• Title/Summary/Keyword: AlON-$Al_2O_3$

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Study on the Properties of $B_2O_3$-$SiO_2$and $Al_2O_3$-$SiO_2$Coating Films by the Sol-Gel Method (Sol-Gel법으로 제조한 $B_2O_3$-$SiO_2$$Al_2O_3$-$SiO_2$ 박막의 특성에 관한 연구)

  • 황규석;김병훈;최석진
    • Journal of the Korean Ceramic Society
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    • v.27 no.5
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    • pp.583-588
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    • 1990
  • Glass films in the binary system B2O3-SiO2 and Al2O3-SiO2 were prepared on soda-lime-silica slide glass by the dip-coating technique from TEOS and boric acid or aluminum nitrate. Thickness of the films varying with viscosity and withdrawal speed were measured and effect of composition and firing temperature on the properties such as transmittance and refractive index were investigated. nM2O3.(100-n)SiO2(M=B or Al) films containing up to 20mol% B2O3 and 40mol% Al2O3 were transparent. Maximum transmittance at visible range were obtained for the sample containing 15mol% Ba2O3 and 32.5mol% Al2O3 and heat-treated at 50$0^{\circ}C$, respectively. Refractive index of the film containing 15mol% B2O3 was mininum in the B2O3-SiO2 binary system and minimal refractive index was appeared at the film containing 32.5mol% Al2O3. In IP spectra, addition of B2O3 were increased absorption peak intensity of B-O and Si-O-B bond and addition of Al2O3 were decreased absorption peak intensity of Si-O bond, respectively.

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A Study on the Forming of Solid Solution in CaO.MgO.$2SiO_2-Al_2O_3$ System (CaO MgO.$2SiO_2-Al_2O_3$ 계의 고용체 생성에 관한 연구)

  • 안영필;김복희
    • Journal of the Korean Ceramic Society
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    • v.20 no.1
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    • pp.25-30
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    • 1983
  • This experiment was studied in the system of (1-x) CaO MgO $2SiO-Al_2O_3$ to investigate forming of solid solution. The technique empolyed was the well known water-quenching method. Differential thermal analysis of the each glass water quenched indicated that under 30 mole% $Al_2O_3$ was lowered with increasing of the amount of $Al_2O_3$ It was supposed by X-ray diffraction patterns of each specimen sintered at various temperature that only solid solution was formed under the 30mole % $Al_2O_3$ compositions solid solution and anorthite were formed at the 20mole% $Al_2O_3$ composition anorthite solid solution and spinel$(MgAl_2O_4)$ were formed over the 40mole% $Al_2O_3$ compositions. The maximum density and thermal expanison coefficient was 2.89g/cm 7.74x106./C$^{\circ}$ respectively in the composi-tion of 10 mole% $Al_2O_3$ . All the specimens showed linear thermal expansion behavior. Microhardness was as high as 850kg/nm2 in the composition of 5, 10, 20 mole % $Al_2O_3$ and dielectric constant was 7.3-6.9.

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Synthesis and Properties of $Al_2O_3-SiC$ Composites from Alkoxides II. Synthesis of Coated Type $Al_2O_3-SiC$ Composite Powders (알콕사이드로부터 $Al_2O_3-SiC$ 복합재료의 제조 및 특성 II. 피복형 $Al_2O_3-SiC$ 복합분말의 합성)

  • 이홍림;김규영
    • Journal of the Korean Ceramic Society
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    • v.30 no.3
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    • pp.243-249
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    • 1993
  • Coated type Al2O3-SiC composite powders were synthesized by surface modification method. Transformation temperature to $\alpha$-Al2O3 of Al2O3 monolith was 115$0^{\circ}C$ whereas increased to 1200, 1250, 130$0^{\circ}C$ with increment of SiC content to 5, 15, 25wt%. Transformation temperature to $\alpha$-Al2O3 was lowered by $\alpha$-Al2O3 seeding. FTIR data analysis and electron micrographs showed that Al2O3 particles were effectively coated on SiC particles.

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Study on the Resistor Formation using an $Al_2O_3$ Etch-Stop Layer in DRAM (DRAM에서 $Al_2O_3$를 식각 정지막으로 이용한 레지스터 형성에 관한 연구)

  • Park, Jong-Pyo;Kim, Gil-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.153-156
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    • 2005
  • 원자층 증착 (atomic layer deposit : ALD) 방식으로 증착한 $Al_2O_3$의 건식식각 특성을 연구하였다. 전자 싸이클로트론 공진 (electron cyclotron resonance : ECR) 방식의 건식식각장치에서 source power, bias power, 압력 그리고 $Cl_2$ 가스를 변수로 하여 $Al_2O_3$의 식각속도와 Poly-Si 의 $Al_2O_3$에 대한 선택비를 측정하였다. bias power가 감소할수록 그리고 압력이 증가할수록 $Al_2O_3$의 식각속도는 감소하였고 Poly-Si 의 $Al_2O_3$에 대한 선택비는 증가하였다. 이 특성을 이용하여 TiN/$Al_2O_3$/Poly-Si 구조의 캐패시터와 Periphery 회로영역의 레지스터를 $Al_2O_3$를 식각 정지막으로 이용하여 구현하였다.

