• Journal of the Korean Society for Nondestructive Testing
• /
• v.14 no.4
• /
• pp.219-227
• /
• 1995

A two-dimensional photoacoustic microscope utilizing photoacoustic signals generated by periodic heating of specimen surface with Argon ion laser and measured by accelerometer has been developed. Several aluminum specimens with various defects have been examined, characteristics of the microscope have been evaluated and optimal experimental conditions have been determined by examining the dependence on several experimental conditions including the modulation frequency and the beam width of laser.

• Journal of the Korean institute of surface engineering
• /
• v.29 no.5
• /
• pp.577-584
• /
• 1996

Silicon oxide films with high hardness and water repellency were prepared by microwave plasma-enhanced CVD using four kind of organosilicon compound-fluoro-alkyl silane mixtures as source gases. An argon gas was used as a carrier gas for fluoro-alkyl silane. The substrate temperatures during deposition were controlled by resistant heating at a constant value between 50 and $300^{\circ}C$. The hardness of the films increased, but the deposition rate and the contact angle for a water drop decreased with increasing substrate temperature. The number of methoxy groups also affected the water repellency and hardness. The deposited films became more inorganic with increasing substrate temperature because of the thermal dissociation of reactants.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.179-179
• /
• 2016

A radio-frequency (RF) Inductively Coupled Plasma (ICP) torch system was used for boron-nitride nano-tube (BNNT) synthesis. Because of electrodeless plasma generation, no electrode pollution and effective heating transfer during nano-material synthesis can be realized. For stable plasma generation, argon and nitrogen gases were injected with 60 kW grid power in the difference pressure from 200 Torr to 630 Torr. Varying hydrogen gas flow rate from 0 to 20 slpm, the electrical and optical plasma properties were investigated. Through the spectroscopic analysis of atomic argon line, hydrogen line and nitrogen molecular band, we investigated the plasma electron excitation temperature, gas temperature and electron density. Based on the plasma characterization, we performed the synthesis of BNNT by inserting 0.5~1 um hexagonal-boron nitride (h-BN) powder into the plasma. We analysis the structure characterization of BNNT by SEM (Scanning Electron Microscopy) and TEM (Transmission Electron Microscopy), also grasp the ingredient of BNNT by EELS (Electron Energy Loss Spectroscopy) and Raman spectroscopy. We treated bundles of BNNT with the atmospheric pressure plasma, so that we grow the surface morphology in the water attachment of BNNT. We reduce the advancing contact angle to purity bundles of BNNT.

• Journal of the Korean institute of surface engineering
• /
• v.53 no.3
• /
• pp.116-123
• /
• 2020

Ion beam irradiation induces self-organization of nanostructure on the surface of polymer film. We show that the incident angle of Ar ions on polyethylene naphthalate(PEN) film changes self-organized nanostructure. PEN film was irradiated by argon ion beams with the ion incident angle of 0°, 30°, 45°, 60°, and 80°. Nanostructure was altered from dimple to ripple structure as the angle increases. The ripple structure changed to pillar structure after 60°due to that the shallow incident angle increased the ion energy transfer per depth up to 50 eV/Å, which value could induce excessive surface heating and oligomer formation reacting as a physical mask for anisotropic etching. And quantitative analysis of the nanostructures was adapted by using ABC model and fractal dimension theory.

• Journal of the Korean institute of surface engineering
• /
• v.39 no.5
• /
• pp.206-209
• /
• 2006

Indium tin oxide (ITO) films were synthesized on polymer (PES, polyethersulfone) at room temperature by pulsed DC magnetron sputtering. By the control of introducing hydrogen to argon atmosphere, the resistivity of ITO films was obtained at $5.27\;{\times}\;10^{-4}\;{\Omega}{\cdot}cm$ without substrate heating in comparison with $2.65\;{\times}\;10{-3}\;{\Omega}{\cdot}cm$ under hydrogen free condition. ITO film synthesized at Ar condition was changed from amorphous to crystalline. These result from the enhancement of electron temperature in $Ar\;+\;H_2$ plasma, which induces the increase of ionization of target materials and argon. The dominant increase of ions such as In II and O II and neutral Sn I was monitored by optical emission spectroscopy (OES). Thermal energy required for the crystalline film formation is compensated by kinetic energy transfer through ion bombardments to substrate.

