• 전기전자학회논문지
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• 제20권4호
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• pp.392-397
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• 2016

본 논문에서는 투명 전극용 ITO(Indium Tin Oxide) 박막의 성막 조건을 알아내기 위하여 DC(Direct Current) 마그네트론 스퍼터를 사용해 증착된 ITO 박막의 특성을 분석하였다. 실험 조건은 1~3[mTorr] 분위기압으로 조절하고 인가전압은 260~330[V]로 10[V]씩 스텝을 주어 실험을 진행하였다. 증착된 박막의 투과율, 굴절률 및 표면과 단면 형상을 자외선-가시광선 분광광도계, 타원편광분석기와 주사전자현미경으로 측정하였다. ITO 성막 조건 1~2[mTorr] 분위기압에서 300[V] 정도의 전압이 투과율이 90[%] 이상으로 우수하고 굴절률이 2이상 이였다. 따라서 높은 투명 전도성 전극을 만들기에 적절한 조건임을 확인하였다.

• 한국정보통신학회논문지
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• 제6권2호
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• pp.315-322
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• 2002

반도체 제조공정과 미세가공 기술을 이용하여 30$0^{\circ}C$의 동작온도에서 약 60㎽의 전력소모를 갖는 산화물 반도체 박막 가스센서 어레이를 제조하였다. 멤브레인의 우수한 열적 절연은 0.1$\mu\textrm{m}$ 두께의 Si$_3$N$_4$와 1$\mu\textrm{m}$ 두께의 PSG의 이중 층에 의한 것으로, 각각 LPCVD(저압화학 기상증착)와 APCVD(대기압 화학 기상증착)에 의해 제조되었다. 센서 어레이의 4가지 산화물 반도체 박막 감지물질로는 1wt.%Pd가 도핑된 SnO$_2$, 6wt.% $Al_2$O$_3$가 도핑된 ZnO, WO$_3$, ZnO를 이용하였으며, 제조된 초소형 산화물 반도체 박막 가스센서 어레이는 여러 가지 가스의 노출시 유용한 저항 변화를 나타내었고 감도는 감지 물질에 강하게 의존함을 알 수 있었다. 센서 소자의 공정 수율을 증진시키기 위하여 히터 부위를 함몰하는 공정 방법을 취하였으며, 그 결과 월등한 수율 개선을 도모할 수 있었다.

• 한국물환경학회지
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• 제26권1호
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• pp.71-80
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• 2010

We studied the nitrogen behavior and budget of Lake Paldang from March to December 2008. The particulate nitrogen (PN) concentrations ranged from 7 to 13% of the total nitrogen concentration (TN) in the stream inflows, the downstream outflow, and the lake water. The nitrate nitrogen ($NO_3-N$) concentration ranged from 67 to 78% of the TN. In the three rivers of Lake Paldang, Gyeongan River (In3 site) had the highest average of the TN, 5.037 mgN/L, but North Han River (In2 site) had the lowest average TN, 1.683 mgN/L. South Han River (In1 site) had the average TN of 2.399 mgN/L. In the dam discharge, TN showed the average 2.063 mgN/L. In the lake water, L4 site (Gyeongan River area) had the highest average TN, 3.781 mgN/L, but L3 site (North Han River) had the lowest average TN, 1.587 mgN/L. Total input of nitrogen loads to Lake Paldang was about 30,875 ton/year in 2008. Inflow rivers contributed 30,643 ton/year (South Han River: 18,111 ton/year (59%), North Han River: 11,333 ton/year (37%), and Gyeongan River: 1,199 ton/year (4%)). The atmospheric deposition had 135 ton/year, the nitrogen release from the bottom sediments had 88 ton/year, and macrophytes had 9 ton/year. Total output of nitrogen loads from Lake Paldang was about 31,256 ton/year. The downstream from dam contributed 29,877 ton/year, and the sediment deposition was 1,379 ton/year.

