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Etching properties of sapphire substrate using $CH_4$/Ar inductively coupled plasma ($CH_4$/Ar 유도 결합 플라즈마를 이용한 Sapphire 기판의 식각 특성)

  • Um, Doo-Seung;Kim, Gwan-Ha;Kim, Dong-Pyo;Yang, Xue;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.102-102
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    • 2008
  • Sapphire (${\alpha}-Al_2O_3$) has been used as the substrate of opto-electronic device because of characteristics of thermal stability, comparatively low cost, large diameter, optical transparency and chemical compatibility. However, there is difficulty in the etching and patterning due to the physical stability of sapphire and the selectivity with sapphire and mask materials [1,2]. Therefore, sapphire has been studied on the various fields and need to be studied, continuously. In this study, the etching properties of sapphire substrate were investigated with various $CH_4$/Ar gas combination, radio frequency (RF) power, DC-bias voltage and process pressure. The characteristics of the plasma were estimated for mechanism using optical emission spectroscopy (OES). The chemical compounds on the surface of sapphire substrate were investigated using energy dispersive X-ray (EDX). The chemical reaction on the surface of the etched sapphire substrate was observed by X-ray photoelectron spectroscopy (XPS). Scanning electron microscopy (SEM) was used to investigate the vertical and slope profiles.

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Chemical Composition and Antioxidant Activity of Algerian Juniperus Phoenicea Essential Oil

  • Harhour, Aicha;Brada, Moussa;Fauconnier, Marie-Laure;Lognay, Georges
    • Natural Product Sciences
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    • v.24 no.2
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    • pp.125-131
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    • 2018
  • Berries and branches essential oil of Juniperus phoenicea were obtained by electromagnetic induction heating assisted extraction and by hydrodistillation with a yield varied from ($1.2{\pm}0.3$ to $2.4{\pm}0.7%$) and from ($0.6{\pm}0.1%$ to $1.1{\pm}0.1%$), respectively. forty eight compounds were identified representing (97.2 - 99.7%) of the oil. ${\alpha}$-Pinene (40.3 - 67.8%) and ${\delta}$-3-carene (13.5 - 26.8%) were the main compounds in berries and branches essential oils. Antioxidant activity was evaluated by three means: inhibition of 2, 2-diphenyl-1-picryl hydrazyl (DPPH) free radical, reducing power and ${\beta}$-Carotene/linoleic acid bleaching. The antioxidant activity of essential oils showed $IC_{50}$ ranging from $67.6{\pm}1.02{\mu}g/mL$ to $131.5{\pm}0.8{\mu}g/mL$ for berries and from $98{\pm}1.25{\mu}g/mL$ to $166.8{\pm}0.29{\mu}g/mL$ for the branches. Berries oil show more potent antioxidant activity compared to branches. This result is supported by the three methods investigated in this work.

The Grunwald-Winstein Relationship in the Solvolysis of β-Substituted Chloroformate Ester Derivatives: The Solvolysis of 2-Phenylethyl and 2,2-Diphenylethyl Chloroformates

  • Park, Kyoung-Ho;Yang, Gi-Hoon;Kyong, Jin Burm
    • Bulletin of the Korean Chemical Society
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    • v.35 no.8
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    • pp.2263-2270
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    • 2014
  • Solvolysis rate constants of 2-phenylethyl-(2-$PhCH_2CH_2OCOCl$, 1) and 2,2-diphenylethyl chloroformate (2,2-$Ph_2CHCH_2OCOCl$, 2), together with the previously studied solvolyses of ${\alpha}$- and ${\beta}$-substituted chloroformate ester derivatives, are reported in pure and binary solvents at $40.0^{\circ}C$. The linear free energy relationship (LFER) and sensitivities (l and m) to changes in solvent nucleophilicity ($N_T$) and solvent ionizing power ($Y_{Cl}$) of the solvolytic reactions are analyzed using the Grunwald-Winstein equation. The kinetic solvent isotope effects (KSIEs) in methanol and activation parameter values in various solvents are investigated for 1 and 2. These results support well the bimolecular pathway with same aspects. Furthermore, the small negative values of the entropies of activation of solvolysis of 1 and 2 in the highly ionizing aqueous fluoroalcohols are consistent with the ionization character of the rate-determining step, and the KSIE values of 1.78 and 2.10 in methanol-d indicate that one molecule of solvent acts as a nucleophile and the other acts as a general-base catalyst. It is found that the ${\beta}$-substituents in alkyl chloroformate are not the important factor to decide the solvolysis reaction pathway.

