• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.363-363
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• 2008

The development of dry etching process for sapphire wafer with plasma has been key issues for the opto-electric devices. The challenges are increasing control and obtaining low plasma induced-damage because an unwanted scattering of radiation is caused by the spatial disorder of pattern and variation of surface roughness. The plasma-induced damages during plasma etching process can be classified as impurity contamination of residual etch products or bonding disruption in lattice due to charged particle bombardment. Therefor, fine pattern technology with low damaged etching process and high etch rate are urgently needed. Until now, there are a lot of reports on the etching of sapphire wafer with using $Cl_2$/Ar, $BCl_3$/Ar, HBr/Ar and so on [1]. However, the etch behavior of sapphire wafer have investigated with variation of only one parameter while other parameters are fixed. In this study, we investigated the effect of pressure and other parameters on the etch rate and the selectivity. We selected $BCl_3$ as an etch ant because $BCl_3$ plasmas are widely used in etching process of oxide materials. In plasma, the $BCl_3$ molecule can be dissociated into B radical, $B^+$ ion, Cl radical and $Cl^+$ ion. However, the $BCl_3$ molecule can be dissociated into B radical or $B^+$ ion easier than Cl radical or $Cl^+$ ion. First, we evaluated the etch behaviors of sapphire wafer in $BCl_3$/additive gases (Ar, $N_2,Cl_2$) gases. The behavior of etch rate of sapphire substrate was monitored as a function of additive gas ratio to $BCl_3$ based plasma, total flow rate, r.f. power, d.c. bias under different pressures of 5 mTorr, 10 mTorr, 20 mTorr and 30 mTorr. The etch rates of sapphire wafer, $SiO_2$ and PR were measured with using alpha step surface profiler. In order to understand the changes of radicals, volume density of Cl, B radical and BCl molecule were investigated with optical emission spectroscopy (OES). The chemical states of $Al_2O_3$ thin films were studied with energy dispersive X-ray (EDX) and depth profile anlysis of auger electron spectroscopy (AES). The enhancement of sapphire substrate can be explained by the reactive ion etching mechanism with the competition of the formation of volatile $AlCl_3$, $Al_2Cl_6$ or $BOCl_3$ and the sputter effect by energetic ions.

• Proceedings of the Mineralogical Society of Korea Conference
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• 2001.06a
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• pp.115-115
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• 2001

경주시 양남면의 4기 단층으로 추정되는 수렴단층에 의해 절단되는 해안단구 퇴적층 풍화단면에서 저결정질 광물인 앨로패인 교결층을 기재하였다. 이들은 자갈퇴적층 내에 협재하는 수조의 모래층에 한정되어 형성되어 있으며, 3-17 cm 두께로 연장성이 매우 좋다. 편광현미경 관찰에 의하면 모래층에는 사장석편들이 다량 함유되어 있으며 앨로패인은 광학적 등방성의 치밀한 점토집합체들로서 사장석 입자를 선택적으로 교대하거나 자갈과 모래입자들을 피복하고 있다. 앨로패인은 광학적 이방성인 상하위층의 고령토질 점토피복물과 명확히 구분된다. 앨로패인의 전자현미분석에 의하면, Al/Si 원자비가 1.3-1.7 범위이고 평균값은 1.5이다. X선회절분석 결과 3.49$\AA$과 2.26$\AA$에서 두 개의 넓은 회절대가 관찰된다. 주사 및 투과전자현미경관찰에 의하면 앨로패인을 특정한 입자형태 없이 치밀한 겔상태를 이루고 있다. 열분석에 의하면 96$^{\circ}C$에서 큰 흡열피크와 992$^{\circ}C$에서 발열피크가 관찰되며, 총 45% 정도의 중량감소를 보인다. 사장석의 평균조성은 An$_{87}$이며, 사장석내 유리포유물의 전자현미분석결과는 화산암 화학분류도에서 현무암 영역에 도시된다. 이 지역의 기반암은 현무암질 라필리응회암이나 사장석편을 제외하고 벤토나이트화되어 있다. 따라서 해빈환경에서 사장석이 벤토나이트에서 분리되어 퇴적한 것으로 보인다. 앨로패인 교결층은 해수면 강하로 단구퇴적층이 지표로 노출된 후, Al의 함량이 높고 비교적 풍화에 약한 사장석이 선택적으로 풍화되어 생성되었다. 앨로패인으로 피복된 모래층 내의 자갈은 풍화반응이 지체되어 상하위층의 자갈과 비교하여 풍화도에 있어서 현저한 차이를 보인다.. 파이프 중심에서 외곽부로 갈수록 전기석의 함량은 줄어들고 있고 장석들이 알바이트ㆍ칼스베드 쌍정을 보이며, 흑운모가 각섬석보다는 우세하게 나타나고 있다. 전기석은 주상 결정, 자형 내지 반자형의 입자로 다색성을 보이며, 결정 중심에서 가장자리로 갈수록 파란색과 황갈색의 광학적 누대구조를 관찰할 수 있다. 일광광산에서 산출되는 전기석에 대한 현미경 관찰은 열수기원임을 지시하고 있다. 야외조사와 현미경 관찰의 예비조사에 의하면 일광광산의 전기석이 형성된 환경은 다른2가지 화학적인 저장소의 혼합 효과의 결과로 생성되어진 것으로 예상된다. 일광의 화강암류를 만든 마그마는 전기석을 형성할 만큼의 Fe-Mg성분이 충분하지 않았을 것이다. 화강암 내에 흑운모와 각섬석의 결정작용에 의해 마그마의 Fe-Mg성분이 고갈되어지고 이로 인해 그 함량이 감소하며 상대적으로 마그마 내에 남은 붕소(B$_2$O$_3$)는 열수로 용리되고 흑운모, 각섬석과 평형을 유지하며 열수에 남아있게 된다. 잔류용융체에 남은 붕소의 함량은 전기석을 만들기에 충분함에도 불구하고, Fe-Mg 함량이 부족하여 마그마 기원의 전기석 결정을 만들 수가 없다가 광맥이 형성된 시기에 또 다른 열수가 공급되면서 이전의 평형이 깨지고 기존의 흑운모와 같은 염기성 광물이 붕소(B)를 함유한 새로운 열수와 반응하여 전기석을 형성한 것으로 예상한다. 앞으로 전암과 광물에 대해 지화학적 연구를 통해 화강암류와 전기석과의 지화학적 연관성, 주성분 원소와 열수의 특성과의 상관관계, 전기석의 기원(마그마 기원인지 열수기원인지)이 보다 정확하게 파악될 것이다. 마그마 진화에 따른 전기석의 성분변화와 기원을 이용하여 일광광산의 동광화대를 형성한 마그마 계에서 열수계로 이어지는 지질학적 과정을 이해할 수 있을 것이며, 암석 성인론적 지시자로서

