Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1995.07c
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- Pages.1428-1430
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- 1995
Fabrication of Knife type Si tip array by orientation dependent etching of single silicon substrate
단결정 Si 기판의 결정 의존성 식각에 의한 Knife형 Si tip array의 제조
- Jung, Yu-Ho (Dep. Electromic Engineering Seoul City Univ.) ;
- Ko, Chang-Gi (Dep. Electromic Engineering Seoul City Univ.) ;
- Kim, Chul-Ju (Dep. Electromic Engineering Seoul City Univ.) ;
- Ju, Byeong-Kwon (Div. Elect. & Inform. Tech., KIST) ;
- Oh, Myung-Hwan (Div. Elect. & Inform. Tech., KIST)
- 정유호 (서울시립대학교 전자공학과) ;
- 고창기 (서울시립대학교 전자공학과) ;
- 김철주 (서울시립대학교 전자공학과) ;
- 주병권 (한국과학기술연구원 정보전자연구부) ;
- 오명환 (한국과학기술연구원 정보전자연구부)
- Published : 1995.07.20
Abstract
In this study we fabricate Knife type Si-tip array using (110) Si wafer. We can fabricate vertical structure by anisotropic etching using EPW and observe it by SEM. After the step, we perform isotropic etching and oxidation sharpening of the structure and also observe it by SEM, respectively. The purpose of isotropic etching is to reduce the oxidation time. We attain a optimal tip whose radius is about
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