for the atmospheric Process. This is due to the differences in the growth rates and etch rates at atmospheric and reduced pressure.

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Total pressure dependence of YBCO films in MOD method (MOD 공정에 의해 제조된 YBCO 박막의 압력 의존성)

  • Yoo, Jai-Moo;Chung, Kook-Chae;Ko, Jae-Woong;Kim, Young-Kuk;Wang, Xiao Lin;Dou, Shi Xue
    • Progress in Superconductivity and Cryogenics
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    • v.8 no.1
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    • pp.5-8
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    • 2006
  • The growth properties of MOD-YBCO films were investigated. To enhance the growth rate of YBCO layer and inhibit the build-up of HF gas during the annealing process in TFA-MOD for YBCO coated conductors the method of low pressure annealing was employed. Total pressure was changed from 700Torr to 1Torr and its effect on growth of YBCO films was compared with atmospheric one. The lower Pressure was effective to control of the pore size in MOD method . Surface morphology of YBCO films processed at low total pres sure was rough and composed of random YBCO (103) grains. But large pores, usually observed at atmospheric process in MOD disappeared and also the number of pores was reduced at low pressure annealing. Also discussed ate the effects of Fluorine-free Y and Cu precursor solution on the development of microstructure. Dense surface me phology and with less and small pores can be provided through controlling Fluorine content.

Effect of annealing time on MOD-YBCO films at reduced total pressure (저압공정을 이용한 MOD-YBCO 박막의 열처리 시간 효과)

  • Chung Kook-Chae;Yoo Jai-Moo;Ko Jae-Woong;Kim Young-Kuk
    • Progress in Superconductivity and Cryogenics
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    • v.8 no.3
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    • pp.5-8
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    • 2006
  • The effect of annealing time in Metal Organic Deposition(MOD) method was investigated at reduced total pressure. As the total annealing pressure was reduced, the growth rate of YBCO films increased from 0.14nm/sec at atmospheric pressure to 4.2nm/sec at 1 Torr. For the total pres sure of 700, 500, 300, 100, and 1 Torr, the optimal annealing times of 60, 40, 20, 10, 2minutes were found in our experimental conditions. When the an nealing time was short, poor crystallinity or un-reacted phase was obtained. Also, the degradation of YBCO films occurred when exposed longer to the humid ambient at the high annealing temperature. The reduced pressure was found effective to in crease the growth rate and to control the pore size of the YBCO films in MOD method. A fast growth of MOD-YBCO films was realized with high critical current density over $1MA/cm^2$ using reduced pressure annealing. Large pores, usually observed at atmospheric pressure in MOD method, disappeared and also, the number of pores was reduced.

A Study on the Storage of Fresh Fruits and Vegetables(III) -Effects of the Storage of Tomato fruits by controlled atmospheric pressure- (청과물 저장에 관한 연구(제3보) -환경압력변화가 Tomato 과실의 저장에 미치는 영향에 대하여-)

  • Kim, Sung-Dal;Choi, Jong-Uck;Sohn, Tae-Hwa
    • Applied Biological Chemistry
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    • v.16 no.2
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    • pp.94-98
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    • 1973
  • 1. Tomato variety used was Bogsu No. 2 and it was grown in field. Experiments were conducted in 1971 and 1972 to examine the changes of $CO_2$ product on in each growth-period and the contents of acid, sugar and vitamine C during storage. 2. By controlled atmospheric pressure the effects of respirationreduction in tomato fruits were the most effective at 660 Torr. part. 3. $CO_2$ production of tomato fruits harvested at each growth-period was differently changed at each growth-period and $CO_2$ production in tomato fruit at the same maturity from the plant showed Sigmoid type. 4. $CO_2$ production of tomato fruits harvested at the same ripeness score was in influenced by controlled atmospheric pressure during growth period and $CO_2$ production was reduced at SAP part compared with NAP part during the full growth-period. 5. The change of weight in tomato fruits was decreased in NAP part than in SAP part during storage and contents of acid, sugar, and vitamine C showed the same tendency.

