• 한국전기전자재료학회논문지
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• 제33권6호
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• pp.450-453
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• 2020

In this study, ZnO:Ga thin films were fabricated on a glass substrate using various Ar flows by an RF magnetron sputter system at room temperature. The dependencies of Ar flow on different properties were investigated. An appropriate control over the Ar flow led to the formation of a high-quality thin film. The ZnO:Ga films were formed as a hexagonal wurtzite structure with high (002) preferential orientation. The films exhibited a typical columnar microstructure and a smooth top face. The average transmittance was 85~89% within the visible area. By decreasing the Ar flow, the sheet resistance was decreased due to an increase in the grain size and a decrease in the root mean square roughness. The lowest sheet resistance of 86 Ω/□ was obtained at room temperature for the 40 sccm Ar flow.

• 마이크로전자및패키징학회지
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• 제8권3호
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• pp.63-67
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• 2001

최근가지 Pt박막의 식각은 Cl 계열의 가스에 의한 물리적인 스퍼터링 기구에 초점을 맞추어 연구가 진행되어왔으며 F 계열의 가스에 의한 식각 특성은 상당히 미진하였다. 본 연구에서는 ECR(electron cyclotron resonance) 플라즈마 식각 장비를 이용하여 $Cl_2$/Ar 가스와 $SF_{6}$/Ar 가스를 사용하여 Pt 박막의 식각 특성을 연구하였고, $SF_{6}$/Ar 가스의 경우 Pt 박막과 반응하여 휘발성의 식각 부산물을 형성시킬 수 있음을 확인하였다. 그리고 휘발성있는 platinum fluoride 화합물의 형성에 의해 식각률, 식각 측면형상과 표면 거칠기 특성개선도 얻을 수 있었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 반도체재료
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• pp.12-16
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• 2001

We investigated the etching characteristics of $YMnO_3$ thin films in high-density plasma etching system. In this study. $YMnO_3$ thin films were etched with $CF_{4}/Ar$ gas chemistries in inductively coupled plasma (ICP). Etch rates of $YMnO_3$ were measured according to gas mixing ratios. The maximum etch rate of $YMnO_3$ is 18 nm/min at $CF_{4}/(CF_{4}+Ar)$ of 20%. In optical emission spectroscopy (OES) analysis, F radical and Ar* ions in plasma at various gas chemistries decreased with increasing $CF_4$ content. Chemical states of $YMnO_3$ films exposed in plasma were investigated with x-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS). There is a chemical reaction between metal (Y, Mn) and F and metal-fluorides were removed effectively by Ar ion sputtering. $YF_x$, $MnF_x$ such as YF, $YF_2$, $YF_3$ and $MnF_3$ Were detected using SIMS analysis. The etch slope is about $65^{\circ}C$ and free of residues.

• 한국생산제조학회지
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• 제23권6호
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• pp.618-623
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• 2014

This study, analyzed the waveform and mechanical properties of flux cored arc Welding on SM45C. $CO_2$ 10% + Ar 90% shows the lowest standard deviation and shunt ratio at which the arc was most stable. $CO_2$ 10% + Ar 90% is equal to $CO_2$ 20% + Ar 80%. therefore, $CO_2$ 20% + Ar 80% is the best of mixture gases. The hardness test result for the gas mixture ratio of $CO_2$ 10% + Ar 90% was HV 249.7 which is the highest measured value. According to tensile test results, the tensile strength increased with increasing Ar in the mixture gas. This was because of the inertness of the argon, which does not combine with other elements, causing $CO_2$ to combine with pearlite and ferrite and decreasing the maximum tensile strength. Microstructural examination results show that with increasing Ar, ferrite generation decreases while the mild microstructure increases which influences the hardness.

• 한국전기전자재료학회논문지
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• 제14권9호
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• pp.773-778
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• 2001

In this dissertation the results of the combined experimental and theoretical studies designed to understand and predict the spatial growth and transport coefficients for electrons in SF$_{6}$ and SF$_{6}$-Ar mixtures have described. The ionization and attachment coefficients in pure SF$_{6}$ and SF$_{6}$-Ar mixtures have been calculated over the range of 10$_{6}$ molecule and for Ar atom proposed by other authors. The transport coefficients for electrons in (0.2%)SF$_{6}$-Ar and (0.5%)SF$_{6}$-Ar mixtures were measured by time-of-flight method, and the electron energy distribution function and the parameters of the velocity and the diffusion were determined by the variation of the collision cross-sections with energy. The results obtained in this work will provide valuable information on the fundamental haviors of electrons in weakly ionized gases and the role of electron attachment in the choice of better gases and unitary gas dielectrics or electro negative components in dielectric gas mixtures. gas mixtures.

