Comparative Analysis of Nanotribological Characterization of Fluorocarbon Thin Film by PECVD and ICP (PECVD와 ICP에 의해 증착된 불화유기박막의 나노트라이볼러지 특성 비교분실)
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- Proceedings of the International Microelectronics And Packaging Society Conference
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- 2001.11a
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- pp.226-229
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- 2001