• Journal of the Korean Crystal Growth and Crystal Technology
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• 제10권1호
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• pp.5-12
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• 2000

As a semiconductor material for electronic devices operated under extreme environmental conditions, silicon carbides (SiCs) have been intensively studied because of their excellent electrical, thermal and other physical properties. The growth characteristics of single- crystalline 6H-SiC homoepitaxial layers grown by a thermal chemical vapor deposition (CVD) were investigated. Especially, the successful growth condition of 6H-SiC homoepitaxial layers using a SiC-uncoated graphite susceptor that utilized Mo-plates was obtained. The CVD growth was performed in an RF-induction heated atmospheric pressure chamber and carried out using off-oriented ($3.5^{\circ}$tilt) substrates from the (0001) basal plane in the <110> direction with the Si-face side of the wafer. In order to investigate the crystallinity of grown epilayers, Nomarski optical microscopy, transmittance spectra, Raman spectroscopy, XRD, Photoluninescence (PL) and transmission electron microscopy (TEM) were utilized. The best quality of 6H-SiC homoepitaxial layers was observed in conditions of growth temperature $1500^{\circ}C$ and C/Si flow ratio 2.0 of $C_3H_8$ 0.2 sccm & $SiH_4$ 0.3 sccm.

• Advances in environmental research
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• 제2권2호
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• pp.81-98
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• 2013

Mercury (Hg) dynamics in the boreal environment have been a subject of concern in recent decades, due to the exposure of local populations to the contaminant. Land use, because of its impact on mercury inputs, has been highlighted as a key player in the sources and eventual concentrations of the heavy metal. In order to evaluate the impact of watershed disturbances on Hg dynamics in frequently fished, large boreal lakes, we studied sediment cores retrieved at the focal point of eight large lakes of Qu$\acute{e}$bec (Canada), six with watersheds affected by land uses such as logging and/or mining, and two with pristine watersheds, considered as reference lakes. Using a Geographical Information System (GIS), we correlated the recent evolution of land uses (e.g., logging and mining activities) and morphological characteristics of the watershed (e.g., mean slope of the drainage area, vegetation cover) to total Hg concentrations (THg) in sedimentary records. In each core, THg gradually increased over recent years with maximum values between 70 and 370 ng/g, the lowest mercury concentrations corresponding to the pristine lake cores. The Hg Anthropogenic Sedimentary Enrichment Factor (ASEF) values range from 2 to 15. Surprisingly, we noticed that the presence of intense land uses in the watershed does not necessarily correspond to noticeable increases of THg in lake sediments, beyond the normal increment that can be attributed to Hg atmospheric deposition since the beginning of the industrial era. Rather, the terrestrial Hg inputs of boreal lakes appear to be influenced by watershed characteristics such as mean slopes and vegetation cover.

• Ecology and Resilient Infrastructure
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• 제2권3호
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• pp.237-246
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• 2015

Heavy metal pollution in soil, such as lead contamination, has become an area of interest in Korea because of urbanization and atmospheric deposition from neighboring countries. Therefore, in this research, eco-physiological responses such as chlorophyll contents, antioxidant enzyme activity, photosynthetic rate, biomass and phytoaccumulation abilities were investigated for 4 commonly used native roadside tree species to suggest suitable tree species to cope with lead contamination. The target species, Ginkgo biloba, Prunus yedoensis, Zelkova serrata and Chionanthus retusus showed lead toxicity by significant changes of chlorophyll contents and antioxidant enzyme activities on treatments over 200 mg Pb/kg. However, biomass and photosynthetic rates only showed significant responses of plants in the highest level (5,000 mg/kg) treatment. Especially, G. biloba did not show any significant changes of antioxidant enzyme activity, photosynthetic rate, and biomass even in the highest level treatment. In low level - environmentally realistic treatments, G. biloba and P. yedoensis showed the highest phytoaccumulation rate of lead from soil. Selecting and planting species like G. biloba which have good phytoaccumulation abilities and resistance to lead contamination by further research will be required to deal with emerging lead contamination.

