• Title/Summary/Keyword: Ag thin film

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Tailoring the properties of spray deposited V2O5 thin films using swift heavy ion beam irradiation

  • Rathika, R.;Kovendhan, M.;Joseph, D. Paul;Pachaiappan, Rekha;Kumar, A. Sendil;Vijayarangamuthu, K.;Venkateswaran, C.;Asokan, K.;Jeyakumar, S. Johnson
    • Nuclear Engineering and Technology
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    • v.52 no.11
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    • pp.2585-2593
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    • 2020
  • Swift heavy ion (SHI) beam irradiation can generate desirable defects in materials by transferring sufficient energy to the lattice that favours huge possibilities in tailoring of materials. The effect of Ag15+ ion irradiation with energy 200 MeV on spray deposited V2O5 thin films of thickness 253 nm is studied at various ion doses from 5 × 1011 to 1 × 1013 ions/㎠. The XRD results of pristine film confirmed orthorhombic structure of V2O5 and its average crystallite size was found to be 20 nm. The peak at 394 cm-1 in Raman spectra confirmed O-V-O bonding of V2O5, whereas 917 cm-1 arise because of distortion in stoichiometry by a loss of oxygen atoms. Raman peaks vanished completely above the ion fluence of 5 × 1012 ions/㎠. Optical studies by UV-Vis spectroscopy shows decrement in transmittance with an increase in ion fluence up to 5 × 1012 ions/㎠. The red shift is observed both in the direct and indirect band gaps until 5 × 1012 ions/㎠. The surface topography of the pristine film revealed sheath like structure with randomly distributed spherical nano-particles. The roughness of film decreased and the density of spherical nanoparticles increased upon irradiation. Irradiation improved the conductivity significantly for fluence 5 × 1011 ions/㎠ due to band gap reduction and grain growth.

Metal-Semiconductor Contact Behavior of Solution-Processed ZnSnO Thin Film Transistors (용액법으로 제작된 ZnSnO 박막트랜지스터의 전극 물질에 따른 계면 접촉특성 연구)

  • Jeong, Young-Min;Song, Keun-Kyu;Woo, Kyoo-Hee;Jun, Tae-Hwan;Jung, Yang-Ho;Moon, Joo-Ho
    • Korean Journal of Materials Research
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    • v.20 no.8
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    • pp.401-407
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    • 2010
  • We studied the influence of different types of metal electrodes on the performance of solution-processed zinc tin oxide (ZTO) thin-film transistors. The ZTO thin-film was obtained by spin-coating the sol-gel solution made from zinc acetate and tin acetate dissolved in 2-methoxyethanol. Various metals, Al, Au, Ag and Cu, were used to make contacts with the solution-deposited ZTO layers by selective deposition through a metal shadow mask. Contact resistance between the metal electrode and the semiconductor was obtained by a transmission line method (TLM). The device based on an Al electrode exhibited superior performance as compared to those based on other metals. Kelvin probe force microscopy (KPFM) allowed us to measure the work function of the oxide semiconductor to understand the variation of the device performance as a function of the types metal electrode. The solution-processed ZTO contained nanopores that resulted from the burnout of the organic species during the annealing. This different surface structure associated with the solution-processed ZTO gave a rise to a different work function value as compared to the vacuum-deposited counterpart. More oxygen could be adsorbed on the nanoporous solution-processed ZTO with large accessible surface areas, which increased its work function. This observation explained why the solution-processed ZTO makes an ohmic contact with the Al electrode.

Dependence of Localized Surface Plasmon Properties on the Shape of Metallic Nanostructures (금속 나노 구조체의 형상에 따른 국소 표면 플라즈몬 특성)

  • Kim, Joo-Young;Cho, Kyu-Man;Lee, Taek-Sung;Kim, Won-Mok;Lee, Kyeong-Seok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.77-77
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    • 2008
  • 금(Au)이나 은(Ag)과 같은 귀금속 물질로 형성된 금속 나노 구조체는 표면 플라즈몬 공진(Surface Plasmon Resonance, SPR) 현상과 이의 국부 환경(local environment) 변화에 대해 민감한 의존성으로 인하여 생화학적 센서로의 응용이 주목 받고 있다. 표면 플라즈몬 공진은 광 흡수와 광 산란을 수반하는데, 두 가지 특성 모두 분광학적 신호검출방식으로 센서에 응용가능하다. 이 중 광 산란을 이용하는 방식은 광원의 배경잡음 효과가 배제되기 때문에 단일 입자 검출에 유리하다. 광 흡수와 광 산란 특성은 금속 나노 구조체는 크기, 형상, 주변 매질, 물질의 선택에 따라서 영향을 받는다. 본 연구에서는 금 나노 디스크(nanodisc)의 형상에 따라서 여기 되는 표면 플라즈몬이 광 흡수와 광 산란 특성에 미치는 영향을 가시광과 근적외선 영역에 대해서 불연속 쌍극자 근사법(Discrete Dipole Approximation, DDA)을 이용하여 전사모사(simulation) 하였다. 금 나노 디스크의 형상과 플라즈몬 특성 간의 관계는 공명 파장과 산란 양자 거둠율(scattering quantum yield, $\eta$)을 이용하여 분석하였고, 센서로서의 응용을 가늠하기 위해 주변 매질의 굴절률을 조절하여 그에 따른 민감도(sensitivity )를 비교하였다. 나노 디스크의 모양이 판상에 가까워질수록 공명 파장은 적색 편이하였고 광 산란 효율과 민감도는 증가하는 현상이 나타났다. 또한, 산란 양자 거둠율은 증가하다가 완만하게 감소하는 경향이 나타났다.

