• Journal of Surface Science and Engineering
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• v.28 no.6
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• pp.386-392
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• 1995

The RF planar magnetron sputtering technique was used to fabricate uniform ZnO/$SiO_2$/Si thin films at high growth rate. A detailed crystallographic character of these thin films has been carried oct using XRD, XRC, and SEM. These thin films have the configuration of c-axis orientation perpendicular to $SiO_2$/ Si substrate. The dependence of the thickness of ZnO/$SiO_2$/Si films on applied RF power parameters was also investigated. The crystallinity of films was improved as the substrate temperature was high, RF input power increased, and Ar/$O_2$ ratio decreased. Also, most of ZnO films fabricated on $SiO_2$/Si were suitable for SAW filter since a standard deviation of XRC (002) peak was less than $6^{\circ}$. The presence of the $SiO_2$ layer has a beneficial effect on the crystalline quality of the grown ZnO films.

• Journal of Biomedical Engineering Research
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• v.9 no.1
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• pp.93-100
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• 1988

The Auto Regressive Parameter Estimation and Pattern Classification of EKG Signal for Automatic Diagnosis. This paper presents the results from pattern discriminant analysis of an AR (auto regressive) model parameter group, which represents the HRV (heart rate variability) that is being considered as time series data. HRV data was extracted using the correct R-point of the EKG wave that was A/D converted from the I/O port both by hardware and software functions. Data number (N) and optimal (P), which were used for analysis, were determined by using Burg's maximum entropy method and Akaike's Information Criteria test. The representative values were extracted from the distribution of the results. In turn, these values were used as the index for determining the range o( pattern discriminant analysis. By carrying out pattern discriminant analysis, the performance of clustering was checked, creating the text pattern, where the clustering was optimum. The analysis results showed first that the HRV data were considered sufficient to ensure the stationarity of the data; next, that the patern discrimimant analysis was able to discriminate even though the optimal order of each syndrome was dissimilar.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.132-132
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• 2010

In the nano-scale Si processing, patterning processes based on multilevel resist structures becoming more critical due to continuously decreasing resist thickness and feature size. In particular, highly selective etching of the first dielectric layer with resist patterns are great importance. In this work, process window for the infinitely high etch selectivity of silicon oxynitride (SiON) layers and silicon nitride (Si3N4) with EUV resist was investigated during etching of SiON/EUV resist and Si3N4/EUV resist in a CH2F2/N2/Ar dual-frequency superimposed capacitive coupled plasma (DFS-CCP) by varying the process parameters, such as the CH2F2 and N2 flow ratio and low-frequency source power (PLF). It was found that the CH2F2/N2 flow ratio was found to play a critical role in determining the process window for ultra high etch selectivity, due to the differences in change of the degree of polymerization on SiON, Si3N4, and EUV resist. Control of N2 flow ratio gave the possibility of obtaining the ultra high etch selectivity by keeping the steady-state hydrofluorocarbon layer thickness thin on the SiON and Si3N4 surface due to effective formation of HCN etch by-products and, in turn, in continuous SiON and Si3N4 etching, while the hydrofluorocarbon layer is deposited on the EUV resist surface.

• Progress in Superconductivity
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• v.3 no.1
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• pp.95-98
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• 2001

Recently, NiO films have been studied as a buffer layer to fabricate the superconductor with preferred orientation and as a diffusion barrier to prevent the reaction between superconductor and textured nickel substrate . We fabricated NiO films on textured Ni substrate by thermal oxidation with various variables of temperature, oxidation time, atmosphere, and cooling rate. We investigated the alignment of NiO films by XRD and pole figure and the microstructures by SEM. (200) <001> alignment of NiO film was observed at the oxidation condition of $1200^{\circ}C$ far 10min and slow cooling in O2 atmosphere. During the process in Ar atmosphere, we could also observe the thermal faceting which affects the alignment of NiO alms on Ni substrate.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2003.11a
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• pp.360-367
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• 2003

Diamond-like carbon(DLC) films are considerable research interest because of their widespread applications as protective coatings in areas such as optical windows, magnetic storage disks, car parts, biomedical coatings and as micro-electromechanical devices(MEMs). DLC films were deposited on WC-Co by PECVD using Ar, $C_2H_4$ gas. Tribological tests were conducted using a ball-on-disk type tribometer in dry air. Three kinds of counter-bodies balls were used. The counter-bodies balls are SM45C, SUJ2 and $ZrO_2$(3.17mm in diameter). Wear rate of the samples were calculated after measuring the worn-out volume of the wear track. As results wear test, the higher hardness of counter-bodies, friction coefficient low. As result of XPS estimation, wear debris generated as an oxide lower the friction coefficient.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.167-167
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• 2012