• Korean Journal of Materials Research
• /
• v.30 no.9
• /
• pp.489-494
• /
• 2020

SiC is a material with excellent strength, heat resistance, and corrosion resistance. It is generally used as a material for SiC invertors, semiconductor susceptors, edge rings, MOCVD susceptors, and mechanical bearings. Recently, SiC single crystals for LED are expected to be a new market application. In addition, SiC is also used as a heating element applied directly to electrical energy. Research in this study has focused on the manufacture of heating elements that can raise the temperature in a short time by irradiating SiC-I₂ with microwaves with polarization difference, instead of applying electric energy directly to increase the convenience and efficiency. In this experiment, Polydimethylsilane (PDMS) with 1,2 wt% of iodine is synthesized under high temperature and pressure using an autoclave. The synthesized Polycarbosilane (PCS) is heat treated in an argon gas atmosphere after curing process. The experimental results obtain resonance peaks using FT-IR and UV-Visible, and the crystal structure is measured by XRD. Also, the heat-generating characteristics are determined in the frequency band of 2.45 GHz after heat treatment in an air atmosphere furnace.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 1992.05b
• /
• pp.126-126
• /
• 1992

Solid and liquid sintering behaviors of mechanically alloyed 75W-25Cu powders have been studied by using a dilatometry technique. The sintering was performed under hydrogen atmosphere of 1 atm with a heating rate of 3 $^{\circ}C$/min. The mechanically alloyed 75W-25Cu powders were prepared by high energy ball milling process under argon atmosphere of 1 atm with alloying times of 0 to 400 h. To compare with the sintering behaviors of mechanically alloyed powders, pure Cu and W powders were also sintered under the above conditions, As the mechanical alloying time increased from 0 to 400 h, the shrinkage behavior of the alloyed powders was enhanced during the sintering, and staring temperature of liquid sintering decreased from 1083 to 1068 $^{\circ}C$. The saturation temperature, above which the shrinkage was completed, of liquid phase sintering decreased from 1248 to 1148 $^{\circ}C$ with increasing mechanical alloying time from 200 to 400 h. The residual stress of the mechanically alloyed powder was measured by X-raydiffractometer. The microstructure of sintered spcimen was observed by optical and scanning electron microscope. From these results, variations of solid and liquid sintering behaviors with mechanical alloying time were discussed in terms of the amount of residual stress and the distribution of W and Cu powders in the mechanically alloyed powder.

• Journal of the Korean Ceramic Society
• /
• v.32 no.6
• /
• pp.659-668
• /
• 1995

Zirconium carbide was prepared from the mixture of metal zirconium and carbon powders in argon atmosphere by Self-propagating High-temperature Synthesis (SHS) in order to obtain the best carbon source and dilution contents. The most exellent result was obtained in the case that active carbon was added as a starting material, 20~30 wt% dilution content. From thermal profile analysis an apparent activation energy of 118 KJ/mol was calculated. The maximum heating rate achieved during 15 wt% ZrC reaction by product dilution method was approximately 1.54$\times$105 K/s. Coupling this value with the measured wave velocity of 1.026cm/s yielded a maximum thermal gradient fo $1.5\times$105 K/cm. Using the definition of t* and the measured wave velocity, the effective thermal diffusivity, $\alpha$, was calculated to be 0.62$\times$102 $\textrm{cm}^2$/s.

• KIEE International Transactions on Electrophysics and Applications
• /
• v.2C no.5
• /
• pp.246-252
• /
• 2002

Two-dimensional steady state simulations of planar type radio frequency inductively coupled plasma (RFICP) have been performed. The characteristics of RFICP were investigated in terms of power transfer efficiency, equivalent circuit analysis, spatial distribution of plasma density and electron temperature. Plasma density and electron temperature were determined from the equations of ambipolar diffusion and energy conservation. Joule heating, ionization, excitation and elastic collision loss were included as the source terms of the electron energy equation. The electromagnetic field was calculated from the vector potential formulation of ampere's law. The peak electron temperature decreases from about 4eV to 2eV as pressure increases from 5 mTorr to 100 mTorr. The peak density increases with increasing pressure. Electron temperatures at the center of the chamber are almost independent of input power and electron densities linearly increase with power level. The results agree well with theoretical analysis and experimental results. A single turn, edge feeding antenna configuration shows better density uniformity than a four-turn antenna system at relatively low pressure conditions. The thickness of the dielectric window should be minimized to reduce power loss. The equivalent resistance of the system increases with both power and pressure, which reflects the improvement of power transfer efficiency.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.11a
• /
• pp.611-615
• /
• 2004

In recent, there have been several developments in lamp technology that promise savings in electrical power consumption and improved quality of the lighting space. Above all, Electrodeless fluorescent lamp is the removal of internal electrodes and heating filaments that are a light-limiting factor of conventional fluorescent lamps. The electrodeless fluorescent lamp is intended as a high efficacy replacement for the incandescent reflector lamp in many applications. Therefore, the electrodeless fluorescent lamps is substantially higher than that of conventional fluorescent lamps and last up to 60,000 hours. In this paper, electron temperature and electron density were measured in a radio-frequency inductively coupled plasma using a Langmuir probe method for emission characteristics. Measurement was conducted in an argon discharge for pressure from 10 [mTorr] and input RF power 100 [W] to 150 [W]. As for the electron density, a electron temperature was more distinguished for a emission characteristic. The results of ideal may contribute to systematic understanding of a electrodeless fluorescent lamps of emission characteristics.