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.137-137
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• 2009

Thin-film transistors (TFTs) that can be prepared at low temperatures have attracted much attention due to the great potential for flexible electronics. One of the mainstreams in this field is the use of organic semiconductors such as pentacene. But device performance of the organic TFTs is still limited by low field effect mobility or rapidly degraded after exposing to air in many cases. Another approach is amorphous oxide semiconductors. Amorphous oxide semiconductors (AOSs) have exactly attracted considerable attention because AOSs were fabricated at room temperature and used lots of application such as flexible display, electronic paper, large solar cells. Among the various AOSs, a-IGZO was considerable material because it has high mobility and uniform surface and good transparent. The high mobility is attributed to the result of the overlap of spherical s-orbital of the heavy pest-transition metal cations. This study is demonstrated the effect of thickness channel layer from 30nm to 200nm. when the thickness was increased, turn on voltage and subthreshold swing were decreased. a-IGZO TFTs have used a shadow mask to deposit channel and source/drain(S/D). a-IGZO were deposited on SiO2 wafer by rf magnetron sputtering. using power is 150W, working pressure is 3m Torr, and an O2/Ar(2/28 SCCM) atmosphere at room temperature. The electrodes were formed with Electron-beam evaporated Ti(30nm) and Au(70nm) structure. Finally, Al(150nm) as a gate metal was evaporated. TFT devices were heat treated in a furnace at $250^{\circ}C$ in nitrogen atmosphere for an hour. The electrical properties of the TFTs were measured using a probe-station to measure I-V characteristic. TFT whose thickness was 150nm exhibits a good subthreshold swing(S) of 0.72 V/decade and high on-off ratio of 1E+08. Field effect mobility, saturation effect mobility, and threshold voltage were evaluated 7.2, 5.8, 8V respectively.

• The Journal of the Petrological Society of Korea
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• v.9 no.2
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• pp.84-98
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• 2000