최근 들어 유연한 폴리머 기판을 이용한 차세대 Flexible display는 다양한 장점으로 인해 많은 연구가들에 의해 유망한 차세대 디스플레이로 주목받고 있다. 일반적 폴리머 기판은 산소, 수분 등에 취약하기 때문에 무기막 또는 멀티레이어를 증착한다. 본 연구는 remote-type과 direct-type DBD로 구성되어 있는 double discharge system을 이용한 SiOx 무기막 증착 실험에 관한 연구이다. 본 연구에서는 HMDS/$O_2$/He/Ar gas mixture를 통해 발생된 대기압 플라즈마를 이용하여 공정을 진행하였다. SiOx를 증착할 때 SiOx 무기막 증착 실험은 $O_2$의 유량이 감소할수록 그리고 HMDS의 유량이 증가함에 따라 deposition rate, 즉 공정효율이 증가하는 것을 알 수 있었다. 하지만 HMDS의 유량이 증가하고 $O_2$ gas 유량이 감소함에 따라 carbon과 hydrogen 등의 불순물의 함유도 함께 증가하게 되고 이로 인해 무기막의 특성이 약해지고, 유기적인 막 특성이 강해지게 된다. Double discharge system을 사용하였을 경우에는 remote-type DBD system을 사용하였을 때 보다 더 높은 공정 효율을 관찰할 수 있었고 동시에 더 낮은 불순물 함량을 가지는 것을 알 수 있었다. 이는 기판에 추가적으로 인가되는 power에 따라 discharge efficiency가 향상되어 Si-O bond 결합을 유도, 무기막적 특성이 강해지고, 또한 기판 바이어스 효과에 따라 증착무기막의 기계적인 강도 역시 향상됨을 관찰할 수 있었다.

• International Journal of Aeronautical and Space Sciences
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• v.12 no.4
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• pp.305-317
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• 2011

This paper presents an overview on flutter boundary prediction in tests which is principally based on a system stability measure, named Jury's stability criterion, defined in the discrete-time domain, accompanied with the use of autoregressive moving-average (AR-MA) representation of a sampled sequence of wing responses excited by continuous air turbulences. Stability parameters applicable to two-, three- and multi-mode systems, that is, the flutter margin for discrete-time systems derived from Jury's criterion are also described. Actual applications of these measures to flutter tests performed in subsonic, transonic and supersonic wind tunnels, not only stationary flutter tests but also a nonstationary one in which the dynamic pressure increased in a fixed rate, are presented. An extension of the concept of nonstationary process approach to an analysis of flutter prediction of a morphing wing for which the instability takes place during the process of structural morphing will also be mentioned. Another extension of analytical approach to a multi-mode aeroelastic system is presented, too. Comparisons between the prediction based on the digital techniques mentioned above and the traditional damping method are given. A future possible application of the system stability approach to flight test will be finally discussed.

• Laser Solutions
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• v.18 no.3
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• pp.1-5
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• 2015

A 3D printer based on laser powder deposition (LPD), also known as DED (direct energy deposition), has been developed for fabricating metal parts. The printer uses a ytterbium fiber laser (1070nm, 1kW) and is equipped with an Ar purge chamber, a three-dimensional translation stage and a powder feeding system composed of a powder chamber and delivery nozzles. To demonstrate the performance of the printer, a tapered cylinder of 320mm in height has been fabricated successfully using Ti-6Al-4V powders. The process parameters including the laser output power, the scan speed, and the powder feeding rate have been optimized. A 3D printed test specimen shows mechanical properties (yield strength, ultimate tensile strength, and elongation) exceeding the criteria to employed in a variety of Ti alloy applications.

• Journal of Surface Science and Engineering
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• v.41 no.2
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• pp.43-47
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• 2008

Cubic boron nitride(c-BN) films were deposited on tungsten carbide insert tool by microwave plasma enhanced chemical vapor deposition(MPECVD) from a gas mixture of triethyl borate$(B(C_2H_5O)_3)$, ammonia $(NH_3)$, hydrogen$(H_2)$ and argon(Ar). The qualities of deposited thin film were investigated by x-ray diffrac-tion(XRD), field emission scanning electron microscopy(FE-SEM) and micro Raman spectroscope. The surface morphologies of the synthesised BN as well as crystallinity appear to be highly dependent on the flow rate of $B(C_2H_5O)_3$ and $(NH_3)$ gases. The deposited film had more crystallized phases with 5 scem of $B(C_2H_5O)_3$ and $(NH_3)$ gases than with 2 sccm, and the phase was identified as c-BN by micro Raman spectroscope and XRD. The adhesion strength were also increased with increasing flow rates of $B(C_2H_5O)_3$ and $(NH_3)$ gases.

• Transactions of the Korean Society of Automotive Engineers
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• v.16 no.5
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• pp.68-76
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• 2008

Diesel $NO_x$ reduction by $NH_3$-SCR in conjunction with the effective oxidation precatalyst was analytically investigated. Physicochemical processes in regard to $NH_3$-SCR $NO_x$ reduction and catalytic NO-$NO_2$ conversion are formulated with detailed descriptions on the commanding reactions. A unified model is correctly validated with experimental data in terms of extents of $NO_x$ reduction by SCR and NO-$NO_2$ conversion by DOC. The present deterministic model based on the rate expressions of Langmuir-Hinshelwood reaction scheme finds a conversion extent directly. A series of numerical experiments concomitant with parametric analysis of the $NO_x$ reduction was conducted. $NO_x$ reduction is promoted in proportion to DOC volume ar lower temperatures and an opposite holds at lower space velocity and intermediate temperatures. $NO_x$ conversion is weakly correlated to the space velocity and the DOC volume at higher exhaust temperature. In DOC-SCR system, the $NO_x$ reduction efficiency depends on the $NH_3/NO_x$ ratio.