• Title/Summary/Keyword: Ar ion beam

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Low Energy Ion-Surface Reactor

  • Choi, Won-Yong;Kang, Tae-Hee;Kang, Heon
    • Bulletin of the Korean Chemical Society
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    • v.11 no.4
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    • pp.290-296
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    • 1990
  • Ion-surface collision studies at low kinetic energies (1-100 eV) provide a unique opportunity for investigating reactions and collision dynamics at surfaces. A special ion optics system for generating an energy- and mass-selected ion beam of this energy is designed and constructed. An ultrahigh vacuum (UHV) reaction chamber, in which the ions generated from the beamline collide with a solid surface, is equipped with Auger electron spectroscopy (AES) and thermal desorption spectrometry (TDS) as in-situ surface analytical tools. The resulting beam from the system has the following characteristics : ion current of 5-50 nA, energy spread < 2eV, current stability within ${\pm}5%,$ and unit mass resolution below 20 amu. The performance of the instrument is illustrated with data representing the implantation behavior of $Ar^+$ into a graphite (0001) surface.

The electronic structure of the ion-beam-mixed Pt-Cu alloys by XPS and XANES

  • Lim, K.Y.;Lee, Y.S.;Chung, Y.D.;Lee, K.M.;Jeon, Y.;Whang, C.N.
    • Proceedings of the Korean Vacuum Society Conference
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    • 1998.02a
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    • pp.133-133
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    • 1998
  • In the thin film alloy formation of the transition metals ion-beam-mixing technique forms a metastable structure which cannot be found in the arc-melted metal alloys. Sppecifically it is well known that the studies about the electronic structure of ion-beam-mixed alloys pprovide the useful information in understanding the metastable structures in the metal alloy. We studied the electronic change in the ion-beam-mixed ppt-Ct alloys by XppS and XANES. These analysis tools pprovide us information about the charge transfer in the valence band of intermetallic bonding. The multi-layered films were depposited on the SiO2 substrate by the sequential electron beam evapporation at a ppressure of less than 5$\times$10-7 Torr. These compprise of 4 ppairs of ppt and Cu layers where thicknesses of each layer were varied in order to change the alloy compposition. Ion-beam-mixing pprocess was carried out with 80 keV Ae+ ions with a dose of $1.5\times$ 1016 Ar+/cm2 at room tempperature. The core and valence level energy shift in these system were investigated by x-ray pphotoelectron sppectroscoppy(XppS) pphotoelectrons were excited by monochromatized Al K a(1486.6 eV) The ppass energy of the hemisppherical analyzer was 23.5 eV. Core-level binding energies were calibrated with the Fermi level edge. ppt L3-edge and Cu K-edge XANES sppectra were measured with the flourescence mode detector at the 3C1 beam line of the ppLS (ppohang light source). By using the change of White line(WL) area of the each metal sites and the core level shift we can obtain the information about the electrons pparticippating in the intermetallic bonding of the ion-beam-mixed alloys.

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Adhesion Properties between Polyimide Film and Copper by Ion Beam Treatment and Imidazole-Silane Compound (이온빔 및 이미다졸-실란 화합물에 의한 폴리이미드 필름과 구리의 접착 특성)

  • Kang, Hyung Dae;Kim, Hwa Jin;Lee, Jae Heung;Suh, Dong Hack;Hong, Young Taik
    • Journal of Adhesion and Interface
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    • v.8 no.1
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    • pp.15-27
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    • 2007
  • Polyimide (PI) surface modification was carried out by ion-beam treatment and silane-imidazole coupling agent to improve the adhesion between polyimide film and copper. Silane-imidazole coupling agent contains imidazole functional groups for the formation of a complex with copper metal through a coordination bonding and methoxy silane groups for the formation of siloxane polymers. The PI film surface was first treated by argon (Ar)/oxygen ($O_2$) ion-beam, followed by dipping it into a modified silane-imidazole coupling agent solution. The results of X-ray photoelectron spectroscopy (XPS) spectra revealed that the $Ar/O_2$ plasma treatment formed oxygen functional groups such as hydroxyl and carbonyl groups on the polyimide film surface and confirmed that the PI surface was modified by a coupling reaction with imidazole-silane coupling agent. Adhesion between copper and the treated PI film by ion-beam and coupling agent was superior to that with untreated PI film. In addition, adhesion of PI film treated by an $Ar/O_2$ plasma to copper was better than that of PI film treated by a coupling agent. The peeled-off layers from the copper-PI film joint were completely different in chemical composition each other. The layer of PI film side showed similar C1s, N1s, O1s spectra to the original Upilex-S and no Si and Cu atoms appeared. On the other hand the layer of copper side showed different C1s and N1s spectra from the original PI film and many Si and Cu atoms appeared. This indicates that the failure occurs at an interface between the imidazole-silane and PI film layers rather than within the PI layers.

