• 한국표면공학회지
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• 제26권6호
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• pp.316-326
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• 1993

Adhesion and hardeness are the most important properties of a hard coated layer which is applied to wear-resistant devices. Zr/ZrN layer was deposited on tool steel(SKH9) and stainless steel(SUS304) by a re-active D.C. magnetron sputtering technique and their microhardness and adhesion strength were measured for the films processed by changing the partial pressures of $N_2$ gas (4~10$\times$$10^{-4}$mbar) and the substrate bias voltage(0~250V). The adhesion strength was evaluated by acoustic signals through the scratch-test with the incremental applied load. As the partial pressure of $N_2$ gas and the substrate bias voltage were increased, the adhesion strength of tool steel was observed to be stronger than that of the stainless steel. The adhesion strength was generally, observed to decrease with the same tendency regardless of the kinds of substrates. The adhesion strength of tool steel was increased more and more strongly than that of stainless steel as heat-treated temperature was increased. The strength of tool steel was appeared to be high adhesion strength at $400^{\circ}C$. From the failure mode of the film during the scratch adhesion test, the cohesive failure was observed to be obvious and the adhesive failure in a minor portion in the Zr/ZrN doublelayer regardless of the kinds of substrates.

• 접착 및 계면
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• 제6권1호
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• pp.7-10
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• 2005

Condensation control of nano-particles has become important in order to fabricate minute condensed structures. In this study, we focus our attention on condensation mechanism of polymer aggregates in a resist film. The polymer aggregate is structural component of a resist material which is used in lithography process. The condensation nature of polymer aggregates in the resist film surface is observed by using atomic force microscope (AFM). By using the AFM, the condensation of polymer aggregates can be observed clearly. The condensation of polymer aggregate strongly affects to precise fabrication of resist pattern below 100nm size. The interaction force among polymer aggregates can be analyzed based on Derjaguin approximation. We also discuss about condensation nature of polymer aggregates in the resist film surface with the help of micro sphere model.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.784-786
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• 2009

Thermal transfer of emitting layer from the donor film to the substrates depends on the physical interaction between the donor film, the emitting layer, and the hole-transport layer (HTL). The interfacial adhesion between the donor film and the EML, the cohesive force of the EML, and the interfacial adhesion between the EML and the HIL have to be optimized to achieve good LITI pattern quality. It was found that surface pretreatment of the donor plate was important on the laser induced thermal transfer of the emitting layer onto the HIL layer of the OLED devices.

• 전자공학회논문지A
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• 제29A권9호
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• pp.15-19
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• 1992

Tungsten silicied (WSix) has been widely used for interconnection line to improve the speed and reliability of devices. It is known that WSix formed by silane reduction has poor step coverage and poor adhesion. In this research, WSix by dichlorosilane reduction showed excellent adhesion in cellophane adhesive tape test, and improved step coverage by two times. The crystal structure of the as-deposited WSix film by silane reduction was transformed from the hexagonal to the tetragonal structure during annealing treatment, while that by dichlorosilane reduction kept the stable tetragonal structure. The fluorine concentration in the WSix film by dichlorosilane was lower than that by silane.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.87-87
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• 2010

We report a new patterning technique of inorganic materials by using thin-film transfer printing (TFTP) with atomic layer deposition. This method consists of the atomic layer deposition (ALD) of inorganic thin film and a nanotransfer printing (nTP) that is based on a water-mediated transfer process. In the TFTP method, the Al2O3 ALD growth occurs on FTS-coated PDMS stamp without specific chemical species, such as hydroxyl group. The CF3-terminated alkylsiloxane monolayer, which is coated on PDMS stamp, provides a weak adhesion between the deposited Al2O3 and stamp, and promotes the easy and complete release of Al2O3 film from the stamp. And also, the water layer serves as an adhesion layer to provide good conformal contact and form strong covalent bonding between the Al2O3 layer and Si substrate. Thus, the TFTP technique is potentially useful for making nanochannels of various inorganic materials.

• Journal of the Korean Wood Science and Technology
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• 제32권6호
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• pp.23-35
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• 2004

The goal of study was to investigate the influence of the acrylated urethane oligomer on mechanical properties, the chemical resistance and thermal resistance of the UV curable urethane acrylate coatings for fancy veneer overlayed plywood flooring. The pencil hardness and abrasion resistance of the coated fancy veneer overlayed plywood floorings increased with increasing the acrylate functionality of the acrylated urethane oligomer. In the case of the UV cured film containing hexa-functional acrylated aliphatic urethane oligomer, high discoloration of the coated fancy veneer overlayed plywood flooring was observed near the cracks at the beginning of the chemical treatment. In this study, it was found that the degradation of the UV cured film caused by an alkaline reagent was higher than that of the UV cured film caused by an acidic treatment.

