• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.155-155
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• 2016

DLC (Diamond like Carbon)는 Diamond와 유사한 물리화학적 특성을 보유한 막으로 고경도 및 우수한 내마모성, 화학적 안정성의 특성을 가지고 있다. DLC는 크게 카본의 막 형성 공정에서 카본 소스에 따라 수소가 포함된 DLC와 무수소 DLC 로 구분된다. Tetrahedral amorphous carbon (ta-C) 박막은 DLC 박막 중에서 가장 다이아몬드와 유사한 특성을 가지는 박막으로, a:C-H에 비해 고온안정성, 높은 경도 (30~80 GPa) 및 내마모 특성이 우수하여, 현재 다양한 응용분야에 적용되고 있으며, 최근에는 고내구성을 보유하면서 전기적 특성을 가지는 기능성 DLC막의 요구가 증대하고 있다. 본 연구에서는 무수소 DLC 형성을 위해 자장필터가 장착된 Filtered Vacuum Arc Source (FVAS)를 자체적으로 개발하여 연구를 수행하였다. FVAS 장비는 카본 이온 발생부와 Plasma Duct 부위, 전자석부위 구성되어 있으며, 본 연구에서는 Plasma Duct 부위의 Bias 제어를 통한 음극에서 기판으로 이동하는 카본이온의 에너지 및 flux 변화를 통해 ta-C 막의 전기적, 기계적 물성 연구를 진행하였다. Plasma Duct Bias 변화는 각 0 ~ 20 V 조건으로 진행하였으며, 물성 평가는 경도 (Hardness), 마찰계수, 전기적 특성에 대한 분석을 진행하였다. 박막의 증착 거동에서는 Plasma Duct bias 변화에 따라 10 V에서 가장 높은 증착 거동을 가지다 감소하는 경향을 확인 하였으며, 박막의 물성 특성 평가 시에도 이와 유사하게 특성의 차이를 관찰하였다. 이는 음극부위에서 형성된 카본이온이 기판에 도달 시에 Plasma Duct Bias 변화에 따라 이온의 Flux 및 에너지 변화로 인한 박막의 밀도 및 ta-C 막의 물성 변화로 예상되며, 이를 분석하기 위해 라만 분석법을 통해 증명하였다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2001.06a
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• pp.3-3
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• 2001

Recently TiN, TiAlN, CrN hardcoatings have adapted many industrial application such as die, mold and cutting tools because of good wear resistant and thermal stability. However, in terms of high speed process, general hard coatings have been limited by oxidation and thermal hardness drop. Especially in the case of PCB drill, high speed cutting and without lubricant process condition have not adapted these coatings until now. Therefore more recently, superhard nanocomposite coating which have superhard and good thermal stability have developed. In previous works, WC-TiAlN new nanocomposite film was investigated by cathodic arc ion plating system. Control of AI concentration, WC-TiAlN multi layer composite coating with controlled microstructure was carried out and provides additional enhancement of mechanical properties as well as oxidation resistance at elevated temperature. It is noted that microhardness ofWC-TiA1N multi layer composite coating increased up to 50 Gpa and got thermal stability about $900^{\circ}C$. In this study WC-TiAlN nanocomposite coating was deposited on PCB drill for enhancement of life time. The parameter was A1 concentration and plasma cleaning time for edge sharpness maintaining. The characteristic of WC-TiAlN film formation and wear behaviors are discussed with data from AlES, XRD, EDS and SEM analysis. Through field test, enhancement of life time for PCB drill was measured.

• Journal of Korean Society of Environmental Engineers
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• v.28 no.3
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• pp.323-328
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• 2006

The purpose of this paper was to investigate the reforming characteristics and optimum operating condition of the GlidArc-assisted $C_3H_8$ reforming reaction for the synthesis gas(SynGas) production without formation of carbon black from propane using GildArc plasma reforming. Also, in order to increase the hydrogen production and the propane conversion rate, 13 wt % nickel catalyst was filled into the catalytic reactor and parametric screening studies were conducted, in which there were the variations of vapor mole ratio$(H_2O/C_3H_8),\;CO_2$ mole ratio($CO_2/C_3H_8$), input power and injection flow rate. When the variations of vapor mole ratio, $CO_2$ mole ratio, input power and injection flow rate were 1.86, 0.48, 1.37 kW and 14 L/min, respectively, the conversion rate of the propane reached its most optimal condition, or 62.6%. Under the condition mentioned above, the dry basic concentrations of the SynGas were $H_2\;44.4%,\;CO\;18.2%,\;CH_4\;11.2%,\;C_2H_2\;2.0%,\;C_3H_6\;1.6%,\;C_2H_4\;0.6%\;and\;C_3H_4$ 0.4%. The conversion rate of carbon dioxide was 29.2% and the concentration ratio of hydrogen to carbon monoxide($H_2/CO$) in the SynGas was 2.4.

• 한국전산유체공학회:학술대회논문집
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• 2008.03b
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• pp.479-482
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• 2008

In order to more closely examine the vacuum arc phenomena, it is necessary to predict the magnetohydrodynamic (MHD) characteristics by the multidisciplinary numerical modeling, which is coupled with the electromagnetic and hydrodynamic fields, simultaneously. In this study, the thermal-fluid characteristics of high current vacuum arcs were calculated by a commercial multiphysics package, ANSYS, in order to obtain Joule heat, Lorentz force and the interactions with flow variables. We assumed the diffused-mode arc within an AMF vacuum interrupter. It was found with four different currents that the temperature distributions on the anode surface are diffused uniformly without concentration in 7kA for both types (cup and coil-type). But the arc plasma transition and an increase of thermal flux density for increasing the applied current have caused the change of temperature distributions on the anode surface. We should need further studies on the two-way coupling method and radiation model for arc plasmas in order to accomplish the advanced analysis method for multiphysics.