• Tribology and Lubricants
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• 제21권3호
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• pp.107-113
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• 2005

Micro/nano adhesion and friction properties of self-assembled monolayers (SAMs) with different head- and end-group were experimentally studied according to the coating methods. Various kinds of SAM having different spacer chains (C10 and C18), head-group and end-group were deposited onto Si-wafer by dipping and chemical vapour deposition (CVD) methods under atmospheric pressure, where the deposited SAM resulted in the hydrophobic nature. The adhesion and friction properties between tip and SAM surfaces under nano scale applied load were measured using an atomic force microscope (AFM) and also those under micro scale applied load were measured using a ball-on-flat type micro-tribotester. Surface roughness and water contact angles were measured with SPM (scanning probe microscope) and contact anglemeter respectively. Results showed that water contact angles of SAMs with the end-group of fluorine show higher relatively than those of hydrogen. SAMs with the end-group of fluorine show lower nano-adhesion but higher micro/nanofriction than those with hydrogen. Water contact angles of SAMs coated by CVD method show high values compared to those by dipping method. SAMs coated by CVD method show the increase of nano-adhesion but the decrease of nano-friction. Nano-adhesion and friction mechanism of SAMs with different end-group was proposed in a view of size of fluorocarbon molecule.

• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.447-447
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• 2010

일찍이 $SiO_2$ (Silicon dioxide) 박막은 다양한 분야에서 유전층, 부식 방지층, passivation층 등의 역할을 해왔다. 그리고 이러한 박막 공정은 대부분 진공의 환경에서 그 공정이 이루어지고 있다. 하지만 이러한 진공 system은 chamber, loadlock 그리고 펌프 등의 다양한 진공장비로 인한 생산 비용 증가, 공정의 복잡성뿐만 아니라 공정의 대면적화에 어려움을 지니고 있다. 그리고 최근 flexible display의 제조 공정에서 polymer 혹은 plastic 기판을 제조 공정에 적용시키기 위해 저온 공정이 필수적으로 요구 되고 있다. 이러한 기술적 한계를 뛰어 넘기 위해 최근 많은 연구가들은 atmospheric pressure plasma enhanced chemical vapor deposition (AP-PECVD)에 대해 지속적으로 다양한 연구를 하고 있다. 본 연구에서는 remote-type의 modified pin-to-plate dielectric barrier discharge (DBD) 시스템을 이용한 $SiO_2$ 무기 박막 증착에 관해 연구하였다. $O_2$/He/Ar의 gas와 5 kV AC power (30 kHz)의 전원장치를 통해 고밀도 대기압 플라즈마를 발생시켰고, silicon precursor로는 hexamethyldisilazane (HMSD)를 사용하였다. 먼저 HMDS와 $O_2$ gas의 flow rate 변화에 따른 증착률을 조사하였고 그 다음으로 박막의 조성 및 표면 특성을 조사하였다. HMDS의 유량이 100 ~ 300 sccm으로 증가함에 따라 증착속도는 증가했다. 하지만 FT-IR을 통해 HMDS의 유량이 증가하면 반응에 참여할 산소 분자의 부족으로 인해 $-(CH_3)_X$의 peak intensity가 증가하고, -OH의 peak intensity가 점차 감소함을 관찰 할 수 있었다. 또한 증착된 박막의 표면에 particle과 불균일한 surface morphology 등을 SEM image를 통해 관찰 하였다. 산소 유량이 탄소와 관련된 많은 불순물들의 제거에 도움이 됨에도 불구하고 14 slm 이상의 산소가 반응기 내로 주입되게 되면 대기압 플라즈마의 discharge가 불안정하게 되어 공정효율을 저하시키는 요소가 되었다. 결과적으로 HMDS (150 sccm)/$O_2$ (14 slm)/He (5 slm)/Ar (3 slm)의 조건에서 약 42.7 nm/min 증착률을 가지며, 불순물이 적고 surface morphology가 깨끗한 $SiO_2$ 박막을 증착할 수 있었다.

• Korean Journal of Ecology and Environment
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• 제41권1호
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• pp.66-72
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• 2008

Total metals, soluble metals, and bioavailable metals were monitored at the sediments of urban lakes located in Seoul, Korea during spring season 2006. The metals measured were zinc, arsenic, chromium, copper, nickel, and cadmium, which are known to be toxic to human health and ecosystems. The main sources of heavy metals in the lakes were urban runoff and atmospheric deposition associated with air pollution in urban areas. Extraction by using a weak electrolyte solution (0.1 M $Ca(NO_3)_2$) was used to predict bioavailability of the metals. Among the six heavy metals studied, copper was the most bioavailable, based the weak electrolyte extraction techniques. Since metal toxicity is related to metal bioavailability, the results were consistent with the high ecotoxicity of copper, compared to other heavy metals. Overall results suggest that there was no direct relationship between total and bioavailable metal concentration, although zinc, copper and cadmium show some relationships.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• 제17권3호
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• pp.299-311
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• 2019