Daejeon-sa basalt in the Mt. Juwang area composed of 12 basalt flows alternate with 9 peperites and each basalt and peperite has the variety of thickness. Peperites yielded in Daejeon-sa basalt are mixed of basalt with reddish shale, of which textural type is globular peperite. Basalts yielded in Daejeon-sa basalt are massive basalt without vesicule, although sometimes vesicules are founded in upper within a flow unit. The basalt has mainly pseudomorph of olivine as phenocryst, and also plagioclase and clinopyroxene phenocryst. Matrix is mainly subophitic texture. The plotting result on the TAS diagram shows these basalts belong to the sub-alkaline, and it can be subdivided into calc-alkaline series on the basis of the diagram of Si02 vs. K20 and of alkali index vs. A1203 diagram. According to plots of wt.% oxides vs. wt.% MgO, abundances of A1203 and CaO increase with decreasing MgO while F ~ dOecre~ase . With decreasing MgO compatible elements decrease while incompatible elements increase. In spider diagram of MORB-normalized trace element patterns, HFS elements are nearly similiar with MORB, but LIL elements are enriched. Especially, contents of Ce, F: and Sm are enriched but Nb is depleted. In the chondrite-normalized REE patterns light REEs are enriched than heavy REEs. Tectomagmatic discrimination diagrams shows basalts in the study area are formed in the tectonomagmatic environment of subduction zone under continental margin. This result accord with characters of chemical composition mentioned above. Cr vs. Y diagram and CeM, vs. Ce diagram show that the primary magma of the basalts may formed by the about 15% partial melting of garnet-peridotite in the mantle wedge. After then, Daejeon-sa basalts may formed from evolved magma undergone mainly olivine fractional crystallization and contarnination of crustal materials before eruption.

• Resources Recycling
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• v.5 no.4
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• pp.32-41
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• 1996

The objective of this study was to investigate the facton affecting the property of CaCO, farmed from CaClz-Na,CO,-HiOsystem. The effcct of the concentmtlon of reaclants, impurity, the pH of reaction, the addition of sccd crystal, and injectingvelocity af reaclant solution an thc yield oI CaCO; polymorphs. parlide size and whiteness of CaCO, were investigated. Thcmqor resulls are ;o fallows; I The optimum concentratinn of reildilnts for forming vaterlte and aragonite is the range of 0.1-1.0 mol/l, when the yicld of vittcrite and araga~nles howed 7542% and XU-90%. respedively. 2. Among thc composition of impunticscontained h limestone, Fe' decrease the wh~tcness nf CaCO;. md Mg" increase the yield of aragonite. 3. The pHrange of vaterite and aragonite are formed with high yield is 8-11, and Calcite is famed in pH 6-8 with big particle size of 1over and in pH 11-13 with small particle size of I under. 4. The yicld of calcite and aragonite was increased by addingthc seed cryst.al nf itself.d cryst.al nf itself.

• Proceedings of the Mineralogical Society of Korea Conference
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• 2001.06a
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• pp.45-47
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• 2001

Jeju island is composed mainly of volcanic rocks such as basalts, trachytic andesites, tracytes, and sedimentary rocks. About 80% of Jeju soils are classified as Andisols. The amount of annual precipitation in Jeju island is about 1872mm, which is 1.5 times the annual precipitation of south Korea. There is a significant difference In amount of precipitation with regions even within Jeju island. In study area, the annual amount of rainfall is about 1280mm, the lowest in Jeju island while south part of the island has the annual precipitation of 2056mm, though they are only tens of kilometers apart. The parent materials of soils in study area are pyroclastic rocks and tuffs. The soils of non-andic properties have developed in this area since pedogenic process of pyroclastic materials is strongly influenced by climatic factor, especially precipitation. In order to investigate the mineralogical characteristics of soils, X-ray analysis for <0.2 and 2-0.2$\mu\textrm{m}$ size fractions was performed with ethylene glycol solvation, K-, Mg-saturation, heat treatment(110, 330, 550$^{\circ}C$). Acid-oxalate and DCB(sodium hydrosulfite, sodium citrate, sodium bicarbonate) dissolution method was used to assess tile total amounts or Al, si, and hydroxy interlayer or 2:1 layer silicates. XRD was also applied for samples treated with DCB only and DCB-oxalate sequentially. XRD patterns showed that 2:1 and 1:1 layer silicates were found, which are different from soils of Andisols. Vermiculite, chlorite, hydroxy interlayered minreals, and interstratified minerals(vermiculite/chlorite) were observed in 2-0.2$\mu\textrm{m}$ size fractions. After DCB treatments, ethylene glycolated samples with Mg-saturation showed expanded d-spacing, suggesting the possibility of hydroxy interlayered minerals. The amounts of hydroxy interlayered minerals increased in surface soil. Unlike Andisols, short range ordered minerals such as allophane, imogolite and gibbsite were hardly found. Mica and kaolinte existed in small amounts. Results are summarized in Fig 1 and Fig. 2.

