• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 춘계학술대회 논문집 전자세라믹스 센서 및 박막재료 반도체재료 일렉트렛트 및 응용기술
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• pp.1-5
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• 2000

As the semiconductor devices are miniaturized, the number of the unit cleaning processes increases. In order to processes by conventional RCA cleaning process, the consumption of volume of liquid chemical and DI water became huge. Therefore, the problem of environmental issues are evolved by the increased consumption of chemicals. To resolve this matter, an advanced cleaning process by Electrolyzed Water was studied in this work. The electrolyzed water was made by an electrolysis equipment which was composed of three chambers of anode, cathode, and middle chambers. In the case of electrolyzed water with electrolytes in the middle chamber, oxidatively acidic water of anode and reductively alkaline water of cathode were obtained. The oxidation/reduction potentials and pH of anode water and cathode water were measured to be +l000mV and 4.8, and -530mV and 6.3, respectively. The Si-wafers contaminated with metallic impurities were cleaning with the electrolyzed water. To analysis the amounts of metallic impurities on Si-water surfaces, ICP-MS(Inductively Coupled Plasma-Mass spectrometer) was introduced. From results of ICP-MS measurements, it was concluded that the ability of electrolyzed water was equivalent to that of the conventional RCA cleaning.

• 유기물자원화
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• 제18권1호
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• pp.57-65
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• 2010

양성자 교환막 미생물연료전지(PEM-MFC)의 경우 양극의 표면적을 기준으로 유기물 제거능력을 산출하면 유기물 부하에 관계없이 $3.0gCOD/m^2$ 수준으로 나타났다. 또 안정적인 전압이 관찰된 시기의 쿨롱 효율은 22.4~23.4 %로 높지 않은 수준이었다. 양성자 교환막은 양성자뿐만 아니라 초산도 통과시키는 것으로 확인되었다. 양성자 교환막을 사용하지 않은 상향류식 미생물연료전지(ML-MFC)의 경우 다공성 RVC 전극을 사용한 관계로 전극의 외부면적당 유기물 제거능력은 $9.3{\sim}10.1gCOD/m^2{\cdot}d$로 나타났다. 이는 양성자 교환막을 사용한 경우에 비하여 3배 정도 높은 수준이다. 그러나 RVC 양극의 비표면적 차이에 따른 유기물 제거 능력 차이는 크지 않았다. ML-MFC의 경우 전기 발생이 안정적이지 못하였으며, 쿨롱 효율도 3.6~3.7 %로 매우 낮은 수준이었다. 전기 발생량이 안정적이지 못한 것은 음극에 성장한 미생물의 영향으로 판단된다. 이를 해결하기 위해 음극부의 공기주입량을 증가시키면 일시적으로 전기 발생이 증가하였으나 오래 지속되지 못하였다.

• 한국생산제조학회지
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• 제24권4호
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• pp.400-406
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• 2015

This study researched the structure of the source of an ion milling machine used to fabricate a scanning electron microscope (SEM) sample. An ion source is used to mill out samples of over 1 mm dimension using a broad ion beam to generate plasma between the anode and cathode using a permanent magnet. To mill the sample in the vacuum chamber, the ion source should be greater than 6 kV for a positive ion current over $200{\mu}A$. To discover the optimum operating conditions for the ion miller, the diameter of the extractor, anode shape, and strength of the permanent magnet were varied in the experiments. A silicon wafer was used as the sample. The sputter yield was measured on the milled surface, which was analyzed using the SEM. The wafer was milled by injecting 1 sccm of argon gas into the 0.5 mTorr vacuum chamber.

• 한국초전도ㆍ저온공학회논문지
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• 제14권1호
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• pp.1-3
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• 2012

LMO($LaMnO_3$) buffer layer of superconducting coated conductor was deposited on IBAD-MgO template in the plasma atmosphere at $650^{\circ}C$ which is relatively low compared with conventional deposition temperature of more than $800^{\circ}C$. Deposition method of LMO was DC sputtering, and target and deposition chamber were connected to the cathode and anode respectively. When DC voltage was applied between target and chamber, plasma was formed on the surface of target. The tape substrate was located with the distance of 10 cm between target and tape substrate. When anode bias was connected to the tape substrate, electrons were attracted from plasma in target surface to the tape substrate, and only tape substrate was heated by electron bombardment without heating any other zone. The effect of electron bombardment on the surface of substrate was investigated by increasing bias voltage to the substrate. We found out that the sample of electron bombardment had the effect of surface heating and had good texturing at low controlling temperature.