Preparation of AIN piezoelectric thin film for filters (필터용 AIN 압전 박막의 제작)

  • Keum Min-Jong;Kim Yeong-Cheol;Seo Hwa-Il;Kim Kyung-Hwan
    • Journal of the Semiconductor & Display Technology
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    • v.5 no.1 s.14
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    • pp.13-16
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    • 2006
  • AIN thin films were prepared on amorphous glass and $SiO_2(1{\mu}m)/Si(100)$ substrate by the facing targets sputtering (FTS) apparatus, which can provide high density plasma, a high deposition rate at a low working gas pressure. The AIN thin films were deposited at a different nitrogen gas flow rate ($1.0{\sim}0.3$) and other sputtering parameters were fixed such as sputtering power of 200w, working pressures of 1mTorr and AIN thin film thickness of 800 nm, respectively. The thickness and crystallographic characteristics of AIN thin films as a function of $N_2$ gas flow rate $[N_2/(N_2+Ar)]$ were measured by $\alpha$-step and an X-ray diffraction (XRD) instrument. And the c-axis preferred orientations were evaluated by rocking curve. In the results, we could prepared the AIN thin film with c-axis preferred orientation of about $5^{\circ}$ on substrate temperature R.T. at nitrogen gas flow rate 0.7.

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Research on Therapeutic Factors of Group Counseling for Elementary School Students (초등학교 집단상담의 치료요인에 대한 연구)

  • Cha, Ta-Soon;Ahn, Le-Hwan
    • Journal of Fisheries and Marine Sciences Education
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    • v.20 no.2
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    • pp.249-265
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    • 2008
  • The purpose of this study is to examine the therapeutic factors of group counseling conducted to the elementary school students. To achieve the purpose, the researchers of this study analysed questionnaire of the 9 therapeutic factors proposed by the Korean Elementary Counseling Education Society(2006) and the survey essay written by the students were added for the research. The reliability (Cronbach's ${\alpha}$) of the whole questions were .753 and the subjects of the survey were 13 paper of elementary group counseling and 213 elementary students. The whole students were classified into two groups which are counseling group and guidance group and the students were classified into 3 types (A, B, C type) by the characteristics they possess. The results of the study are as follow. First, the factors displayed highly in 9 therapeutic factors is the learning of interpersonal relations, the considerations of others, the cohesive power. Second, the 9 therapeutic factors displayed significant difference by the gender and type of the students. Third, the factors displayed highly in analysis of survey essay is the acquisition of informations, the self-understanding, the feeling of intimacy, the other-understanding, the catharsis.

SIGNIFICANCE OF ACTINIDE CHEMISTRY FOR THE LONG-TERM SAFETY OF WASTE DISPOSAL

  • Kim, Jae-Il
    • Nuclear Engineering and Technology
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    • v.38 no.6
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    • pp.459-482
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    • 2006
  • A geochemical approach to the long-term safety of waste disposal is discussed in connection with the significance of actinides, which shall deliver the major radioactivity inventory subsequent to the relatively short-term decay of fission products. Every power reactor generates transuranic (TRU) elements: plutonium and minor actinides (Np, Am, Cm), which consist chiefly of long-lived nuclides emitting alpha radiation. The amount of TRU actinides generated in a fuel life period is found to be relatively small (about 1 wt% or less in spent fuel) but their radioactivity persists many hundred thousands years. Geological confinement of waste containing TRU actinides demands, as a result, fundamental knowledge on the geochemical behavior of actinides in the repository environment for a long period of time. Appraisal of the scientific progress in this subject area is the main objective of the present paper. Following the introductory discussion on natural radioactivities, the nuclear fuel cycle is briefly brought up with reference to actinide generation and waste disposal. As the long-term disposal safety concerns inevitably with actinides, the significance of the aquatic actinide chemistry is summarized in two parts: the fundamental properties relevant to their aquatic behavior and the geochemical reactions in nanoscopic scale. The constrained space of writing allows discussion on some examples only, for which topics of the primary concern are selected, e.g. apparent solubility and colloid generation, colloid-facilitated migration, notable speciation of such processes, etc. Discussion is summed up to end with how to make a geochemical approach available for the long-term disposal safety of nuclear waste or for the performance assessment (PA) as known generally.

Influence of socio-demographic characteristics and ethical type on self-esteem in dental hygiene students (일부 치위생과 학생들의 인구사회학적 특성과 윤리성향이 자아존중감에 미치는 영향)

  • Lee, Hye-Kyung;Ju, On-Ju
    • Journal of Korean society of Dental Hygiene
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    • v.15 no.3
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    • pp.497-504
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    • 2015
  • Objectives: The purpose of the study is to investigate the influence of socio-demographic characteristics and ethical type on self-esteem in dental hygiene students. Methods: A self-reported questionnaire was completed by 657 dental hygiene students in J region from November 10 to December 10, 2014. Data were analyzed by SPSS 12.0 program. The study instrument consisted of ethical type and self-esteem by Liker 5 scale. Ethical type was adapted from Ethics Position Questionnaire by Forsyth and self-esteem was adapted and modified from Rosenburg instrument. Cronbach alpha was 0.850 in ethical type and 0.840 in self-esteem. Results: Ethical type of dental hygiene students showed higher idealism of 3.87 and relativism of 3.59. Self-esteem was 3.49. Extroverted personality tended to show higher self-esteem. Age, monthly income of parents, family atmosphere had an influence on self-esteem. The explanatory power of the study was 35.0%. Conclusions: The ethical type and self-esteem were the important factors to the dental hygiene students in career development.