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The study on dielectric and thermal property of $Ta_2O_5$ Thin-films ($Ta_2O_5$의 유전 특성과 안정성에 관한 연구)

  • Kim, I.S.;Song, J.S.;Lee, D.Y.;Kim, D.H.;Kim, H.S.
    • Proceedings of the KIEE Conference
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    • 2001.07c
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    • pp.1487-1489
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    • 2001
  • The tantalum oxide($Ta_2O_5$) is an important material for present thin-film capacitor application owing to its high dielectric constant and thermal stability. We report dielectric property of Si(p type)/Pt/$Ta_2O_5$/Ag based MIM structure obtained by RF sputtering and annealed in vacuum environment. We have measured and researched the characteristics of C-F, C-V and EPMA. And we describe parameter dependence on sputtered condition and annealed temperature with dielectric property.

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Characteristics of the diffraction grating formation for SeGe (SeGe 재료의 회절 격자 형성 특성)

  • Park, Jeong-Il;Park, Jong-Hwa;Kim, Jin-Woo;Yeo, Cheol-Ho;Lee, Young-Jong;Chung, Hong-B.
    • Proceedings of the KIEE Conference
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    • 2001.07c
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    • pp.1445-1447
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    • 2001
  • We have investigated about the grating formation of the $a-Se_{75}-Ge_{25}$ chalcogenide thin films. In this study, holographic gratings have been formed by using He-Ne laser(632.8nm) with different polarization states(linear, circular polarization). The diffraction efficiency was obtained by +1st order intensity of the diffracted beam. We have obtained maximum efficiency for Ag-doped thin film. It is observed the difference of the diffraction efficiency with polarization states. S:S-polarized state is shown high efficiency than the other polarization.

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The characteristic study of amorphous chalcogenide As-Ge-Se-S thin film for photonic crystal application (포토닉 크리스탈 응용을 위한 비정질 칼코게나이드 As-Ge-Se-S 박막의 특성 연구)

  • Nam, Ki-Hyeon;Ju, Long-Yun;Choi, Hyuk;Chung, Hong-Bay
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.77-78
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    • 2007
  • In this paper, we suppose that the 1-dimensional photonic crystal using holography lithography. We used Ag doped amorphous AsGeSeS which belongs in the chalcogenide materials have sensitive photoluminescence property. The purpose of this experiment is the process to complete 3-D photonic crystal after making 2-D photonic crystal. The lattice formation was made an observation by irradiating He-Ne laser with the AsGeSeS film leaned obliquely. Then, by measuring formed diffraction beam, the diffraction lattice was calculated.

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Plasmonic Nanosheet towards Biosensing Applications

  • Tamada, Kaoru
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.105-106
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    • 2013
  • Surface plasmon resonance (SPR) is classified into the propagating surface plasmon (PSP) excited on flat metal surfaces and the local surface plasmon (LSP) excited by metalnanoparticles. It is known that fluorescence signals are enhanced by these two SPR-fields.On the other hand, fluorescence is quenched by the energy transfer to metal (FRET). Bothphenomena are controlled by the distance between dyes and metals, and the degree offluorescence enhancement is determined by the correlation. In this study, we determined thecondition to achieve the maximum fluorescence enhancement by adjusting the distance of ametal nanoparticle 2D sheet and a quantum dots 2D sheet by the use of $SiO_2$ spacer layers. The 2D sheets consisting of myristate-capped Ag nanoparticles (AgMy nanosheets) wereprepared at the air-water interface and transferred onto hydrophobized gold thin films basedon the Langmuir-Schaefer (LS) method [1]. The $SiO_2$ sputtered films with different thickness (0~100 nm) were deposited on the AgMy nanosheet as an insulator. TOPO-cappedCdSe/CdZnS/ZnS quantum dots (QDs, ${\lambda}Ex=638nm$) [2] were also transferred onto the $SiO_2$ films by the LS method. The layered structure is schematically shown in Fig. 1. The result of fluorescence measurement is shown in Fig. 2. Without the $SiO_2$ layer, the fluorescence intensity of the layered QD film was lower than that of the original QDs layer, i.e., the quenching by FRET was predominant. When the $SiO_2$ thickness was increased, the fluorescence intensity of the layered QD film was higher than that of the original QDs layer, i.e., the SPR enhancement was predominant. The fluorescence intensity was maximal at the $SiO_2$ thickness of 20 nm, particularly when the LSPR absorption wavelength (${\lambda}=480nm$) was utilized for the excitation. This plasmonic nanosheet can be integrated intogreen or bio-devices as the creation point ofenhanced LSPR field.