• 한국항공우주학회지
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• 제42권11호
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• pp.974-980
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• 2014

소형 인공위성에 적용하기 위해 홀 추력기의 음극 전원공급기가 개발되었다. 이 전기추력기에는 마이크로웨이브 음극을 적용하였고 음극전원은 안정적인 동작을 위해서 필수적이다. 유량을 조절함에 따라 양극전류는 변하게 되고 이때 음극전류는 양극전류에 비례하여 제어되어야 한다. 그래서 양극전류에 비례하여 음극전류를 공급하도록 음극전원을 설계하였다. 또한 음극전원은 음극의 안정성을 위해 음극전류가 약 0.03A 이내에서 양극전류보다 더 흐르도록 세부 조정되었다. 음극전원에 대한 기능시험은 양극과 음극을 등가적인 부하로 구성하여 수행되었다. 안정적인 추력기 동작을 확인하기 위해서 진공 챔버에서 검증되었고 발사 이후에 우주환경에서도 정상적으로 동작하는 것을 확인하였다.

• 한국수소및신에너지학회논문집
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• 제19권6호
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• pp.498-504
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• 2008

Metal-reducing bacterium, Geobacter sulfurreducens is available for mediator-less microbial fuel cell (MFC) because it has biological nanowires(pili) which transfer electrons to outside the cell. In this study, in the anode chamber of the MFC system using G. sulfurreducens, the concentrations of NaCl, sodium phosphate and sodium bicarbonate as electrolytes were mainly optimized for the generation of electricity from acetate. 0.4%(w/v) NaClO and 0.5M $H_2SO_4$ could be utilized for the sterilization of acrylic plates and proton exchange membrane (major construction materials of the MFC reactor), respectively. When NaCl concentration in anode phosphate buffer increased from 5 to 50 mM, power density increased from 6 to $20\;mW/m^2$. However, with increasing sodium phosphate buffer concentration from 5 to 50 mM, power density significantly decreased from 18 to $1\;mW/m^2$. Twenty-four mM sodium bicarbonate did not affect electricity generation as well as pH under 50 mM phosphate buffer condition. Optimized anode chamber of MFC using G. sulfurreducens generated relatively high power density ($20\;mW/m^2$) with the maximum coulombic efficiency (41.3%).

• 센서학회지
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• 제4권4호
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• pp.62-69
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• 1995

1차원 MWPC(Multiwire Proportional Chamber)를 이용한 디지탈 X-선 사진촬영장치를 개발하였다. X-선의 입사위치 정보는 각각의 양극선에 증폭기, 판별기및 계수기를 연결하여 얻는다. 각각의 판별기에는 판별전압을 독립적으로 설정하여 검출기의 계수율 균일성을 향상시켰으며 미분형비선형값은 ${\pm}4%$이었다. 노화효과를 방지하기 위하여 기체유입형으로 제작하였으며 검출기체로는 비교적 값싼 P10기체를 사용하였다. 양극선 간격이 2mm일때 검출기체의 압력을 증가시킴으로써 위치분해능이 약 1.4mm인 우수한 특성을 얻었다. 피사체를 수직방향으로 스캐닝하여 $32{\times}32$화소의 영상을 었었다.

• 한국추진공학회지
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• 제25권5호
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• pp.65-72
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• 2021

소형위성의 궤도조정 및 궤도유지에 활용될 수 있는 700 W급 홀추력기 랩모델을 개발하였다. 스케일링 방정식을 사용하여 방전채널의 크기를 선정하였으며, 자기장이 방전채널 중심선을 기준으로 대칭성을 가지면서 방전채널 바깥에서 최대가 되도록 설계하였다. 개발된 홀추력기의 방전시험은 2.0×10^-5 Torr 이하의 배경압력을 갖는 진공 환경에서 수행되었으며 추력 스탠드를 이용하여 추력을 측정하였다. 양극전압을 300 V로 고정하고 양극유량과 코일전류를 변수로 하여 추력을 측정하였으며, 양극유량 2.36 mg/s, 코일전류 2.4 A 조건에서 양극전력 620 W에서 추력 38 mN, 통합비추력 1,540 s, 양극효율 50 %로 가장 높은 성능을 보였다.

• 한국세라믹학회지
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• 제43권11호
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• pp.746-750
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• 2006

NiO films and Ru co-sputtered NiO films were deposited by reactive magnetron sputtering for micro-solid oxide fuel cell anode applications. The deposited films were reduced to form porous films. The reduction kinetics of the Ru doped NiO film was more sluggish than that of the NiO film, and the resulting microstructure of the former exhibited finer pore networks. The possibility of using the films for the anodes of single chamber micro-SOFCs was investigated using an air/fuel mixed environment. It was found that the abrupt increase in the resistance is suppressed in the Ru co-sputtered film, as compared to undoped film.

• Transactions on Electrical and Electronic Materials
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• 제17권1호
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• pp.41-45
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• 2016

The Cs₃Sb photocathode was formed by non-vacuum process technology and successive in-situ photocathode vacuum device fabrication carried out in a process chamber. Performance testing of the device was followed. Light emission from the devices was induced by photoemitted electrons, which were accelerated by an anode electric field that was shielded from the photoemitter surface. The luminescent characteristics of the devices were investigated by measuring the optical parameters as functions of the applied anode voltages. The results showed that this approach could produce a more easily directed and controlled stream of light. These features make these devices suitable for a variety of planar lighting applications.