• Applied Microscopy
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• 제44권3호
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• pp.100-104
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• 2014

As decreasing device size, probing of nanoscale surface properties becomes more significant. In particular, nanoscale probing of surface potential has paid much attention for understanding various surface phenomena. In this article, we review different atomic force microscopy techniques, including electrostatic force microscopy and Kelvin probe force microscopy, for measuring surface potential at the nanoscale. The review could provide fundamental information on the probing method of surface potential using atomic force microscopy.