• 한국환경농학회지
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• 제24권3호
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• pp.280-288
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• 2005

대기중 PCDD/Fs가 소나무잎과 토양에 침착되는 특징에 대하여 연구하였다. 1) 토양과 소나무잎에 침착된 PCDD/Fs는 토양중 농도가 소나무잎중 농도보다 ${\Sigma}PCDDs$는 7.4배, ${\Sigma}PCDFs$는 2.3배, 그리고 ${\Sigma}PCDD/Fs$는 5.4배 더 높았다. 2) 토양/소나무잎 농도비를 homologue 별로 비교한 결과 PCDD/Fs homologue의 LogKoa 값의 크기 변화와 동일한 경향을 보였다. 3) 각 congener의 ${\Sigma}PCDD/Fs$ 농도에 대한 농도 분율은 염소치환수가 적은 경우(tetra-에서 hexa-까지)에는 소나무잎에서 높고, 염소치환수가 많은 경우(hepta-와 octa-)에는 토양에서 더 높았다. 4) 소나무잎에는 염소치환수가 적은 PCDD/Fs homologue가, 토양에는 염소치환수가 많은 PCDD/Fs homologue가 주로 누적침착되었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.285-285
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• 2013

Recently, hexagonal boron nitride (h-BN), which is III-V compound of boron and nitride by strong covalent sp2 bonds has gained great interests as a 2 dimensional insulating material since it has honeycomb structure with like graphene with very small lattice mismatch (1.7%). Unlike graphene that is semi-metallic, h-BN has large band gap up to 6 eV while providing outstanding properties such as high thermal conductivity, mechanical strength, and good chemical stability. Because of these excellent properties, hBN can potentially be used for variety of applications such as dielectric layer, deep UV optoelectronic device, and protective transparent substrate. Low pressure and atmospheric pressure chemical vapor deposition (LPCVD and APCVD) methods have been investigated to synthesize h-BN by using ammonia borane as a precursor. Ammonia borane decomposes to polyiminoborane (BHNH), hydrogen, and borazine. The produced borazine gas is a key material that is a used for the synthesis of h-BN, therefore controlling the condition of decomposed products from ammonia borane is very important. In this paper, we optimize the decomposition of ammonia borane by investigating temperature, amount of precursor, and other parameters to fabricate high quality monolayer h-BN. Synthesized h-BN is characterized by Raman spectroscopy and its absorbance is measured with UV spectrophotometer. Topological variations of the samples are analyzed by atomic force microscopy. Scanning electron microscopy and Scanning transmission Electron microscopy are used for imaging and analysis of structures and surface morphologies.

• Journal of Forest and Environmental Science
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• 제38권1호
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• pp.64-73
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• 2022

Increasing carbon and PM_2.5 concentrations have been emerging as serious environmental issues worldwide. The purpose of this study was to quantify carbon and PM_2.5 reduction by urban parks in Gangneung, Korea. A total of 35 parks were sampled by applying a random sampling method to survey tree planting structures and the areal distribution of land cover types of urban parks. These survey data and the Green Evaluation Technique (GET) computer program were used to estimate carbon and PM_2.5 reduction by trees. Mean tree density and cover in the study parks were 3.5±0.2 tree/100 m² and 44.5±3.0%, respectively. Annual carbon uptake and PM_2.5 deposition per unit area by trees averaged 2.8±0.2 t/ha/yr and 30.2±2.8 kg/ha/yr. Gangneung's urban parks annually offset the carbon emissions by 3.4% and the PM_2.5 emissions by 3.5%. Thus, urban parks played a significant role in reducing atmospheric carbon and PM_2.5 concentrations. Total annual carbon uptake and PM_2.5 deposition of urban parks in Gangneung were about 1,338.2 t/yr and 14,433.2 kg/yr. This study is expected to contribute to raising awareness of the role and importance of urban parks regarding carbon and PM_2.5 reduction.

• 접착 및 계면
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• 제24권1호
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• pp.36-40
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• 2023

반데르발스 물질이란 층간 결합이 약한 반데르발스 결합으로 이루어진 이차원 층상구조를 지닌 물질을 의미하며, 이러한 반데르발스 이차원 소재를 이용한 이종접합 구조 연구는 그래핀이 발견된 이후 꾸준히 연구되고 있다. 본 논문에서는 대기압 화학기상증착법을 통해 성장된 단층 단결정 MoSe₂를 기반으로하는 반데르발스 이종접합 트랜지스터 소자에 대해 보고한다. 최적화된 공정조건에서 성장된 MoSe₂는 원자수준의 결함이 존재하지 않는 것을 밝혔으며, 이를 이용한 트랜지스터 소자 또한 우수한 특성을 보인다는 것을 밝혀내었다.

