• International Journal of Precision Engineering and Manufacturing
• /
• v.9 no.2
• /
• pp.28-33
• /
• 2008

In a scanning electron microscope (SEM), outside acoustic noise causes image noise that distorts observations of the specimen being examined. A SEM that is less sensitive to acoustic noise is highly desirable. This paper investigates the image noise problem by addressing the mode shapes of the base plate and the transmission path of the acoustic noise and vibration. By arranging the position of the rib, a new SEM base plate was developed that had twisting as the 1st and 2nd modes. In those two twisting modes, vibration nodes existed near the center of the base plate where the specimen chamber is placed. Less vibration was transmitted to the chamber and to the specimen by the twisting modes compared to bending ones, which are the 2nd and 3rd modes for a rectangular plain base plate. An SEM with the developed base plate installed exhibited a significant reduction of image noise when exposed to acoustic noises below 250 Hz.

• The Journal of the Acoustical Society of Korea
• /
• v.16 no.2E
• /
• pp.21-26
• /
• 1997

We propose to use transverse waves instead of longitudinal waves in a scanning tomographic acoustic microscope (STAM) and new type of multiple-transducer with the functions of muliple-angle and multiple-frequency tomography. Proposed multiple-transducer scheme has three insonification angles and three resonance frequencies in order to operate in the transverse wave mode and multiple-angle and multiple frequency tomography for the STAM. In order to evaluate the performance of proposed transducer scheme we have simulated tomographic reconstruction with back-and-forth propagation(BFP) algorithm. Simulation results showed proposed multiple-transducer scheme is capable of obtaining good resolution with transverse wave mode and multiple-frequency tomography. It is also showed that proposed scheme is an efficient rotation scheme by proportion to the number of projections.

• Journal of the Korean Institute of Telematics and Electronics
• /
• v.27 no.12
• /
• pp.1889-1893
• /
• 1990

In this paper, ultrasonic microscope system has been constructed with the small aperturre acoustic lens and the angle controller, and the new type of B-scanultransonic imaging has been analyzed. The system with small aperture lens was used to detect flaw existing within the thick specimen and its resolution was in the range of one wavelength at interior plane of sample. The anle controller was used to excited surface acoustic wave or shear wave. In order to obtain B-scan image of the flaw existig at interior of solids, shear wave has been excited and backscattering signals from the flaw have been processed. In experimental results, B-scan ultransonic images have been obtain from the flaws of varable shape and measured flaw size from the images has been in good agreement with practical size in the range of 10% error.

• The Journal of the Acoustical Society of Korea
• /
• v.7 no.2
• /
• pp.65-73
• /
• 1988

In this paper, V(z) curve has been analyzed theoretically and compared with the experimental result, and the relation between the V(z) curve and the material characteristic has been studied. Angular spectrum and ray optics theory have been used for theoretical analysis and the acoustic microscope operating at a center frequency of 3 MHz has been used for experiment. In experiment, it has been shown that each material has a V(z) curve of a unique form and the interval of dips appearing in the V(z) curves have been used to determine the Rayleigh wave velocity.

• The Journal of the Acoustical Society of Korea
• /
• v.9 no.2
• /
• pp.5-13
• /
• 1990

In this paper, 50MHz reflection ultrasonic microscope system with small aperture acoustic lens has been constructed in order to study the defects which lay deep in thick specimens, and acoustic images of multilayered media have been analyzed. Output characteristics of this system for multilayered media have been influenced by acoustic attenuation, aberration in specimen, type of lens and the properties of a defect, and it has been used for image processing of the multilayered I.C. and the bonding layer. In experimental results, it has been shown that small aperture ultrasonic microscope system was powerful tool for inspection of thick specimens such as electronic device, bonding layer, quality of ceramic materials.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.16 no.4
• /
• pp.234-240
• /
• 1997

We studied the resolution enhancement of a novel scanning laser acoustic microscope (SLAM) using transverse waves. Mode conversion of the ultrasonic wave takes place at the liquid-solid interface and some energy of the insonifying longitudinal waves in the water will convert to transverse wave energy within the solid specimen. The resolution of SLAM depends on the size of detecting laser spot and the wavelength of the insonifying ultrasonic waves. Science the wavelength of the transverse wave is shorter than that of the longitudinal wave, we are able to achieve the high resolution by using transverse waves. In order to operate SLAM in the transverse wave mode, we made wedge for changing the incident angle. Our experimental results with model 2140 SLAM and an aluminum specimen showed higher contrast of the SLAM image in the transverse wave mode than that in the longitudinal wave mode.

