• Journal of Powder Materials
• /
• v.9 no.1
• /
• pp.11-18
• /
• 2002

The 6061 Al alloy based composites reinforced with 10 vol% SiC whiskers were prepared by powder metallurgy with the powders having the different sizes, i.e. < $30{\mu}m$ and > $30{\mu}m$ The composites were subjected to equal channel angular pressing (ECAP) at various conditions and the microstructural changes during ECAP were examined In the composites SiC whiskers were clustered and randomly aligned. The clusters were relatively well distributed in the composite with the smaller initial powder size. After ECAP, the clusters were aligned parallel to flow direction and became smaller. In addition, the shape of clusters was changed from irregular to round. The microstructure of the ECAPed samples were compared with those of the conventionally hot-extruded composites. The uniform microstructure and enhanced microhardness could be obtained by using the powders having the smaller size, decreasing ECAP temperature and repeating ECAP.

• Proceedings of the Korean Vacuum Society Conference
• /
• 1999.07a
• /
• pp.163-163
• /
• 1999

MOSFET, MESFET 그리고 MODFET는 Logic ULSIs, high speed ICs, RF MMICs 등에서 중요한 역할을 하고 있으며, 그것의 gate electrode, contact, interconnect 등의 물질로는 refractory metal을 이용한 CoSi2, MoSi2, TaSi2, PtSi2, TiSi2 등의 효과를 얻어내고 있다. 그중 TiSi2는 비저항이 가장 낮고, 열적 안정도가 좋으며 SAG process가 가능하므로 simpler alignment process, higher transconductance, lower source resistance 등의 장점을 동시에 만족시키고 있다. 최근 소자차원이 scale down 됨에 따라 TiSi2의 silicidation 과정에서 C49 TiSi2 phase(high resistivity, thermally unstable phase, larger grain size, base centered orthorhombic structure)의 출현과 그것을 제거하기 위한 노력이 큰 issue로 떠오르고 있다. 여러 연구 결과에 따르면 PAI(Pre-amorphization zimplantation), HTS(High Temperature Sputtering) process, Mo(Molybedenum) implasntation 등이 C49를 bypass시키고 C54 TiSi2 phase(lowest resistivity, thermally stable phase, smaller grain size, face centered orthorhombic structure)로의 transformation temperature를 줄일 수 있는 가장 효과적인 방법으로 제안되고 있지만, 아직 그 문제가 완전히 해결되지 않은 상태이며 C54 nucleation에 대한 physical mechanism을 밝히진 못하고 있다. 본 연구에서는 증착 시 기판온도의 변화(400~75$0^{\circ}C$)에 따라 silicon 위에 DC/RF magnetron sputtering 방식으로 Ti/Si film을 각각 제작하였다. 제작된 시료는 N2 분위기에서 30~120초 동안 500~85$0^{\circ}C$의 온도변화에 따라 RTA법으로 각각 one step annealing 하였다. 또한 Al을 cosputtering함으로써 Al impurity의 존재에 따른 영향을 동시에 고려해 보았다. 제작된 시료의 분석을 위해 phase transformation을 XRD로, microstructure를 TEM으로, surface topography는 SEM으로, surface microroughness는 AFM으로 측정하였으며 sheet resistance는 4-point probe로 측정하였다. 분석된 결과를 보면, 고온에서 제작된 박막에서의 C54 phase transformation temperature가 감소하는 것이 관측되었으며, Al impuritydmlwhswork 낮은온도에서의 C54 TiSi2 형성을 돕는다는 것을 알 수 있었다. 본 연구에서는 결론적으로, 고온에서 증착된 박막으로부터 열적으로 안정된 phase의 낮은 resistivity를 갖는 C54 TiSi2 형성을 보다 낮은 온도에서 one-step RTA를 통해 얻을 수 있다는 결과와 Al impurity가 존재함으로써 얻어지는 thermal budget의 효과, 그리고 그로부터 기대할 수 있는 여러 장점들을 보고하고자 한다.

