• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.3
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• pp.265-274
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• 2011

This paper presents current state of the prediction simulator of structural characteristics of machinery equipment accuracy. Developed accuracy prediction simulator proceeds and estimates the structural analysis between the designer and simulator through the internet for convenience of designer. 3D CAD model which is input to the accuracy prediction simulator would simplified by the process of removing the small hole, fillet and chamfer. And the structural surface joints would be presented as the spring elements and damping elements for the structural analysis. The structural analysis of machinery equipment joints, containing rotary motion unit, linear motion unit, mounting device and bolted joint, are presented using Finite Element Method and their experiment. Finally, a general method is presented to tune the static stiffness at a rotation joint considering the whole machinery equipment system by interactive use of Finite Element Method and static load experiment.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.9 no.6
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• pp.164-169
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. As such technology has been rapidly developed, this field needs the positioning accuracy as high as submicron. It is expected that the accuracy of 10nm and 1nm is required in precision work and ultra precision work field, respectively by the beginning of 2000s. High speed and low vibration are also needed. This work deals with the design method and control system of Ultra precision positioning apparatus. Control performance and stability analysis were performed in advance by modeling and designing the controller with Simulink.

• Tribology and Lubricants
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• v.15 no.3
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• pp.257-264
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• 1999

Recently as electronics and semi-conductor industry develop, ultra-precision machine tools that use air-spindle with externally pressurized air bearing appear in need of ultra-precision products which demand high precision property. Effects of air compressibility absorbs the vibration of shaft, this is called averaging effect, however, the higher running accuracy is demanded by degrees, the more important factor is machining errors that affect running accuracy of shaft. Actually, it would be very important in the view points of running accuracy to understand effects of machining errors on the running accuracy of the spindle system quantitatively to design and manufacture precision spindle system in the aspect that efficiency in manufacturing spindle system and performance in operation. So fu, there are some researches on the effects that machining error affect running accuracy. However, because these researches deal with one bearing of spindle system, these results aren't enough to explain how much machining errors affect running accuracy in the typical spindle system overall. In this study, we investigate the effects of the perpendicularity error of bearing and shaft on running accuracy of spindle system that consists of journal and thrust bearing theoretically, and suggest design guideline about shape tolerances.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1099-1104
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• 2004

As consumer in optics, electronics, aerospace and electronics industry grow, the demand for ultra precision aspherical surface lens increases higher. To enhance the precision and productivity of ultra precision aspherical surface micro lens, the following specification of ultra precision grinding system is required: the highest rotational speed of the grinder is 100,000rpm and its turning accuracy is $0.1{\mu}m$, positioning accuracy is $0.1{\mu}m$. The development process of the grinding system for the ultra precision aspherical surface micro lens for optoelectronics industry is introduced. In the work reported in this paper, an intelligent grinding system for ultra precision aspherical surface machining was designed by considering the factors affecting the surface roughness and profiles accuracy. An aerostatic form was adopted to build the spindle of the workpiece and the spindle of grinder and ultra precision LM guide way was adopted in this system.

• Journal of the Korea Institute of Military Science and Technology
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• v.14 no.5
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• pp.788-797
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• 2011

This paper analyzes the accuracy on the approach and landing of aircraft to an airport through comparison with airbase Precision Approach Radar and aircraft track data of DGPS equipped in aircraft. The proposed analysis result could be a basis for verifying the possibility that DGPS can be utilized in Airbase precision approach and landing. Position identification capability of widely used commercial DGPS is fairly accurate on latitude and longitude, while there is a slight error for being used in an airbase accurate approach and landing of Category I precision when it comes to altitude. Thus, we tested accuracy by analyzing actual flight track data of high performance aircraft to verify the accuracy of the airbase approach and landing using DGPS. Through the research, we developed instrumentation to compare PAR track data with DGPS track data, which can be used in reducing the number of PAR verification Flight utilizing it as a system measuring PAR accuracy at PAR installation phase.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.2
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• pp.1-9
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• 2006

As consumers in optics, electronics, aerospace and electronics industry grow, the demand for ultra-precision aspheric surface lens increases higher. To enhance the precision and productivity of ultra precision aspheric surface micro lens, the development of ultra-precision grinding system and process for the aspheric surface micro lens are described. In the work reported in this paper, an ultra-precision grinding system for manufacturing the aspheric surface micro lens was developed by considering the factors affecting the ground surface roughness and profile accuracy. This paper deals with mirror grinding of an aspheric surface micro lens by resin bonded diamond wheel and spherical lens of BK7. The optimization of grinding conditions on ground surface roughness and profiles accuracy is investigated using the design of experiments.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.1
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• pp.59-64
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• 2005

This paper describes an investigation about the fluid delivering method that minimizes the generation of hydrodynamic pressure and improves the grinding accuracy. Traditionally, grinding fluid is delivered for the purpose of cooling, chip flushing and lubrication. Hence, a number of conventional investigations are focused on the delivering method to maximize fluid flux into the contact arc between the grinding wheel and the work piece. It is already known that hydrodynamic pressure generates due to this fluid flux, and that it affects the overall grinding resistance and machining accuracy. Especially in the ultra-precision mirror grinding process that requires extremely small amount of cut per pass, its influence on the machining accuracy becomes more significant. Therefore, in this paper, a new delivering method of grinding fluid is proposed with focus on minimizing the hydrodynamic pressure effect. Experimental data indicates that the proposed method is effective not only to minimize the hydrodynamic pressure but also to improve the machining accuracy.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.6
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• pp.45-50
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• 2007

The aspheric lens has become the most popular optical component used in various optical devices such as digital cameras, pick-up lenses, printers, copiers etc. Using aspheric lenses not only miniaturizes and reduces the weight of products, but also lower prices and higher field angles can be realized. Additionally, plastic lenses are being changed to glass lenses more recently because of low accuracy, low acid-resistance and low thermal-resistance in the plastic lenses. Currently, one fabrication method of glass lenses is using a glass-mold method with a high precision mold core for mass production. In this paper, DOE (Design Of Experiments) and compensation machining were adopted to improve the surface roughness and the form accuracy of the mold core. The DOE has been done in order to discover the optimal grinding conditions which minimize the surface roughness with factors such as work spindle revolution, turbine spindle revolution, federate and cutting depth. And the compensation machining is used to generate high form accuracy of the mold core. From various experiments and analyses, we could obtain the best surface roughness 5 nm in Ra, form accuracy $0.167\;{\mu}m$ in PV.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.561-562
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• 2006

To enhance the precision and productivity of ultra precision aspheric surface micro lens, the development of ultra-precision grinding system and process for the aspheric surface micro lens are described. In the work reported in this paper, an ultra-precision grinding system for manufacturing the aspheric surface micro lens was developed by considering the factors affecting the grinding surface roughness and profile accuracy. This paper deals with mirror grinding of an aspheric surface micro lens by resin bonded diamond wheel and spherical lens of BK7. The optimization of grinding conditions on ground surface roughness and profiles accuracy is investigated using the design of experiments.