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Inactivation of Indoor Airborne Fungi Using Cold Atmospheric Pressure Plasma (저온 대기압 플라즈마의 실내공기 중 곰팡이 생장억제 효과)

  • Paik, Namwon;Heo, Sungmin;Lee, Ilyoung
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.29 no.3
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    • pp.351-357
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    • 2019
  • Objectives: The objectives of this study were to investigate fungal contamination in a 31-year old university building in Seoul, Korea, and to study the inactivation of fungi using cold atmospheric pressure plasma(CAP). Methods: To investigate the fungal contamination in a university building, air samples were collected from five locations in the building, including two study rooms, a storage room, a laboratory, and a basement. The sampling was performed in a dry season(February to April) and in a wet season(July). To study the inactivation efficacy of fungi by CAP, airborne fungal concentrations were measured before and after the operation of the CAP generator. Results: Humidity was an important factor affecting fungal growth. The airborne fungal concentrations determined in the wet season(July) were significantly higher than those determined in the dry season(February to April). In the basement, the values determined in the dry and wet season were 319 and $3,403CFU/m^3$, respectively. The inactivation efficiency of fungi by CAP was 83-90% over five to nine days of operation. Conclusions: The university building was highly contaminated by airborne fungi, especially in summer. It is concluded that humidity is an important factor affecting fungal growth and CAP is a highly useful technique for inactivation of indoor airborne fungi.

Generation and Growth of Long Ocean Waves along the West Coast of Korea in March 2007 (2007년 3월 한국 서해안에 발생한 해양장파의 형성과 성장과정)

  • Choi, Byoung-Ju;Park, Yong-Woo;Kwon, Kyung-Man
    • Ocean and Polar Research
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    • v.30 no.4
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    • pp.453-466
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    • 2008
  • In order to examine the generation mechanism of long ocean waves along the west coast of Korea and to understand the amplification process of the long ocean waves, sea level, atmospheric pressure and wind data observed every minute from 2007 March 29 to 2007 April 1 were analyzed and onedimensional numerical ocean model experiments were performed. An atmospheric pressure jump propagated southeastward from Backryungdo to Yeonggwang along the west coast of Korea with speed of $13{\sim}27\;m/s$ between 2007 March 30 23:00 and 2007 April 1 1:30. Average magnitude of pressure jump was 4.2 hPa. As a moving atmospheric jump propagated from north to south along the coast, long ocean waves were generated and the sea level abnormally rose or fell at Anheung, Kunsan, Wido and Yeonggwang. Average amplitude of sea level rise (or fall) was about 113.6 cm. In a one-dimensional numerical ocean model, nonlinear shallow water equations were numerically integrated and a moving atmospheric pressure jump with traveling speed of 24 m/s was used as an external force. While the atmospheric pressure jump travels over 60 m depth ocean, a long ocean wave is generated. Because the propagation speed of the atmospheric jump is almost equal to that of the long ocean wave, Proudman resonance occurs and the long ocean wave amplifies. As the atmospheric pressure jump moves into the coastal area shallower than 60 m, the speed of the long ocean wave decreases and Proudman resonance effect decreases. However, the amplitude of the long ocean wave increases and wave length becomes shorter because of shoaling effect. When the long ocean wave hits the land boundary, amplitude of the long ocean wave drastically amplifies due to reflection. Data analysis and numerical experiments suggest that the southeastward propagation of an atmospheric pressure jump over the shallow ocean, which is a necessary condition for Proudaman resonance, generated the long ocean waves along the west coast of Korea on 2007 March 31 and the ocean waves amplified due to shoaling effect in the coastal area and reflection at the shore.

The effects of LED light quality on ecophysiological and growth responses of Epilobium hirsutum L., a Korean endangered plant, in a smart farm facility