YBCO - film production by thermal co-evaporation for microwave and electrical power applications

  • Prusseit, W.;Semerad, R.
    • 한국초전도학회:학술대회논문집
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    • v.10
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    • pp.145-145
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    • 2000
  • Large area YBCO - films are series produced by thermal co-evaporation using a deposition scheme known as Garching process, which allows intermittent oxygen supply in a high vacuum ambient by an oxygen cup spaced closely underneath the moving substrates. The deposition area of 9" diameter is capable to handle very large wafers up to 8" diam. or numerous smaller wafers. The large distance between substrates and boat sources and an elaborate heater design guarantee excellent film uniformity over the entire deposition area. YBCO - films deposited by this technique are commercially fabricated for a variety of applications - the most prominent are resistive fault current limiters and microwave filters for mobile or satellite communications. IMUX and OMUX - filters are currently space qualined by Robert Bosch GmbH and are expected to be launched and installed on an experimental platform of the international space station ALPHA in 2001. Both of the above applications require quite different film specifications on the one hand, but at the same time extremely high uniformity and reproducibility on the other hand, since hundreds of YBCO - films are combined to large systems or have to be approved for manned space missions. The success of such projects is direct evidence that the technique of thermal evaporation is readily capable to meet these high demands and has become the major deposition technique to support the emerging HTS market.

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산소 및 아르곤 이온 보조빔을 이용하여 증착한 저온 Indim Tin Oside(ITO) 박막의 특성 연구

  • 김형종;김정식;배정운;염근영;이내응;오경희
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.100-100
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    • 1999
  • 가시광선 영역에서 높은 광학적 투과성과 함께 우수한 전기 전도성을 갖는 ITO 박막은 디스플레이 소자나 투명전극재료 등 다양한 분야에서 응용성이 더욱 증대되고 있다. 증착기판으로서 유리를 사용할 때 생기는 활용범위 제한을 극복하고자 최근 유기물 위에 증착이 가능한 저온 증착방법에 대한 연구가 활발히 이루어지고 있다. 그 가운데 이온빔과 같은 energetic한 beam을 이용한 박막의 제조는 기판을 플라즈마 발생지역으로부터 분리시켜 이온빔의 flux 및 에너지, 입사각 등의 자유로운 조절을 통해 상온에서도 우수한 성질의 박막 형성 가능성이 제시되어 왔다. 본 연구에서는 ion beam assisted evaporation방법을 이용하여 ITO 박막을 성장시켰으며, ion-surface interaction 효과가 박막 성장주에 미치는 영향을 이해하기 위하여 먼저 반응성 산소 이온빔에 비 반응성 아르곤 이온빔을 다양하게 변화시켜가며 증착하였으며, 이와 더불어 산소 분위기에서 아르곤 이온빔에 의한 ITO 박막의 특성 변화를 각각 관찰하였다. 증착전 후의 열처리 없이 상온에서 비저항이 ~10-4$\Omega$cm 이하로 낮고 80% 이상의 투과율을 갖는 ITO 박막을 성장시켰다. 실험에서 이용된 e-beam evaporation 물질은 In2O3-SnO2(1-wt%)였으며, 이온빔 source는 산소에 의한 filament의 산화를 막기 위해 filament cathodes type이 아닌 rf(radio-frequency)를 사용하였다. 중요 증착변수인 이온빔의 flux 변화는 산소와 Ar의 flow rate를 MFC로 조절하고 rf power를 변화시켜 얻었으며, 이온빔 에너지는 가속 grid의 가속전압 변화와 ion gun과 기판사이의 거리 조절을 통해 최적화하였다. 이온빔의 에너지와 flux는 Faraday cup으로 측정하였으며, 성박된 박막의 특성은 UV-spectrometer, 4-point probe, Hall measurement. $\alpha$-step, XRD, XPS 등을 이용하여 광학적, 전기적, 구조적 특성을 분석하였다.

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Factors Impacting on the Supply Chain Collaboration of the Furniture Industry in Vietnam

  • Suong, Huynh Thi Thu
    • The Journal of Asian Finance, Economics and Business
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    • v.4 no.4
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    • pp.67-77
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    • 2017
  • The purpose of this research is to explore the factors affecting on Supply chain (SC). In fact, the collaborative supply chain (CSC) concept in Vietnam is quite new. Apart from obvious differences of doing business between Western versus and most of developing countries such as Vietnam, the literature suggests that collaboration in the supply chain (SC) of the furniture industry are quite low. The primary reason for such low adoption rates is low awareness of enterprises. In order to achieve the purpose of this study, a literature survey related to SC, CSC was carried out, and an empirical analysis was conducted among 276 manufacturers in this industry with the results analyzed. Using Cronbach's alpha analysis, Explore Factor Analysis (EFA) and Regression Analysis (RA) with primary data collected 276 valid samples from 393 samples in Vietnam, this paper explores and confirms that there are existed six basic factors affecting the collaboration in supply chain including: (i) Trust; (ii) Power; (iii) Maturity; (iv) Strategy; (v) Culture; and (vi) Frequency. Results of the research show strong evidences for policy makers and enterprises for management the supply chain collaboration in furniture industry as well as its contribution to literature review of supply chain management.