• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.7-12
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• 2023

The edge ring placed on the outside of the electrostatic chuck (ESC) is a key component for protecting the ESC and controlling the etching uniformity of the edge of the wafer. Therefore, it is very important to understand the etching phenomenon of edge rings for edge ring management and equipment homeostasis. In this study, a specimen with SiO₂ hard mask and underlying Si mold was installed on the edge ring surface and the etching results were measured by varying the edge ring 2MHz RF power. By developing PI-VM model with high prediction accuracy and analyzing the roles of key parameters in the model, we were able to evaluate the effect of plasma and sheath characteristics around the edge ring on edge ring erosion. This analysis method provided information necessary for edge ring maintenance and operation.

• Journal of Life Science
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• v.31 no.6
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• pp.550-558
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• 2021

Fructus Corni, the fruit of Cornus officinalis, has long been used for the prevention and treatment of various diseases. We recently suggested that it was effective against benign prostatic hyperplasia (BPH). In this study, we investigated the inhibitory effect of Corni Fructus (CF) water extract on BPH induced by testosterone propionate (TP) in noncastrated and castrated animal models. BPH was induced in Sprague Dawley rats by an intramuscular injection of TP in castrated or noncastrated rats. Finasteride (FINA) treatment was used as a positive control for inhibition of BPH. According to our results, CF administration inhibited excessive enlargement of development of the prostate in both the noncastrated and castrated groups compared to the control and FINA-treated groups. The inhibitory effect of CF on BPH was associated with inhibition of expression of hypoxia-inducible factor-1α, 5α-reductase type 2, steroid receptor coactivator-1, androgen receptor (AR), and prostate-specific antigen. Serum levels of the stress hormone cortisol increased during BPH induction by TP in both the noncastrated and castrated groups, but they were attenuated significantly by CF administration. However, insulin and IGF-1 levels were not increased in the BPH-induced groups and CF, and no effective results were found by CF administration. These results point to a beneficial effect of CF on BPH through inhibition of AR signaling pathway activity and imply that CF shows excellent potential as a therapeutic agent for the prevention and treatment of BPH.

• Polymer(Korea)
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• v.34 no.2
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• pp.159-165
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• 2010

Dipyridine-terminated polystyrenes and polybutadienes were synthesized by the chain endfunctionalization reaction of polystyryllithium (PSLi) and polybutadienyllithium (PBDLi) with di(2-pyridyl) ketone(DPK) using a living anionic polymerization method in the Ar-glove box. Living polymeric lithiums with low molecular weights (Mw=1000~2000 g/mol) were used to investigate the chain end-functionalization yield with DPK and the degree of coupling reaction by the attack of organolithium to the pyridine ring in the presence of TMEDA using GPC, $^1H$-NMR, $^{13}C$ analysis. DPK-terminated PBD exhibited much higher functionalization yield and less amount of coupling reaction compared with DPK-terminated PS. 86% functionalization yield with 9% degree of coupling was obtained when the PBDLi was added dropwise to DPK solution at room temperature. The functionalization yield was increased as the reaction temperature decreased, however, no LiCl effect was observed in this chain end-functionalization reaction with DPK.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.43 no.8 s.350
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• pp.13-18
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• 2006

[ $SnO_2$ ] and ZnO nanostructures were grown on the surface of thin film by heat treatment of metal Sn, Zn under Ar gas flow and $O_2$ at atmospheric pressure, respectively. The sensitivity of the $SnO_2$ thin film device on which grown nanowires to CO gas(5,000 ppm) was 50 % at the operating temperature of $200^{\circ}C$. In case of using Pt as catalysts, the sensitivity was enhanced and operating temperature was reduced(73 % at $150^{\circ}C$ ). The sensitivity of the ZnO nanorods device using Cu as catalysts to NOx gas was 90 % at the operating temperature of $200^{\circ}C$. It was found that the sensitivity to CO and NOx gases for the device on which grown nanostructures was much higher than those for general thin film device.

