• Journal of the Korea Safety Management & Science
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• v.7 no.5
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• pp.255-273
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• 2005

Overlay parameter control of the semiconductor photolithography process is researched in this paper. Overlay parameters denote the error in superposing the current pattern to the pattern previously created. The reduction of the overlay deviation is one of the key factors in improving the quality of the semiconductor products. The semiconductor process is affected by numerous environment and equipment factors. Through process condition prediction and control, the overlay inaccuracy can be reduced. Generally, three types of process condition change exist; uncontrollable white noise, slowly changing drift, and abrupt condition shift. To effectively control the aforementioned process changes, control scheme using adaptive deadband is proposed. The suggested approach and existing control method are cross evaluated through simulation.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.11
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• pp.82-91
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• 1996

In this study, we put our object to carry out adaptive modeling of cutting process in turning system, and to find out the optimal cutting conditions to maximize material removal rate under some constraints. We used a back-propagation neural network to model the cutting process adaptively and a genetic algorithm to find out optimal cutting conditions. The experimental results show that a back-propagation neural network could model the cutting process effciently, and optimized cutting conditions for maximizing the material removal rate were obtained through the adaptive process model and genetic algorithms. Therefore, the proposed approach can be applied to the real machining system.

• Proceedings of the IEEK Conference
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• 1998.10a
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• pp.437-440
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• 1998

In this paper, the design method of fuzzy neural network(FNN) controller using indirect adaptive control technique is presented for controlling chaotic nonlinear systems. Firstly, the fuzzy model identified with a FNN in off-line process. Secondly, the trained fuzzy model tunes adaptively the control rules of the FNN controller in on-line process. In order to evaluate the proposed control method, Indirect adaptive control method is applied to the representative continuous-time chaotic nonlinear systems, that is, the Duffing system and the Lorenz system. Simulations are done to verify the effectivencess of controller.

• 제어로봇시스템학회:학술대회논문집
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• 1991.10a
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• pp.584-588
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• 1991

This paper presents a fuzzy adaptive controller which can improve the control policy automatically. Adaptation is achieved by the addition of on-line identification of the fuzzy inverse model using input-output data pairs of the process. Starting with an initial crude control rule, the adaptive controller matches the model to the process to self-tune the controller. The control algorithm needs much less memory of computer than other SOC algorithms.

• 제어로봇시스템학회:학술대회논문집
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• 1986.10a
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• pp.534-539
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• 1986

This paper considers the ring rolling process contorl and treats the problem of controlling the pressure roll and conical roll motion which critically affects final quality of the rolled products. Since the process dynamics reveals nonlinear characteristics and parameter uncertainty, an adaptive control scheme was applied. The results show that this proposed adaptive control scheme can produce rolled rings of closer dimensional tolerances as compared with nonadaptive control system.

• Proceedings of the Korea Society for Simulation Conference
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• 1997.04a
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• pp.124-127
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• 1997

A key element in the control of Automated Guided Vehicle Systems (AGVS) is dispatching policy. This paper proposes a new dispatching algorithm for an efficient operation of AGVS. Based on an evolutionary operation, it has an adaptive control capability responding to changes of the system environment. The performance of the algorithm is compared with some well-known dispatching rules in terms of the system throughput through simulation. Sensitivity analysis is carried out varying the buffer capacity and the number of AGVS.

• Journal of the Semiconductor & Display Technology
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• v.3 no.3
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• pp.19-21
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• 2004

This paper presents a 3-dimensional diffusion simulation with adaptive solution strategy. The developed diffusion simulator VLSIDIF-3 was designed to re-refine areas. Refine scheme was calculated by the difference of doping concentration between any of two nodes. Each element is greater than tolerance and redo diffusion process until error is tolerable. Numerical experiment in low doping diffusion problem showed that this adaptive solution strategy is very efficient in both memory and time, and expected this scheme would be more powerful in complex diffusion model.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.653-657
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• 1996

This paper presents adaptive cutting force control in milling process using indirect cutting force measurement. The cutting forces in X, Y, and Z axes are measured indirectly from the sensing current of the feed-drive servo motor. After modelling the feed-drive system of a horizontal machining center, the relation between the cutting force and the servo motor current is analyzed. The pulsating milling forces are measured from the sensing current within the bandwidth of the servo. It is shown that indirect cutting farce measurement can be used in adaptive cutting force control. The adaptive control scheme which is globally convergent and stable is attached to a commercial CNC machining center. Cutting experiments on end milling are performed for diagonal cutting.

• Proceedings of the Korean Institute of Intelligent Systems Conference
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• 2003.09b
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• pp.95-98
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• 2003

In this paper, an adaptive fuzzy neural control of unknown nonlinear systems based on the rapid learning algorithm is proposed for optimal parameterization. We combine the advantages of fuzzy control and neural network techniques to develop an adaptive fuzzy control system for updating nonlinear parameters of controller. The Fuzzy Neural Network(FNN), which is constructed by an equivalent four-layer connectionist network, is able to learn to control a process by updating the membership functions. The free parameters of the AFN controller are adjusted on-line according to the control law and adaptive law for the purpose of controlling the plant track a given trajectory and it's initial values are off-line preprocessing, In order to improve the convergence of the learning process, we propose a rapid learning algorithm which combines the error back-propagation algorithm with Aitken's $\delta$$\^$2/ algorithm. The heart of this approach ls to reduce the computational burden during the FNN learning process and to improve convergence speed. The simulation results for nonlinear plant demonstrate the control effectiveness of the proposed system for optimal parameterization.

• International Journal of CAD/CAM
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• v.6 no.1
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• pp.139-148
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• 2006

Catmull-Clark subdivision scheme provides a powerful method for building smooth and complex surfaces. But the number of faces in the uniformly refined meshes increases exponentially with respect to subdivision depth. Adaptive tessellation reduces the number of faces needed to yield a smooth approximation to the limit surface and, consequently, makes the rendering process more efficient. In this paper, we present a new adaptive tessellation method for general Catmull-Clark subdivision surfaces. Different from previous control mesh refinement based approaches, which generate approximate meshes that usually do not interpolate the limit surface, the new method is based on direct evaluation of the limit surface to generate an inscribed polyhedron of the limit surface. With explicit evaluation of general Catmull-Clark subdivision surfaces becoming available, the new adaptive tessellation method can precisely measure error for every point of the limit surface. Hence, it has complete control of the accuracy of the tessellation result. Cracks are avoided by using a recursive color marking process to ensure that adjacent patches or subpatches use the same limit surface points in the construction of the shared boundary. The new method performs limit surface evaluation only at points that are needed for the final rendering process. Therefore it is very fast and memory efficient. The new method is presented for the general Catmull-Clark subdivision scheme. But it can be used for any subdivision scheme that has an explicit evaluation method for its limit surface.