  • Park, Jae-Hoon;Lee, Jung-Min;Kim, Eui-Joo;You, Young-Han
    • Journal of Ecology and Environment
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    • v.46 no.3
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    • pp.161-171
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    • 2022
  • Background: Epilobium hirsutum L. is designated as an endangered plant in South Korea located in Asia, due to the destruction of its habitats through the development of wetlands. Therefore, in this study, in order to find a light condition suitable for the growth and ecophysiological responses of Epilobium hirsutum L., those of this plant under treatment with various light qualities in a smart farm were measured. Results: In order to examine the changes in the physiological and growth responses of Epilobium hirsutum L. according to the light qualities, the treatment with light qualities of the smart farm was carried out using the red light: blue light irradiation time ratios of 1:1, 1:1/2, and 1:1/5 and a red light: blue light: white light irradiation time ratio of 1:1:1. As a result, the ecophysiological responses (difference between leaf temperature and atmospheric temperature, transpiration rate, net photosynthetic rate, intercellular CO2 partial pressure, photosynthetic quantum efficiency) to light qualities appeared differently according to the treatments with light qualities. The increase in the blue light ratio increased the difference between the leaf temperature and the atmospheric temperature and the photosynthetic quantum efficiency and decreased the transpiration rate and the intercellular CO2 partial pressure. On the other hand, the white light treatment increased the transpiration rate and intercellular CO2 partial pressure and decreased the temperature difference between the leaf temperature and the ambient temperature and photosynthetic quantum efficiency. Conclusions: The light condition suitable for the propagation by the stolons, which are the propagules of Epilobium hirsutum L., in the smart farm, is red, blue and white mixed light with high net photosynthetic rates and low difference between leaf temperature and atmospheric temperature.

Direct treatment on live and cancer cells & process innovation of bio-sensor using atmospheric pressure plasma system with low-temperature arc-free unit

  • Lee, Keun-Ho;Lee, Hae-Ryong;Jun, Seung-Ik;Bahn, Jae-Hoon;Baek, Seung-J.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.43-43
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    • 2010
  • We have characterized the parametric and functional properties of live cell and cancer cell according to plasma treatment conditions using Atmospheric Pressure (AP) Plasma with uniquely designed low temperature arc-free unit. AP plasma system showed very highly efficient capabilities of reacting and interfacing directly with live and cancer cells. The parametric results with the types of gases, applied power, applied gap, and process times on cells will be presented in accordance with functional studies of the works. The growth of cancer cells is directly influenced by AP plasma exposure with evaluating plasma conditions in several human cancer cells and understanding how plasma exposure alters molecular signaling pathways. The cells exhibit a slower or faster growth rates compared with untreated cells, depending on the cell types. These results strongly support the conclusion that alterations in one or more of each gene are responsible, at least in part, for plasma-induced apoptosis in cancer cells. In addition, it also will be presented that AP plasma has an important role for the improvement of sensor performance due to excellent interface property between enzyme and metal electrode for bio sensor manufacturing process.

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a-C:H Films Deposited in the Plasma of Surface Spark Discharge at Atmospheric Pressure. Part I: Experimental Investigation

  • Chun, Hui-Gon;K.V. Oskomov;N.S. Sochungov;Lee, Jing-Hyuk;You, Yong-Zoo
    • Journal of the Korean institute of surface engineering
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    • v.36 no.5
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    • pp.357-363
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    • 2003
  • The aim of this work is the synthesis of a-C:H films from methane gas using surface spark discharge at the atmospheric pressure. Properties of these films have been investigated as functions of energy W delivered per a methane molecule in the discharge. The method enables the coatings to be deposited with high growth rates (up to $100 \mu\textrm{m}$/hour) onto large-area substrates. It is shown that the films consist of spherical granules with diameter of 20∼50 nm formed in the spark channel and then deposited onto the substrate. The best film characteristics such as minimum hydrogen-to-carbon atoms ratio H/C=0.69, maximum hardness $H_{v}$ =3 ㎬, the most dense packing of the granules and highest scratch resistance has been obtained under the condition of highest energy W of 40 eV. The deposited a-C:H coatings were found to be more soft and hydrogenated compared to the diamond-like hydrogenated (a-C:H) films which obtained by traditional plasmaenhanced chemical vapor deposition methods at low pressure (<10 Torr). Nevertheless, these coatings can be potentially used for scratch protection of soft plastic materials since they are of an order harder than plastics but still transparent (the absorption coefficient is about $10^4$$10^{5}$ $m^{-1}$ At the same time the proposed method for fast deposition of a-C:H films makes this process less expensive compared to the conventional techniques. This advantage can widen the application field of. these films substantially.y.