Decommissioning is a critical issue in Korea. Although compared with the operation of nuclear power plants the release of radioactive materials during decommissioning is not expected to be significant, residents should always be protected from radiation exposure. To manage this effectively, Annual Release Objectives (ARO) and Annual Release Limits (ARL) were derived from dose standards in the NSSC Notice and dose limit for the public. Based on meteorological data for the three years from 2008 to 2010 in the Shin Kori nuclear power plant site, atmospheric dispersion and ground deposition factors of gaseous effluent were evaluated using the XOQDOQ computer code. The exposure dose was evaluated using the ENDOS-G computer code. Because of differences in radiological sensitivity according to age groups, the results of Annual Release Objectives (ARO) and Annual Release Limits (ARL) showed significant differences depending on the radionuclides. The evaluation methodology of this study will provide meaningful information for radioactive effluent management for decommissioning of nuclear power plants.

• Applied Chemistry for Engineering
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• 제22권1호
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• pp.31-36
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• 2011

Tetrafluoromethane ($CF_4$) has been used as the plasma etching and chemical vapor deposition (CVD) gas for semiconductor manufacturing processes. However, the gas need to be removed efficiently because of their strong absorption of infrared radiation and the long atmospheric lifetime which cause global warming effects. A waterjet gliding arc plasma system in which plasma is combined with the waterjet was developed to effectively produce OH radicals, resulting in efficient destruction of $CF_4$ gas. Design factors such as electrode shape, electrode angle, gas nozzle diameter, electrode gap, and electrode length were investigated. The highest $CF_4$ destruction of 93.4% was achieved at Arc 1 electrode shape, $20^{\circ}$ electrode angle, 3 mm gas nozzle diameter, 3 mm electrode gap and 120 mm electrode length.

• Asia-Pacific Journal of Atmospheric Sciences
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• 제54권4호
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• pp.587-598
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• 2018

The impacts of aerosol loading on surface precipitation from mid-latitude deep convective systems are examined using a bin microphysics model. For this, a precipitation case over north central Mongolia, which is a high-altitude inland region, on 21 August 2014 is simulated with aerosol number concentrations of 150, 300, 600, 1200, 2400, and $4800cm^{-3}$. The surface precipitation amount slightly decreases with increasing aerosol number concentration in the range of $150-600cm^{-3}$, while it notably increases in the range of $600-4800cm^{-3}$ (22% increase with eightfold aerosol loading). We attempt to explain why the surface precipitation amount increases with increasing aerosol number concentration in the range of $600-4800cm^{-3}$. A higher aerosol number concentration results in more drops of small sizes. More drops of small sizes grow through condensation while being transported upward and some of them freeze, thus increasing the mass content of ice crystals. The increased ice crystal mass content leads to an increase in the mass content of small-sized snow particles largely through deposition, and the increased mass content of small-sized snow particles leads to an increase in the mass content of large-sized snow particles largely through riming. In addition, more drops of small sizes increase the mass content of supercooled drops, which also leads to an increase in the mass content of large-sized snow particles through riming. The increased mass content of large-sized snow particles resulting from these pathways contributes to a larger surface precipitation amount through melting and collision-coalescence.

• Journal of Sensor Science and Technology
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• 제33권1호
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• pp.24-29
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• 2024

Inkjet printing technology is used to mass-produce displays and electrochemical sensors by dropping tens of pico-liters or less of specific-purpose ink through nozzles, just as ink is sprayed and printed on paper. Unlike the deposition method for vaporizing material in a vacuum, inkjet printing technology can be used for processing even under general atmospheric pressure and has a cost advantage because the material is dissolved in a solvent and used in the form of ink. In addition, because it can only be printed on the desired part, masks are not required. However, a technical shortcoming is the difficulty for commercialization, such as uniformity for forming the thickness and coffee ring effect. As sizes of devices decrease, the need to print electrodes with precision, thinness, and uniformity increases. In this study, we improved the printing and processing conditions to form a homogeneous electrode using Ag ink (DGP-45LT-15C) and applied this for patterning to fabricate a heat sensor. Upon the application of voltage to the heat sensor, the model with an extended width exhibited superior heat performance. However, in terms of sheet resistance, the model yielded an equivalent value of 21.6 Ω/□ compared to the ITO.