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Novel Alignment Layers for Ion Beam Method and the Orientations of Liquid Crystal

  • Ahn, Han-Jin;Kim, Kyung-Chan;Kim, Jong-Bok;Baik, Hong-Koo;Park, Chang-Joon;Hwang, Jeoung-Yeon;Seo, Dae-Shik
    • 한국정보디스플레이학회:학술대회논문집
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    • 2004.08a
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    • pp.1155-1158
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    • 2004
  • Various inorganic alignment layers of nematic liquid crystal (NLC) molecules were investigated. Ar ion beam (IB) irradiation was utilized for alignment method and homogenous and homeotropic orientations with tilt angle were obtained on the suitable inorganic thin films. Proper doping materials were added to diamond-like carbon (DLC) films. In the case of homogeneous alignment, nitrogen doping affected the increase of pretilt angle, while the fluorine bonding in the DLC films was induced the tilted homeotropic alignment cause its extreme hydrophobic property. These results showed that ion beam irradiation method could be applied to the various alignment mode of NLC such as IPS, TN and MVA.

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Enhanced Interfacial Adhesion between Polymers and Metals(Cu) by Low Energy Ion-beam Irradiation with Reactive Gases (반응성 기체를 첨가한 저 에너지 이온빔 처리에 의한 고분자와 금속 간의 계면 접착력 증가에 관한 연구)

  • Lee, Ji-Seok;Seo, Yong-Sok;Kim, Han-Seong;Gang, Tae-Jin
    • Proceedings of the Korean Society For Composite Materials Conference
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    • 2005.11a
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    • pp.75-78
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    • 2005
  • Using a low-energy Ar+ ion-beam with and without reactive gases, polymers such as chemically stable poly(ether ether ketone) (PTFE) and poly(ether ether ketone) (PEEK) films were modified to have special surface features. The adhesion strength between the polymers and the copper was significantly improved because of both changes in the surface topography and chemical interactions due to polymer surface functionalization (oxidation and amination). The surface modification altered the failure mode from adhesive failure for the unmodified polymer/Cu interface to cohesive failure for the surface-modified polymer/Cu layer interface..

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Investigation into the stability of ion beam treated inorganic alignment layer

  • Kim, Kyung-Chan;Ahn, Han-Jin;Kim, Jong-Bok;Hwang, Byung-Har;Baik, Hong-Koo
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07a
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    • pp.328-329
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    • 2005
  • Inorganic alignment layer (IAL) was deposited on an indium-tin-oxide (ITO) by using reactive sputtering deposition method. After deposited, IAL was irradiated by $Ar^+$ ion beam (IB) for liquid crystal (LC) alignment. IAL treated by various conditions such as IB energy, IB incident angle, and IB irradiation time had excellent alignment property and electro-optical property the same as that of PI. We investigated into the stability of ion beam treated IAL after a lapse of long time. However IAL irradiated IB did not occur degradation of electro-optical property. The results implied that IAL irradiated IB was adopted as LC alignment layer instead of rubbed polyimide.

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Development of Electrospray Micro Thruster with Super-Hydrophobic PTFE Surface Nozzle Treated by Ar and Oxygen Ion Beam

  • Lee, Y.J.;Byun, D.Y.;Si, Bui Quang Tran;Kim, S.H.;Park, B.H.;Yu, M.J.;Kim, M.Y.
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2008.03a
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    • pp.877-880
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    • 2008
  • In this article, in order to fabricate polymer based electrospray device with super hydrophobic nozzle we use PTFE(polyfluorotetraethylene) plate and PMMA(polymethylmethacrylate). To obtain the super hydrophobic surface nozzle, PTFE surface is treated by argon and oxygen plasma treatment process. And evaluate the treated surface, perform measuring contact angle, SEM(Scanning Electron Microscope) and AFM(Atomic Force Microscope). We compare the performance of the super hydrophobic PTFE surface nozzle with raw PTFE and PMMA surface nozzle. For the ion beam treated PTFE nozzle, the liquid doesn't overflow and it keeps initial position and meniscus shape. From these results, we expect in cease of superhydrophobic surface nozzle jetting becomes more stable and repeatable.

