• 제목/요약/키워드: Ar gas

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이중 이온빔 스퍼터링 방식을 사용한 보조 이온빔의 Ar/O2가스 유량에 따른 Ta2O5 박막의 제조 및 특성분석 (Characteristics Analysis and Manufacture of Ta2O5 Thin Films Prepared by Dual Ion-beam Sputtering Deposition with Change of Ar/O2Gas Flow Rate of Assist Ion Beam)

  • 윤석규;김회경;김근영;김명진;이형만;이상현;황보창권;윤대호
    • 한국세라믹학회지
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    • 제40권12호
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    • pp.1165-1169
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    • 2003
  • 이중 이온빔 스퍼터링(Dual ion-beam sputtering)을 사용하여 보조이온건의 Ar/O$_2$가스유량 변화에 따라 Si-(III) 기판과 glass에 Ta$_2$O$_{5}$ 박막을 증착시켰다. 보조 이온총의 산소 가스량의 비가 감소함에 따라서 증착되는 Ta$_2$O$_{5}$ 박막의 성장속도는 감소하였으며, 굴절률은 $O_2$ 가스의 양이 0∼12sccm인 범위에서 2.09(at 1550nm)로 일정한 값을 나타내었다. Ar:O$_2$가 3: 12인 조건에서 화학양론 조성인 Ta$_2$O$_{5}$를 형성하였으며, 표면 거칠기도 가장 작은 값을 나타내었다.나타내었다.

A Study on the Spatial Resolution of Gas Detectors Based on EGS4 Calculations

  • Moon, B.S.;Han, S.H.;Kim, Y.K.;Chung, C.E.
    • Journal of Radiation Protection and Research
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    • 제29권1호
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    • pp.25-31
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    • 2004
  • Results of EGS4 based calculations to study the spatial resolution of gas detectors are described. The calculations include radial distribution of electrons generated by photons of various energies penetrating into variable thickness of Ar and Xe gas layers. Given a desired spatial resolution, the maximum allowed thickness of gas layer for each energy level is determined. In order to obtain 0.1mm spatial resolution, the maximum thickness for the Ar gas is found to be 2mm for photon energies below 14keV while the optimum energy of photons for Xe gas with the same thickness is about 45keV. The results of calculations performed to compare the number of electrons generated by CsI coated micro-channel plate and the number of electrons generated by the Ar and Xe gas layers are described. The results show that the number of electrons generated by the gases is about 10 times higher than the one generated by CsI coated micro-channel plate. A few sample gray scale images generated by these calculations are included.

Ar/He 보호가스분위기에서 Al 5083 합금의 대전류 MIG 용접특성 (High Current MIG Welding of Al 5083 Alloy under Ar/He Mixed Gas Shielding)

  • 최영배;황인성;강문진;김동철
    • Journal of Welding and Joining
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    • 제32권1호
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    • pp.87-92
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    • 2014
  • Recently, use of thick Al 5083 plate has increased in production of LNG storage tank. In general, multi-pass welding has been used to achieve sufficient penetration in thick plate welding. High current welding which enables high deposition and deep penetration is preferred in thick plate welding because the increase of number of pass increases manufacturing cost and formation of weld defect. In this study, welding characteristics according to various Ar/He shielding gas composition was investigated in high current MIG welding. The bead-on-plate welding and V groove welding were conducted on Al 5083 alloy with a thickness of .25 mm. The effect of shielding gas composition on bead shape was evaluated and proper shielding gas composition was proposed. Also arc stability was examined under selected shielding gas composition. One side-one pass welding experiments were conducted for V groove specimen with a thickness of 25 mm. Mechanical properties and hardness profiles were measured for the V groove specimens.

$Cl_2/Ar$ 유도 결합 플라즈마에서 Pt 박막 식각시 $N_2$ 가스 첨가 효과 (The Effect Of Additive $N_2$ Gas In Pt Film Etching Using Inductively Coupled $Cl_2/Ar$ Plasmas)

  • 류재흥;김남훈;장의구;김창일
    • 대한전자공학회논문지SD
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    • 제37권7호
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    • pp.1-6
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    • 2000
  • 본 연구에서는 Pt 박막을 식각하기 이하여 기존에 최적화된 가스 혼합비인 $Cl_2$(10)Ar (90)에 $N_2$ 가스를 첨가하기 실험하였다. $Cl_2$(10)/Ar(90)의 가스 혼합비에 20% $N_2$가스 첨가시, $SiO_2$ 마스크에 대한 Pt 박막의 선택비 향상으로 70$^{\circ}$ 이상의 식각 프로파일을 얻을 수 있었다. 이는 $SiO_2$ 마스크 위에 Si-N, Si-O-N과 같은 차단막 생성을 통한 결과로 확인 되어졌다. $SiO_2$ 마스크에 대한 Pt 박막의 최대 선택비와 식각률은 각각 1.71과 4125 ${\AA}$/min 이다. 이는 Pt-N, Pt-N-Cl과 같은 휘발성 화합물의 생성을 통한 결과로 판단된다.