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Fabrication and Characteristics of a White Emission Electroluminicent Device (백색 전계발광소자의 제작과 그 특성)

  • Kim, Woo-Hyun;Choi, Sie-Young
    • Journal of Sensor Science and Technology
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    • v.10 no.6
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    • pp.295-303
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    • 2001
  • White emission thin film electroluminecent device was fabricated with ZnS for phosphor layers and BST ferroelectric thin film for insulating layers. The ZnS:Mn and $ZnS:SmF_3$ layers were used for emission of red color. Also the $ZnS:TbF_3$ and $ZnS:AgF_3$ layers were used to emission of green and blue color, respectively. And the fabrication conditions of the BST insulating layers were followings, that is, the composition ratio of target, substrate temperature, working pressure and operating gas ratio were $Ba_{0.5}Sr_{0.5}Ti_{0.3}$, $400^{\circ}C$, 30 mTorr and 9:1, respectively. The thickness of phosphor were 150 nm for each layers and the insulating layers of upper and bottom were 400 nm and 200 nm, respectively. The luminesence threshold voltage was $75\;V_{rms}$ and the maximum brightness of the thin film electroluminecent device was $3200\;cd/m^2$ at $100\;V_{rms}$.

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Roles of i-SiC Buffer Layer in Amorphous p-SiC/i-SiC/i-Si/n-Si Thin Film Solar Cells (비정질 p-SiC/i-SiC/i-Si/n-Si 박막 태양전지에서 i-SiC 완충층의 역할)

  • Kim, Hyun-Chul;Shin, Hyuck-Jae;Lee, Jae-Shin
    • Korean Journal of Materials Research
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    • v.9 no.12
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    • pp.1155-1159
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    • 1999
  • Thin film solar cells on a glass/$SnO_2$ substrate with p-SiC/i-Si/n-Si heterojunction structures were fabricated using a plasma-enhanced chemical-vapor deposition system. The photovoltaic properties of the solar cells were examined with varying the gas phase composition, x=$CH_4/\;(SiH_4+CH_4)$, during the deposition of the p-SiC layer. In the range of x=0~0.4, the efficiency of solar cell increased because of the increased band gap of the p-SiC window layer. Further increase in the gas phase composition, however, led to a decrease in the cell efficiency probably due to in the increased composition mismatch at the p-SiC/i-Si layers. As a result, the efficiency of a glass/$SnO_2$/p-SiC/i-SiC/i-Si/n-Si/Ag thin film solar cell with $1cm^2$ area was 8.6% ($V_{oc}$=0.85V, $J_{sc}$=16.42mA/$cm^2$, FF=0.615) under 100mW/$cm^2$ light intensity.

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Rapid Thermal Annealing for Ag Layers on SiO2 Coated Metal Foils (이산화규소 증착된 스테인레스 기판위에 형성된 은 금속 박막의 급속 열처리에 대한 효과)

  • Kim, Kyoung-Bo
    • Journal of Convergence for Information Technology
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    • v.10 no.8
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    • pp.137-143
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    • 2020
  • This study examined the effects of rapid thermal annealing (RTA) on the physical and chemical characteristics of thin silver (Ag) layers on SiO2 coated metal foils. Ag layers were annealed at various temperatures of the range between 150 ℃ and 550 ℃ for 20 min. The surface roughness and resistivity are increased at the annealing temperatures of 550 ℃. We also found that oxygen (O) and silicon (Si) atoms exist at the Ag film surface by using compositional analysis in the annealing temperatures of 550 ℃. The total reflectance is decreased with increasing temperature. These phenomena are due to an out-diffusion of Si atoms from SiO2 layers during the RTA annealing. The results offer the possibility of using it as a substrate for various flexible optoelectronic devices.