• Title/Summary/Keyword: Atmospheric deposition

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A Study of Characteristic based on Working Pressure of ITO Electrode for Display (디스플레이용 ITO 전극의 동작 압력에 따른 특성 연구)

  • Kim, Hae-Mun;Park, Hyung-Jun
    • Journal of IKEEE
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    • v.20 no.4
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    • pp.392-397
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    • 2016
  • In this paper, Characteristics of the ITO thin film deposited were analyzed using DC magnetron sputtering in order to investigate the deposition conditions of ITO thin film for transparent electrode. The experiment conditions were atmospheric pressure from 1 to 3[mTorr] with 1 [mTorr] step, bias electric voltage ranged from 260[V] to 330[V] with 10[V] step. The transmittance, refractive index and surface and cross-sectional shape of the deposited thin film were measured with an UV.-VIS. spectrophotometer, ellipsometer and SEM. Such condition as 1~2[mTorr] and near 300[V] voltage the transmittance was over 90[%] and the refractive index more than 2. Therefore, it was confirmed that the appropriate condition for making a highly transparent conductive electrode.

Fabrication and yield improvement of oxide semiconductor thin film gas sensor array (산화물 반도체 박막 가스센서 어레이의 제조 및 수율 개선)

  • 이규정;류광렬;허창우
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.6 no.2
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    • pp.315-322
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    • 2002
  • A thin film oxide semiconductor micro gas sensor array which shows only 60㎽ of power consumption at an operating temperature of 30$0^{\circ}C$ has been fabricated using microfabrication and rnicrornachining techniques. Excellent thermal insulation of the membrane is achieved by the use of a double la! or structure of 0.1${\mu}{\textrm}{m}$ thick Si$_3$N$_4$ and 1${\mu}{\textrm}{m}$ thick phosphosilicate glass(PSG) prepared by low pressure chemical vapor deposition(LPCVD) and atmospheric-pressure chemical-vapor deposition(APCVD), respectively. The sensor way consists of such thin film oxide semiconductor sensing materials as 1wt.% Pd-doped SnO$_2$, 6wt.% AI$_2$O$_3$-doped ZnO, WO$_3$ and ZnO. The thin film oxide semiconductor micro gas sensor array exhibited resistance changes usable for subsequent data processing upon exposure to various gases and the sensitivity strongly depended on the sensing layer materials. Heater Part of the sensor structure has been modified in order to improve the process yield of the sensor, and as a result of modified heater structure improved process yield has been achieved.

The Nitrogen Behavior and Budget in Lake Paldang (팔당호의 질소거동과 수지)

  • Lee, Jangho;Park, Hae-Kyung;Lee, Kyoo;Kim, Eunmi
    • Journal of Korean Society on Water Environment
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    • v.26 no.1
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    • pp.71-80
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    • 2010
  • We studied the nitrogen behavior and budget of Lake Paldang from March to December 2008. The particulate nitrogen (PN) concentrations ranged from 7 to 13% of the total nitrogen concentration (TN) in the stream inflows, the downstream outflow, and the lake water. The nitrate nitrogen ($NO_3-N$) concentration ranged from 67 to 78% of the TN. In the three rivers of Lake Paldang, Gyeongan River (In3 site) had the highest average of the TN, 5.037 mgN/L, but North Han River (In2 site) had the lowest average TN, 1.683 mgN/L. South Han River (In1 site) had the average TN of 2.399 mgN/L. In the dam discharge, TN showed the average 2.063 mgN/L. In the lake water, L4 site (Gyeongan River area) had the highest average TN, 3.781 mgN/L, but L3 site (North Han River) had the lowest average TN, 1.587 mgN/L. Total input of nitrogen loads to Lake Paldang was about 30,875 ton/year in 2008. Inflow rivers contributed 30,643 ton/year (South Han River: 18,111 ton/year (59%), North Han River: 11,333 ton/year (37%), and Gyeongan River: 1,199 ton/year (4%)). The atmospheric deposition had 135 ton/year, the nitrogen release from the bottom sediments had 88 ton/year, and macrophytes had 9 ton/year. Total output of nitrogen loads from Lake Paldang was about 31,256 ton/year. The downstream from dam contributed 29,877 ton/year, and the sediment deposition was 1,379 ton/year.