• Economic and Environmental Geology
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• v.22 no.2
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• pp.151-166
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• 1989

A study of rare-earth mineralization in Kyemyungsan metasedimentary formation of Precambrian Ogcheon Group was carried out in the Mt. Eore Area near Choongju City based on the thorium (Th) and uranium (U) count data of geophysical airborne survey. This rare-earth mineralization was found in the magnetite-bearing banded quartizite which contains diagnostically some amounts of the metamict allanite. The brown colored allanites are distributed as aggregates of fine grains and sometimes banded structures with magnetite (inter growth) along the banding. The ore bed is displaced by the small faults and granite intrusions, and separated 5 ore blocks. The dimensions of the outcrop are 50-80 m in width, 1,500 m in length with the strike of $N70-80^{\circ}E$ and dip of $50-80^{\circ}NW$. In the field, the values of total gamma ray count of GR-101A scintillometer were able to measure more than 400 cps and maximum 1,500 cps, which data are coincided with the values of GR-310 gamma ray spectrometer and the gamma ray count of well logging data. The chemical compositions of the allanites from EPMA data are ranged from$\sum^{TR_2O_3}$ 18.57% to 26.00%, and the cerium oxides ($Ce_2O_3$) of allanite are positive relation with $La_2O_3$, MgO, FeO, MnO and negative relation with $SiO_2$, $Al_2O_3$, $Nd_2O_3$. The result of Neutron Activation Analysis (N.A.A.), Multi-Channel Analysis (M.C.A.) and wet chemistry of 25 outcrop samples for the elements of REE, Zr, U, Th shows strong anomalies. The good correlation elements with the thorium (Th) are the elements of La, Ce, LREE, $TR_2O_3$, Pr, Sm, Yb, Lu by the increasing order.

• Korean Journal of Materials Research
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• v.22 no.2
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• pp.71-77
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• 2012

When a new bonding agent using coal ash is utilized as a substitute for cement, it has the advantages of offering a reduction in the generation of carbon dioxide and securing the initial mechanical strength such that the agent has attracted strong interest from recycling and eco-friendly construction industries. This study aims to establish the production conditions of new hardening materials using clean bottom ash and an alkali activation process to evaluate the characteristics of newly manufactured hardening materials. The alkali activator for the compression process uses a NaOH solution. This study concentrated on strength development according to the concentration of the NaOH solution, the curing temperature, and the curing time. The highest compressive strength of a compressed body appeared at 61.24MPa after curing at $60^{\circ}C$ for 28 days. This result indicates that a higher curing temperature is required to obtain a higher strength body. Also, the degree of geopolymerization was examined using a scanning electron microscope, revealing a micro-structure consisting of a glass-like matrix and crystalized grains. The microstructures generated from the activation reaction of sodium hydroxide were widely distributed in terms of the factors that exercise an effect on the compressive strength of the geopolymer hardening bodies. The Si/Al ratio of the geopolymer having the maximum strength was about 2.41.

• Journal of Powder Materials
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• v.16 no.5
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• pp.326-335
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• 2009

Fe based (Fe$_{68.2}$C$_{5.9}$Si$_{3.5}$B$_{6.7}$P$_{9.6}$Cr$_{2.1}$Mo$_{2.0}$Al$_{2.0}$) amorphous powder, which is a composition of iron blast cast slag, were produced by a gas atomization process, and sequently mixed with ductile Cu powder by a mechanical ball milling process. The Fe-based amorphous powders and the Fe-Cu composite powders were compacted by a spark plasma sintering (SPS) process. Densification of the Fe amorphous-Cu composited powders by spark plasma sintering of was occurred through a plastic deformation of the each amorphous powder and Cu phase. The SPS samples milled by AGO-2 under 500 rpm had the best homogeneity of Cu phase and showed the smallest Cu pool size. Micro-Vickers hardness of the as-SPSed specimens was changed with the milling processes.

• Korean Journal of Materials Research
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• v.20 no.4
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• pp.181-186
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• 2010

Since it was developed by Joseph Aspdin, cement has been a common construction materials up to the present time. However, there are trace constituents in cement clinker. One of the trace constituents included in cement clinker, chromium, has become prominent and highly noticed lately as a social issue both inside and outside of this country because it affects the human body negatively. The aim of the present study was to investigate the concentration of water-soluble hexavalent chromium in cement clinker by using industrial by-products. For that reason, raw materials were prepared to add different $SiO_2$, $Al_2O_3$, and $Fe_2O_3$ sources. After the raw materials such as the limestone, the sand and the clay, iron ore was pulverized and mixed, and the raw meal was burnt at about $1450^{\circ}C$ in a furnace with an oxidizing atmosphere. The part in the raw materials of the clinker was substituted with slag, sludge, etc. and this was used to manufacturing cement clinker. To investigate the water-soluble hexavalent chromium content in clinker, raw meal was prepared by changing the modulus, the type, and the content of clinker materials and tested concentrations of hexavalent chromium in the clinkers. To determine $Cr^{+6}$ formation of the clinker, tests were done with raw meals adding chromium by using different industrial by-products. Consequently because the chromium was to be included in the raw materials of the clinker, production of Portland cement clinker was included with the chromium. Also, the chromium was converted into hexavalent chromium in the burning process.