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Ar-GCIB를 이용하여 ToF-SIMS에서 얻은 쥐의 뇌조직 이미지

  • Son, Hyeon-Gyeong;Lee, Tae-Geol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.378.1-378.1
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    • 2016
  • 나노바이오연구분야에서 ToF-SIMS를 이용하여 lipid와 metabolite같은 저 분자의 생체물질을 측정하는데 널리 이용되어 왔다. 최근에는 고 분자량의 생체물질을 측정하기 위해서 C60, water cluster, argon cluster등의 다양한 종류의 클러스터 이온빔들이 개발되어 왔다. [1,2] 하지만 tissue샘플을 클러스터 이온빔을 이용하여 분석한 결과에서도 m/z 1500이상의 고분자를 측정한 결과는 거의 없다. 바이오샘플의 charging을 상쇄하기위해 low energy electron beam (~20 eV)을 사용하는데, low energy electron beam이 샘플에 damage를 주기 때문이다. [3] 본 연구에서는 electron fluence (electrons/cm2)가 증가함에 따라 PC(16:0/18:1(9Z)와 Ganglioside GM1의 intensity가 감소함을 알았고, low energy electron beam에 의해 생체 물질이 damage를 받을 수 있음을 확인하였다. 따라서 tissue 샘플을 SUS기판에 샘플링하고 Ar-GCIB를 이용하면 charging없이 tissue imaging을 성공적으로 수행할 수 있고, m/z 2000이상의 고 분자량의 생체물질을 측정할 수 있음을 확인하였다.

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Assessment of exchange bias by Ar ion beam FeMn inter-layer surface etching in Py/FeMn/Py multilayer (NiFe/FeMn/NiFe 다층박막에서 사이층 FeMn의 Ar 이온빔 surface etching에 의한 교환바이어스 평가)

  • 윤상민;임재준;이영우;김철기;김종오
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.03a
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    • pp.233-233
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    • 2003
  • 교환바이어스(exchange bias)현상은 강자성과 반강자성의 접합계면에서 강한 상호 교환결합력에 의해 발생하는 것으로 알려져 있다. 이 현상은 1956년 Meiklejohn과 Bean에 의해 CoO 층으로 둘러싸인 Co 입자에서 발견된 이후, 강자성과 반강자성의 접합계면을 가지는 다층 박막에서의 교환바이어스에 대한 연구가 진행되어왔다. 이는 강자성/반강자성 박막의 교환바이어스 특성을 이용하여, 강자성 박막의 스핀방향을 고정시킬 수 있기 때문이다. 이러한 교환바이어스 특성은 하드드라이브의 고밀도 자기헤드소자 및 비휘발성 자기메모리소자에 응용되어지는 등 경제적 가치를 갖는 기술적인 면과 교환바이어스라는 자기특성의 학문적인 가치로 인해 이 분야에 대한 집중적인 투자와 연구가 이루어지고 있다 최근에는 교환바이 어스 현상의 원인과 형성기구에 대한 연구가 활발히 진행되고 있다. 그러나 강자성과 반강자성 박막의 단거리 상호 교환결합력에 의한 교환바이어스 현상은, 계면의 원자구조, 자기구조 및 각자성층의 여러 가지 인자들에 대해서 지속적으로 연구되고 있다. 본 연구에서는 Helmhertz 코일의 진동샘플형 자력계(VSM)을 이용하여 Si 기판위에 증착된 NiFe(10nm)/FeMn(t)/NiFe(10nm) 다층박막에서 FeMn층의 두께에 대한 각각의 교환바이어스 현상을 조사하고 사잇층 FeMn층의 surface를 Ar ion beam etching하여 etching 조건에 따른 교환바이어스를 비교분석 하고자 한다.

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A Study on the Surface Treatment of Prepreg with $Ar^+$ Ion to Increase Mode I Fracture Characteristics of Fiber-Reinforced Composites (섬유강화 적층복합재의 열림모드 파괴특성 향상을 위해 $Ar^+$ 이온도움반응법을 적용한 프리프레그의 표면처리 연구)

  • Lee, Gyeong-Yeop;Ji, Chang-Heon;Yang, Jun-Ho
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.24 no.11
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    • pp.2771-2776
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    • 2000
  • In this work, the effect of surface treatment of prepreg on the mode I fracture behavior was studied. Unidirectional (0-deg) double cantilever beam (DCB) specimens were used for fracture tests. Two groups of DCB specimens were made: the first group was made of prepregs surface-treated by Ar(sup)+ ion beam under oxygen environment and the second group was made of regular prepregs. For both groups, fracture resistance curve (R-curve) was determined and compared to each other, Results showed that resistance behavior of the first group is better than that of the second group. That is, mode I fracture toughness, G(sub)Ic of the first group is 24% larger than that of the second group. SEM examination shows that the improvement of G(sub)Ic is due to the increase of interfacial strength between plies.