• 한국정보디스플레이학회:학술대회논문집
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• 2007.08a
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• pp.181-185
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• 2007

We report on our material and process research on ZnO:Al films and on our investigations on wet chemical etching using a variety of etching solutions. We achieve resistivity as low as $750{\mu}{\Omega}cm$ for ZnO:Al films with film thickness of 140 nm. Etching with phosphorous acid allows for accurate fine patterning of the ZnO:Al films on glass substrates.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.05a
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• pp.160-160
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• 2012

Al과 Al합금은 경량금속으로 가공성과 내식성이 우수하여 철강제품의 부식방지, 고효율 반사체 등의 산업 분야에 널리 이용된다. 본 연구에서는 Al과 Al-3wt%Si, Al-10wt%Si의 Al 합금을 마그네트론 스퍼터링으로 코팅하였고 외부 자기장 변화와 빗각 증착에 따른 반사율과 조직 변화 등의 물성을 비교 분석하였다.

• Korean Journal of Materials Research
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• v.16 no.7
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• pp.449-454
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• 2006

Al-doped zinc oxide (ZnO:Al) films for transparent electrodes in thin film solar cells were deposited on glass substrates at a low temperature of $200^{\circ}C$ by rf magnetron sputtering. The transmittance of the ZnO:Al films in the visible range was 87%. The lowest resistivity of the ZnO:Al films was about $5.8{\times}10^{-4}{\Omega}$ cm at the Al content of 2.5 wt%. After deposition, the surface of ZnO:Al films were etched in dilute HCl (0.5%) for the investigation of the change in the electrical properties and the surface morphology due to etching.

• Journal of the Korean Society for Heat Treatment
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• v.13 no.3
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• pp.151-157
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• 2000

This study aims to investigate the effect of carbon content on the surface nitrogen permeation of 13%Cr-1.8%Al alloyed stainless steels. The surface nitrogen permeation was performed at $1050^{\circ}C{\sim}1200^{\circ}C$ in the $1kg/cm^2$ nitrogen gas atmosphere. The nitrogen permeated surface layer of the specimen containing 0.03%C consists of AlN, martensite and retained austenite phases. while the surface layer of the specimen containing 0.14%C appears the $AlFe_3C_x$ phase including former three phases. The specimen containing 0.14%C shows lower total case depth than that containing 0.03%C at the nitrogen permeation temperatures of $1050^{\circ}C$ and $1100^{\circ}C$, while the total case depth of the specimen containing 0.14%C is remarkably increased at the temperature of $1150^{\circ}C$ and $1200^{\circ}C$ due to the increase in the retained austenite content. Martensitic phase, AlN and $AlFe_3C_x$ precipitate of the nitrogen permeated surface layer cause to increase the surface hardness of 550~600Hv.

• Journal of Periodontal and Implant Science
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• v.34 no.4
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• pp.699-709
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• 2004

The present study was performed to evaluate histomorphological difference in various surface-treated implants in beagle. Implants($Implantium^{(R)}$, Dentium Co. Korea) with pure titanium machined surface, acid treated surface, and $Al_2O_3(50{\sim}100\;{\mu}m)$blasted with acid treated surface were used in this study. All mandibular premolars of $1.5{\sim}2$ year old male beagle dogs were extracted. At 3 months after extraction, the implants(${\Phi}$ 4mm, l 6mm) were installed. The beagle were sacrificed at 1, 3 months after installation and then tissues including implants were prepared for non-decalcified specimens. These specimens were analyzed comparatively under light microscope. The results of this study were as follow 1. Higher rate of osseointegration were showed in the $Al_2O_3(50{\sim}100\;{\mu}m)$blasted with acid-treated surface. 2. Increased osseointegration were showed in the $Al_2O_3(50{\sim}100\;{\mu}m)$blasted with acidtreated surface with time. 3. Higher maturation of integration were showed in the $Al_2O_3(50{\sim}100\;{\mu}m)$blasted with acid-treated surface. In conclusion, surface treatment of $Al_2O_3blasted$ with acid might be considered to shorten healing time and improve success rate as increasing contact of implant and bone.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.391-394
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• 2002