• Journal of the Korean Chemical Society
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• v.37 no.7
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• pp.635-641
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• 1993

Electrochemical cell, $Pt|air(PO_2=5.3{\times}10^{-3}atm)|Zr_{0.85}Ca_{0.15}O_{1.85}|air(PO_2= 0.21atm)|Pt$, has been designed to characterize the solid electrolyte and the temperature dependence of the electromotive force (EMF) has been measured in a temperature range of 600∼1000${\circ}$C. Solid electrolyte shows pure ionic conduction of the oxygen anion. The Fe-FexO, Co-CoO, Ni-NiO, and Cu2O-CuO electrodes have been prepared by mixing the 1 : 1 mole ratio of each metal and metal oxide and then by heating at 800${\circ}$C for 6 hours. Electrochemical cells, Pt│M(s), $MO(s)|Zr_{0.85}Ca_{0.15}O_{1.85}|air(PO_2=0.21atm)|Pt$, have been designed and the temperature dependence of the EMF has also been measured in the same temperature range. The changes of the thermodynamic state functions for the formation of the metal oxides are calculated from the electromotive forces and their temperature dependences. The material properties of the oxide systems are also discussed with the function changes.

• Journal of Life Science
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• v.28 no.12
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• pp.1507-1515
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• 2018

Benign prostatic hyperplasia (BPH) is characterized by prostatic hypertrophy mainly in the elderly. Corni Fructus is reportedly effective in the prevention and treatment of various diseases, but its efficacy on BPH has not been previously studied. In the present study, we investigated whether or not a Corni Fructus water extract (CF) could prevent testosterone-induced prostatic hyperplasia in rats. To induce BPH, castrated rats were subcutaneously injected with testosterone propionate (TP). CF was administered daily by oral gavage, along with the TP injections, and finasteride, a selective inhibitor of $5{\alpha}$-reductase type 2, was used as a positive control. The results show that CF significantly reduces prostate weight and histopathologic changes while also decreasing levels of serum dihydrotestosterone, similar to the finasteride-treated group. CF also suppresses TP-induced $5{\alpha}$-reductase expression and concentration in prostate tissue and serum, respectively. Furthermore, CF markedly inhibited TP-induced expression of the androgen receptor (AR) and the steroid receptor coactivator 1, an AR coactivator, which was associated with a decrease in prostate-specific antigen levels in both serum and prostate tissue. In conclusion, the results of this study indicate that CF weakens BPH status by inactivation of $5{\alpha}$-reductase and AR.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.266.2-266.2
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• 2016

최근 디스플레이 산업의 확대에 따라 투명 전도 산화물(Transparent Conducting Oxides:TCOs)의 수요가 급증하고 있다. 이 중 ZnO는 wide bandgap (3.37eV)와 large exciton binding energy (60meV)의 값을 가져 차세대 투명 전도 산화물, LED와 LD 등의 소자 소재로 각광받고 있다. ZnO는 electron을 내어놓는 native defect 때문에 기본적으로 n-type 물성을 띈다. 그래서 dopant를 이용해 p-type ZnO를 제작할 때 native defect를 줄이는 것이 중요한 요점이 된다. 이 때 buffer layer를 사용하여 native defect를 줄이는 방법이 사용되고 있다. 본연구에서는 RF-magnetron sputtering법을 이용하여 c-plane sapphire 기판 위에 다양한 조건의 ZnO buffer layer를 증착하고, 그 위에 ZnO:(Al,P) co-doping한 APZO를 증착하였다. ZnO buffer layer 증착조건의 변수는 증착온도와 Ar:O2의 비율을 변수로 두었다. 이러한 박막을 FE-SEM, XRD, Hall effect measurement, AFM을 통하여 미세구조와 물성을 관찰하였다. 이 때 APZO보다 낮은 증착온도에서 ZnO buffer layer가 증착되면 APZO를 증착하는 동안 chamber 내부에서 열처리하는 효과를 얻게 되고, UHV(Ultra High Vaccum)에서 열처리 될 때 ZnO buffer layer의 mophology와 결정성이 변하게 되는 모습을 관찰아혔다. 또한 본 실험을 통해 ZnO buffer layer의 증착 온도가 APZO의 증착온도보다 높을 때 제어 가능한 실험이 됨을 확인 할 수 있었다.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2003.11a
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• pp.360-367
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• 2003