• Nuclear Engineering and Technology
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• 제55권2호
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• pp.696-706
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• 2023

Consequences of an anticipated Beyond Design Basis Accident (BDBA) Long-Term Station Blackout (LTSBO) event with complete loss of grid power in the VVER-1200 reactor of Rooppur Nuclear Power Plant (NPP) of Unit-1 are assessed using the RASCAL 4.3 code. This study estimated the released radionuclides, received public radiological dose, and ground surface concentration considering 3 accident scenarios of International Nuclear and Radiological Event Scale (INES) level 7 and two meteorological conditions. Atmospheric transport, dispersion, and deposition processes of released radionuclides are simulated using a straight-line trajectory Gaussian plume model for short distances and a Gaussian puff model for long distances. Total Effective Dose Equivalent (TEDE) to the public within 40 km and radionuclides contribution for three-dose pathways of inhalation, cloudshine, and groundshine owing to airborne releases are evaluated considering with and without passive safety Emergency Core Cooling System (ECCS) in dry (winter) and wet (monsoon) seasons. Source term and their release rates are varied with the functional duration of passive safety ECCS. In three accident scenarios, the TEDE of 10 mSv and above are confined to 8 km and 2 km for the wet and dry seasons, respectively in the downwind direction. The groundshine dose is the most dominating in the wet season while the inhalation dose is in the dry season. Total received doses and surface concentration in the wet season near the plant are higher than those in the dry season due to the deposition effect of rain on the radioactive substances.

• 한국재료학회지
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• 제24권11호
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• pp.639-643
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• 2014

Hydrophilic $SiO_2$ layers were obtained by the atmospheric-pressure plasma treatment. Superhydrophobic $SiO_2$ layers were first deposited by the electrospray deposition method. The electrospunable solution that was prepared based on the solgel method was sprayed on Si (100) substrates. The surface of the electrosprayed $SiO_2$ layers consisted of the agglomeration of nano-sized grains, which led to a very high roughness and revealed a very high contact angle to water droplets over $162^{\circ}$. After having been exposed to the atmospheric $Ar/O_2$ plasma, the observed superhydrophobicity of the $SiO_2$ layers were greatly changed: a dramatic variation of the water contact angle from $162^{\circ}$ to $3^{\circ}$, namely realization of superhydrophillicity. Interestingly, the surface microstructure was almost preserved. According to the XPS analysis, it is more likely that thanks to the plasma exposure, the surface of $SiO_2$ layers will be cleaned in terms of organic species that are hydrophobic-inducing, consequently leading to the hydrophilic nature observed for the plasma-exposed $SiO_2$ layers.

• 한국대기환경학회지
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• 제20권5호
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• pp.625-632
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• 2004

Perfluorocompounds ($PFC_s$), such as tetrafluoromethane ($CF_4$) and hexafluoroethane ($C_2F_6$), have been widely used as plasma etching and chemical vapor deposition (CVD) gases for semiconductor manufacturing processes. Since these $PFC_s$ are known to cause a greenhouse effect intensively, there has been a growing interest in reducing $PFC_s$ emissions. Among various $CF_4$ decomposing techniques, a dielectric barrier discharge (DBD) is considered as one of a promising candidate because it has been successfully used for generating ozone ($O_3$) and decomposing nitrogen oxide (NO). Firstly, optimal concentration of oxygen for $CF_4$ decomposition was found to figure out how many primary and secondary reactions are associated with DBD process. Secondary, to find effective discharge method for $CF_4$ decomposition, a streamer and a glow mode in DBD are experimentally compared, which includes (i) coaxialcylinder DBD, (ii) DBD reactor packed with glass beads. and (iii) a glow mode operation with a helium gas. The test results showed that optimal concentration of oxygen was ranged 500 ppm~1% for treating 500 ppm of $CF_4$ and helium glow discharge was the most efficient one to decompose $CF_4$.