Transparent conductive oxides (TCO) are necessary as front electrode for most thin film solar cell. In our paper, transparent conducting aluminum-doped Zinc oxide films (ZnO:Al) were prepared by rf magnetron sputtering on glass (Corning 1737) substrate as a variation of the deposition condition. After deposition, the smooth ZnO:Al films were etched in diluted HCl (0.5%) to examine the electrical and surface morphology Properties as a variation of the time. The most important deposition condition of surface-textured ZnO films by chemical etching is the processing pressure and the substrate temperature. In low pressures (0.9 mTorr) and high substrate temperatures ($\leq$30$0^{\circ}C$), the surface morphology of films exhibits a more dense and compact film structure with effective light-trapping to apply the silicon thin film solar cells.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.1
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• pp.21-27
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• 2000

We used the surface photovoltage spectroscopy(SPVS) for characterization of GaAs/Al\ulcornerGa\ulcornerAs multi-quantum well(MQW) structures grown by molecular beam epitaxy(MBE) method. Energy gap related transitions in GaAs and AlGaAs were observed. The Al composition(x=0.3) was determined by Sek's composition formula. Transition energies in MQW were determined using the differential surface photo-volatage spectroscopy)DSPVS) of the measured resonanced. In order to indentify the transitions, the experimentally observed energies were compared with results of the envelope function approximation for a rectangular quantum well. We have observed and interesting behavior of the temperature dependence(80K~300K) of the 11Hand 11L transition for sample.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.3
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• pp.203-207
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• 1998

After etching Al-Cu alloy films using $SiCl_4/Cl_2/He/CHF_3$ plasma, a corrosion phenomenon on the metal surface has been studied with XPS (X-ray photoelectron spectroscopy) and SEM (Scanning electron microscopy). In Al-Cu alloy system, the corrosion occurs rapidly on the etched surface by residual chlorine atoms. To prevent the corrosion, the $SF_6$ plasma treatment subsequent to the etch has been carried out. A passivation layer is formed by fluorine-related compounds on etched Al-Cu alloy surface after $SF_6$ treatment, and the layer suppresses effectively the corrosion on the surface as the RF power of $SF_6$ treatment increases. The corrosion could be suppressed successfully with $SF_6$ treatment in the RF power of 150watts.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.283-284
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• 2005

Al electrode for OLED was deposited by Facing Targets Sputtering(FTS) system which can reduce the damage of organic layer. The Al thin films were deposited on the slide glass as a function of working gas such as Ar, Kr or mixed gas. The film surface image was observed by AFM and SEM. In the results, when Al thin film were deposited using mixed gas, the surface morphology was improved in some region.

• Journal of the Korean institute of surface engineering
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• v.34 no.1
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• pp.39-48
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• 2001

Fe-Cr-Al alloy has been studied for application in automobile muffler materials due to good corrosion and oxidation resistance. In order to develop the automobile muffler materials, corrosion behaviors of electron beam physical vapor deposition (EB-PVD) coated surface of muffler matericls of muffler materials were investigated using potentiostat. For 0.1M NaCl solution, corrosion potential and pitting potential of Fe-20Cr-10Al was higher than that of Fe-5Cr- 10Al samples. Especially, in the case of Ti and Nb coated samples, pitting potential increased remarkably compared with non-coated samples. For 0.1M $CaCl_2$ solution, Ti-coated Fe-20Cr-10Al showed remarkably improved pitting corrosion resistance in comparison with non-coated Fe-20Cr-10Al and Fe-5Cr-10Al. The number and size of pits were decreased in the case of Ti coated samples in the 0.1M NaCl and 0.1M $CaCl_2$ solution.