• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1999.06a
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• pp.291-296
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• 1999

This study presents a method for determining stiffness and damping coefficients of 30% U slider-air bearings by using perturbation method, and shows that this method is more accurate than steady state method according to the comparison of those with the modal analysis method. Through a generalized lubrication equation, which based on linealized Boltzmann equation, the static and dynamic pressure distributions are calculated by finite volume method.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.677-684
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• 2004

This paper describes a method for identifying the dynamic characteristics of air foil bearings for high speed turbomachinerys with the LS/IV method. In fact identifying the characteristics of air foil bearings is very difficult work, and it is tried to identify it. Experiments were conducted to determine the structural dynamic and hydrodynamic characteristics of air foil bearings. Numerical predictions compare the static and dynamic force performances. The housing of the bearing on the journal was driven by the impact hammer which were used to simulate impact force acting on air foil bearings. The characteristics of air foil bearings were extracted from the frequency response function (FRF) by LS(Least Square) method and IV(Instrumental Variable) method. The experiment was tested at 0 rpm and $10000\sim16000rpm$. And the test results were introduced about the dynamic characteristics of air foil bearings, and also compared with theoritical results.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.4
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• pp.747-754
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• 2013

This study introduces a recently designed desktop-sized NC turning system and its components. This machine is designed for the ultra-precise turning of parts with a diameter of 0.5-20 mm with minimum space usage for the machine. This study aims to achieve submicron-level accuracy of movements and good rigidity of the machine for precision machining using the desktop-sized machine. The components such as the main machine structure, air bearing servo spindle, and XZ stage with needle roller guides are designed, and the designed machine is built with a PC-based CNC controller. Its static and dynamic stiffness performances and positioning resolutions are tested. Through machining tests with single-crystal diamond tools, a form error less than $0.8{\mu}m$ and surface roughness (Ra) of $0.03{\mu}m$ for workpieces are obtained.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2003.11a
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• pp.210-214
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• 2003

The static and dynamic characteristics of HDD slider with ulta-low flying height are analyzed using Direct Numerical method with Boundary Fitted Coordinate System. The slip flow effect is considered using the Boltzmann equation solution in a form of the flow rate database. The air film stiffness and damping are evaluated by the small perturbation method.

• 유체기계공업학회:학술대회논문집
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• 2005.12a
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• pp.803-809
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• 2005

This paper presents the theoretical model to investigate the effect of Coulomb damping in the sub-structure of a foil bearing. Foil deflection is restricted by friction of bumps. Equivalent viscous damping of the bump foils is derived from the Coulomb friction. Dynamic equation of the bumps is constituted by stiffness and damping terms. This point give the difference from Heshmat's frictionless and simple compliance bump model. The fluid is modeled with the compressible Reynolds equation. A perturbation approach is used to determine the static and dynamic performance of the bearing from the coupled fluid-structural model. The analysis result shows that the static and dynamic performance is enhanced by bump friction. This analysis technique would be extended to development of a high performance bearing.

• The KSFM Journal of Fluid Machinery
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• v.9 no.1 s.34
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• pp.47-55
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• 2006

This paper presents the theoretical model to investigate the effect of Coulomb damping in the sub-structure of a foil bearing. Foil deflection is restricted by friction of bumps. Equivalent viscous damping of the bump foils is derived from the Coulomb friction. Dynamic equation of the bumps is constituted by stiffness and damping terms. This point give the difference from Heshmat's frictionless and simple compliance bump model. The fluid is modeled with the compressible Reynolds equation. A perturbation approach is used to determine the static and dynamic performance of the bearing from the coupled fluid-structural model. The analysis result shows that the static and dynamic performance is enhanced by bump friction. This analysis technique would be extended to development of a high performance bearing.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.23 no.4
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• pp.392-397
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• 2014

Recently, there is an increase in the need for precision linear stages with vacuum compatibility in such areas as lithography equipment for wafer or mask manufacturing, mask mastering equipment for optical data storage and electron beam equipment. A simple design, high stiffness and low cost can be achieved by using ball bearings. However, a ball bearing have friction and wear problems just as in ambient air. In order to decrease the friction, a special finish, a diamond-like carbon (DLC) film coating, is applied to the surface of a guide rail by sputtering deposition. This paper presents the result of an experimental investigation on the control performance of a ball bearing-guided linear motion stage under two environmental conditions: in air and vacuum. A comparison between the results with and without the DLC coating was also considered in the experimental investigation.

• Tribology and Lubricants
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• v.36 no.1
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• pp.39-46
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• 2020

Air stages are usually applied to precision engineering in sectors such as the semiconductor industry owing to their excellent performance and extremely low friction. Since the productivity of a semiconductor depends on the acceleration and deceleration performance of the air stage, many attempts have been made to improve the speed of the stage. Even during sudden start or stop sequences, the stage should maintain an air film to avoid direct contact between pad and the rail. The purpose of this study is to quantitatively predict the dynamic behavior of the air stage when acceleration and deceleration occur. The air stage is composed of two parts; the stage and the guide-way. The stage transports objects to the guideway, which is supported by an externally pressurized gas bearing. In this study, we use COMSOL Multiphysics to calculate the pressure of the air film between the stage and the guide-way and solve the two-degree-of-freedom equations of motion of the stage. Based on the specified velocity conditions such as the acceleration time and the maximum velocity of stage, we calculate the eccentricity and tilting angle of the stage. The result shows that the stiffness and damping of the gas bearing have non-linear characteristics. Hence, we should consider the operating conditions in the design process of an air stage system because the dynamic behavior of the stage becomes unstable depending on the maximum velocity and the acceleration time.

• Tribology and Lubricants
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• v.35 no.5
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• pp.310-316
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• 2019

This paper presents two methods for designing a high-speed air spindle operated over the rotational speed of 50,000 rpm. The first method is an approximate method, which assumes a symmetric spindle shape even though it is not symmetric in reality. The second is an analysis of rotordynamics using beam and solid models. The approximate method can be used to calculate the bearing load capacities, stiffness and damping coefficients, stability of the shaft system, and response of the forced excitation from the unbalanced mass. Designers can use this method to determine the dimensions of the desired spindle at the first stage of the design. The more detailed behavior of the spindle can be calculated using the rotordynamics theory using beam and solid models based on the Finite Element Method. In this paper, a spindle, with two air bearings, one motor at the end, and two air thrust bearings, is newly developed. The solutions from the two rotordynamics theories are compared with the solution obtained using the approximate method. The three calculations are in agreement, and the procedure for the design of a spindle system, supported on the externally pressurized air bearings, ispresented and discussed.

• Proceedings of the Korea Technical Association of the Pulp and Paper Industry Conference
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• 2002.11a
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• pp.81-90
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• 2002

Air entrainment of a winding roll with a nip roller was studied numerically. The amount of air entrainment between two rotating rollers was obtained by solving lubrication equation, Reynolds equation, which neglect the existence of a web. However, the numerical model of this study included the web existence, therefore it considered the two lubricating air films between a winding roll and a web and also between a nip roller and the web. The pressure profiles and gap profiles of the two films were obtained by solving lubrication equation for the two air films and force balance equation of the web. Ballooning phenomenon was examined in terms of nip force, wrap angle, web stiffness, web speed, and web tension. This ballooning phenomenon caused by the back flow of the air film blocked by the nip roller. Air entrainment of the two numerical models was compared.