Characteristics of PCDD/Fs Deposited on Pine Needles and Soil (소나무잎과 토양에 침착된 PCDD/Fs 특성)

  • Chun, Man-Young;Yeo, Hyun-Gu
    • Korean Journal of Environmental Agriculture
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    • v.24 no.3
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    • pp.280-288
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    • 2005
  • The aim of this study was to investigate deposition characteristics of atmospheric PCDD/Fs on pine needles and soil. Concentration of PCDD/Fs on soil were higher than those in pine needles, being 7.4 times for ${\Sigma}PCDDs$, 2.3 times for ${\Sigma}PCDFs$, and 5.4 times for ${\Sigma}PCDD/Fs$ respectively. The ratios of the concentration of each homologue in soil to that in pine needles increased as the number of chlorine atoms increased. The concentration (%) of each congener to ${\Sigma}PCDD/Fs$ was higher in the one with a small number of chlorine atoms substituted, such as tetra- to hexa-homologues in pine needle samples and in one with a large number of chlorine atoms, such as hepta- to octa-homologues in soil samples. Lower-chlorinated homologues of PCDD/Fs were mainly accumulative deposited in pine needles, whereas higher-chlorinated ones were on soil.

Optimized Decomposition of Ammonia Borane for Controlled Synthesis of Hexagonal Boron Nitride Using Chemical Vapor Deposition

  • Han, Jaehyu;Kwon, Heemin;Yeo, Jong-Souk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.285-285
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    • 2013
  • Recently, hexagonal boron nitride (h-BN), which is III-V compound of boron and nitride by strong covalent sp2 bonds has gained great interests as a 2 dimensional insulating material since it has honeycomb structure with like graphene with very small lattice mismatch (1.7%). Unlike graphene that is semi-metallic, h-BN has large band gap up to 6 eV while providing outstanding properties such as high thermal conductivity, mechanical strength, and good chemical stability. Because of these excellent properties, hBN can potentially be used for variety of applications such as dielectric layer, deep UV optoelectronic device, and protective transparent substrate. Low pressure and atmospheric pressure chemical vapor deposition (LPCVD and APCVD) methods have been investigated to synthesize h-BN by using ammonia borane as a precursor. Ammonia borane decomposes to polyiminoborane (BHNH), hydrogen, and borazine. The produced borazine gas is a key material that is a used for the synthesis of h-BN, therefore controlling the condition of decomposed products from ammonia borane is very important. In this paper, we optimize the decomposition of ammonia borane by investigating temperature, amount of precursor, and other parameters to fabricate high quality monolayer h-BN. Synthesized h-BN is characterized by Raman spectroscopy and its absorbance is measured with UV spectrophotometer. Topological variations of the samples are analyzed by atomic force microscopy. Scanning electron microscopy and Scanning transmission Electron microscopy are used for imaging and analysis of structures and surface morphologies.

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Effect of Urban Parks on Carbon and PM2.5 Reduction in Gangneung

  • Choi, Seong-Gyeong;Jo, Hyun-Kil
    • Journal of Forest and Environmental Science
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    • v.38 no.1
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    • pp.64-73
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    • 2022
  • Increasing carbon and PM2.5 concentrations have been emerging as serious environmental issues worldwide. The purpose of this study was to quantify carbon and PM2.5 reduction by urban parks in Gangneung, Korea. A total of 35 parks were sampled by applying a random sampling method to survey tree planting structures and the areal distribution of land cover types of urban parks. These survey data and the Green Evaluation Technique (GET) computer program were used to estimate carbon and PM2.5 reduction by trees. Mean tree density and cover in the study parks were 3.5±0.2 tree/100 m2 and 44.5±3.0%, respectively. Annual carbon uptake and PM2.5 deposition per unit area by trees averaged 2.8±0.2 t/ha/yr and 30.2±2.8 kg/ha/yr. Gangneung's urban parks annually offset the carbon emissions by 3.4% and the PM2.5 emissions by 3.5%. Thus, urban parks played a significant role in reducing atmospheric carbon and PM2.5 concentrations. Total annual carbon uptake and PM2.5 deposition of urban parks in Gangneung were about 1,338.2 t/yr and 14,433.2 kg/yr. This study is expected to contribute to raising awareness of the role and importance of urban parks regarding carbon and PM2.5 reduction.

Chemical Vapor Deposition of High-Quality MoSe2 Monolayer and Its Application to van der Waals Heterostructure-Based High-Performance Field-Effect Transistors (화학기상증착법을 통한 고품질 단층 MoSe2합성 및 반데르발스 수직이종 접합 구조 기반 고성능 트랜지스터 제작)

  • Si Heon Lim;Sun Woo Kim;Seon Yeon Choi;Hyun Ho Kim
    • Journal of Adhesion and Interface
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    • v.24 no.1
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    • pp.36-40
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    • 2023
  • A van der Waals material refers to a material having a two-dimensional layered structure composed of van der Waals bonds with weak interlayer bonding. The research based on heterojunction structures using such van der Waals two-dimensional materials has been steadily studied since the discovery of graphene. Herein, this paper reports a van der Waals heterojunction -based field-effect transistor device based on monolayer single crystalline MoSe2 grown by atmospheric pressure chemical vapor deposition. We found that MoSe2 grown under optimized process conditions did not have atomic-level defects and the transistor devices incorporating MoSe2 also showed excellent characteristics.