• Journal of Welding and Joining
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• 제23권1호
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• pp.41-47
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• 2005

Arc pressure is one of important factors in understanding physical arc phenomena. Especially it affects on the penetration, size and shape of TIG welding. Some researches were reported on the effect of arc pressure in low and middle current region. But there are not any research in high current region. The purpose of this study is to investigate the arc pressure distribution with mixing ratio of shield gas such as Ar and He gases. A Cu block with water cooling was specifically designed and used as an anode electrode in order to measure the arc pressure in high current region. Then, the arc pressure distribution was measured with change in welding current and mixing ratio of shield gases. The arc force was obtained by numerically integrating the measured results. As the results, it was shown that the arc pressure was concentrated at the central part of the arc in middle and high current regions when a pure Ar gas was used. In case of Ar + He mixing gas, the arc pressure was much lower than that of pure Ar gas. In addition, it was widely distributed to radial direction.

• 한국마린엔지니어링학회:학술대회논문집
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• 한국마린엔지니어링학회 2002년도 춘계학술대회논문집
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• pp.113-199
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• 2002

In this study, the toughness was evaluated by using the instrumented Charpy impact testing procedures for A15083-O aluminum alloy used in the LNG carrying and storing tank. The specimens were GMAW welded with four different mixing shield gas ratios (Ar100%+He0%, Ar67%+He33%, Ar50%+He50%, and Ar33%+He67%), and tested at four different temperatures(+25, -30, -85, and -196$^{\circ}C$ ) in order to investigate the influence of the mixing shield gas ratio and the low temperature. The specimens were divided into base metal, weld metal, fusion line, and HAZ specimen according to the worked notch position. From experiment, the maximum load increased a little up to -85$^{\circ}C$, and the maximum load and maximum displacement were shown the highest and the lowest at -196$^{\circ}C$ than the other test temperatures. The absorption energy of weld metal notched specimens was not nearly depends on test temperature and mixing shield gas ratio because the casting structure was formed in weld metal zone. In the other hand, the others specimens was shown that the lower temperature, the higher absorption energy slightly up to -85$^{\circ}C$ but the energy was decreased so mush at -196$^{\circ}C$

• Journal of Welding and Joining
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• 제30권5호
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• pp.46-50
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• 2012

This study was carried out to investigate the effect of welding parameters such as shielding gas compositions welding voltage and welding current on the pore formation in the weld beads of galvanized steel pipes produced with gas metal arc welding. The porosity was evaluated and rated by metallography and radiographic test in terms of weight percentage, number and distribution of pores in weld beads. The porosity increased with increasing welding voltage and current, in which Ar gas produced the most porosity while $Ar+5%O_2$ generated the least porosity. It was found that the porosity could be reduced by selection of the proper gas mixture composition such as $Ar+5%O_2$ and $Ar+10%CO_2$ and by using current (130~150A) and voltage(16~20V).

• Journal of Animal Science and Technology
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• 제62권1호
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• pp.52-57
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• 2020

In rumen in vitro experiments, although nitrogen gas (N₂) flushing has been widely used, its effects on rumen fermentation characteristics are not clearly determined. The present study is the first to evaluate the effects of N₂ flushing on rumen fermentation characteristics in in vitro batch culture system by comparing with new applicable non-metabolizable gas: argon (Ar). The rumen fluid was taken from two Korean native heifers followed by incubation for 3, 9, 12, and 24 h with N₂ or Ar flushing. As a result, in all incubation time, N₂ flushing resulted in higher total gas production than Ar flushing (p < 0.01). Additionally, in N₂ flushing group, ammonia nitrogen was increased (p < 0.01). However, volatile fatty acids profiles and pH were not affected by the flushing gases (p > 0.05). In conclusion, the present study demonstrated that N₂ flushing can influence the rumen nitrogen metabolism via increased ammonia nitrogen concentration and Ar flushing can be used as a new alternative flushing gas.

• Journal of Advanced Marine Engineering and Technology
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• 제26권6호
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• pp.653-660
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• 2002

In this study, the toughness was evaluated by using the instrumented Charpy impact testing procedures for A15083-O aluminum alloy used in the LNG carrying and storing tank. The specimens were GMAW welded with four different mixing shield gas ratios (Ar100%+He0%, Ar67%+He33%, Ar50%+He50%, and Ar33%+He67%), and tested at four different temperatures(+25, -30, -85, and $-196^{\circ}C$) in order to investigate the influence of the mixing shield gas ratio and the low temperature. The specimens were divided into base metal, weld metal, fusion line, and HAZ specimen according to the worked notch position. From experiment, the maximum load increased a little up to -$85^{\circ}C$ , and the maximum load and maximum displacement were shown the highest and the lowest at -$196^{\circ}C$ than the other test temperatures. The absorption energy of weld metal notched specimens was not nearly depends on test temperature and mixing shield gas ratio because the casting structure was formed in weld metal zone. In the other hand, the other specimens were shown that the lower temperature, the higher absorption energy slightly up to $-85^{\circ}C$ but the energy was decreased so mush at $-196^{\circ}C$.