• Proceedings of the Korea Concrete Institute Conference
• /
• 1998.04b
• /
• pp.677-682
• /
• 1998

Concrete is an inhomogeneous material consisting of larger aggregates and sand embedded in a cement paste matrix. In this study, an acoustic emission technique has been used to clarify the microscope failure mechanisms of concrete under three point bending test. AE source location has also been done to monitor the activities of internal damage and the progress of microscopic failure path during the loading. The relationship between AE characteristic and microscopic and microscopic failure mechanism is discussed.

• The Journal of the Acoustical Society of Korea
• /
• v.18 no.3
• /
• pp.55-61
• /
• 1999

In this study, we have constructed the acoustic microscope using quadrature technique and analyzed the relative variation of image intensity and the quality of image by reconstructing the amplitude and phase image for surface defects with tiny hight variation. In this experiment, we have constructed the scanning acoustic microscope using the focused transducer with 3㎒ center frequency and the quadrature detector. And we have fabricated aluminum samples with round defects whose depth is different and reconstructed the amplitude and phase images for the samples. One sample has round defects with 2㎜ diameter and 100㎛ depth and the other has round defects with 4㎜ diameter and 5㎜ depth. In the result of line scanning for the sample with 100㎛ round defects, it has been shown that the variation rate of amplitude image intensity is 7% and the variation rate of phase image intensity is 89%. The phase image has better contrast than amplitude image for the sample. In contrast to this, the amplitude image has better contrast than phase image for the sample with 5㎜ depth's defects. Accordingly there is big difference between amplitude image and phase image for depth variation of defects whose boundary is 1 wavelength. Consequently the acoustic microscope using quadrature detector can be evaluated efficiently more than using envelope detector, for detecting defects which have height variation less than 1 wavelength. And also the phase image and the amplitude image can be used for detecting defects of tiny height variation with complimentary relation.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1991.04a
• /
• pp.127-133
• /
• 1991

Acoustic microscopy has attracted much intrest recently as potential mondestructive evalution technique for detecting and sizing defects of surface and sub-surface. Also acoustic emission testing method has been developed for detecting microcracks which is more than 30 umm in length quintitatively on ceramics material. In the present paper, acoustic emission during the four point bending test in hot-pressed sintered Si$\_$3/N$\_$4/ specimen which was stressed bythermal shock has been measured by high sensitive sensing system. The surface and sub-surface cracks were detected by scanning acoustic microscope of 800 MHz and conventional ultrasonic testing in C-scope image. The purpose was to investigate the location and size of cracks by SAM and AE technique, whose experimental datas demontrates good agreement for detecting microcracks.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.24 no.5
• /
• pp.518-524
• /
• 2004

The feasibility of Y(z) curve method of scanning acoustic microscope using high frequency transducer was experimentally studied for assessment of the thermal degradation in Co-based superalloy. Thermal degradation was performed to simulate the microstructural changes in Co-based superalloy arising from long term exposure at high temperature. Longitudinal wave velocity measured by pulse echo method using 10MHz transducer and leaky surface acoustic wave (LSAW) velocity measured by V(z) curve method using 200MHE transducer were measured to investigate the effect on thermal degradation. Ultrasonic velocity decreased as the aging time increased in both ultrasonic waves. Moreover, the low frequency longitudinal wave velocity decreased a little. Otherwise, the high frequency LSAW velocity drastically decreased up to a maximum of 4.7% at the aging time of 4,000hours. A good correlation was found between LSAW and Vickers hardness. Consequently, V(z) curve method of SAM using high frequency transducer could be a potential tool for assessing thermal degradation.