• Title/Summary/Keyword: Ar Gas

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Properties of ZnO:Ga Thin Films Deposited by RF Magnetron Sputtering with Ar Gas Flows (RF 마그네트론 스퍼터링법으로 제조한 GZO 박막의 Ar 유량에 따른 특성)

  • Kim, Deok Kyu
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.33 no.6
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    • pp.450-453
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    • 2020
  • In this study, ZnO:Ga thin films were fabricated on a glass substrate using various Ar flows by an RF magnetron sputter system at room temperature. The dependencies of Ar flow on different properties were investigated. An appropriate control over the Ar flow led to the formation of a high-quality thin film. The ZnO:Ga films were formed as a hexagonal wurtzite structure with high (002) preferential orientation. The films exhibited a typical columnar microstructure and a smooth top face. The average transmittance was 85~89% within the visible area. By decreasing the Ar flow, the sheet resistance was decreased due to an increase in the grain size and a decrease in the root mean square roughness. The lowest sheet resistance of 86 Ω/□ was obtained at room temperature for the 40 sccm Ar flow.

Study on the Surface Reaction of Pt Thin Film with SF$_6$/Ar and Cl$_2$/Ar Plasma Gases (Pt 박막의 SF$_6$/Ar과 C1$_2$/Ar 플라즈마 가스와의 표면반응에 관한 연구)

  • 김상훈;주섭열;안진호
    • Journal of the Microelectronics and Packaging Society
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    • v.8 no.3
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    • pp.63-67
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    • 2001
  • Up to now, most studies about Pt-etching have been focused on physical sputtering mechanism with Cl-based plasma, while only a limited results are available for etching characteristics with fluorine-based plasma. In this study, etch characteristics of Pt thin film with $Cl_2$/Ar and $SF_{6}$/Ar Ar gas chemistries have been studied with ECR plasma etching system. It is confirmed that $SF_{6}$/Ar Ar plasma chemistry could make volatile etch-products through the reaction with Pt thin film. Also the improvement in etch rate, etch profile and surface roughness is obtained due to the formation of volatile platinum fluoride compounds.

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Etching Mechanism of $YMnO_3$ Thin Films in High Density $CF_{4}/Ar$ Plasma (고밀도 $CF_{4}/Ar$ 플라즈마에서 $YMnO_3$ 박막의 식각 매카니즘)

  • Lee, Cheol-ln;Kim, Dong-Pyo;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.05b
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    • pp.12-16
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    • 2001
  • We investigated the etching characteristics of $YMnO_3$ thin films in high-density plasma etching system. In this study. $YMnO_3$ thin films were etched with $CF_{4}/Ar$ gas chemistries in inductively coupled plasma (ICP). Etch rates of $YMnO_3$ were measured according to gas mixing ratios. The maximum etch rate of $YMnO_3$ is 18 nm/min at $CF_{4}/(CF_{4}+Ar)$ of 20%. In optical emission spectroscopy (OES) analysis, F radical and Ar* ions in plasma at various gas chemistries decreased with increasing $CF_4$ content. Chemical states of $YMnO_3$ films exposed in plasma were investigated with x-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS). There is a chemical reaction between metal (Y, Mn) and F and metal-fluorides were removed effectively by Ar ion sputtering. $YF_x$, $MnF_x$ such as YF, $YF_2$, $YF_3$ and $MnF_3$ Were detected using SIMS analysis. The etch slope is about $65^{\circ}C$ and free of residues.

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Analysis on the Characteristic of Current Waveform and Welding for SM45C Using FCAW According to Gas Mixture Ratio (FCAW를 이용한 SM45C의 혼합가스비율에 따른 전류파형 및 용접특성 연구)

  • Lee, JongHun;Lim, ByungChul;Park, SangHeup
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.23 no.6
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    • pp.618-623
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    • 2014
  • This study, analyzed the waveform and mechanical properties of flux cored arc Welding on SM45C. $CO_2$ 10% + Ar 90% shows the lowest standard deviation and shunt ratio at which the arc was most stable. $CO_2$ 10% + Ar 90% is equal to $CO_2$ 20% + Ar 80%. therefore, $CO_2$ 20% + Ar 80% is the best of mixture gases. The hardness test result for the gas mixture ratio of $CO_2$ 10% + Ar 90% was HV 249.7 which is the highest measured value. According to tensile test results, the tensile strength increased with increasing Ar in the mixture gas. This was because of the inertness of the argon, which does not combine with other elements, causing $CO_2$ to combine with pearlite and ferrite and decreasing the maximum tensile strength. Microstructural examination results show that with increasing Ar, ferrite generation decreases while the mild microstructure increases which influences the hardness.

