• Journal of the Korean Society for Precision Engineering
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• v.21 no.1
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• pp.40-45
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• 2004

Recently, aspheric optical lenses and mirrors, which are harder to manufacture and measure than the conventional spherical ones, are widely used, particularly in electronic fabrication process. Generally, interferometric optical method is used for the measurement of spherical optical surface. However, the interferometric method for aspheric surface measurement is difficult because it needs a precise null corrector and strict environmental conditions such as constant temperature, humidity and vibrations. We have been studied on the manufacturing of aspheric optics to improve the surface profile accuracy and productivity using a corrective polishing process. For the corrective polishing, a practical method of On-Machine Measurement (OMM) is required. For this purpose, an optical OMM system has been studied using the Shach-Hartmann test, which is very robust to the practical polishing environment. The wavefront has been reconstructed from the measured data using the primary aberration polynomial function by the least squares fitting. The measured result of the OMM system shows that the maximum deviation is less than 200 nm for the one of commercial Fizeau interferometer Wyko 6000.

• Korean Journal of Optics and Photonics
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• v.15 no.4
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• pp.313-320
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• 2004

We present a null testing method fer aspheric surfaces, utilizing a phase-shifting diffraction grating interferometer along with a binary amplitude computer generated hologram (CGH). The binary amplitude CGH is designed to compensate for the wavefront between a point source and the aspheric surface under test. The fringe visibility of the grating interferometer is controlled easily by selecting suitable grating diffraction orders for the measurement and reference wavefronts or by optimizing the groove shape of the grating used. The binary amplitude CGH is designed by numerical analysis of ray tracing and fabricated using e-beam lithography for autostigmatic testing. Experimental results of a large-scale aspheric mirror surface are discussed to verify the measurement performance of the proposed diffraction grating interferometer.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.5 s.236
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• pp.726-733
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• 2005

A spherical surface referenced Shack-Hartmann method is studied for inspecting machining accuracy of large concave mirror This method is so strong to the vibration environment for using as an on-machine inspection system during polishing process of large optics comparing with the interferometry. The measuring uncertainty of the system is shown as less than p-v 150 m. On-machine measured surface profile data with this method is used for feed back control of the polishing time or depth to improve the surface profile accuracy of large concave mirror. Also, the spherical surface referenced Shack-Hartmann method is useful for measuring aspheric such as parabolic or hyperbolic surface profile, comparing that the interferomehy needs a special null lens, which is to be a reference and difficult to fabricate.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.237-238
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• 2007

• Journal of the Optical Society of Korea
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• v.16 no.3
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• pp.243-246
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• 2012

An off-axis four-mirror-anastigmatic telescope is presented here which is composed of two aspheric surfaces and two spherical surfaces. The entrance pupil diameter is 290 mm and the stop is located at the primary mirror. The effective focal length is 900 mm. The strip field of view for the telescope is $15^{\circ}{\times}0.2^{\circ}$ and if the telescope is launched into an orbit about 400 km altitude, the observed range width will be more than 105 km within a scene without any other auxiliary scanning instrument. The spectral range can be as wide as from visual wave band to infrared wave band in the mirror system. This telescope can be used for environmental monitoring with different detectors whose pixel is adapted to the optical resolution. In this paper, the spectral range is chosen as 3.0 -5.0 ${\mu}m$, and center distance of the pixel is 30 ${\mu}m$. And the image quality is near the diffraction limit.

• Journal of Korean Ophthalmic Optics Society
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• v.12 no.4
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• pp.83-86
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• 2007

In this study, a program has been developed to enable a simulation of spherical aberration - originated from a spherical surface and an aspheric surface - via ray tracing and calculation of the degree of spherical aberration. This process has been verified for the variation of spherical aberration generated from ray tracing for aspheric surfaces such as an oval, a parabola, and a hyperbola. By comparing it with the spherical surface, the principle and necessity of the aspheric surface lens design have been understood. In addition, it allows confirming the accuracy of the simulation by developing a ray tracing program in relation to the mirror plane of a parabola.

• Bulletin of the Korean Space Science Society
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• 2010.04a
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• pp.25.3-25.3
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• 2010

Our previous study used a bar-type reference mirror to measure the relative distance to the target surface. The target measurement accuracy was required to $1{\mu}m$ PV for aspheric optical surface up to 1m in diameter. Earlier system suffers from the reference surface deformation when the measuring part moves. In order to reduce the deformation, measuring part and the reference part separated from each order in the new design. This system utilizes a kinematic support assembly using invar flexure to minimize the reference surface deformation under gravity and vibration. The surface deformation requirement of reference mirror is defined as of $0.2{\mu}m$ under gravity and 40Hz vibration. The finite element results, shows reference mirror deformation of $0.164{\mu}m$. The first resonance mode was computed to analysis 46.05Hz for reference part and 43.44Hz for measuring part. Thesis satisfies the frequency requirement.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.6 s.183
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• pp.22-28
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• 2006

• Journal of the Korean Society for Precision Engineering
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• v.24 no.2 s.191
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• pp.19-24
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• 2007

• Korean Journal of Optics and Photonics
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• v.31 no.6
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• pp.328-333
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• 2020

In this paper, we study the analysis method for the aspherical tolerance of a Korsch telescope using a Q polynomial. It is important to analyze the tolerances for evaluating quality in high-precision fabrication of aspherical reflectors for high-resolution satellites. Thus we express the aspheric surface in terms of a Q polynomial in which each coefficient term is composed independently, and analyze the tolerance of a Korsch telescope. We also analyze the tolerance using Zernike fringe sag, which expresses the shape error of an aspherical mirror. By comparing the two results, we confirm that the Q-polynomial method can be used to analyze an aspherical mirror.