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Study on the R-curve Behaviour in $Al_2O_3-ZrO_2-SiC$ Whisker Comosite ($Al_2O_3-ZrO_2-SiC$ Whisker 복합재료에서의 R-curve 거동에 관한 연구)

  • Kim, Hyun-Ha;Park, Hyun;Choi,Sung-Churl
    • Journal of the Korean Ceramic Society
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    • v.30 no.9
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    • pp.731-739
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    • 1993
  • R-curve measurements were performed on Al2O3(matrix)-ZrO2-SiC whisker composite and Al2O3-ZrO2, Al2O3-SiC whisker composites in the favor of comparing the effect of ZrO2 and SiC whisker, as a second phase, to Al2O3 matrix. Al2O3-SiC whisker and Al2O3-ZrO2-SiC whisker were fabricated by hot pressing at 1$700^{\circ}C$, 15MPa and Al2O3-ZrO2 by pressureless sintering at 1$600^{\circ}C$. A controlled flaw/strength technique was utilized to determine fracture resistance as a function of crack extension and R-curve behaviour was determined from the relationship which is KR=K0(Δa)m. R-curveresults were KR=6.173$\times$Δa0.031 for Al2O3-ZrO2, KR=18.796$\times$Δa0.172 for Al2O3-SiC whisker and KR=11.96$\times$Δa0.110 for Al2O3-ZrO2-SiC whisker composite. From the analysis of R-curve and expeirmental data above three composites, it is found that R-curve behaviour of Al2O3-ZrO2-SiC whisker composite was dominated initially by the strengthening effect of ZrO2 and after, some extended crack were influenced by the effect of SiC whisker. Analysis of SEM and X-ray data revealed that whisker bridging in the crack wake and whisker pull-out mechanisms were the main mechanism for the R-curve behaviour.

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Study of Hydrolysis of Al Powder and Compaction of Nano Alumina by Spark Plasma Sintering(SPS) (Al 분말의 수화 반응과 스파크 플라즈마 열처리법으로 제조된 알루미나 성형체 연구)

  • Uhm Y. R.;Lee M. K.;Rhee C. K.
    • Journal of Powder Materials
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    • v.12 no.6 s.53
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    • pp.422-427
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    • 2005
  • The $Al_2O_3$ with various phases were prepared by simple ex-situ hydrolysis and spark plasma sintering (SPS) process of Al powder. The nano bayerite $(\beta-Al(OH)_3)$ phase was derived by hydrolysis of commercial powder of Al with micrometer size, whereas the bohemite (AlO(OH)) phase was obtained by hydrolysis of nano Al powder synthesized by pulsed wire evaporation (PWE) method. Compaction as well as dehydration of both nano bayerite and bohemite was carried out simultaneously by SPS method, which is used to fabricate dense powder compacts with a rapid heating rate of $100^{\circ}C$ per min. under the pressure of 50MPa. After compaction treatment in the temperature ranges from $100^{\circ}C\;to\; 1100^{\circ}C$, the bayerite and bohemite phases change into various alumina phases depending on the compaction temperatures. The bayerite shows phase transition of $Al(OH)_3{\to}{\eta}-Al_2O_3{\to}{\theta}-Al_2O_3{\to}\alpha-Al_2O_3$ sequences. On the other hand, the bohemite experiences the phase transition from AlO(OH) to ${\gamma}-Al_2O_3\;at\;350^{\circ}C.$ It shows AlO(OH) ${\gamma}-Al_2O_3{\to}{\delta}-Al_2O_3{\to}{\alpha}-Al_2O_3$ sequences. The ${\gamma}-Al_2O_3$ compacted at $550^{\circ}C$ shows a high surface area $(138m^2/g)$.

A Study on the Transparent Glass-Ceramics On Al2O3-SiO2 System (투명 결정화 유리에 관한 연구 - $Al_2O_3-SiO_2$계에 관하여)

  • 박용완;김용욱
    • Journal of the Korean Ceramic Society
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    • v.29 no.3
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    • pp.223-231
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    • 1992
  • CaO and ZnO were added to Al2O3-SiO2 binary system respectively as flux, then ZrO2 and TiO2 were applied as nucleating agent to these CaO-Al2O3-SiO2 and ZnO-Al2O3-SiO2 ternary system glass. The transparency could not be kept in CaO-Al2O3-SiO2 system glass, whereas the transparent glass-ceramics were prepared in ZnO-Al2O3-SiO2 system glass containing ZrO2 as the nucleating agent. At this time the optimum heating temperatures for the nucleation and the crystal growth were 78$0^{\circ}C$ and 97$0^{\circ}C$. The sizes of the precipitated crystals in the transparent glass-ceramics were below 0.1 ${\mu}{\textrm}{m}$, and their light transmissibilities were more than 80%.