Diamond-like carbon(DLC) films are considerable research interest because of their widespread applications as protective coatings in areas such as optical windows, magnetic storage disks, car parts, biomedical coatings and as micro-electromechanical devices(MEMs). DLC films were deposited on WC-Co by PECVD using Ar, $C_2H_4$ gas. Tribological tests were conducted using a ball-on-disk type tribometer in dry air. Three kinds of counter-bodies balls were used. The counter-bodies balls are SM45C, SUJ2 and $ZrO_2$(3.17mm in diameter). Wear rate of the samples were calculated after measuring the worn-out volume of the wear track. As results wear test, the higher hardness of counter-bodies, friction coefficient low. As result of XPS estimation, wear debris generated as an oxide lower the friction coefficient.

• Journal of the Korean institute of surface engineering
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• v.31 no.2
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• pp.81-90
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• 1998

NiCrAly/YSZ(8wt% Y2O3-Zro2) functionally fraded thermal barrier coating (FGC) layers on a Co-base sureralloy (HAYNESS 188) substrate were fabricated using Ar shielded single torch air plasma spraying method. Functional grading were produced with the stepwise compositional change throughout layer thinkness. Microstructural observation revealed a sucessful fabrication of NiCrAly/YSZ FGC. From the results of the curvature measurement, adhesive stength measurement and thermal shock test for the FGC, it was concluded that the optimum enhance of functionally graded coating layer thinkcess and compositional pattern exit to enhance the properties of FGC, which is closely reated to the internal residual distribution with it.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.399.2-399.2
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• 2016

Cu(In,Ga)Se2 (CIGS) 박막 태양전지는 높은 효율과 낮은 제조비용, 높은 신뢰성으로 인해 박막 태양전지 중 가장 각광받고 있다. 특히 유리기판 대신 가볍고 유연한 철강소재나 플라스틱 소재를 이용하여 발전분야 외에 건물일체형, 수송용, 휴대용등 다양한 분야에 적용이 가능하다. 이러한 유연 기판을 이용한 CIGS 태양전지의 개발을 위해서는 기판의 특성에 따른 다양한 공정개발이 선행되어야 한다. Poly-imide와 같은 유연기판은 공정온도가 $400^{\circ}C$이하로 낮고 기판이 매우 얇아 기존 Mo 공정을 개선하여야한다. 이러한 유연기판의 특성을 고려하여 본 연구에서는 기존 bi-layer Mo의 bottom layer의 두께를 조절하여 박막의 strain을 조절하였다. 유연기판으로는 SKC KOLON에서 제조된 GL type의 기판을 사용하였다. 기판의 두께는 50um이다. 먼저 Mo의 bottom layer 두께 비율을 기존 12.5%에서 50%로 증가 시켰으며 전체 박막의 두께 역시 900nm에서 500nm로 두께를 감소시키며 실험을 실시하였다. 그 후 흡수층은 Co-Evaporation 방법을 이용하여 제조하였으며 이때 공정온도는 기존 공정온도에서 450, $400^{\circ}C$로 낮추어 흡수층을 제조하였다. 소자 제조 후 초기 Mo의 strain 개선과 저온공정이 적용되지 않은 경우 4.4%에서 공정 최적화 후 13%로 효율이 증가하였다. 제조된 흡수층은 SEM, XRF, XRD등을 이용하여 분석하였으며 그 외 일반적인 방법을 이용하여 Mo, CdS, TCO, Al grid를 제조하였다. AR 코팅은 제외 하였으며 제조된 소자는 솔라 시뮬레이터를 이용하여 효율 특성 분석을 실시하였으며 Q.E. 분석을 실시하였다.