• Transactions of the Korean Society of Mechanical Engineers
• /
• v.19 no.7
• /
• pp.1619-1629
• /
• 1995

The Al/Al$_{2}$O$_{3}$ SiC and Al/Al$_{2}$O$_{3}$/C hybrid metal matrix composites (MMCs) were fabricated by squeeze infiltration method. Uniform distribution of reinforcements were found in the microstructure of metal matrix composites. Mechanical tests were carried out under various test conditions to clearly identify mechanical behavior of MMCs, and the wear mechanism of Al/Al$_{2}$O$_{3}$/(SiC or C) hybrid metal matrix composites were investigated. The tensile strength and hardness of hybrid composites was resulted in increasing compared with those of the unreinforced matrix alloy. Wear resistance was strongly dependent upon kinds of fiber, volume fraction and sliding speed. The wear resistance of metal matrix composites was remarkably improved by the addition of reinforcements. Especially, the wear resistance of the hybrid composites of carbon fibers was more effective than in the composites reinforced with alumina and SiC whiskers of reinforcements. This was due to the effect of carbon fiber on the solid lubrication. Wear mechanisms of hybrid composites were suggested from wear surface analyses. The major wear mechanism of hybrid composites was the abrasive wear at low to intermediate sliding speed, and the melting wear at intermediate to high sliding speed.

• Korean Journal of Materials Research
• /
• v.9 no.8
• /
• pp.817-824
• /
• 1999

The $Al_2$$O_3$-SiC composite powder was prepared by Self-propagating High-Temperature Synthesis(SHS) process using $SiO_2$Al and C powders as raw material. The effects of the molar ratio in raw material, compaction pressure, initial temperature of reactants on the products and combustion process were studied. Self-propagating high temperature synthesis of $SiO_2$/Al/C system should be preheated above $400^{\circ}C$ owing to the low combustion temperature. As the result of the combustion reaction, the purity of final product became better than that of reactants. In this system, the optimum molar ratio of $SiO_2$:Al:C was 3.0:4.0:6.0. The free carbon was removed by roasting at $650^{\circ}C$ for 30min. In this study, pressureless sintering was very dffective both for controlling the disintegration of specimen with powder bed and for obtaining dense sintered-body at $1700^{\circ}C$. The sintered-body produced with hot-pressing was about 98% of the theoretical relative density.

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.50 no.11
• /
• pp.544-549
• /
• 2001

The mechanical and electrical properties of the hot-pressed and pressureless annealed SiC-39vo1.%TiB$_2$electroconductive ceramic composites were investigated as functions of the liquid additives of $Al_2O_3+Y_2O_3$ and the sintering temperature. The result of phase analysis for the SiC-39vo1.%TiB$_2$ composites by XRD revealed $\alpha -SiC(6H),\; TiB_2,\; and YAG(Al_5Y_3O_{12})$ crystal phase. The relative density of SiC-39vo1.% $TiB_2$ composites was increased with increased $Al_2O_3+Y_2O_3$ contents. The fracture toughness showed the highest value of $7.8 MPa.m_{1/2}$ for composites added with 12 wt% $Al_2O_3+Y_2O_3$additives at $1750^{\circk}C$. The electrical resistivity of the SiC-39vo1.%$TiB_2$composites was all positive temperature coefficient resistance(PTCR) in the temperature range of $25S^{\circ}C \;to\; 700^{\circ}C$.

• Proceedings of the Korean Society For Composite Materials Conference
• /
• 2003.04a
• /
• pp.46-49
• /
• 2003

Aluminum based metal matrix composites(MMCs) are well known for their high specific strength, stiffness and hardness. They are gaining further importance because of their high wear resistance. In this study, Al/Saffil-20%, Al/Saffil-5%/Al2O3(particle type)-15% and Al/Saffil-5%/SiC(particle type)-15% hybird MMCs' wear behavior were characterized by the pin-on-disk test under various normal load The superior wear resistance was exhibited at Al/Saffil-5%/SiC(particle type)-15% MMCs. And this MMCs' predominant wear mechanism is subsurface cracking in the low load wear regime. Others(Al/Saffil-20%, Al/Saffil-5%/Al2O3(particle type)-15%) showed the similar wear resistance with each other at the same test condition. In the low load & room temperature condition, the wear resistance was improved due to the high hardness of the ceramic reinforcements. As the test load increased, the wear properties were governed by the wear properties of matrix.