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Effect of CuO and $Al_2O_3$ Addition on the Electrical Conductivity of ZnO (ZnO의 전기전도도에 미치는 CuO 및 $Al_2O_3$의 첨가영향)

  • 전석택;최경만
    • Journal of the Korean Ceramic Society
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    • v.32 no.1
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    • pp.106-112
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    • 1995
  • In order to examine the effect of CuO and Al2O3 addition on the electrical conductivity of ZnO, both Al2O3 (0, 1, 2, 5, 10at.%) and CuO (1, 5at.%) were added to ZnO. Al2O3 addition (~2at.% Al) increased the total electrical conductivity of ZnO which was already decreased by CuO doping effect Above solid solubility of Al (~2at.%), ZnAl2O4 formed and the total electrical conductivity decreased due to the decrease of sintered density. Impedance measurements were used to know the reason and degree of contribution of three resistive elements, ZnO grain, ZnO/CuO, and ZnO/ZnO grain boundaries, to the total electrical conductivity changed.

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Effect of Al Alloy Content on Processing of Reaction-Bonded Al2O3 Ceramics Using Al Alloy Powder

  • Lee, Hyun-Kwuon
    • Korean Journal of Materials Research
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    • v.25 no.5
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    • pp.215-220
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    • 2015
  • The effect of Al content on the processing of reaction-bonded $Al_2O_3$ (RBAO) ceramics using 40v/o ~ 80v/o Al-Zn-Mg alloy powder was studied in order to improve traditional RBAO ceramic processes that use ~ 40v/o pure Al powder. The influence of high Al content in starting $Al_2O_3$-Al alloy powder mixtures on its particulate characteristics, reaction-bonding, microstructure, physical and mechanical properties was revealed. Starting $Al_2O_3$-Al alloy powder mixtures with 40v/o ~ 80v/o Al alloy powder were milled, reaction-bonded, post-sintered, and characterized. With an increasing Al alloy content, the milling efficiency of Al alloy powder was lowered, resulting in a larger particle size after milling. However, in spite of the larger particle size of Al alloy powder, the oxidation, i.e., reaction-bonding, of the Al alloy was successfully completed via solid and liquid state oxidation, in which the activation energy of the oxidation was nearly the same regardless of Al alloy content. After reaction-bonding and post-sintering at $1600^{\circ}C$, RBAO ceramics from 80v/o Al alloy content showed a relative density of ~97% and a flexural strength of 251 MPa compared to ~ 96% and 353 MPa for RBAO ceramics from 40v/o Al alloy content, respectively. The lower flexural strength at 80v/o Al alloy content was due to the weak spinel phase that formed from Zn, Mg alloying elements in Al.

Formation of $Al_2O_3$-Ceramics by Reactive Infiltration of Al-alloy into Insulation Fiber Board (Al-합금의 단열섬유판 반응침투에 의한 $Al_2O_3$-세라믹스의 형성)

  • 김일수
    • Journal of the Korean Ceramic Society
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    • v.34 no.5
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    • pp.483-490
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    • 1997
  • Al2O3/metal composites were fabricated by oxidation and reaction of molten Al-alloy into two types of commercial Al2O3-SiO2 fibrous insulation board. The growth rate, composition and microstructure of these materials were described. An AlZnMg(7075) alloy was selected as a parent alloy. Mixed polycrystalline fiber and glass phase fiber were used as a filler. The growth surface of an alloy was covered with and without SiO2. SiO2 powder was employed as a surface dopant to aid initial oxidation of Al-alloy. Al-alloy, SiO2, fiber block and growth inhibitor CaSiO3 were packed sequentially in a alumina crucible and oxidized in air at temperature range 90$0^{\circ}C$ to 120$0^{\circ}C$. The growth rate of composite layer was calculated by measuring the mass increasement(g) per unit surface($\textrm{cm}^2$). XRD and optical microscope were used to investigate the composition and phase of composites. The composite grown at 120$0^{\circ}C$ and with SiO2 dopant showed rapid growth rate. The growth behavior differed a little depending on the types of fiber used. The composites consist of $\alpha$-Al2O3, Al, Si and pore. The composite grown at 100$0^{\circ}C$ exhibited better microstructure compared to that grown at 120$0^{\circ}C$.

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