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오비탈 용접법을 적용한 STS 316L 파이프 소재의 용접부 특성에 관한 연구 (A Study on the Welds Characteristics of Stainless Steel 316L Pipe using Orbital Welding Process)

  • 이병우;조상명
    • 동력기계공학회지
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    • 제14권2호
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    • pp.71-77
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    • 2010
  • This paper was studied on microstructure, mechanical properties and corrosion characteristics of 316L stainless steel pipe welds was fabricated by orbital welding process. S-Ar specimen was fabricated by using Ar purge gas and S-$N_2$ specimen was fabricated by using $N_2$ purge gas. Ferrite was not detected in weld metal of S-$N_2$ specimen but the order of 0.13 Ferrite number(FN) was detected in weld metal of S-Ar specimen. Oxygen and Nitrogen concentration of S-$N_2$ specimen was higher than S-Ar specimen on HAZ and inner bead. The welds microstructural characteristics of S-Ar and S-$N_2$ specimens are similar. The microvickers hardness values of S-Ar and S-$N_2$ specimens welds were similar and average values of each regions were in the range of 174~194. The microstructures of S-Ar and S-$N_2$ weld metal were full austenite by primary austenite solidification. The Solidification structures of S-Ar and S-$N_2$ weld metal were formed directional dendrite toward bead center. The potentiodynamic polarization curve of STS 316L pipe welds exhibited typical active, passive, transpassive behaviour. Corrosion current density$(I_{corr.})$ and corrosion rate values of S-Ar specimen in 0.1M HCl solution were $0.95{\mu}A/cm^2$ and $0.31{\mu}A$/year respectively. The values of S-$N_2$ specimen were $1.4{\mu}A/cm^2$ and $0.45{\mu}m$/year.

The Effects of Gas Compositions During Post Nitriding on the AISI 316L Stainless Steel after Plasma Carburizing

  • Lee, Insup
    • 한국표면공학회지
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    • 제48권6호
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    • pp.269-274
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    • 2015
  • In this experiment, post-nitriding treatment was performed at $400^{\circ}C$ on AISI 316 stainless steel which was plasma carburized previously at $430^{\circ}C$ for 15 hours. Plasma nitriding was implemented on AISI 316 stainless steel at various gas compositions (25% $N_2$, 50% $N_2$ and 75% $N_2$) for 4 hours. Additionally, during post nitriding Ar gas was used with $H_2$ and $N_2$ to observe the improvement of surface properties. After treatment, the behavior of the hybrid layer was investigated by optical microscopy, X-ray diffraction, and micro-hardness testing. Potentiodynamic polarization test was also used to evaluate the corrosion resistance of the samples. Meanwhile, it was found that the surface hardness increased with increasing the nitrogen gas content. Also small percentage of Ar gas was introduced in the post nitriding process which improved the hardness of the hardened layer but reduced the corrosion resistance compared with the carburized sample. The experiment revealed that AISI 316L stainless steel showed better hardness and excellent corrosion resistance compared with the carburized sample, when 75% $N_2$ gas was used during the post nitriding treatment. Also addition of Ar gas during post nitriding treatment degraded the corrosion resistance of the sample compared with the carburized sample.

저온 플라즈마침탄처리된 316L 스테인레스 스틸의 플라즈마 후질화 처리시 표면특성에 미치는 가스조성의 영향 (The effects of post nitriding on the AISI 316 stainless steel after Plasma carburizing at various gas compositions)

  • 이인섭
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2012년도 춘계학술발표회 논문집
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    • pp.177-178
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    • 2012
  • In this experiment, post-nitriding treatment has been performed at $400^{\circ}C$ on AISI 316 stainless steel which is plasma carburized previously at $430^{\circ}C$ for 15 hours. Plasma nitriding was implemented on AISI 316 stainless steel at various gas compositions (25% N2, 50% N2 and 75% N2) for 4 hours. Additionally, during post nitriding Ar gas was used with H2 and N2 to observe the improvement of treatment. After treatment, the behavior of the hybrid layer was investigated by optical microscopy, X-ray diffraction, and micro-hardness testing. Potentiodynamic polarization test was also used to evaluate the corrosion resistance of the samples. Meanwhile, it was found that the surface hardness increased with increasing the nitrogen gas content. Also small percentage of Ar gas was introduced in the post nitriding process which improved the hardness of the hardened layer but reduces the corrosion resistance compared with the carburized sample. The experiment revealed that AISI 316L stainless steel showed better hardness and excellent corrosion resistance compared with the carburized sample, when 75% N2 gas was used during the post nitriding treatment. Also addition of Ar gas during post nitriding treatment were degraded the corrosion resistance of the sample compared with the carburized sample.

