• Journal of the Semiconductor & Display Technology
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• v.6 no.1 s.18
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• pp.43-48
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• 2007

For exposure systems, very accurate alignment between the mask and the substrate is indispensable. In this paper, an automatic alignment system using machine vision for exposure systems is described. Machine vision algorithms are described in detail including extraction of an alignment mark's center position and camera calibration. Methods for extracting parameters for alignment are also presented with some compensation techniques to reduce alignment time. Our alignment system was implemented with a vision system and motion control stages. The performance of the alignment system has been extensively tested with satisfactory results. The performance evaluation shows alignment accuracy of lum within total alignment time of about $2{\sim}3$ seconds including stage moving time.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.19 no.8
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• pp.838-842
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• 2009

Vibrational analysis is presented for a visual alignment system of nano-imprint process in this study. For a nano-imprinting equipment, the visual alignment system is one of the essential parts in order to align the mold into the target panel. For the precision alignment, the vibration from inside and outside of the vision system should be avoided, and the elimination of the vibration should be considered in the design process of the visual alignment design. In this work, vibrational characteristics for the vision system frame is analyzed and topology optimization of a frame section area is carried out. With the results of the analysis, a new frame design are suggested. Design consideration for constructing a visual alignment system in view of optimal design is also discussed.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.1393-1398
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• 2009

We once have announced that we developed a horizontal large-area alignment system with an alignment accuracy of < ${\pm}3{\mu}m$ and an alignment time of < 30 seconds, a core process module for RGB direct pattering by using a fine metal mask, which can process a Gen 4 ($730{\times}920mm^2$) substrate for high resolution OLED products. In this article, we presents a brand-new vertical alignment system for a even larger substrate of Gen 5 and beyond which can provide a better alignment accuracy and a higher throughput. The newly developed system exhibits an alignment accuracy of < ${\pm}2{\mu}m$ and an alignment time of < 20 seconds which, we believe, can open a new era for manufacturing large-size OLED monitors and TVs.

• Journal of the Semiconductor & Display Technology
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• v.9 no.3
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• pp.47-51
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• 2010

This paper presents a wafer pre-alignment system which is improved using the image of the entire wafer area. In the previous method, image acquisition for wafer takes about 80% of total pre-alignment time. The proposed system uses only one image of entire wafer area via a high-resolution CMOS camera, and so image acquisition accounts for nearly 1% of total process time. The larger FOV(field of view) to use the image of the entire wafer area worsen camera lens distortion. A camera calibration using high order polynomials is used for accurate lens distortion correction. And template matching is used to find a correct notch's position. The performance of the proposed system was demonstrated by experiments of wafer center alignment and notch alignment.

• Journal of Institute of Control, Robotics and Systems
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• v.16 no.12
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• pp.1233-1240
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• 2010

In the flat panel display and semiconductor industries, the visual alignment system is considered as a core technology which determines the productivity of a manufacturing line. It consists of the vision system to extract the centroids of alignment marks and the stage control system to compensate the alignment error. In this paper, we develop a Kalman filter algorithm to estimate the alignment mark postures and propose a coarse-fine alignment control method which utilizes both original fine images and reduced coarse ones in the visual feedback. The error compensation trajectory for the distributed joint servos of the alignment stage is generated in terms of the inverse kinematic solution for the misalignment in task space. In constructing the estimation algorithm, the equation of motion for the alignment marks is given by using the forward kinematics of alignment stage. Secondly, the measurements for the alignment mark centroids are obtained from the reduced images by applying the geometric template matching. As a result, the proposed Kalman filter based coarse-fine alignment control method enables a considerable reduction of alignment time.

• Publications of The Korean Astronomical Society
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• v.11 no.1
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• pp.163-175
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• 1996

We propose the development and test result of new optical axis alignment system for the interchangeable F/8 secondary mirror of the BOAO 1.8m telescope system. Since the original system was not equipped with a suitable optical alignment facility, the whole alignment process was performed by hand. It was necessary at least three persons working more than 2 nights and the altitude of the telescope could not exceed 10 degrees, in such altitude the alignment quality was not so good by atmospheric effect. The new system adopts position readable motorized system and remote control operation by the computer installed in observation room, which reduces the number of workers to only one and eliminates the altitude restriction. The defocused CCD image pair obtained at higher altitude makes the aberration estimates more accurately and the number of required alignment loops is reduced from 10 to 4. The system has been installed on September 1, and performed alignment three times. The test results show that the system is stable and accurate, gives better optical performance of the telescope under F/8 focus. We hope to emphasize the fact that the new system will increase observation time of the telescope by about 20 nights per year assuming one alignment in every month.

• International Journal of Aeronautical and Space Sciences
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• v.2 no.1
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• pp.44-54
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• 2001

This paper describes the antenna alignment method of the tracking antenna system for LEO satellite. The purpose of the antenna alignment is to reduce the angular error due to the structural alignment and the monopulse null point alignment error. The angular error of 3 axis tracking system is the key performance parameter that should be minimized to accurately track satellite movement. The angular error is analyzed via a simulation and boresight measurement. The simulation is done with formulas to be derived from vector concept for 3-axis movement. The formulas of the structural alignment are verified by comparing the formula result with the field measurement. Also, the angular error due to monopulse null shift is obtained via boresight measurement. Based on the analyzed and measured results, the antenna alignment was performed and was verified via tracking test of operating LEO satellite.

• Journal of the Semiconductor & Display Technology
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• v.10 no.4
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• pp.79-87
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• 2011

In this paper, suggested is a hybrid-type visual alignment system to align mask and panel in 3-D space, where mask and panel are to be controlled independently by two individual positioning mechanisms in order to compensate for spatial misalignments. In the hybrid visual alignment system, the below 4-PPR parallel mechanism provides in-plain motions to pattern mask like the other conventional alignment systems while the above 4-RPS parallel mechanism is to move glass panel to achieve a complete spatial alignment. For the control of the hybrid alignment system, first, inverse kinematic solutions for the parallel mechanisms are given to determine the driving distance of each active joint, and also an efficient way to determine the spatial alignment error is developed by exploiting three in-plane cameras.

• Journal of the Korea Institute of Military Science and Technology
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• v.16 no.6
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• pp.745-751
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• 2013

In naval gun firing, firing accuracy comes from the combination of each component's accuracy in CFCS (Command and Fire Control System) like tracking sensors and gun. Generally, battery alignment is done to correct the error between gun and tracking sensor by using boresight telescope on harbor and sea. But normally, the battery alignment can compensate only the static alignment error and ignore dynamic alignment error which is caused by own ship movement. There was no research on this dynamic alignment error until now. We propose a new way to analyze dynamic arrangement error by using image of boresight telescope. In case of the dynamic alignment error was due to time delay of own ship attitude information, we propose the way to compensate it.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.67 no.3
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• pp.433-439
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• 2018

In this paper, a SDINS(strapdown inertial navigation system) rapid initial alignment technique with adaptive time delay compensation is proposed. The proposed method consists of two steps. In first step, misalignment and data latency are estimated by conducting pre-transfer alignment. Then, hybrid alignment is designed to rapidly find the misalignment changes induced by pyro-shock. To improve the performance of hybrid alignment, adaptive time delay compensation method is suggested. We verify the performance improvement of the proposed alignment scheme comparing with the conventional transfer alignment method by van test. The test result shows that the proposed alignment technique improves alignment performance.