Prediction of radioactivity releases for a Long-Term Station Blackout event in the VVER-1200 nuclear reactor of Bangladesh

  • Shafiqul Islam Faisal ;Md Shafiqul Islam;Md Abdul Malek Soner
    • Nuclear Engineering and Technology
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    • v.55 no.2
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    • pp.696-706
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    • 2023
  • Consequences of an anticipated Beyond Design Basis Accident (BDBA) Long-Term Station Blackout (LTSBO) event with complete loss of grid power in the VVER-1200 reactor of Rooppur Nuclear Power Plant (NPP) of Unit-1 are assessed using the RASCAL 4.3 code. This study estimated the released radionuclides, received public radiological dose, and ground surface concentration considering 3 accident scenarios of International Nuclear and Radiological Event Scale (INES) level 7 and two meteorological conditions. Atmospheric transport, dispersion, and deposition processes of released radionuclides are simulated using a straight-line trajectory Gaussian plume model for short distances and a Gaussian puff model for long distances. Total Effective Dose Equivalent (TEDE) to the public within 40 km and radionuclides contribution for three-dose pathways of inhalation, cloudshine, and groundshine owing to airborne releases are evaluated considering with and without passive safety Emergency Core Cooling System (ECCS) in dry (winter) and wet (monsoon) seasons. Source term and their release rates are varied with the functional duration of passive safety ECCS. In three accident scenarios, the TEDE of 10 mSv and above are confined to 8 km and 2 km for the wet and dry seasons, respectively in the downwind direction. The groundshine dose is the most dominating in the wet season while the inhalation dose is in the dry season. Total received doses and surface concentration in the wet season near the plant are higher than those in the dry season due to the deposition effect of rain on the radioactive substances.

Change in Water Contact Angle on Electrospray-Synthesized SiO2 Coated Layers by Plasma Exposure (플라즈마 조사에 의한 전기분무합성 SiO2 코팅층의 물접촉각 변화)

  • Kim, Jae-Hun;Lee, Junseong;Kim, Ji Yeong;Kim, Sang Sub
    • Korean Journal of Materials Research
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    • v.24 no.11
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    • pp.639-643
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    • 2014
  • Hydrophilic $SiO_2$ layers were obtained by the atmospheric-pressure plasma treatment. Superhydrophobic $SiO_2$ layers were first deposited by the electrospray deposition method. The electrospunable solution that was prepared based on the solgel method was sprayed on Si (100) substrates. The surface of the electrosprayed $SiO_2$ layers consisted of the agglomeration of nano-sized grains, which led to a very high roughness and revealed a very high contact angle to water droplets over $162^{\circ}$. After having been exposed to the atmospheric $Ar/O_2$ plasma, the observed superhydrophobicity of the $SiO_2$ layers were greatly changed: a dramatic variation of the water contact angle from $162^{\circ}$ to $3^{\circ}$, namely realization of superhydrophillicity. Interestingly, the surface microstructure was almost preserved. According to the XPS analysis, it is more likely that thanks to the plasma exposure, the surface of $SiO_2$ layers will be cleaned in terms of organic species that are hydrophobic-inducing, consequently leading to the hydrophilic nature observed for the plasma-exposed $SiO_2$ layers.

Decomposition Characteristics of PFCs for Various Plasma Discharge Methods in Dielectric Barrier Discharge (DBD 반응기에서 플라즈마 방전형태에 따른 PFCs 가스의 분해 특성)

  • Kim, Kwan-Tae;Kim, Yong-Ho;Cha, Min-Suk;Song, Young-Hoon;Kim, Seock-Joon;Ryu, Jeong-In
    • Journal of Korean Society for Atmospheric Environment
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    • v.20 no.5
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    • pp.625-632
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    • 2004
  • Perfluorocompounds ($PFC_s$), such as tetrafluoromethane ($CF_4$) and hexafluoroethane ($C_2F_6$), have been widely used as plasma etching and chemical vapor deposition (CVD) gases for semiconductor manufacturing processes. Since these $PFC_s$ are known to cause a greenhouse effect intensively, there has been a growing interest in reducing $PFC_s$ emissions. Among various $CF_4$ decomposing techniques, a dielectric barrier discharge (DBD) is considered as one of a promising candidate because it has been successfully used for generating ozone ($O_3$) and decomposing nitrogen oxide (NO). Firstly, optimal concentration of oxygen for $CF_4$ decomposition was found to figure out how many primary and secondary reactions are associated with DBD process. Secondary, to find effective discharge method for $CF_4$ decomposition, a streamer and a glow mode in DBD are experimentally compared, which includes (i) coaxialcylinder DBD, (ii) DBD reactor packed with glass beads. and (iii) a glow mode operation with a helium gas. The test results showed that optimal concentration of oxygen was ranged 500 ppm~1% for treating 500 ppm of $CF_4$ and helium glow discharge was the most efficient one to decompose $CF_4$.