Ionization and Attachment Coefficients in Mixtures of $SF_6$ and Ar ($SF_6$-Ar 혼합기체에서의 전리와부착계수)

  • 김상남;하성철
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.9
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    • pp.773-778
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    • 2001
  • In this dissertation the results of the combined experimental and theoretical studies designed to understand and predict the spatial growth and transport coefficients for electrons in SF$_{6}$ and SF$_{6}$-Ar mixtures have described. The ionization and attachment coefficients in pure SF$_{6}$ and SF$_{6}$-Ar mixtures have been calculated over the range of 10$_{6}$ molecule and for Ar atom proposed by other authors. The transport coefficients for electrons in (0.2%)SF$_{6}$-Ar and (0.5%)SF$_{6}$-Ar mixtures were measured by time-of-flight method, and the electron energy distribution function and the parameters of the velocity and the diffusion were determined by the variation of the collision cross-sections with energy. The results obtained in this work will provide valuable information on the fundamental haviors of electrons in weakly ionized gases and the role of electron attachment in the choice of better gases and unitary gas dielectrics or electro negative components in dielectric gas mixtures. gas mixtures.

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The Characteristics on Arc Pressure Distribution of TIG Welding with Shield Gas Mixing Ratio (TIG 용접에서의 실드 가스 혼합비에 따른 아크 압력분포 특성)

  • Oh Dong-Soo;Kim Yeong-Sik;Cho Sang-Myung
    • Journal of Welding and Joining
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    • v.23 no.1
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    • pp.41-47
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    • 2005
  • Arc pressure is one of important factors in understanding physical arc phenomena. Especially it affects on the penetration, size and shape of TIG welding. Some researches were reported on the effect of arc pressure in low and middle current region. But there are not any research in high current region. The purpose of this study is to investigate the arc pressure distribution with mixing ratio of shield gas such as Ar and He gases. A Cu block with water cooling was specifically designed and used as an anode electrode in order to measure the arc pressure in high current region. Then, the arc pressure distribution was measured with change in welding current and mixing ratio of shield gases. The arc force was obtained by numerically integrating the measured results. As the results, it was shown that the arc pressure was concentrated at the central part of the arc in middle and high current regions when a pure Ar gas was used. In case of Ar + He mixing gas, the arc pressure was much lower than that of pure Ar gas. In addition, it was widely distributed to radial direction.

The Influence of Shield Gas Ratio on the Toughness of A15083-0 GMAW Weld Zone (A15083-O GMAW 용접시 불활성가스 혼합비가 용접부의 인성에 미치는 영향에 관한 연구)

  • 이동길;김건호
    • Proceedings of the Korean Society of Marine Engineers Conference
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    • 2002.05a
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    • pp.113-199
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    • 2002
  • In this study, the toughness was evaluated by using the instrumented Charpy impact testing procedures for A15083-O aluminum alloy used in the LNG carrying and storing tank. The specimens were GMAW welded with four different mixing shield gas ratios (Ar100%+He0%, Ar67%+He33%, Ar50%+He50%, and Ar33%+He67%), and tested at four different temperatures(+25, -30, -85, and -196$^{\circ}C$ ) in order to investigate the influence of the mixing shield gas ratio and the low temperature. The specimens were divided into base metal, weld metal, fusion line, and HAZ specimen according to the worked notch position. From experiment, the maximum load increased a little up to -85$^{\circ}C$, and the maximum load and maximum displacement were shown the highest and the lowest at -196$^{\circ}C$ than the other test temperatures. The absorption energy of weld metal notched specimens was not nearly depends on test temperature and mixing shield gas ratio because the casting structure was formed in weld metal zone. In the other hand, the others specimens was shown that the lower temperature, the higher absorption energy slightly up to -85$^{\circ}C$ but the energy was decreased so mush at -196$^{\circ}C$

