• Proceedings of the Optical Society of Korea Conference
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• 2000.08a
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• pp.22-23
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• 2000

GaAs/AlGaAs나 InGaAs/InGaAsP와 같은 반도체 기판을 이용한 전계광학 광변조기는 LD나 SOA와 같은 광소자와 단일기판 집적이 가능하고 낮은 chirping과 높은 변조대역폭을 갖는 외부광변조기로서의 장점으로 인하여 마이크로파 대역의 초고속광통신소자로 각광을 받아왔다. 특히 진행파의 속도가 정합된 traveling-wave 전극 구조를 갖는 경우 변조대역폭은 30-400Hz에 달하고 있다$^{(1)}$ . 그러나 한편으로는 반도체의 전계광학계수(electro-Optic Coefficient)가 LiNbO$_3$에 비해 10분의 1정도로 작아 상대적으로 동작전압이 커지는 단점이 대두되며 실제 구동전압이 수십 V에 이르고 있다. 이런 단점을 극복하기 위하여 p-i-n 구조를 이용하여 전계 집속도를 높이는 방법이 제안되어 동작전압이 2 V/mm 정도까지 감소하였다$^{(2)}$ . 본 논문에서는 이와 같은 반도체 전계광학 광변조기에서의 소신호 및 대신호 광변조특성을 분석함으로써 보다 높은 변조대역폭과 보다 낮은 동작전압을 갖는 구조를 연구하였다. (중략)

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.172-175
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• 2003

ZnO:Al thin film for application to FBAR's bottom electrode using ZnO piezoelectric thin film were prepared by FTS, in order to improve the crystallographic properties of ZnO thin films because the ZnO:Al thin film and ZnO thin films structure is equal each other. So we prepared the ZnO:Al thin film with oxygen gas flow rate. Thickness and c-axis preferred orientation and electric properties of ZnO:Al bottom electrode were evaluated by $\alpha$-step, XRD and 4-point probe..

• JSTS:Journal of Semiconductor Technology and Science
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• v.9 no.2
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• pp.91-97
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• 2009

The performance of GaInP/GaAs tandem solar cells with AlInP growth temperatures of 680$^{\circ}C$ and 700 $^{\circ}C$ on n-type GaAs (100) substrate with 2$^{\circ}$ and 6$^{\circ}$ tilt angles has been investigated. The series resistance and open circuit voltage of the fabricated tandem solar cells are affected by the substrate tilt angles and the growth temperatures of the window layer when zinc is doped in the tunnel diode. With carbon doping as a p-type doping source in the tunnel diode and the effort of current matching between top and bottom cells, GaInP/GaAs tandem solar cell has been exhibited 25.58% efficiency.

• Journal of Sensor Science and Technology
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• v.31 no.1
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• pp.31-35
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• 2022

The efficacy improvement of the light emitting diode (LED) was studied for the realization of small-size, low power consumption, and highly sensitive bio-sensor instrument. The performance of the LED with Mg delta-doping at the interface of AlGaN/GaN super-lattice in p type cladding layer was simulated. The device with Mg delta-doping showed improved current, radiative recombination rate, electroluminescence, and light output power compared to the conventional LED structure. Under the bias condition of 5 V, the improved device exhibited 20.8% increase in the light output power. This is attributed to the increment of hole concentration from stable ionization of Mg in p type cladding layer. This result is expected to be used for the miniaturization, power saving, and sensitivity improvement of the bio-sensor system.

• Proceedings of the Korean Vacuum Society Conference
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• 2001.02a
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• pp.97-97
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• 2001

• Journal of the Korean Vacuum Society
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• v.11 no.1
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• pp.43-49
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• 2002

Pd/Ge/Pd/Ti/Au ohmic contact to n-type InGaAs was investigated with rapid thermal annealing conditions. Minimum specific contact resistivity of $1.1\times10^{-6}\Omega\textrm{cm}^2$ was achieved after annealing at $400^{\circ}C$/10sec, and a ohmic performance was degraded at higher annealing temperature due to the chemical reaction between the ohmic contact materials and the InGaAs substrate. However, non-spiking planar interface and relatively good ohmic contact($high-10^{-6};{\Omega}\textrm{cm}^2$) were maintained. This ohmic contact system is expected to be a promising candidate for compound semiconductor devices.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.566-569
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• 2001