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300 kHz 조건에서의 초음파화학적 산화반응에 대한 연속식 가스 주입 효과 (Effect of Gas Sparging on Sonochemical Oxidation in a 300 kHz Sonoreactor)

  • 서지은;손영규
    • 한국물환경학회지
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    • 제34권6호
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    • pp.642-649
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    • 2018
  • The effect of gas sparging on sonochemical oxidation was investigated in a 300 kHz sonoreactor under various liquid height/volume conditions ($5{\sim}30{\lambda}$, 3.4 ~ 9.0 L), determined by the wavelength of the applied frequency. The electrical input power was maintained constant for all cases . Sonochemical activity drastically decreased from $15{\lambda}$ and the liquid height of $10{\lambda}$ was suggested as the optimal height for 300 kHz without gas sparging. In our previous research, the sonochemical activity observed was five-times higher when air sparging was applied for 36 kHz. On the other hand, no enhancement was obtained at 10, 15, 25 and $30{\lambda}$ using air sparging (1, 3, and 6 L/min) for 300 kHz in this study $20{\lambda}$ and optimization of gas sparging was conducted at $20{\lambda}$ using various gases including air, Ar, $O_2$, $N_2$, and mixtures of Ar and $O_2$. It was found that gas sparging using pure Ar or pure $O_2$ resulted in lower sonochemical activity compared to that of air sparging due to the imbalance between the intensity of cavitation phenomena and the generation of oxidizing radical species. Consequently, the gas mixture of $Ar:O_2$ = 80 % : 20 % (DO saturation ${\approx}100%$) was suggested as an optimal gas sparging condition.

Ar-CO$_2$ Plasma에 의한 강(鋼)의 정련(精鍊) (Refining of Steels by $Ar-CO_2$ Plasma)

  • 장석영;김동의
    • 한국주조공학회지
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    • 제6권4호
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    • pp.284-289
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    • 1986
  • Decarburization phenomena have been studied by plasma in stainless steel, plain carbon steel and cast iron. It was also investigated the movement of impurity element P,S in the plasma jet metal pool. The plasma jet was obtained by $Ar\;-\;CO_2$ gas mixture with 5 kVA DC power source. It produced enough temperature to dissociate into activated oxygen atom by reaction of $CO_2{\leftrightarrows}CO+O^+$ and it reacted with ${\underline{C}}$ in metal pool. Decarburization rate was increased about 5 times in comparing with the conventional induction melted metal pool by $CO_2$ gas decarburization. Even under the Ar plasma jet, decarburization was obtained by agitation of metal bath by $Ar^+$ bombardment and dilution phenomena of carbon atom under the very high plasma temperature. But heavy element P and S are not much removed because they are too heavy in mass to be activated by $Ar^+$ion bombardment. Desulphurization was achieved by $Ar\;-\;CO_2$ plasma in plain carbon steel and cast iron by the reaction of $SO_2({\underline{S}}+O^+)$. But dephosphorization could not be obtained by $Ar\;-\;CO_2$ plasma, because gaseous reaction of phosphorous oxide (${\underline{P}}+O^+$) was not existed.

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Kinetic Spray 공정으로 제조된 탄탈륨 코팅층의 열처리 분위기에 따른 미세조직 및 물성 (Effect of Heat Treatment Environment on the Microstructure and Properties of Kinetic Sprayed Tantalum Coating Layer)

  • 이지혜;김형준;이기안
    • 한국분말재료학회지
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    • 제22권1호
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    • pp.32-38
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    • 2015
  • The effect of heat treatment environment on the microstructure and properties of tantalum coating layer manufactured by kinetic spraying was examined. Heat treatments are conducted for one hour at $800^{\circ}C$, $900^{\circ}C$, and $1000^{\circ}C$ in two different environments of vacuum and Ar gas. Evaluation of microstructure and physical properties are conducted. High density ${\alpha}$-tantalum single phase coating layer with a porosity of 0.04% and hardness of 550 Hv can be obtained. As heat treatment temperature increases, porosity identically decreases regardless of heat treatment environment (vacuum and Ar gas). Hardness of heat treated coating layer especially in Ar gas environment deceases from 550 Hv to 490 Hv with increasing heat treatment temperature. That in vacuum environment deceases from 550 Hv to 530 Hv. The boundary between particles became vague as heat treatment temperature increases. Oxygen distribution of tantalum coating layer is minute after heat treatment in vacuum environment than Ar gas environment.