• Journal of the Korean institute of surface engineering
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• v.34 no.5
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• pp.395-402
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• 2001

An induction thermal plasma system have been newly designed for advanced operation with a pulse modulated mode to control the plasma power in time domain and to create non-equilibrium effects such as fast quenching of the plasma to produce new functional materials in high rate. The system consists of MOSFET power supply with a maximum power of 50 kW with a frequency of 460 kHz, an induction plasma torch with a 10-turns coil of 80 mm diameter and 150 mm length and a vacuum chamber. The pulse modulated plasma was successfully generated at a plasma power of 30 kW and a high pressure of 100 kPa, with taking the on and off time as 10 ms, respectively. Measurements were carried out on the time-dependent spectral lines emitted from Ar species. The dynamic behavior of plasma temperature in a pulse cycle was estimated by the Boltzmann plot and the excitation temperature of Ar atom was found to be changed periodically from around 0.5 to 1.7 eV during the cycle. Two application regions of the induction thermal plasma newly generated were introduced to material processing with high rate synthesis based on non equilibrium effects, and to the finding of new arc quenching gases coming necessary for power circuit breaker, which is friendly with earth circumstance alternative to SF6 gas.

• Journal of Powder Materials
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• v.2 no.3
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• pp.201-207
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• 1995

In general, the characteristics of plasma spray coating are strongly dependent on process conditions. In this paper, Mo and Co alloy coating layers were made by plasma spraying with different spray parameters and characterized using X-ray diffraction, scanning electron microscopy(SEM), hardnass test, and wear test. It was found that the coating characteristics were mainly affected by phase composition of the powder, spray distance, arc current, and gas flow rate.

• Journal of Korean Society for Atmospheric Environment
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• v.23 no.6
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• pp.727-733
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• 2007

In this study, a newly developed biotrickling system, combined with a non-thermal plasma reactor, was investigated to effectively treat gaseous contaminants such as VOCs (Volatile Organic Compounds). Three kinds of non-thermal plasmas (NTPs) such as a rod type dielectric barrier discharge (DBD) plasma, a packed bead type DBD plasma and a gliding arc (GA) plasma, were tested and compared in terms of power consumption. The rod type DBD plasma was selected as one for integration with biotrickling system due to its relatively high VOC removal efficiency, low power consumption and low pressure drop. Toluene and xylene as representatives of VOCs were used as test gases. The experiment results showed that the efficiency of biotrickling system was especially very low at the high gas concentration and high flow rate and the removal efficiencies of VOCs were considerably enhanced in the biotrickling system, when the DBD plasma was worked in front of that even at the high gas concentration and high flow rate.

• Journal of the Korean Vacuum Society
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• v.7 no.2
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• pp.155-160
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• 1998

It is necessary to use Arc layer and DUV resist to define 0.25 $\mu \textrm{m}$ line and space for 256 MDRAM devices. Poly-Si etching with Arc layer and different resists has been performed in a TCP-9408 etcher with variation of gas chemistries; $Cl_2/O_2, Cl_2/N_2, Cl_2$/HBr . DUV resist causes more positive etch profile and CD gain compared to I-line resist because the sidewall passivation is more stimulated by increasing polymerization through the loss of resist. When Arc layer is applied, CD hain also increases due to the polymeric mask formed after thching Arc layer. From the point of gas chemistry effects, the etch profile and CD gain is not improved using $Cl_2/O_2$ gas, since polymerization is accelerated in this gas. however, the vertical profile and less CD gain is obtained using $Cl_2$/HBr gas. Furthermore, HBr gas is very effective to suppress the difference of profile and CD variation between dense pattern and isolated pattern by minimizing non-uniformity of side wall passivation with pattern density.

• Applied Chemistry for Engineering
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• v.34 no.4
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• pp.404-411
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• 2023

For the direct reforming of biogas, a three-phase gliding arc plasma reformer was designed to expand the plasma discharge region, and the operation conditions of the plasma reformer, such as the S/C ratio, the gas flow rate, and the plasma input power, were optimized. The H₂ production efficiency is increased at a lower specific plasma input energy density, but byproducts such as C_XH_Y and carbon soot are generated along with the increase in H₂ production efficiency. The formation of byproducts is decreased at higher specific plasma input energy densities and S/C ratios. The optimized operation conditions are 5.5 ~ 6.0 kJ/L for the specific plasma input energy density and 3 for the S/C ratio, considering the conversion efficiency, H₂ production, and byproduct formation. It is expected that the H₂ production efficiency will improve with the decrease in fuel consumption in biogas burners because the heat generated from plasma discharge heats up the feed gas to over 500 ℃.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1772-1774
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• 2004

Because the physics occurring during an interruption process is not well known, it is not easy to analyze the characteristics of a self-blast circuit breaker neither theoretically nor experimentally. Fortunately the available computational power and the numerical method improved recently make it possible to predict an interruption process as precisely and fast as possible. Therefore many researches using computational methods have been done for the interruption process of interrupters and applied to extend the information such as thermal and dielectric reignition. In this paper, we have simulated the interruption process of SF6 self-blast circuit breakers with the arc plasma during the fault interruption of a 10 kA current. The CFD program used here is coupled with the electromagnetic field analysis, the radiation model and the effects of turbulence. Through this work, we have get further information about the thermal performance as well as the behavior of the arc. The results have been compared with the measured arc voltage.