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Effects of Welding Parameters on Porosity Formation in Weld Beads of Galvanized Steel Pipes produced with Gas Metal Arc Welding (아연도금강관의 가스메탈아크용접에서 용접인자가 기공형성에 미치는 영향)

  • Lim, Young-Min;Jang, Bok-Su;Koh, Jin-Hyun
    • Journal of Welding and Joining
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    • v.30 no.5
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    • pp.46-50
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    • 2012
  • This study was carried out to investigate the effect of welding parameters such as shielding gas compositions welding voltage and welding current on the pore formation in the weld beads of galvanized steel pipes produced with gas metal arc welding. The porosity was evaluated and rated by metallography and radiographic test in terms of weight percentage, number and distribution of pores in weld beads. The porosity increased with increasing welding voltage and current, in which Ar gas produced the most porosity while $Ar+5%O_2$ generated the least porosity. It was found that the porosity could be reduced by selection of the proper gas mixture composition such as $Ar+5%O_2$ and $Ar+10%CO_2$ and by using current (130~150A) and voltage(16~20V).

Effects of nitrogen gas flushing in comparison with argon on rumen fermentation characteristics in in vitro studies

  • Park, KiYeon;Lee, HongGu
    • Journal of Animal Science and Technology
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    • v.62 no.1
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    • pp.52-57
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    • 2020
  • In rumen in vitro experiments, although nitrogen gas (N2) flushing has been widely used, its effects on rumen fermentation characteristics are not clearly determined. The present study is the first to evaluate the effects of N2 flushing on rumen fermentation characteristics in in vitro batch culture system by comparing with new applicable non-metabolizable gas: argon (Ar). The rumen fluid was taken from two Korean native heifers followed by incubation for 3, 9, 12, and 24 h with N2 or Ar flushing. As a result, in all incubation time, N2 flushing resulted in higher total gas production than Ar flushing (p < 0.01). Additionally, in N2 flushing group, ammonia nitrogen was increased (p < 0.01). However, volatile fatty acids profiles and pH were not affected by the flushing gases (p > 0.05). In conclusion, the present study demonstrated that N2 flushing can influence the rumen nitrogen metabolism via increased ammonia nitrogen concentration and Ar flushing can be used as a new alternative flushing gas.

The Influence of Shield Gas Ratio on the Toughness of Al5083-O GMA Welding Zone (Al5083-O GMA 용접시 불활성가스 혼합비가 용접부의 인성에 미치는 영향에 관한 연구)

  • 이동길;조상곤;김건호
    • Journal of Advanced Marine Engineering and Technology
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    • v.26 no.6
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    • pp.653-660
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    • 2002
  • In this study, the toughness was evaluated by using the instrumented Charpy impact testing procedures for A15083-O aluminum alloy used in the LNG carrying and storing tank. The specimens were GMAW welded with four different mixing shield gas ratios (Ar100%+He0%, Ar67%+He33%, Ar50%+He50%, and Ar33%+He67%), and tested at four different temperatures(+25, -30, -85, and $-196^{\circ}C$) in order to investigate the influence of the mixing shield gas ratio and the low temperature. The specimens were divided into base metal, weld metal, fusion line, and HAZ specimen according to the worked notch position. From experiment, the maximum load increased a little up to -$85^{\circ}C$ , and the maximum load and maximum displacement were shown the highest and the lowest at -$196^{\circ}C$ than the other test temperatures. The absorption energy of weld metal notched specimens was not nearly depends on test temperature and mixing shield gas ratio because the casting structure was formed in weld metal zone. In the other hand, the other specimens were shown that the lower temperature, the higher absorption energy slightly up to $-85^{\circ}C$ but the energy was decreased so mush at $-196^{\circ}C$.