• 전기학회논문지
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• 제67권10호
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• pp.1375-1381
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• 2018

In this paper, we studied coatings of the DLC thin film for improving loosening torque of dental implant screw. We used a filtered arc ion plating process which can realize the most dense DLC layer by coating the DLC thin film on the surface of the dental abutment screw. It showed both hardness comparable to diamond and low friction coefficient similar to graphite, and to improve the loosening phenomenon by increasing the screw tightening force Cr/CrN, Ti/TiN or Ti/TiN/Cr/CrN buffer layers were deposited for 5 to 10 minutes to improve the adhesion of the DLC thin film to the surface of the Ti (Gr.5), and then the DLC thin film was coated for about 15 minutes. As a result, the Cr/CrN buffer layer exhibited the highest hardness of 29.7 GPa, the adhesion of 18.62N on average, and a very low coefficient of friction of less than 0.2 as a whole. And we measured loosening torque after one million times with masticatory movement simulator. As a result, the values of the coated screw loosening torque were clearly higher than those of the uncoated screw. From this, it was found that the DLC coating was effective methods improving the loosening torque. In addition, it was confirmed that the cytotoxicity test and cell adhesion test showed high biocompatibility.

• 한국진공학회지
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• 제8권3B호
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• pp.262-268
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• 1999

Polycarbonate (PC) and Polymethylmethacrylate (PMMA) surface was modified by ion assisted reaction (IAR) technique to obtain the hydrophilic functional groups and improve the wettability. In conditions of ion assisted reaction, ion beam energy was changed from 500 to 1500eV, and ion dose and oxygen gas blown rate were fixed $1\times10^{16}$ ions/$\textrm{cm}^2$ and 4ml/min, respectively. Wetting angle of water on PC and PMMA surface modified by $Ar^+$ ion without blowing oxygen at 4ml/mon showed $5^{\circ}$ and $10^{\circ}$. Changes of wetting angle with oxygen gas and $Ar^+$ ion irradiation were explained by considering formation of hydrophilic group due to a reaction between irradiated polymer chain by energetic ion irradiation and blown oxygen gas. X-ray photoelectron spectroscopy analysis shows that hydrophilic groups such as -C-O, -(C=O)- and -(C=O)-O- are formed on the surface of polymer by chemical interaction. The polymer surface modification using ion assisted reaction only changed the surface physical properties and sept the bulk properties. In comparison with other modification methods, the surface modification by IAR treatment was chemically stable and enhanced the adhesion between metal and polymer surface. The applications of various kinds of polymer surface modification methods, metal and polymer surface. The applications of various kinds of polymer surface modification could be appled to the new materials about hydrophilic surface properties by IAR treatment. The adhesion between metal film and polymer measured by Scotch tape test whether the hydrophilic surfaces could improve the adhesion strength or not.

• 한국응용과학기술학회지
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• 제26권4호
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• pp.467-472
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• 2009

Ultraviolet curable coating solution was prepared with poly(ethylene glycol) acrylate oligomer and various mono and multi-functional acrylate monomers. The optical properties of UV cured coating layer on PET film with acrylate coating solution containing metal oxides, such as fumed silica and alumina, were also investigated to reduce light reflection on films. Poly(ethylene glycol) diacrylate which has 575 of average molecular weight was used as oligomer acrylate, and pentaerythritol triacrylate and dipentaerythritolpenta-/hexa acrylate were used as multi-functional acrylate monomers. Also, butyl acrylate was used to improve the adhesion as well as to reduce glass transition temperature to give a better flexability. 1-hydroxy cyclohexyl phenyl ketone was used as photoinitiator. We found out the metal oxides in acrylate coating solution showed a homogeneous dispersion from energy dispersive spectroscopy data. Transmittance and light reflection of coated PET film was measured with UV/vis spectrometer and gloss meter, respectively. When 1.00 g of both metal oxides was added into coating solution, the transmittance and the glossiness were reduced from 90% to 30% and from 190 GU to 35 GU, respectively. However, adding up to 1.00 g of the metal oxide into coating solution did not affect on the hardness of coating layer and adhesion between coated layer and PET film. Conclusively, we can control transmittance and light reflection of coated film by adjusting the amounts of metal oxide in coating solution.

• 한국재료학회지
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• 제3권5호
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• pp.466-475
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• 1993

전면증착법에 의한 W공정에서 부착특성고양층으로 사용되는 TiN막에 대한 CVD W막의 부착특성을 인장법(pulling method)과 스크래치법(scratch method)을 사용하여 조사하고, 주사전자현미경과 반사도측정에 의한 표면거칠기측정, 응력측정 및 SIMS depth profiling 등에 의하여 그 원인을 분석하였다. 스퍼터링법으로 형성한 TiN막상에 바로 W막을 증착한 경우와 TiN막을 열처리한 후에 W막을 증착한 경우 간에 두 막간의 부착특성은 큰 차이를 보였다. 전자의 경우가 후자의 경우보다 부착특성이 더 우수한 것으로 나타났는데, 이것은 열처리하지 않은 TiN막이 열처리한 TiN막에 비해 표면이 더 거칠고, 응력수준이 더 낮으며, 열처리한 TiN막내에는 산소성분이 존재하는 반면, 열처리 하지 않은 TiN막내에는 산소성분이 거의 들어있지 않기 때문이다. 또한 TiN막 두께가 증가함에 따라 응력의 증가로 인하여 TiN막에 대한 W막의 부착강도가 저하되었다.