• Journal of Electrical Engineering and information Science
• /
• 제2권5호
• /
• pp.108-113
• /
• 1997

In this paper, the optimum condition of (110) Si etching with the potassium hydroxide(KOH) etchant is presented. Although several researches on (110) Si anisotropic etching have been studied, there has been lack of effects of mask quality and etching conditions on the selectivity and the roughness o the etched surface. Three kinds of masks (film, emulsion and E-beam mask) were used in order to verify the effect of etching properties. Anisotropic bulk etching depends on the crystalline orientation and the concentration and temperature of the etchant. In order to investigate the effect of etching conditions on selectivity and the roughness of the etched surface, the concentration of the etchant was varied from 35 to 45 per cent in weight with increments by 5 per cent and the temperature was changed from 70 to 90$^{\circ}C$ with increments by 10$^{\circ}C$. The combination of the temperature of 70$^{\circ}C$ and the concentration of 40wt.% was found to be the optimum etching condition for high selectivity. Etched surfaces show minimum surfaces show minimum surface roughness at a temperature of 80$^{\circ}C$ and a concentation of 40wt.%. Comb structures with various comb widths were fabricated and the lengths of the combs wree measured with several etching time durations. A micro comb structure 525$\mu\textrm{m}$ high was fabricated for MEMS application.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1995년도 하계학술대회 논문집 C
• /
• pp.1428-1430
• /
• 1995

In this study we fabricate Knife type Si-tip array using (110) Si wafer. We can fabricate vertical structure by anisotropic etching using EPW and observe it by SEM. After the step, we perform isotropic etching and oxidation sharpening of the structure and also observe it by SEM, respectively. The purpose of isotropic etching is to reduce the oxidation time. We attain a optimal tip whose radius is about $100{\AA}$ after anisotropic etching 2.25 min.+isotropic etching 5 min.+oxidation 1 hour and 23 min.

• Structural Engineering and Mechanics
• /
• 제7권5호
• /
• pp.473-484
• /
• 1999

In the present study, the thermal buckling analysis of thick anisotropic laminated composite plates is carried out using the finite strip method based on the higher-order shear deformation theory. This theory accounts for the parabolic distribution of the transverse shear strains through the thickness of the plate and for zero transverse shear stresses on the plate surfaces. Therefore, this theory yields improved results over the Mindlin plate theory and eliminates the need for shear correction factors in calculating the transverse shear stiffness. The critical temperatures of simply supported rectangular cross-ply and angle-ply composite laminates are calculated. The effects of several parameters, such as the aspect ratio, the length-to-thickness ratio, the number of plies, fibre orientation and stacking sequence, are investigated.

• 한국복합재료학회:학술대회논문집
• /
• 한국복합재료학회 2001년도 춘계학술발표대회 논문집
• /
• pp.234-237
• /
• 2001

In this study, efforts were made to understand the propagation of electromagnetic wave through the foam core sandwich structure by the analytical model. Foam core sandwich structure is composed of glass/epoxy composite skins and foam core. Transmittance and reflectance of the arbitrary linearly polarized incident TEM waves through the unidirectional composites, foam and foam core sandwich structures were determined as functions of thickness, fiber orientation of composites, incident angle and polarization angle by the analytical model. From the results of the analysis, the general tendency of transmittance and reflectance of electromagnetic wave through composites, foam and foam core sandwich structures was obtained.

• Interaction and multiscale mechanics
• /
• 제4권2호
• /
• pp.139-153
• /
• 2011

In this paper we develop a fully anisotropic pressure and temperature dependent model to investigate the effect of the microstructure on the shock response of ${\beta}$-HMX molecular single and polycrystals. This micromechanics-based model can account for crystal orientation as well as crystallographic twinning and slip during deformation and has been calibrated using existing gas gun data. We observe that due to the high degree of anisotropy of these polycrystals, certain orientations are more favorable for plastic deformation - and therefore defect and dislocation generation - than others. Loading along these directions results in highly localized deformation and temperature fields. This observation confirms that most of the temperature rise during high rates of loading is due to plastic deformation or dislocation pile up at microscale and not due to volumetric changes.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2006년도 춘계학술대회 논문집
• /
• pp.527-528
• /
• 2006

In the proposed research plan, the effects of anisotropic and time-dependent mechanical properties on nanoindentation measurements of osteonic lamellae in a human cortical bone are investigated. The most popular method(Oliver-Pharr method) in nanoindentation data analysis is based on the assumption of elastic isotropy. Since cortical bone has exhibited anisotropy, it is necessary to consider the effects of anisotropy on nanoindentation measurement for cortical bone. By comparison with the contact area obtained from monitoring the contact profile in FEA simulations, the Oliver-Pharr method was found to underpredict or overpredict the contact area due to effects of anisotropy. The mount of error depended on the indentation orientation. The indentation modulus results and were also similar to moduli calculated from mathematical model. The Oliver-Pharr method has been shown to be useful for providing first order approximations in analysis of anisotropic mechanical properties of cortical bone, although the indentation modulus is influenced by anisotropy.