• Journal of the Korean Ceramic Society
• /
• v.34 no.3
• /
• pp.296-302
• /
• 1997

The effect of cold cyclic compaction on densification of SiC whisker/Al2O3 composite was investigated. Re-lative density of the compact increased as the number of cycle and the compaction pressure increased and the bias pressure decreased. The rate of loading and unloading and the frequency of cold cyclic compaction did not affect much on sliding and rearrangement of the particles. Fracture of SiC whisker was hardly ob-served during cold cyclic compaction and the direction of whisker was randomly oriented throughout the compact regardless of the direction of compaction. Thus, cold cyclic compaction may be an efficient method to densify SiC whisker/Al2O3 composite.

• Journal of Korea Foundry Society
• /
• v.13 no.6
• /
• pp.524-531
• /
• 1993

Dispersion behaviors of SiC particles and microstructures in Al-2%Si/SiCp composite prepared by Rheo-compocasting were studied with change of fabrication conditions(slurry temperature, agitation time) and additions of Mg($0{\sim}3wt.%$). Also, the microhardness change of matrix, interface and total in composites were examined with additions of Mg($0{\sim}3wt.%$). The dispersion of particles in the composites became relatively homogeneous with increase of Mg additions, agitation time and decrease of slurry temperature. Rate of occupied area by particle in matrix was increased as increase of Mg additions due to improvement of wettability between SiC particle and matrix. A favorable composites were obtained by melting under Ar atmospheric SiCp injection and bottom pouring system. According to the analysis of X-ray diffraction, $Mg_2Si$, $Al_4C_3$, $SiO_2$ and MgO, etc, intermetallic compounds were formed by chemical interreaction at interface of matrix and particles. The microhardness of interface is higher than that of matrix due to more strengthening of above intermetallic compounds. It was considered that the total hardness of the composites is improved by dispersing of SiCp and addition of Mg.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.20 no.4
• /
• pp.1301-1308
• /
• 1996

In order to save the energy and protect the environment, it were studied about ecomaterials with the developed countries as central figure. In the Metal Matrix Composites(MMCs), this trends appeared the development of the MMCs which had excellent mechanical properties in spite of the low volume fraction of reinforcement. Therefore, in this study, fatigue crack growth test, tensile and hardness test were conducted in order to investigate the mechanical and fatigue properties of 5 %, and 10 % $SiC_{p}$/Al composites. As the results, in the tensile and hardness test, tensile strength and hardness increased but fatigue crack growth rate decreased with $SiC_{p}$/Al volume fraction. And in the view of fatigue failured surface through the SEM, fatigue crack initiated around the SiC particle and in low $\Delta{K}$ regions, fatigue creck detoured the SiC particle but crack propagated through the SiC particle in the high $\DeltaK$ regions.

• 한국신재생에너지학회:학술대회논문집
• /
• 2005.06a
• /
• pp.196-200
• /
• 2005

In this work, we investigated simple Aㅣ/TCO/a-Si:H(n)/c-Si(p)/Al hetero-junction solar cells prepared by low temperature processes, unlike conventional thermal diffused c-Si solar cells. a-Si:H/c-Si hetero-junction solar cells are processed by low temperature deposition of n-type hydrogenated amorphous silicon (a-Si:H) films by plasma-enhanced chemical vapor deposition on textured and flat p-type silicon substrate. A detailed investigation was carried out to acquire optimization and compatibility of amorphous layer, TCO (ZnO:Al) layer depositions by changing the plasma process parameters. As front TCO and back contact, ZnO:Al and AI were deposited by rf magnetron sputtering and e-beam evaporation, respectively. The photovoltaic conversion efficiency under AMI.5 and the quantum efficiency on $1cm^2$ sample have been reported. An efficiency of $12.5\%$ is achieved on hetero-structure solar cells based on p-type crystalline silicon.