In this paper, we investigated the electrical characteristics through DC power at manufacturing the MIS capacitor insulator AIN thin film based on reactive sputtering method. In case of deposition temperature 250$^{\circ}C$, pressure 5mTorr, total flow rate 8sccm(Ar:4sccm N2:4sccm), AIN thin film was deposited with changing DC power. As DC power increses, resistivity is observed a little increase. When AIN thin film is deposited at 100W, the result shows leakage current 10$\^$-8/A/$\textrm{cm}^2$ at 0.1MV/cm. Otherwise, In case of depositing at 150W and 200W, the result shows that the characteristic of leakage current is under 10$\^$-9//$\textrm{cm}^2$ at 0.1MV/cm. In C-V characteristic with DC power, deep depletion phenomenon is observed at inversion region in 100W and 150W. In 200W, that phenomenon, however, was showed to decrease. It shows that the hysterisis increases with being increasing DC power.

• Proceedings of the Zoological Society Korea Conference
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• 1999.10b
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• pp.150.2-150
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• 1999

To investigate the weathering soil buffering capacities of the artificial acidic precipitation, the weathering soils and their leachate solutions were sampled from the host rocks(granite;GR, rhyolite;RH, gabbro;GA, basalt;BA, two serpentinite;SE1, SE2 and limestone;LI) and analyzed for pH and chemical properties. 1n the soil pH of the GR and RH ,the acidic rocks, were 5.02 and 5.95, respectively. And the GA and BA, basic rocks, were 6.52 and 7.57. The SE1 and SE2 were 8.90 and 8.89. While the LI was 7.84. These results means the typical soil pH properties by host rocks. After the artificial acidic precipitation input 5OOml, the average changes of soil leachate solutions treated by pH levels(pH 5.0, 4.0 and 3.0), were pH 5.73, 5.00 and 4.40. in GR soil, and pH 6.19, 5.99 and 5.57 in RH. GA were pH 6.31, 6.04 and 5.86, BA were pH 7.05, 6.85 and 6.56 and SE1 were pH 8.31, 8.26 and 7.71. SE2 were pH 8.29, 8.24 and 7.96. LI were pH 7.55, 7.46 and 6.79. The soil leachate pHs from volcanic rocks were higher than those from the plutonic rocks and GR soils showed greater response than other soils. With increasing 100ml input-solution, the soil leachate pHs were mainly decreased. Cation concentrations, CEC, EC and total nitrogen concentrations of RH and BA soils, the volcanic rocks, were higher than those of GR and GA soil, the plutonic rocks. On the contrary, Al concentrations of the GR and GA soils were higher than those of RH and BA soils, partly because of high quartz content in GR and Al content in the biotite and plagioclase in GA.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.44 no.4
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• pp.80-85
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• 2007

The passivation is one of the important technologies for protection of the devies from damage. In this paper, we fabricated $0.1{\mu}m\;{\Gamma}$--gate InAIAs/InGaAs metamorphic high electron mobility transistors (MHEMTs) on a GaAs substrate. And then the wafer with MHEMTs was divided into two pieces; one for passivation and another for without passivation experiments. The passivations were done by using both low-k BCB and Si3N4 thin films. DC and RF performances were measured and the results are compared. The MHEMTs with BCB passivation show lower degradation than ones with Si3N4 passivation.

• Transactions on Electrical and Electronic Materials
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• v.11 no.2
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• pp.54-60
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• 2010

Polymer-assisted deposition is a chemical solution route to high quality thin films. In this process, the polymer controls the viscosity and binds metal ions, resulting in a homogeneous distribution of metal precursors in the solution and the formation of crack-free and uniform films after thermal treatment. We review our recent effort to epitaxially grow metal-nitride thin films, such as hexagonal GaN, cubic TiN, AlN, NbN, and VN, mixed-nitride $Ti_{1-x}Al_xN$, ternary nitrides tetragonal $SrTiN_2$, $BaZrN_2$, and $BaHfN_2$, hexagonal $FeMoN_2$, and nanocomposite TiN-$BaZrN_2$.