• 연구논문집
• /
• 통권33호
• /
• pp.147-155
• /
• 2003

In order to fabricate porous materials having an anisotropic thermal conductivity by aligning plate-shaped pores structure, alumina powder (AM-21, mean particle size $4\mum$) and flake crystalline graphite was used. The aligned pore structure was realized using multi-pressing process. Degree of pore orientation increased with the number of pressing and thermal conductivity, parallel to the pressing direction, decreased with the number of pressing. Thermal conductivity decreased significantly to the addition of 30vol% crystalline graphite, however, in the case of 60vol%, thermal conductivity did not decrease significantly due to the breakage of crystalline graphite. An anisotropy of the thermal conductivity increased with the content of crystalline graphite up to 30vol%. Graded pore structure was fabricated by controlling the content and size of crystalline graphite, which provides, possibly, the enhancement in mechanical strength and thermal insulation properties of the insulating bricks.

• Structural Engineering and Mechanics
• /
• 제5권6호
• /
• pp.755-765
• /
• 1997

Within the framework of anisotropic combined viscoplastic hardening formulation, accounting macroscopically for residual stress as well as texture development at finite deformations of metals, simple shear analyses for the simulation of fixed-end torsion experiments for ${\alpha}$-Fe, Al and Cu at different strain rates are reviewed with an emphasis on the role of constitutive spins. Complicated responses of the axial stresses with monotonically increasing shear deformations can be successfully described by the capacity of orthotropic hardening part, featuring tensile axial stresses either smooth or oscillatory. Temperature effect on the responses of axial stresses for Cu is investigated in relation to the distortion and orientation of yield surface. The flexibility of this combined hardening model in the simulation of finite inelastic strains is discussed with reference to the variations of constitutive spins depending upon strain rates and temperatures.

• Structural Engineering and Mechanics
• /
• 제3권1호
• /
• pp.49-60
• /
• 1995

In the present study, a finite strip method for the vibration and stability analyses of anisotropic laminated composite plates is developed according to the higher-order shear deformation theory. This theory accounts for the parabolic distribution of the transverse shear strains through the thickness of the plate and for zero transverse shear stresses on the plate surfaces. In comparison with the finite strip method based on the first-order shear deformation theory, the present method gives improved results for very thick plates while using approximately the same number of degrees of freedom. It also eliminates the need for shear correction factors in calculating the transverse shear stiffness. A number of numerical examples are presented to show the effect of aspect ratio, length-to-thickness ratio, number of plies, fibre orientation and stacking sequence on the natural frequencies and critical buckling loads of simply supported rectangular cross-ply and arbitrary angle-ply composite laminates.

• 대한기계학회논문집
• /
• 제19권9호
• /
• pp.2181-2193
• /
• 1995

The effective elasticity and conduction of composite materials containing arbitrarily oriented multiple phases has been analyzed using the concept of orientation-dependent average fields and concentration factors. The analysis provided closed form expressions for the effective stiffnesses and conductivities. Under the prescribed boundary conditions, the concentration factors were evaluated by the equivalent inclusion principle, through which the interaction between various phases is approximated by the Mori-Tanaka mean-field approximation. SiC particulate(SiC$_{p}$) reinforce aluminum(Al) matrix composites were fabricated and their elastic constants and electrical conductivities were measured together with a careful study of their microstructure. The measured properties showed a systematic anisotropy and this behavior could be attributed to the preferred orientation of SiC$_{p}$. The theoretical model developed was applied to the computation of the anisotropic properties of these composites. Both two-phase and three-phase composites were considered based on the microstructural information. The SiC$_{p}$ was modeled as an ellipsoid with planar random orientation distribution in the extruded Al/SiC$_{p}$ composites. The effect of extraneous phase such as intermetallic compounds was also investigated.tigated.